EP3286781A1 - Dispositif d'entretien - Google Patents

Dispositif d'entretien

Info

Publication number
EP3286781A1
EP3286781A1 EP16709368.1A EP16709368A EP3286781A1 EP 3286781 A1 EP3286781 A1 EP 3286781A1 EP 16709368 A EP16709368 A EP 16709368A EP 3286781 A1 EP3286781 A1 EP 3286781A1
Authority
EP
European Patent Office
Prior art keywords
plant
service
magnetic
service device
magnetic rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP16709368.1A
Other languages
German (de)
English (en)
Inventor
Ingo Weiske
Arndt Evers
Han Hartgers
Andreas Birkner
Guido VAN LOON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Integrated Dynamics Engineering GmbH
Original Assignee
Integrated Dynamics Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Dynamics Engineering GmbH filed Critical Integrated Dynamics Engineering GmbH
Publication of EP3286781A1 publication Critical patent/EP3286781A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor

Definitions

  • the invention relates to a service facility for
  • the invention relates to a service facility with the parts of equipment used in the field of semiconductor industry
  • Plant in particular parts of a process plant, or parts of a process control plant (for example, a
  • Measuring sensor can be moved vertically and horizontally.
  • the invention relates to plants which may be process plants, process control plants.
  • Such systems often also include plant parts for carrying out the intended use of this system in a vacuum.
  • Such systems often include plant parts
  • Electron beam source or a variety of other plant specific parts.
  • the plant parts and other components of the system can be arranged.
  • Lifting device for the module of a lithographic device The lifting device shown in this document is integrated into the system, which has the advantage of shorter
  • the invention is based on the object to reduce the mentioned disadvantages of the prior art. It is a particular object of the invention to provide a
  • the object of the invention is already by a
  • the invention relates to a service facility
  • the plant part may also be part of a plant, in particular a measuring sensor, a part of a substrate handling device.
  • the plant part can furthermore also include plant components, such as components of lithography and inspection equipment or be part of a vacuum chamber,
  • the plant part passages for fluid, electrical and / or optical cables include.
  • the system part can be moved in both horizontal and vertical directions.
  • the system part can therefore not only be lifted in the system, but also be moved in the horizontal direction.
  • the plant part comprises at least one magnetic rail.
  • a magnetic rail in particular a magnetic bearing is understood, which is designed as a rail.
  • Magnetic rail has in particular electromagnets, by means of a runner can be held on a rail in suspension. In the activated state, therefore, the rotor is lifted by magnetic forces and is spaced from the rail by at least one gap. Now the plant part is non-contact in the horizontal direction
  • Magnetic rails is expensive, but has the big one Advantage of reducing particulate emissions.
  • Parts of the magnetic rail in particular a carrier or a runner running on the carrier, can be provided for this purpose with a coating which increases the friction. It is also conceivable to provide carrier and rotor with interlocking positive locking elements. These may be, for example, teeth running along a rail, in which teeth of the runner engage in weaning.
  • Locking is advantageous in that it is in any position, so for example, even during a power failure in the system during the process for a secure fixing of the
  • the machine part can also be held in the required position by the drive.
  • the magnetic rail to a separate linear drive for
  • Magnetic rail on an electromagnetic side guide The magnetic rail thus has both electromagnets for lifting a rotor, as well as electromagnets to keep the rotor spaced from the walls of a carrier in a middle position.
  • the runner also does not abut the process in the horizontal direction along the carrier, which in turn can lead to abrasion.
  • the electromagnetic side guide is preferably via separate electromagnets and not via electromagnets, which serve to lift the rotor on the rail.
  • Control engineering design in which the lifting of a rotor of the magnetic rail, the side guide and the horizontal method separately and independently
  • the service device comprises a plurality of magnetic rails. It is provided in particular, a service facility
  • Rail or the carrier is movable.
  • the plant part is now preferably connected at the edge of the center of the runners approximately in the middle of its center of gravity and can thus be moved along the carrier.
  • the method in the vertical direction which is understood in the context of the invention is not a lifting of the plant part by the activation of the magnetic rail to then move it without contact in the horizontal direction, but the method over a longer distances in the vertical direction, is preferably characterized Realized that the plant part about a hanging product
  • a contactless operating drive in particular a magnetic drive and / or a non-contact magnetic guide within the hanging device, is also used for the vertical method
  • a locking device in a non-contact drive which automatically locks in the event of a power failure, the system part and thus secures against falling.
  • This can be realized, for example, by a positive-locking element actuated by means of an electromagnet. This releases the carrier to the vertical process once it is electrically powered. In the event of a power failure, the form-locking element moves back to its original position and locks the carrier or the hanging product over which the system part is raised.
  • the plant part is in particular a hanging device, which is designed as a rope or pin on the
  • At least one magnetic rail in particular on a rotor of the magnetic rail, suspended.
  • the service device is designed in particular for lifting a mass of more than 50 kg, preferably more than 100 kg, more preferably more than 1 t, very particularly preferably more than 5 t.
  • the plant part is preferably more than 30% and / or less than 70% of its length of one
