JP4388538B2 - 炭化珪素単結晶製造装置 - Google Patents
炭化珪素単結晶製造装置 Download PDFInfo
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- JP4388538B2 JP4388538B2 JP2006255571A JP2006255571A JP4388538B2 JP 4388538 B2 JP4388538 B2 JP 4388538B2 JP 2006255571 A JP2006255571 A JP 2006255571A JP 2006255571 A JP2006255571 A JP 2006255571A JP 4388538 B2 JP4388538 B2 JP 4388538B2
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- 239000013078 crystal Substances 0.000 title claims description 157
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 71
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 70
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000011810 insulating material Substances 0.000 claims description 43
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 229910002804 graphite Inorganic materials 0.000 claims description 22
- 239000010439 graphite Substances 0.000 claims description 22
- 239000002994 raw material Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 35
- 235000012431 wafers Nutrition 0.000 description 18
- 230000007547 defect Effects 0.000 description 15
- 230000006698 induction Effects 0.000 description 15
- 239000010453 quartz Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 230000008022 sublimation Effects 0.000 description 11
- 238000000859 sublimation Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 7
- 238000004430 X-ray Raman scattering Methods 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000001953 recrystallisation Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004854 X-ray topography Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/066—Heating of the material to be evaporated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
Description
(1) 少なくとも、炭化珪素原料粉末と種結晶を収容する坩堝、該坩堝の周囲に配置された断熱材、該坩堝を加熱する加熱装置を有する炭化珪素単結晶の製造装置であって、該坩堝の外形に、隣接する領域より径の細い領域が、坩堝の種側上端から坩堝の結晶成長部の下端までの範囲に、少なくとも一箇所以上あり、径の差により生じる空間にも断熱材が配置され、径の細い領域の断熱材厚さが隣接する領域の断熱材厚さよりも厚いことを特徴とする炭化珪素単結晶製造装置。
実施例1で用いる坩堝の断面構造を、図2に模式的に示す。坩堝上端から結晶成長部の途中までは径が細い。坩堝側面全体が断熱材25で覆われており、径の細い領域にはさらに断熱材26が配置されており、径の細い領域の断熱材の厚さはt2となっている。一方、径の太い坩堝の下部の断熱材の厚さはt1であり、t2/t1は2.0である。
実施例2で用いる坩堝を図3に模式的に示す。坩堝上端から結晶成長部の上部までは径が細く、下方に向かってはテーパー形状を有しており、結晶成長部の下端から下は一様な径を有する構造になっている。実施例1と同様に、坩堝側面全体が断熱材25で覆われており、径の細い領域にはテーパー部も含めてさらに断熱材26が配置されている。最も径の細い領域の断熱材厚さはt2、径が一様な坩堝の下部の断熱材厚さはt1であり、t2/t1は3.4である。
種結晶1として口径100mmの[0001]面を有した4H単一ポリタイプで構成された、3個/cm2のマイクロパイプ密度を有するSiC単結晶ウェハを用意し、C面を成長面として坩堝4の上部内面に取り付けた。
本発明の比較例として用いた坩堝を、図4に模式的に示す。内部構造は図3の坩堝と同じであるが、外径に細くなっている領域は無く、坩堝側面全体が断熱材25のみで覆われている。図4の坩堝及び黒鉛フェルトを図1に示す結晶製造装置の坩堝4及び黒鉛フェルト5の位置に設置し、実施例2同様のプロセスで単結晶インゴットを育成した。
2…SiC単結晶インゴット
3…SiC原料粉末
4…黒鉛坩堝
5…熱シールド(黒鉛フェルト)
6…支持台
7…二重石英管
8…ワークコイル
9…ガス配管
10…マスフローコントローラ
11…真空排気装置及び圧力制御装置
12a…放射温度計(坩堝上部用)
12b…放射温度計(坩堝下部用)
21…種結晶
22…SiC単結晶インゴット
23…黒鉛坩堝
24…SiC原料
25…坩堝側面全体に配置された黒鉛フェルト
26…坩堝の径の細い領域にのみ配置された黒鉛フェルト
27…坩堝底面に配置された黒鉛フェルト
28…坩堝上面に配置された黒鉛フェルト
29…SiC単結晶の周辺に発生したSiC多結晶
Claims (4)
- 少なくとも、炭化珪素原料粉末と種結晶を収容する坩堝、該坩堝の周囲に配置された断熱材、該坩堝を加熱する加熱装置を有する炭化珪素単結晶の製造装置であって、該坩堝の外形に、隣接する領域より径の細い領域が、坩堝の種側上端から坩堝の結晶成長部の下端までの範囲に、少なくとも一箇所以上あり、径の差により生じる空間にも断熱材が配置され、径の細い領域の断熱材厚さが隣接する領域の断熱材厚さよりも厚いことを特徴とする炭化珪素単結晶製造装置。
- 前記断熱材が黒鉛フェルトである請求項1に記載の炭化珪素単結晶製造装置。
- 前記断熱材の最大厚みと最小厚みの比(最大厚/最小厚)が1.5以上である請求項1又は2に記載の炭化珪素単結晶製造装置。
- 前記断熱材の最大厚みと最小厚みの比(最大厚/最小厚)が2以上である請求項1又は2に記載の炭化珪素単結晶の製造装置。
