JP4882292B2 - 研磨布の製造方法 - Google Patents
研磨布の製造方法 Download PDFInfo
- Publication number
- JP4882292B2 JP4882292B2 JP2005195839A JP2005195839A JP4882292B2 JP 4882292 B2 JP4882292 B2 JP 4882292B2 JP 2005195839 A JP2005195839 A JP 2005195839A JP 2005195839 A JP2005195839 A JP 2005195839A JP 4882292 B2 JP4882292 B2 JP 4882292B2
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- JP
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- Prior art keywords
- fiber
- treatment
- polishing cloth
- preferable
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 238000000034 method Methods 0.000 claims description 68
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- 239000012530 fluid Substances 0.000 claims description 25
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 65
- 229910001868 water Inorganic materials 0.000 description 63
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- 239000006061 abrasive grain Substances 0.000 description 9
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
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- 239000002904 solvent Substances 0.000 description 3
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- 239000004952 Polyamide Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- MMINFSMURORWKH-UHFFFAOYSA-N 3,6-dioxabicyclo[6.2.2]dodeca-1(10),8,11-triene-2,7-dione Chemical group O=C1OCCOC(=O)C2=CC=C1C=C2 MMINFSMURORWKH-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910018134 Al-Mg Inorganic materials 0.000 description 1
- 229910018467 Al—Mg Inorganic materials 0.000 description 1
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- 239000004970 Chain extender Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- JHWNWJKBPDFINM-UHFFFAOYSA-N Laurolactam Chemical compound O=C1CCCCCCCCCCCN1 JHWNWJKBPDFINM-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 229920000299 Nylon 12 Polymers 0.000 description 1
- 229920000305 Nylon 6,10 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- 235000006040 Prunus persica var persica Nutrition 0.000 description 1
- 240000006413 Prunus persica var. persica Species 0.000 description 1
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- 239000002174 Styrene-butadiene Substances 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
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- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- MTAZNLWOLGHBHU-UHFFFAOYSA-N butadiene-styrene rubber Chemical compound C=CC=C.C=CC1=CC=CC=C1 MTAZNLWOLGHBHU-UHFFFAOYSA-N 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
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- 239000003814 drug Substances 0.000 description 1
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- 238000002513 implantation Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
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- 229920000098 polyolefin Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
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- 229920002215 polytrimethylene terephthalate Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- 238000007127 saponification reaction Methods 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
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- 239000011115 styrene butadiene Substances 0.000 description 1
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- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Nonwoven Fabrics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005195839A JP4882292B2 (ja) | 2004-07-05 | 2005-07-05 | 研磨布の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004197671 | 2004-07-05 | ||
