EP3286781A1

EP3286781A1 - Service cart

Info

Publication number: EP3286781A1
Application number: EP16709368.1A
Authority: EP
Inventors: Ingo Weiske; Arndt Evers; Han Hartgers; Andreas Birkner; Guido VAN LOON
Original assignee: Integrated Dynamics Engineering GmbH
Current assignee: Integrated Dynamics Engineering GmbH
Priority date: 2015-04-22
Filing date: 2016-03-09
Publication date: 2018-02-28
Also published as: US20180155126A1; WO2016169694A1; KR102561719B1; KR20170141728A

Abstract

The invention relates to a service cart for a clean room or for systems in the clean room comprising a system part which can be moved horizontally and vertically. Said system part is suspended on magnetic rails.

Description

SERVI CEE INRI CHTUNG

Description Field of the invention

The invention relates to a service facility for

Use in plants in clean rooms. In particular, the invention relates to a service facility with the parts of equipment used in the field of semiconductor industry

Plant, in particular parts of a process plant, or parts of a process control plant (for example, a

Measuring sensor) can be moved vertically and horizontally.

Background of the invention

In the semiconductor industry, as the size of the substrates increases, so too do the plants. In particular, the invention relates to plants which may be process plants, process control plants.

Such systems often also include plant parts for carrying out the intended use of this system in a vacuum.

Such systems often include plant parts

(For example, parts of a measuring sensor, parts of

Substrate handling, a light source, a

Electron beam source, or a variety of other plant specific parts). In the plant parts and other components of the system can be arranged. For maintenance purposes, it is sometimes necessary that Lift the unit and move it laterally to get to the underlying devices or components or to the devices or components that are mounted in the system itself.

Usually mobile service cranes are used for this purpose. The mass to be moved can be quite high. In particular, there are parts of the plant that weigh more than 5 t. To move such a component with a mobile service crane is time-consuming and thus leads to correspondingly costly downtime of the system. The

Publication US 2013/0088702 AI shows a

Lifting device for the module of a lithographic device. The lifting device shown in this document is integrated into the system, which has the advantage of shorter

Service times brings with it.

The problem with such a system but the mechanical parts, in particular the bearings. So

Any fats or oils used will degrade the

Clean room conditions. When moving loads also oil-free bearings lead to undesirable abrasion, which contaminates the plant or the clean room. The larger the loads, the greater the abrasion.

Another disadvantage of the service crane is that any side forces, as they occur, for example, when attached to the moving part of the plant during movement and then attached side cables or other lines for fluids or optical cables can lead to the fact that the use of such a service crane is not permitted for safety reasons.

Object of the invention

The invention is based on the object to reduce the mentioned disadvantages of the prior art. It is a particular object of the invention to provide a

To provide service facility by means of which high loads can be moved quickly and in which the risk of particulate emissions in the system or the

Cleanroom is reduced.

Summary

The object of the invention is already by a

Service device according to claim 1 solved. Preferred embodiments and further developments of the invention can be found in the subject matter of the subclaims.

The invention relates to a service facility,

especially for use in plants and in clean rooms.

This includes a vertically and horizontally movable plant part. As described above, the plant part may also be part of a plant, in particular a measuring sensor, a part of a substrate handling device. The plant part can furthermore also include plant components, such as components of lithography and inspection equipment or be part of a vacuum chamber,

in particular the lid of a vacuum chamber. For this purpose, the plant part passages for fluid, electrical and / or optical cables include.

The system part can be moved in both horizontal and vertical directions. By means of

According to the service device according to the invention, the system part can therefore not only be lifted in the system, but also be moved in the horizontal direction.

According to the invention, at least for the horizontal method, the plant part comprises at least one magnetic rail. Under a magnetic rail in particular a magnetic bearing is understood, which is designed as a rail. The

Magnetic rail has in particular electromagnets, by means of a runner can be held on a rail in suspension. In the activated state, therefore, the rotor is lifted by magnetic forces and is spaced from the rail by at least one gap. Now the plant part is non-contact in the horizontal direction

movable.

The fact that the plant part is no longer supported by ^rolling or plain bearings, this can in

horizontal direction without causing abrasion.

It has been found that, in particular, heavy system components can also be moved without contact in the horizontal direction by means of a magnetic rail.

The provision of such large-sized

Magnetic rails is expensive, but has the big one Advantage of reducing particulate emissions. In addition, one could rely on locking devices,

especially at the end positions of the horizontal

Travel, do without. Because when Stromlosschalt the magnetic rail, the system locks itself by placing it so that it is then frictionally or positively fixed on a support. Turning off the magnets is usually more of an emergency feature

Power failure .

