JP6124668B2 - 薄膜トランジスタ基板およびその製造方法 - Google Patents
薄膜トランジスタ基板およびその製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 176
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000010409 thin film Substances 0.000 title claims description 21
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 43
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 16
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- 238000005229 chemical vapour deposition Methods 0.000 description 16
- 239000011734 sodium Substances 0.000 description 16
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- 238000010438 heat treatment Methods 0.000 description 14
- 229910003437 indium oxide Inorganic materials 0.000 description 14
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 14
- 235000006408 oxalic acid Nutrition 0.000 description 14
- 238000001039 wet etching Methods 0.000 description 14
- 239000011651 chromium Substances 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
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- 238000002425 crystallisation Methods 0.000 description 12
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- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 11
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- 239000011737 fluorine Substances 0.000 description 9
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 9
- 229910001887 tin oxide Inorganic materials 0.000 description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 8
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 8
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 8
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- 229910052708 sodium Inorganic materials 0.000 description 8
- 229910052715 tantalum Inorganic materials 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 6
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- 239000011521 glass Substances 0.000 description 6
- 238000006479 redox reaction Methods 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
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- 238000002834 transmittance Methods 0.000 description 4
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- 239000007788 liquid Substances 0.000 description 3
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
Description
図1は、実施の形態1に係るTFT基板の構成を示す平面図である。実施の形態1のTFT基板は、スイッチング素子としての薄膜トランジスタ(TFT)がマトリックス状に複数個配置されたアクティブマトリクス基板である。また、ここでは、平面型表示装置(フラットパネルディスプレイ)である液晶表示装置(LCD)用のTFT基板を例に挙げて説明する。
図8および図9は、実施の形態2に係るTFT基板200の構成を示す図である。これらの図において、図2および図3に示した要素と同様の要素には同一符号を付してある。
実施の形態2では、平板状の画素電極の上方に、スリットを有する櫛歯状の共通電極を配置した構成としたが、これとは逆に、平板状の共通電極の上方に、櫛歯状の画素電極を配置した構成としてもよい。実施の形態3では、後者の構成を有するTFT基板に本発明を適用した例を示す。
Claims (12)
- 基板上に形成されたゲート電極および補助容量電極と、
前記ゲート電極および前記補助容量電極を覆うように形成された第1絶縁膜と、
前記第1絶縁膜上に形成された、下層ソース電極、下層ドレイン電極および前記下層ドレイン電極に繋がった画素電極と、
前記下層ソース電極および前記下層ドレイン電極の上に形成され、前記下層ソース電極および前記下層ドレイン電極と電気的に接続された半導体膜と、
前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に形成された第2絶縁膜と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極と、