| JP2004197671 | 2004-07-05 | ||
| JP2005195839A JP4882292B2 (ja) | 2004-07-05 | 2005-07-05 | 研磨布の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006045757A JP2006045757A (ja) | 2006-02-16 |
| JP2006045757A5 JP2006045757A5 (enExample) | 2008-07-24 |
| JP4882292B2 true JP4882292B2 (ja) | 2012-02-22 |
Family
ID=36024660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005195839A Expired - Fee Related JP4882292B2 (ja) | 2004-07-05 | 2005-07-05 | 研磨布の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4882292B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102691172A (zh) * | 2012-05-09 | 2012-09-26 | 中国人民解放军总后勤部军需装备研究所 | 一种汉麻针刺非织造布及其制备方法 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5040260B2 (ja) * | 2005-10-31 | 2012-10-03 | 東レ株式会社 | 研磨布およびその製造方法 |
| JP4997859B2 (ja) * | 2006-07-21 | 2012-08-08 | 信越半導体株式会社 | バッキングパッド並びにワークの研磨装置及びワークの研磨方法 |
| JP5018094B2 (ja) * | 2007-01-12 | 2012-09-05 | 東レ株式会社 | 研磨布 |
| US8647179B2 (en) | 2007-02-01 | 2014-02-11 | Kuraray Co., Ltd. | Polishing pad, and method for manufacturing polishing pad |
| JP5415700B2 (ja) * | 2007-02-01 | 2014-02-12 | 株式会社クラレ | 研磨パッド及び研磨パッドの製造方法 |
| JP2009007713A (ja) * | 2007-06-29 | 2009-01-15 | Toray Ind Inc | シート状物 |
| JP4899947B2 (ja) * | 2007-03-07 | 2012-03-21 | 東レ株式会社 | 繊維構造体の製造方法 |
| WO2008111442A1 (ja) * | 2007-03-07 | 2008-09-18 | Toray Industries, Inc. | 繊維構造体およびその製造方法 |
| JP4499136B2 (ja) * | 2007-06-06 | 2010-07-07 | シャープ株式会社 | 研磨パッドの製造方法 |
| US20090061743A1 (en) * | 2007-08-29 | 2009-03-05 | Stephen Jew | Method of soft pad preparation to reduce removal rate ramp-up effect and to stabilize defect rate |
| JP5451160B2 (ja) * | 2009-04-15 | 2014-03-26 | 帝人株式会社 | 研磨材 |
| CN104153122A (zh) * | 2014-07-17 | 2014-11-19 | 南通江潮纤维制品有限公司 | 用于鲜花包装的超吸水纤维无纺布 |
| JP7104961B2 (ja) * | 2018-02-01 | 2022-07-22 | 東レコーテックス株式会社 | 研磨布 |
| KR20240125581A (ko) | 2021-12-21 | 2024-08-19 | 신에쯔 한도타이 가부시키가이샤 | 양면연마장치, 반도체 실리콘 웨이퍼의 양면연마방법, 양면연마 실리콘 웨이퍼 및 그의 제조방법 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6075682A (ja) * | 1983-09-30 | 1985-04-30 | Toray Ind Inc | 皮革様シ−トの製造法 |
| JPH0615750B2 (ja) * | 1988-01-22 | 1994-03-02 | 東レ株式会社 | ポリアミド系超極細繊維シートの着色方法 |
| JPH0694629B2 (ja) * | 1989-03-08 | 1994-11-24 | 東レ株式会社 | 柔軟な皮革様シート物の製造方法 |
| JP3774302B2 (ja) * | 1997-09-11 | 2006-05-10 | 株式会社クラレ | 研磨用布帛 |
| JP2000237951A (ja) * | 1999-02-19 | 2000-09-05 | Toray Ind Inc | 研磨布および研磨装置 |
| JP2001001253A (ja) * | 1999-06-21 | 2001-01-09 | Toray Ind Inc | 研磨布 |
| JP2002079472A (ja) * | 2000-06-19 | 2002-03-19 | Kuraray Co Ltd | テクスチャー加工用研磨シート及びその製造方法 |
| JP4808867B2 (ja) * | 2001-06-28 | 2011-11-02 | ダイワボウホールディングス株式会社 | 研磨不織布及びその製造方法 |
| JP2003094320A (ja) * | 2001-09-25 | 2003-04-03 | Toray Ind Inc | 研磨布 |
| JP2003235896A (ja) * | 2002-02-15 | 2003-08-26 | Daio Paper Corp | 不織布を有する吸収性物品及びその製造方法 |
| JP2003236739A (ja) * | 2002-02-20 | 2003-08-26 | Teijin Ltd | 研磨基布 |
| JP4254115B2 (ja) * | 2002-03-18 | 2009-04-15 | 東レ株式会社 | 研磨布の製造方法 |
-
2005
- 2005-07-05 JP JP2005195839A patent/JP4882292B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102691172A (zh) * | 2012-05-09 | 2012-09-26 | 中国人民解放军总后勤部军需装备研究所 | 一种汉麻针刺非织造布及其制备方法 |
| CN102691172B (zh) * | 2012-05-09 | 2015-04-15 | 中国人民解放军总后勤部军需装备研究所 | 一种汉麻针刺非织造布及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006045757A (ja) | 2006-02-16 |
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