Parts of the magnetic rail, in particular a carrier or a runner running on the carrier, can be provided for this purpose with a coating which increases the friction. It is also conceivable to provide carrier and rotor with interlocking positive locking elements. These may be, for example, teeth running along a rail, in which teeth of the runner engage in weaning.

In addition to a waiver of safety devices for

Locking is advantageous in that it is in any position, so for example, even during a power failure in the system during the process for a secure fixing of the

Runner comes. Alternatively or in combination, the machine part can also be held in the required position by the drive.

Further, a mechanical locking by an additional device is conceivable, which prevents the horizontal movement of the rotor. This can be realized, for example, by means of an actuator actuated positive locking elements which are the rotor of the magnetic rail on the

Lock magnetic track.

In a preferred embodiment of the invention, the magnetic rail to a separate linear drive for

horizontal method. The decoupling of lifting the rotor of the magnetic rail by means of the magnetic rail of the horizontal method simplifies the control engineering implementation against a control of the solenoid of the magnetic rail itself. The linear drive must apply only small forces and move the system part not very fast in the horizontal direction.

Of advantage are the reduction of abrasion non-contact linear motors.

But since only small forces must be applied, it is also conceivable to use, for example, spindle drive for horizontal operation. Due to the low forces that this drive must apply, the resulting abrasion is usually less severe.

In a further development of the invention, the

Magnetic rail on an electromagnetic side guide. The magnetic rail thus has both electromagnets for lifting a rotor, as well as electromagnets to keep the rotor spaced from the walls of a carrier in a middle position.

The runner also does not abut the process in the horizontal direction along the carrier, which in turn can lead to abrasion. The electromagnetic side guide is preferably via separate electromagnets and not via electromagnets, which serve to lift the rotor on the rail.

This allows in particular a simple

Control engineering design, in which the lifting of a rotor of the magnetic rail, the side guide and the horizontal method separately and independently

can be controlled from each other.

In a preferred embodiment of the invention, the service device comprises a plurality of magnetic rails. It is provided in particular, a service facility

to provide, which comprises two magnetic rails, on each of which a runner on a support along the

Rail or the carrier is movable.

The plant part is now preferably connected at the edge of the center of the runners approximately in the middle of its center of gravity and can thus be moved along the carrier.

The method in the vertical direction, which is understood in the context of the invention is not a lifting of the plant part by the activation of the magnetic rail to then move it without contact in the horizontal direction, but the method over a longer distances in the vertical direction, is preferably characterized Realized that the plant part about a hanging product

is vertically movable. In one embodiment of the invention, a contactless operating drive, in particular a magnetic drive and / or a non-contact magnetic guide within the hanging device, is also used for the vertical method

used.

This in turn reduces the particulate emissions, but has the disadvantage that in the vertical direction a locking device must be provided, by which the plant part is locked in its vertical end position.

It is still better to provide a locking device in a non-contact drive, which automatically locks in the event of a power failure, the system part and thus secures against falling. This can be realized, for example, by a positive-locking element actuated by means of an electromagnet. This releases the carrier to the vertical process once it is electrically powered. In the event of a power failure, the form-locking element moves back to its original position and locks the carrier or the hanging product over which the system part is raised.

The plant part is in particular a hanging device, which is designed as a rope or pin on the

at least one magnetic rail, in particular on a rotor of the magnetic rail, suspended. Thus, the plant part game in the horizontal and vertical direction, whereby tolerances of the components involved can be bleached, or even a reduction in the transmission of vibrations of the service facility can be achieved on the often vibration-isolated part of the plant.

The service device is designed in particular for lifting a mass of more than 50 kg, preferably more than 100 kg, more preferably more than 1 t, very particularly preferably more than 5 t.

Further, the plant part is preferably more than 30% and / or less than 70% of its length of one

Center position movable in a horizontal direction.

In a further development of the invention, the runner of the rail has a running in horizontally extending direction arm to which the system part attached, in particular suspended.

Thus, a plant part fastened to its center of gravity can be extended by more than half its length, in particular completely over the area of the installation in which the magnetic rails run.

The plant part can also be suspended in particular in the middle and is thus about half of its length in

movable horizontally. The part of the plant may be outside its scope in other embodiments

Center of gravity and / or not be suspended in the middle.