  • the runner of the rail has a running in horizontally extending direction arm to which the system part attached, in particular suspended.
  • a plant part fastened to its center of gravity can be extended by more than half its length, in particular completely over the area of the installation in which the magnetic rails run.
  • the plant part can also be suspended in particular in the middle and is thus about half of its length in
  • the invention relates in particular to a
  • Service facility for parts of a process plant, or parts of a process control plant (for example a measuring sensor), or parts of a lithography plant, in particular to measuring instruments, lithographic apparatus, optical inspection apparatus, inspection apparatus
  • Electron beam base, coating systems, and equipment for processing semiconductor substrates Furthermore, a use in plants in clean rooms of the pharmaceutical and food industries is conceivable, especially in
  • the vertical movement is preferably carried out by the hanging product.
  • the hanging equipment as
  • Rod is executed, there can realize the vertical movement (for example, as a threaded drive).
  • FIG. 1 shows a schematic perspective view of an embodiment of a service device.
  • Fig. 2 shows the service device according to FIG. 1, wherein the plant part has been moved vertically upwards.
  • FIG. 3 shows those in FIGS. 1 and 2
  • FIG. 4 shows a schematic sectional view of a
  • FIG. 5 shows a perspective view of a
  • Fig. 6 shows perspective views of a further embodiment of the invention, in which the plant part can be moved over a greater distance from the plant.
  • Fig. 1 shows a perspective view of a first schematic embodiment of a service device 1. This comprises a frame 2. Within the frame 2 is a table 3 with a
  • Plant part 5 is arranged.
  • the table serves, for example, the recording of
  • the table 3 vibration isolated on bearings may be arranged, in particular on air bearings.
  • the service device 1 comprises two edges
  • Each magnetic rail 7 comprises an at least carrier 9, on each of which a rotor 10 is horizontally movable.
  • the runners 10 comprise electromagnets (not shown), with which the runners 10 can be raised by the carriers 9, so that the runners 10 are separated from the carrier by an air gap
  • the frame 2 should not be much larger than the entire system in order to minimize the additional space or space required by the service facility.
  • the service device is preferably designed so that it can be fully integrated into the system without increasing the need for Aufsteil Design for the system.
  • the plant part 5 is suspended in this embodiment via hanging tools 15 to the runners 10 and thus has at least in the horizontal direction something game. Also in the vertical direction game can be present.
  • the plant part 5 can be raised in this embodiment, the hanging equipment 15 in the vertical direction.
  • the hanging product 15 as a hoist, such as
  • the arranged electromagnets can be done for example by the hanging product 15.
  • the hanging tools 15 are connected to the two runners 10, which are each arranged on the carrier 9.
  • the vertical method can also take place via the drive 4.
  • the magnetic rails 9 may already be activated.
  • the magnetic rails are activated at the latest now, so that the rotor 10 are raised and are now free to move on the carrier 9.
  • the plant part 5 is now moved in the horizontal direction along the carrier 9 in its final position.
  • the runners 10 By deactivating the magnetic rail, the runners 10 set on the carriers 9, whereby they are secured against further horizontal displacement.
  • the position can also be held solely by the drive without the magnetic track being deactivated.
  • the magnetic rail can also be locked by a different lock, such as, for example, an electrically actuated positive-locking element (not shown).
  • Fig. 4 shows a schematic sectional view of a
  • the magnetic rail 7 includes one in this
  • Embodiment rectangular runner 10 It is understood that the rotor 10 and another
  • Geometry such as a round
  • the rotor 10 encloses the rail 9, which is designed as a T-beam with a shorter lower strut. Opposite the underside of the carrier 9, the rotor comprises electromagnets 11, which serve to lift the rotor 10 on the carrier 9.
  • the rotor 10 By activating the electromagnets, the rotor 10 is pulled upwards and is then separated by a gap
  • Carrier 9 spaced.
  • Deactivation of the electromagnets 11 causes the rotor 10 to settle on the carrier 9 and then already secured in the horizontal direction by frictional engagement.
  • the rotor 10 Opposite the vertically upwardly extending part of the carrier 9, the rotor 10 comprises laterally arranged therefrom electromagnets 12, via which a side guide
  • a sensor module 16 can be used, which measures the distance of the carrier 9 from the rotor 10 in the horizontal and vertical directions. This also operates without contact, for example as an inductive or capacitive sensor.
  • a separate linear drive 13 is provided, via which the rotor 10 can be moved along the carrier 9 in the horizontal direction.
  • the linear drive 13 is designed such that it is a vertical
  • the plant part 5 is attached to the rotor 10.
  • hangers for example, ropes or pins, in particular threaded pins can be used. These provide some play in the horizontal and vertical directions. These ropes or pins may be combined with a vertical drive, for example a threaded spindle, to form a hoist.
  • Fig. 5 shows a perspective view of a
  • the rail 6 is arranged on the carrier 9 and the rail 17 is arranged on the rotor 10.
  • the rotor 10 is formed substantially square and has on the underside an extension for attachment of the hoist.
  • FIGS. 1 to 3 show a further embodiment of the invention in which the plant part 5 can be moved out of the area of the plant over a further distance than in the embodiment shown in FIGS. 1 to 3. Otherwise corresponds to the one shown here
  • arms 10 extending in the horizontal direction are arranged on the runners 10, to which the machine part 5 is preferably suspended at its center of gravity. As a result, the machine part 5 continues
  • the invention enabled a service facility
  • the service device according to the invention allows a

