JP6043021B2 - 強誘電性電界効果トランジスタメモリアレイを有する装置および関連方法 - Google Patents
強誘電性電界効果トランジスタメモリアレイを有する装置および関連方法 Download PDFInfo
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- G—PHYSICS
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- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/78391—Field effect transistors with field effect produced by an insulated gate the gate comprising a layer which is used for its ferroelectric properties
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
- G11C11/225—Auxiliary circuits
- G11C11/2253—Address circuits or decoders
- G11C11/2255—Bit-line or column circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
- G11C11/225—Auxiliary circuits
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Description
Claims (20)
- 三次元メモリアーキテクチャにおいて水平方向および垂直方向に積層された複数の電界効果トランジスタ(FET)構造と、
前記複数のFET構造間に垂直方向に伸び、水平方向に離隔された複数のゲートと、
前記複数のFET構造および前記複数のゲートを分離する強誘電性材料と、
を含み、
個々の強誘電性FET(FeFET)は、前記複数のFET構造、前記複数のゲートおよび前記強誘電性材料の交点に配置され、
前記強誘電性材料は、同一の垂直方向FeFET積層のFeFETによって共有される、
ことを特徴とする装置。 - 個々のFeFETと結合された複数のアクセス線をさらに含み、前記複数のFeFET構造の各FET構造は、垂直方向配置に積層されたドレイン領域、ボディ領域およびソース領域を含み、前記複数のアクセス線は、
前記複数のゲートに結合された複数のワード線と、
前記複数のFET構造の前記ドレイン領域に結合された複数のビット線と
を含む、
ことを特徴とする請求項1に記載の装置。 - 前記複数のワード線は、交互接触スキームに従って、前記複数のゲートに結合する、
ことを特徴とする請求項1に記載の装置。 - 各FET構造は、
前記ドレイン領域に結合されたドレイン接点と、
前記ソース領域に結合されたソース接点と、をさらに含み、
前記ドレイン接点および前記ソース接点は、前記三次元メモリアレイアーキテクチャの対向する端に結合される、
ことを特徴とする請求項2に記載の装置。 - 第一の強誘電性材料によって第一のFET構造から分離された第一の複数のゲートを含む第一の垂直方向強誘電性電界効果トランジスタ(FeFET)積層と、
第二の強誘電性材料によって第二のFET構造から分離された第二の複数のゲートを含む第二の垂直方向FeFET積層と、
を含み、
前記第一の垂直方向FeFET積層および前記第二の垂直方向FeFET積層は、水平方向に積層され、誘電材料によって分離され、
前記第一の強誘電性材料は、前記第一の垂直方向FeFET積層のFeFETによって共有され、前記第二の強誘電性材料は、前記第二の垂直方向FeFET積層のFeFETによって共有される、
ことを特徴とする装置。 - 前記誘電材料は、前記第二の垂直方向FeFET積層が、前記第二の垂直方向FeFET積層の前記第二のFET構造の両側にメモリセルを有するように構成された、第三の強誘電性材料を含む、
ことを特徴とする請求項5に記載の装置。 - 同一の水平方向軸に沿った前記第一の複数のゲートおよび前記第二の複数のゲート由来の隣接するゲートは、同一のワード線の一部である、
ことを特徴とする請求項6に記載の装置。 - 前記第一の垂直方向FeFET積層および前記第二の垂直方向FeFET積層にわたって線形に延びる複数のワード線平行接点をさらに含み、単一のワード線接点は、同一の水平方向軸に沿った前記第一の複数のゲートおよび前記第二の複数のゲート由来の前記隣接するゲートに結合する、
ことを特徴とする請求項7に記載の装置。 - 同一の水平方向軸に沿った前記第一の複数のゲートおよび前記第二の複数のゲート由来の隣接するゲートは、異なるワード線の一部である、
ことを特徴とする請求項6に記載の装置。 - さらなる複数のゲートを含むさらなる複数の垂直方向FeFET積層をさらに含み、前記さらなる垂直方向FeFET積層は、前記第一の垂直方向FeFET積層および前記第二の垂直方向FeFET積層と水平方向に積層される、