The invention relates in particular to a

Service facility for parts of a process plant, or parts of a process control plant (for example a measuring sensor), or parts of a lithography plant, in particular to measuring instruments, lithographic apparatus, optical inspection apparatus, inspection apparatus

Electron beam base, coating systems, and equipment for processing semiconductor substrates. Furthermore, a use in plants in clean rooms of the pharmaceutical and food industries is conceivable, especially in

Production, packaging and bottling plants.

The vertical movement is preferably carried out by the hanging product. In particular, when the hanging equipment as

Rod is executed, there can realize the vertical movement (for example, as a threaded drive).

Brief description of the drawings

The invention will in the following reference to the

Figures 1 to Fig. 6 are explained with reference to schematically illustrated embodiments. Fig. 1 shows a schematic perspective view of an embodiment of a service device.

Fig. 2 shows the service device according to FIG. 1, wherein the plant part has been moved vertically upwards.

FIG. 3 shows those in FIGS. 1 and 2

shown service facility with in horizontal

Direction of moved plant part. Fig. 4 shows a schematic sectional view of a

Magnetic rail. Fig. 5 shows a perspective view of a

Magnetic rail.

Fig. 6 shows perspective views of a further embodiment of the invention, in which the plant part can be moved over a greater distance from the plant.

Detailed description of the drawings

Fig. 1 shows a perspective view of a first schematic embodiment of a service device 1. This comprises a frame 2. Within the frame 2 is a table 3 with a

Plant part 5 is arranged.

The table serves, for example, the recording of

vibration-isolated stored part of a plant in one

Meter.

For this purpose, the table 3 vibration isolated on bearings (not shown) may be arranged, in particular on air bearings.

The service device 1 comprises two edges

arranged magnetic rails 7th

Each magnetic rail 7 comprises an at least carrier 9, on each of which a rotor 10 is horizontally movable. The runners 10 comprise electromagnets (not shown), with which the runners 10 can be raised by the carriers 9, so that the runners 10 are separated from the carrier by an air gap

are spaced and can be moved without contact on the carrier 9.

The frame 2 should not be much larger than the entire system in order to minimize the additional space or space required by the service facility.

The service device is preferably designed so that it can be fully integrated into the system without increasing the need for Aufsteilfläche for the system. The plant part 5 is suspended in this embodiment via hanging tools 15 to the runners 10 and thus has at least in the horizontal direction something game. Also in the vertical direction game can be present. The plant part 5 can be raised in this embodiment, the hanging equipment 15 in the vertical direction. For this purpose, the hanging product 15 as a hoist, such as

for example, as a threaded spindle formed. Alternatively or in combination, it is also conceivable to move the carriers in the vertical direction by means of a drive 4.

The power supply for driving in the rotor

arranged electromagnets can be done for example by the hanging product 15. The hanging tools 15 are connected to the two runners 10, which are each arranged on the carrier 9.

In Fig. 2 is now shown how by means of

Hängezeuge 15 the plant part 5 vertically upwards

was moved and the table 3 releases.

Alternatively or in combination, the vertical method can also take place via the drive 4.

In this state, the magnetic rails 9 may already be activated.

As shown in Fig. 3, the magnetic rails are activated at the latest now, so that the rotor 10 are raised and are now free to move on the carrier 9.

The plant part 5 is now moved in the horizontal direction along the carrier 9 in its final position.

By deactivating the magnetic rail, the runners 10 set on the carriers 9, whereby they are secured against further horizontal displacement. However, the position can also be held solely by the drive without the magnetic track being deactivated. Alternatively or additionally, however, the magnetic rail can also be locked by a different lock, such as, for example, an electrically actuated positive-locking element (not shown).

Fig. 4 shows a schematic sectional view of a

Magnetic rail 7. The magnetic rail 7 includes one in this

Embodiment rectangular runner 10. It is understood that the rotor 10 and another

Geometry, such as a round

Outer contour. The rotor 10 encloses the rail 9, which is designed as a T-beam with a shorter lower strut. Opposite the underside of the carrier 9, the rotor comprises electromagnets 11, which serve to lift the rotor 10 on the carrier 9.

By activating the electromagnets, the rotor 10 is pulled upwards and is then separated by a gap

Carrier 9 spaced.

Deactivation of the electromagnets 11 causes the rotor 10 to settle on the carrier 9 and then already secured in the horizontal direction by frictional engagement.

Opposite the vertically upwardly extending part of the carrier 9, the rotor 10 comprises laterally arranged therefrom electromagnets 12, via which a side guide

is provided such that the rotor 10 is also spaced in the horizontal direction by air gaps of the carrier 9. For controlling the magnets 11 and 12, a sensor module 16 can be used, which measures the distance of the carrier 9 from the rotor 10 in the horizontal and vertical directions. This also operates without contact, for example as an inductive or capacitive sensor.

