JP5093974B2 - 気相成長法による単結晶の製造装置および製造法 - Google Patents
気相成長法による単結晶の製造装置および製造法 Download PDFInfo
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- 238000000927 vapour-phase epitaxy Methods 0.000 title 1
- 230000012010 growth Effects 0.000 claims abstract description 83
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 49
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 12
- 150000002367 halogens Chemical class 0.000 claims abstract description 12
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 7
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- 239000012159 carrier gas Substances 0.000 claims description 7
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- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 229910052740 iodine Inorganic materials 0.000 claims description 3
- 239000005046 Chlorosilane Substances 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 238000010899 nucleation Methods 0.000 claims description 2
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- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims 1
- 239000011630 iodine Substances 0.000 claims 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
- 238000002425 crystallisation Methods 0.000 description 11
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- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 239000012071 phase Substances 0.000 description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 8
- 229910002601 GaN Inorganic materials 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
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- 150000004767 nitrides Chemical class 0.000 description 5
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- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000001294 propane Substances 0.000 description 4
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
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- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- -1 GaN or AlN Chemical class 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
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- OCVXZQOKBHXGRU-UHFFFAOYSA-N iodine(1+) Chemical compound [I+] OCVXZQOKBHXGRU-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1016—Apparatus with means for treating single-crystal [e.g., heat treating]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Description
図3は、米国特許No.5,704,985、6,039,812および6,048,398記載の概念に基づくHTCVDの成長室を含む改善された装置の概略を示す。この装置は、類似の主要な構成を有する本発明の装置として記述されるが、本発明記載に記載する特徴および改善と言う点で異なっている。図3の装置はSiCまたはIII族の窒化物の単結晶を成長させるのに適している。単純化のために、いくつかの部品は概略で示され、この装置にはまた、CVD系では通常の手法である質量流量調節計、バルブ類、ポンプ類、制御用電子部品、精製系、ガス洗浄系および他の要素を含むことは当業者には自明である。
Claims (15)
- 下記の段階を包含することを特徴とする、一つのポリタイプである(single polytype)、a)炭化ケイ素、b)III族窒化物、の1種の化合物結晶(compound crystals)を成長させる方法であって、上記化合物結晶の側面のエッチングの速度が、0.5mm/h以上である、上記方法:
・ 種結晶、化合物結晶の元素を少なくとも含有する蒸気種の混合物を含む
加熱した成長室中に、元素のうちの少なくとも1種が、上記結晶の成長
表面の上流開口部を通じて、連続的に上記室にフィードされるように、
かつ、0.5mm/h以上の結晶成長速度をもたらすように供給するこ
と、
・ 上記結晶の成長のための条件下で堆積しなかった残留蒸気種の連続流を
除去するために、上記結晶の成長表面の下流に別の開口部を設けること
、
・ 少なくとも1種のハロゲン元素を含有する付加的なガス流を、このガス
流が加熱され、上記結晶の成長表面の下流での固相の堆積速度が減少す
るように、そして、上記化合物結晶の側面をエッチングするように、供
給すること、
・ 上記付加的なガス流を変化させることにより、上記結晶の直径を制御
すること。 - さらに下記の段階を包含する請求項1記載の方法:
・ 上記結晶の近傍の上流中の成長室の少なくとも一つの領域を、少なくと
も1900℃まで加熱すること、
・ シリコンガスの前駆体の少なくとも1種、および炭化水素ガス前駆体ま