を備える薄膜トランジスタ基板。 - 基板上に形成されたゲート電極および補助容量電極と、
前記ゲート電極および前記補助容量電極を覆うように形成された第1絶縁膜と、
前記第1絶縁膜上に形成された、下層ソース電極および下層ドレイン電極と、
前記下層ソース電極および前記下層ドレイン電極の上に形成され、前記下層ソース電極および前記下層ドレイン電極と電気的に接続された半導体膜と、
前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に形成された第2絶縁膜と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、
前記第2絶縁膜上に前記上層ドレイン電極に繋がるように形成された画素電極と、
前記上層ソース電極、前記上層ドレイン電極および前記画素電極の上に形成された第3絶縁膜と、
前記第3絶縁膜上に形成され、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極と、
を備える薄膜トランジスタ基板。 - 基板上に形成されたゲート電極および補助容量電極と、
前記ゲート電極および前記補助容量電極を覆うように形成された第1絶縁膜と、
前記第1絶縁膜上に形成された、下層ソース電極および下層ドレイン電極と、
前記下層ソース電極および前記下層ドレイン電極の上に形成され、前記下層ソース電極および前記下層ドレイン電極と電気的に接続された半導体膜と、
前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に形成された第2絶縁膜と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、
前記第2絶縁膜上に形成され、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極と、
前記上層ソース電極、前記上層ドレイン電極および前記共通電極の上に形成された第3絶縁膜と、
前記第3絶縁膜上に形成され、コンタクトホールを通して前記上層ドレイン電極と電気的に接続された画素電極と、
を備える薄膜トランジスタ基板。 - 前記半導体膜が、酸化物半導体からなる
請求項1から請求項3のいずれか一項記載の薄膜トランジスタ基板。 - 前記下層ソース電極および前記下層ドレイン電極が、酸化物導電膜からなる
請求項1から請求項4のいずれか一項記載の薄膜トランジスタ基板。 - 前記第2絶縁膜が、上層のSiN膜とそれよりも膜応力の絶対値が小さい下層のSiN膜とを含んでいる
請求項1から請求項5のいずれか一項記載の薄膜トランジスタ基板。 - 前記第2絶縁膜において、前記下層のSiN膜の膜応力の絶対値が150MPa〜200MPaである
請求項6記載の薄膜トランジスタ基板。 - 前記第2絶縁膜において、前記下層のSiN膜のN/Si比が、前記上層のSiN膜のN/Si比よりも大きい
請求項6または請求項7記載の薄膜トランジスタ基板。 - 前記第2絶縁膜において、前記上層のSiN膜のN/Si比が1.1〜1.5である
請求項8記載の薄膜トランジスタ基板。 - (a)基板上に、第1の導電膜を用いてゲート電極および補助容量電極を形成する工程と、
(b)前記ゲート電極および前記補助容量電極を覆うように第1絶縁膜を形成する工程と、
(c)前記第1絶縁膜上に、第2の導電膜を用いて、下層ソース電極、下層ドレイン電極および前記下層ドレイン電極に繋がった画素電極を形成する工程と、
(d)前記下層ソース電極および前記下層ドレイン電極の上に、前記下層ソース電極および前記下層ドレイン電極と電気的に接続する半導体膜を形成する工程と、
(e)前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に第2絶縁膜を形成する工程と、
(f)前記第2絶縁膜上に、第3の導電膜を用いて、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極とを形成する工程と、
を備える薄膜トランジスタ基板の製造方法。 - (a)基板上に、第1の導電膜を用いてゲート電極および補助容量電極を形成する工程と、
(b)前記ゲート電極および前記補助容量電極を覆うように第1絶縁膜を形成する工程と、
(c)前記第1絶縁膜上に、第2の導電膜を用いて、下層ソース電極および下層ドレイン電極を形成する工程と、
(d)前記下層ソース電極および前記下層ドレイン電極の上に、前記下層ソース電極および前記下層ドレイン電極と電気的に接続する半導体膜を形成する工程と、
(e)前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に第2絶縁膜を形成する工程と、
(f)前記第2絶縁膜上に、第3の導電膜を用いて、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、前記上層ドレイン電極に繋がった画素電極を形成する工程と、
(g)前記上層ソース電極、前記上層ドレイン電極および前記画素電極の上に第3絶縁膜を形成する工程と、
(h)前記第3絶縁膜上に、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極を形成する工程と、
を備える薄膜トランジスタ基板の製造方法。 - (a)基板上に、第1の導電膜を用いてゲート電極および補助容量電極を形成する工程と、
(b)前記ゲート電極および前記補助容量電極を覆うように第1絶縁膜を形成する工程と、
(c)前記第1絶縁膜上に、第2の導電膜を用いて、下層ソース電極および下層ドレイン電極を形成する工程と、
(d)前記下層ソース電極および前記下層ドレイン電極の上に、前記下層ソース電極および前記下層ドレイン電極と電気的に接続する半導体膜を形成する工程と、
(e)前記下層ソース電極、前記下層ドレイン電極および前記半導体膜の上に第2絶縁膜を形成する工程と、
(f)前記第2絶縁膜上に、第3の導電膜を用いて、コンタクトホールを通して前記半導体膜および前記下層ソース電極と電気的に接続された上層ソース電極と、コンタクトホールを通して前記半導体膜および前記下層ドレイン電極と電気的に接続された上層ドレイン電極と、コンタクトホールを通して前記補助容量電極と電気的に接続された共通電極とを形成する工程と、
(g)前記上層ソース電極、前記上層ドレイン電極および前記共通電極の上に第3絶縁膜を形成する工程と、
(h)前記第3絶縁膜上に、コンタクトホールを通して前記上層ドレイン電極と電気的に接続された画素電極を形成する工程と、
を備える薄膜トランジスタ基板の製造方法。
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