Vertical guidance and horizontal cornering work independently.

Further, a separate linear drive 13 is provided, via which the rotor 10 can be moved along the carrier 9 in the horizontal direction.

This also operates independently and is preferably designed as a non-contact drive. The linear drive 13 is designed such that it is a vertical

Game, at least the lifting height of the rotor 10 allows. This is done in this embodiment by

angled and interlocking extensions of runner 10 and carrier 9.

By means of the hanging equipment 15, the plant part 5 is attached to the rotor 10. As hangers, for example, ropes or pins, in particular threaded pins can be used. These provide some play in the horizontal and vertical directions. These ropes or pins may be combined with a vertical drive, for example a threaded spindle, to form a hoist.

Fig. 5 shows a perspective view of a

Magnetic rail 7. Recognize is the runner 10 running on the support 9. Next you can see the interlocking

Rails 6, 17 of a linear drive, over which the rotor 10 is moved in the horizontal direction. As a stator of such a linear drive can

For example, serve along a rail 6, 17 arranged permanent magnets.

The rail 6 is arranged on the carrier 9 and the rail 17 is arranged on the rotor 10.

The rotor 10 is formed substantially square and has on the underside an extension for attachment of the hoist.

Even with a relatively short runner 10 high forces can be achieved, which are particularly sufficient to lift loads of over 1 t. 6 shows a further embodiment of the invention in which the plant part 5 can be moved out of the area of the plant over a further distance than in the embodiment shown in FIGS. 1 to 3. Otherwise corresponds to the one shown here

Service facility 1 but the previously shown

Embodiment.

In contrast to the previously illustrated embodiment, arms 10 extending in the horizontal direction are arranged on the runners 10, to which the machine part 5 is preferably suspended at its center of gravity. As a result, the machine part 5 continues

Drive out the system. This becomes a larger area

Table 3 released.

It will be appreciated that by the extended arms 18, a force acts on the frame of the system, which, so that it does not tip over, must be intercepted by the weight of the system or a suitable attachment.

The invention enabled a service facility

be provided, which can also move high loads in the horizontal and vertical directions. The service device according to the invention allows a

Faster plant maintenance and leads to a reduced particle load, the plant or the clean room.

LIST OF REFERENCE NUMBERS

1 service facility

2 frames

3 table

4 drive

5 part of the plant

6 rail

7 magnetic rail

9 carriers

10 runners

11 electromagnet

12 electromagnet

13 linear drive

15 hanging items

16 sensor module

17 rail

Claims

Claims:

Service device (1), in particular for use in clean rooms, by means of which a plant part (5) is vertically and horizontally movable, characterized in that the plant part (5) via at least one magnetic rail (7) horizontally

is movable.

Service device according to the preceding claim, characterized in that the magnetic rail (7) operates a separate non-contact

Linear drive (13) for horizontal method has.

Service facility according to one of the preceding

Claims, characterized in that the

Magnetic rail (7) has a magnetic, in particular electromagnetically controlled side guide

Service facility according to one of the preceding

Claims, characterized in that the

Magnetic rail (7) via a drive (4) is moved vertically.

Service facility according to one of the preceding

Claims, characterized in that the

Plant part (5) comprises bushings for fluid, electrical, and / or optical lines. Service facility according to one of the preceding

Claims, characterized in that the

Service device comprises a plurality of magnetic rails (7).

7. Service device according to one of the above

Claims, characterized in that the

Magnetic rail (7) comprises a carrier (9) on which at least one rotor (10) is movable.

8. Service device according to one of the above

Claims, characterized in that the

Plant part (5) on the at least one magnetic rail (7) is suspended.

Service device according to the preceding claim, characterized in that the plant part (5) is movable vertically via a hanging device (15).

10. Service device according to one of the above

Claims, characterized in that the

Service device (1) for moving a mass of more than 50 kg, in particular more than 1 t is formed.

11. Service facility according to one of the above

Claims, characterized in that the

Plant part (5) more than 30% and / or less than 70% of its length from a central position in the horizontal direction is movable.

12. Service facility according to one of the above

Claims, characterized in that the

Plant part (5) Part of a process plant, or part of a process control plant, or part of a process plant

Lithography plant of the semiconductor industry is, in particular wherein the part of the plant to be moved is part of a vibration-isolated mounted part of the plant,

that the plant part is part of a plant of the pharmaceutical or food industry and / or that the

Service facility is part of an installation and / or part of a clean room.