ことを特徴とする請求項9に記載の装置。 - 前記第一の垂直方向FeFET積層、前記第二の垂直方向FeFET積層および前記複数のさらなる垂直方向FeFET積層に沿って延びる複数の相互に平行なワード線接点をさらに含み、同一の水平方向軸に沿った前記第一の複数のゲートおよび前記第二の複数のゲート由来の隣接するゲートは、前記相互に平行なワード線接点のうちの異なる一つに結合する、
ことを特徴とする請求項10に記載の装置。 - 前記隣接するゲートのうちの一つは、前記第一の垂直方向FeFET積層の第一の端部に延び、前記相互のワード線接点のうちの第一の接点に結合し、
前記隣接するゲートのうちの他方は、前記第二の垂直方向FeFET積層の第二の端部に延び、前記相互のワード線接点のうちの第二の接点と結合する、
ことを特徴とする請求項11に記載の装置。 - 前記複数のワード線接点は、前記第一の複数のゲートおよび前記第二の複数のゲートからオフセットされ、前記第一の垂直方向FeFET積層、前記第二の垂直方向FeFET積層および前記複数のさらなる垂直方向FeFET積層にわたって線形にさらに伸びる、
ことを特徴とする請求項11に記載の装置。 - それぞれが互いに並行に延びるソース及びドレインであって、それらの間にボディを介在して積層されたソース及びドレインと、それぞれが前記ソース、前記ドレインおよび前記ボディの積層方向に沿って延びる複数のゲートであって、それぞれが前記ボディとの間に強誘電性材料を介在して前記ソース、前記ドレインおよび前記ボディと交差する複数のゲートとを含むことにより、複数の強誘電性電界効果トランジスタ(FeFET)メモリセルが一列に配置され、
前記複数のゲートをそれぞれワード線とし、前記ドレインをビット線とし、前記ソースをソース線とすることにより、これら複数のFeFETメモリセルのゲートは互いに異なるワード線に、ドレインは共通のビット線に、ソースは共通のソース線に、それぞれ接続されており、
前記ビット線に流れる電流の向きは、前記複数のFeFETメモリセルの内のどのFeFETメモリセルが選択された場合でも同じにされ、且つ、前記ソース線に流れる電流の向きは、前記複数のFeFETメモリセルの内のどのFeFETが選択された場合でも同じにされると共に前記ビット線に流れる電流の向きと同じにされるように構成されている、
ことを特徴とする装置。 - 前記ビット線は前記複数のFeFETメモリセルの配列構成体の一方の端部側においてビット線接点に結合され、前記ソース線は前記複数のFeFETメモリセルの配列構成体の他方の端部側においてソース線接点に結合されている、
ことを特徴とする請求項14に記載の装置。 - 複数の強誘電性電界効果トランジスタ(FeFET)メモリセルを有する三次元メモリアレイであって、前記複数のFeFETは、複数のビット線および複数のワード線に結合された強誘電体材料の複数の交差点にそれぞれ配置されている三次元メモリアレイを含み、
前記複数のFeFETメモリセルは、前記三次元メモリアレイの垂直ストリングに沿って配置され、
前記強誘電性材料は、前記垂直ストリングに沿った前記複数のFeFETメモリセルによって共有される、
ことを特徴とする装置。 - 各ドレイン領域が、前記複数のFeFETメモリセルを形成するために隣接するゲートによって共有されるように、前記複数のビット線の各ビット線は、前記強誘電性材料と結合された少なくとも二つの側を有するドレイン領域に結合される、
ことを特徴とする請求項16に記載の装置。 - 前記隣接するゲートおよびワード線は、同一のビット線に関連付けられた前記複数のFeFETに独立してアクセスするように構成される、
ことを特徴とする請求項17に記載の装置。 - 三次元強誘電性電界効果トランジスタ(FeFET)メモリアレイの動作方法であって、
三次元FeFETメモリアレイの複数のFeFETメモリセルに対する所望の動作のために、複数のワード線およびデジット線に、ある組み合わせの電圧を印加することを含み、
少なくとも一つのデジット線は、共有された強誘電性材料を通って隣接するゲートによってアクセス可能な複数のFeFETメモリセルを有する、
ことを特徴とする方法。 - ある組み合わせの電圧を印加することは、V/3選択スキームおよびV/2選択スキームから成る群由来の選択スキームを使用することを含む、
ことを特徴とする請求項19に記載の方法。
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US13/897,037 US9281044B2 (en) | 2013-05-17 | 2013-05-17 | Apparatuses having a ferroelectric field-effect transistor memory array and related method |
US13/897,037 | 2013-05-17 | ||
PCT/US2014/038110 WO2014186529A1 (en) | 2013-05-17 | 2014-05-15 | Apparatuses having a ferroelectric field-effect transistor memory array and related method |
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