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un dispositif d'entretien pour la salle blanche ou pour des installations dans la salle blanche, munies d'un élément déplaçable horizontalement et verticalement. Ce dernier est suspendu à des rails magnétiques.
EP16709368.1A 2015-04-22 2016-03-09 Dispositif d'entretien Pending EP3286781A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15164605 2015-04-22
PCT/EP2016/054975 WO2016169694A1 (fr) 2015-04-22 2016-03-09 Dispositif d'entretien

Publications (1)

Publication Number Publication Date
EP3286781A1 true EP3286781A1 (fr) 2018-02-28

Family

ID=53181050

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16709368.1A Pending EP3286781A1 (fr) 2015-04-22 2016-03-09 Dispositif d'entretien

Country Status (4)

Country Link
US (1) US20180155126A1 (fr)
EP (1) EP3286781A1 (fr)
KR (1) KR102561719B1 (fr)
WO (1) WO2016169694A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018132896A1 (fr) * 2017-01-18 2018-07-26 Bigz Tech Inc. Absorption de chaleur transitoire et dissipation retardée par un matériau à capacité thermique élevée

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0648698B1 (fr) * 1992-07-07 1998-01-07 Ebara Corporation Dispositif de transport en levitation magnetique
US6604624B2 (en) * 1998-09-22 2003-08-12 Hirata Corporation Work conveying system
US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
FR2844258B1 (fr) * 2002-09-06 2005-06-03 Recif Sa Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert
KR101515775B1 (ko) * 2002-10-11 2015-04-29 무라다기카이가부시끼가이샤 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량
JP3981885B2 (ja) * 2003-05-20 2007-09-26 株式会社ダイフク 搬送装置
KR20140091768A (ko) * 2005-11-07 2014-07-22 브룩스 오토메이션 인코퍼레이티드 반도체 작업대상물 공정처리 시스템
JP4798799B2 (ja) * 2007-08-20 2011-10-19 Ｎｅｃエンジニアリング株式会社 版給排装置及びそれを用いた刷版作成装置
US8981807B2 (en) * 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
US9190304B2 (en) * 2011-05-19 2015-11-17 Brooks Automation, Inc. Dynamic storage and transfer system integrated with autonomous guided/roving vehicle
NL2007401C2 (en) 2011-09-12 2013-04-09 Mapper Lithography Ip Bv Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assembly.

Also Published As

Publication number Publication date
KR102561719B1 (ko) 2023-07-31
KR20170141728A (ko) 2017-12-26
US20180155126A1 (en) 2018-06-07
WO2016169694A1 (fr) 2016-10-27

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