たはこれらの組み合わせのどちらかを、固体または液体源から上記結晶
に向けて昇華した蒸気とともに連続的にフィードすること。 - 前記加熱を、2000〜2600℃の範囲で行うことを特徴とする、請求項2記載の方法。
- さらに下記の段階を包含する請求項2記載の方法:
・ 少なくともClまたはFを含有する上記の付加的なエッチングガス流を
供給すること。 - 前記シリコンガスの前駆体が、シラン、クロロシラン、又はメチルシランである、請求項2記載の方法。
- 塩素(Cl2)、または塩化水素(HCl)、または水素(H2)、またはフッ素(F2)またはこれらの混合物からなる上記付加的なエッチングガス流を供給する段階をさらに包含する請求項2記載の方法。
- さらに下記の段階を包含する請求項1記載の方法:
・ 上記結晶の近傍の上流中の成長室の少なくとも一つの領域を、少なくと
も1100℃まで加熱すること、
・ ガリウムまたはアルミニウム有機金属前駆体の少なくとも1種、および
窒素含有ガスを、上記結晶に向けて連続的にフィードすること。 - 前記加熱を、1200〜2200℃の範囲で行うことを特徴とする、請求項7記載の方法。
- さらに下記の段階を包含する請求項7記載の方法:
・ 少なくともClまたはIを含有する上記の付加的なエッチングガス流を
供給すること。 - 塩素(Cl2)、または塩化水素(HCl)、または水素(H2)、またはヨウ化水素(HI)、またはヨウ素(I2)またはこれらの混合物からなる上記付加的なエッチングガス流を供給する段階をさらに包含する請求項7記載の方法。
- 回転および引き上げシャフトに装着された種ホルダーに種を置く段階、および上記結晶の成長表面の下流に供給されるように、上記付加的なエッチングガス流をシャフトを通じてフィードする段階を、さらに包含する請求項1〜10記載の方法。
- 上記の付加的なエッチングガス流を、加熱るつぼから出て、種結晶の最初の位置の上流の領域に入る少なくとも一つの流路に、相当の時間の間引き上げられる前にフィードする段階をさらに含む請求項1〜10のいずれかに記載の方法。
- 上記の付加的なエッチングガス流が、外側ヒーターと内部るつぼの間に形成された導管に供給され、このるつぼが、上記結晶の成長方向に平行な対称軸に沿って延び、初期の種結晶位置の直近の上流で終わっている、請求項1〜10のいずれかに記載の方法。
- キャリヤーガスが、少なくとも化合物結晶の元素を含有する蒸気種混合物とともに連続的にフィードされ、このキャリヤーガスが、水素、窒素、ヘリウムもしくはアルゴンまたはこれらの混合物のいずれかである、請求項1〜10のいずれかに記載の方法。
- 個別の付加的なエッチングガス流のいずれかにおけるハロゲン対水素の比が、固体の堆積がなく維持される事が望まれる表面に沿っての固体堆積の生成を防止する値に調整されている、請求項1〜14のいずれかに記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US465800 | 1990-01-12 | ||
SE0301225A SE0301225L (sv) | 2003-04-24 | 2003-04-24 | Apparat och metod för tillverkning av monokristaller genom gasdeposition |
SE0301225-9 | 2003-04-24 | ||
US46580003P | 2003-04-28 | 2003-04-28 |
Publications (2)
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JP2004323351A JP2004323351A (ja) | 2004-11-18 |
JP5093974B2 true JP5093974B2 (ja) | 2012-12-12 |
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JP2004127482A Expired - Lifetime JP5093974B2 (ja) | 2003-04-24 | 2004-04-23 | 気相成長法による単結晶の製造装置および製造法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7361222B2 (ja) |
EP (1) | EP1471168B2 (ja) |
JP (1) | JP5093974B2 (ja) |
CN (1) | CN100414004C (ja) |
AT (1) | ATE335872T1 (ja) |
DE (1) | DE602004001802T3 (ja) |
IT (1) | ITTO20040245A1 (ja) |
Families Citing this family (92)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2839730B1 (fr) * | 2002-05-15 | 2004-08-27 | Centre Nat Rech Scient | Formation de carbure de silicium monocristallin |
US6814801B2 (en) * | 2002-06-24 | 2004-11-09 | Cree, Inc. | Method for producing semi-insulating resistivity in high purity silicon carbide crystals |
US7601441B2 (en) * | 2002-06-24 | 2009-10-13 | Cree, Inc. | One hundred millimeter high purity semi-insulating single crystal silicon carbide wafer |
US20050250347A1 (en) * | 2003-12-31 | 2005-11-10 | Bailey Christopher M | Method and apparatus for maintaining by-product volatility in deposition process |
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US7361222B2 (en) | 2008-04-22 |
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EP1471168A1 (en) | 2004-10-27 |
JP2004323351A (ja) | 2004-11-18 |
US20080149020A1 (en) | 2008-06-26 |
ITTO20040245A1 (it) | 2004-07-20 |
EP1471168B1 (en) | 2006-08-09 |
CN1570225A (zh) | 2005-01-26 |
EP1471168B2 (en) | 2011-08-10 |
US20050000406A1 (en) | 2005-01-06 |
DE602004001802T2 (de) | 2007-10-11 |
DE602004001802D1 (de) | 2006-09-21 |
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