EP3286781A1 - Serviceeinrichtung - Google Patents
ServiceeinrichtungInfo
- Publication number
- EP3286781A1 EP3286781A1 EP16709368.1A EP16709368A EP3286781A1 EP 3286781 A1 EP3286781 A1 EP 3286781A1 EP 16709368 A EP16709368 A EP 16709368A EP 3286781 A1 EP3286781 A1 EP 3286781A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plant
- service
- magnetic
- service device
- magnetic rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15164605 | 2015-04-22 | ||
PCT/EP2016/054975 WO2016169694A1 (de) | 2015-04-22 | 2016-03-09 | Serviceeinrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3286781A1 true EP3286781A1 (de) | 2018-02-28 |
Family
ID=53181050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16709368.1A Pending EP3286781A1 (de) | 2015-04-22 | 2016-03-09 | Serviceeinrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US20180155126A1 (de) |
EP (1) | EP3286781A1 (de) |
KR (1) | KR102561719B1 (de) |
WO (1) | WO2016169694A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11150032B2 (en) * | 2017-01-18 | 2021-10-19 | Bigz Tech Inc. | Transient heat absorption and delayed dissipation by high heat capacity material |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5641054A (en) * | 1992-07-07 | 1997-06-24 | Ebara Corporation | Magnetic levitation conveyor apparatus |
US6604624B2 (en) * | 1998-09-22 | 2003-08-12 | Hirata Corporation | Work conveying system |
US6481558B1 (en) * | 1998-12-18 | 2002-11-19 | Asyst Technologies, Inc. | Integrated load port-conveyor transfer system |
FR2844258B1 (fr) * | 2002-09-06 | 2005-06-03 | Recif Sa | Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert |
KR101544699B1 (ko) * | 2002-10-11 | 2015-08-18 | 무라다기카이가부시끼가이샤 | 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량 |
JP3981885B2 (ja) * | 2003-05-20 | 2007-09-26 | 株式会社ダイフク | 搬送装置 |
US7798758B2 (en) * | 2005-11-07 | 2010-09-21 | Brooks Automation, Inc. | Reduced capacity carrier, transport, load port, buffer system |
JP4798799B2 (ja) * | 2007-08-20 | 2011-10-19 | Necエンジニアリング株式会社 | 版給排装置及びそれを用いた刷版作成装置 |
US8981807B2 (en) * | 2010-07-27 | 2015-03-17 | Intest Corporation | Positioner system and method of positioning |
US9190304B2 (en) * | 2011-05-19 | 2015-11-17 | Brooks Automation, Inc. | Dynamic storage and transfer system integrated with autonomous guided/roving vehicle |
NL2007401C2 (en) | 2011-09-12 | 2013-04-09 | Mapper Lithography Ip Bv | Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assembly. |
-
2016
- 2016-03-09 EP EP16709368.1A patent/EP3286781A1/de active Pending
- 2016-03-09 US US15/568,348 patent/US20180155126A1/en not_active Abandoned
- 2016-03-09 KR KR1020177033221A patent/KR102561719B1/ko active IP Right Grant
- 2016-03-09 WO PCT/EP2016/054975 patent/WO2016169694A1/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR102561719B1 (ko) | 2023-07-31 |
KR20170141728A (ko) | 2017-12-26 |
US20180155126A1 (en) | 2018-06-07 |
WO2016169694A1 (de) | 2016-10-27 |
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Legal Events
Date | Code | Title | Description |
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STAA | Information on the status of an ep patent application or granted ep patent |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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STAA | Information on the status of an ep patent application or granted ep patent |
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17P | Request for examination filed |
Effective date: 20170927 |
|
AK | Designated contracting states |
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AX | Request for extension of the european patent |
Extension state: BA ME |
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DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
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17Q | First examination report despatched |
Effective date: 20210326 |
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STAA | Information on the status of an ep patent application or granted ep patent |
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