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JP2006255571A JP4388538B2 (ja) | 2006-09-21 | 2006-09-21 | 炭化珪素単結晶製造装置 |
US12/416,500 US9068277B2 (en) | 2006-09-21 | 2009-04-01 | Apparatus for manufacturing single-crystal silicon carbide |
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JP2006255571A JP4388538B2 (ja) | 2006-09-21 | 2006-09-21 | 炭化珪素単結晶製造装置 |
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JP2008074662A JP2008074662A (ja) | 2008-04-03 |
JP4388538B2 true JP4388538B2 (ja) | 2009-12-24 |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
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US9228274B2 (en) | 2008-12-08 | 2016-01-05 | Ii-Vi Incorporated | Axial gradient transport growth process and apparatus utilizing resistive heating |
KR101101984B1 (ko) * | 2008-12-12 | 2012-01-02 | 에스케이씨 주식회사 | 단결정 성장장치 |
KR20120024767A (ko) * | 2009-09-24 | 2012-03-14 | 스미토모덴키고교가부시키가이샤 | 탄화규소 잉곳, 탄화규소 기판, 이들의 제조 방법, 도가니, 및 반도체 기판 |
JP5304712B2 (ja) * | 2010-04-07 | 2013-10-02 | 新日鐵住金株式会社 | 炭化珪素単結晶ウェハ |
JP5392169B2 (ja) * | 2010-04-07 | 2014-01-22 | 株式会社デンソー | 炭化珪素単結晶の製造方法 |
KR101897078B1 (ko) * | 2011-06-01 | 2018-09-10 | 엘지이노텍 주식회사 | 잉곳 제조 장치 및 잉곳 제조 방법 |
CN103184512B (zh) * | 2011-12-28 | 2016-04-13 | 上海硅酸盐研究所中试基地 | 轴向温度梯度可调控的碳化硅单晶生长装置 |
JP2013212952A (ja) * | 2012-04-02 | 2013-10-17 | Sumitomo Electric Ind Ltd | 炭化珪素単結晶の製造方法 |
JP2014015394A (ja) * | 2013-10-30 | 2014-01-30 | Sumitomo Electric Ind Ltd | 炭化珪素結晶の製造方法 |
KR102163488B1 (ko) * | 2013-12-05 | 2020-10-07 | 재단법인 포항산업과학연구원 | SiC 단결정 성장 장치 |
JP5719957B1 (ja) * | 2014-06-06 | 2015-05-20 | 日新技研株式会社 | 単結晶の製造装置及び製造方法 |
US20160002820A1 (en) * | 2014-07-04 | 2016-01-07 | Sumitomo Electric Industries, Ltd. | Crucible and method for producing single crystal |
CN105658846B (zh) * | 2014-09-30 | 2018-08-28 | 昭和电工株式会社 | 碳化硅单晶晶片、和碳化硅单晶锭的制造方法 |
JP6398640B2 (ja) * | 2014-11-18 | 2018-10-03 | 住友電気工業株式会社 | 炭化珪素単結晶の製造方法および炭化珪素単結晶の製造装置 |
CN106894091B (zh) * | 2017-03-28 | 2020-03-20 | 山东大学 | 用于物理气相传输法生长碳化硅晶体的坩埚 |
JP2019156698A (ja) * | 2018-03-15 | 2019-09-19 | 信越半導体株式会社 | 炭化珪素単結晶の製造方法 |
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CN114108078B (zh) * | 2021-11-30 | 2023-06-02 | 江苏集芯半导体硅材料研究院有限公司 | 坩埚组件和具有其的单晶生长装置 |
CN114481323B (zh) * | 2021-12-30 | 2023-06-20 | 湖南金博碳基材料研究院有限公司 | 碳/碳复合材料坩埚及其制备方法、晶体生长设备 |
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US5683507A (en) * | 1995-09-05 | 1997-11-04 | Northrop Grumman Corporation | Apparatus for growing large silicon carbide single crystals |
US6428621B1 (en) * | 2000-02-15 | 2002-08-06 | The Fox Group, Inc. | Method for growing low defect density silicon carbide |
JP2004224666A (ja) * | 2003-01-27 | 2004-08-12 | Mitsui Eng & Shipbuild Co Ltd | SiC単結晶製造方法及び装置 |
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JP2007230846A (ja) * | 2006-03-03 | 2007-09-13 | Matsushita Electric Ind Co Ltd | 単結晶製造装置用坩堝 |
JP2007308355A (ja) * | 2006-05-22 | 2007-11-29 | Bridgestone Corp | 炭化ケイ素単結晶の製造装置及びその製造方法 |
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2006
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2009
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US20090205565A1 (en) | 2009-08-20 |
JP2008074662A (ja) | 2008-04-03 |
US9068277B2 (en) | 2015-06-30 |
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