JP4626302B2 - 単一の軌道位置から高架ホイスト搬送手段により材料収納棚の一つまたはそれ以上のレベルへ到達する方法 - Google Patents

単一の軌道位置から高架ホイスト搬送手段により材料収納棚の一つまたはそれ以上のレベルへ到達する方法 Download PDF

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JP4626302B2
JP4626302B2 JP2004543686A JP2004543686A JP4626302B2 JP 4626302 B2 JP4626302 B2 JP 4626302B2 JP 2004543686 A JP2004543686 A JP 2004543686A JP 2004543686 A JP2004543686 A JP 2004543686A JP 4626302 B2 JP4626302 B2 JP 4626302B2
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hoist
track
material storage
elevated
suspended
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JP2006515256A5 (enExample
JP2006515256A (ja
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ジェフリー， ティー。 タウィヤー，
ブライアン， ジェー． ドリーティー，
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Murata Machinery Ltd
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Murata Machinery Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004543686A 2002-10-11 2003-10-09 単一の軌道位置から高架ホイスト搬送手段により材料収納棚の一つまたはそれ以上のレベルへ到達する方法 Expired - Lifetime JP4626302B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41799302P 2002-10-11 2002-10-11
PCT/US2003/032200 WO2004034438A2 (en) 2002-10-11 2003-10-09 Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position

Publications (3)

Publication Number Publication Date
JP2006515256A JP2006515256A (ja) 2006-05-25
JP2006515256A5 JP2006515256A5 (enExample) 2006-12-07
JP4626302B2 true JP4626302B2 (ja) 2011-02-09

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JP2004543686A Expired - Lifetime JP4626302B2 (ja) 2002-10-11 2003-10-09 単一の軌道位置から高架ホイスト搬送手段により材料収納棚の一つまたはそれ以上のレベルへ到達する方法

Country Status (8)

Country Link
US (1) US10957569B2 (enExample)
EP (2) EP1573778B1 (enExample)
JP (1) JP4626302B2 (enExample)
KR (10) KR101458520B1 (enExample)
CN (1) CN1849251B (enExample)
AU (1) AU2003284051A1 (enExample)
TW (1) TWI302902B (enExample)
WO (1) WO2004034438A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9620397B2 (en) 2002-06-19 2017-04-11 Murata Machinery Ltd. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10957569B2 (en) 2002-10-11 2021-03-23 Murata Machinery Ltd. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position

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