JP7173291B2 - 搬送車システム - Google Patents
搬送車システム Download PDFInfo
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- JP7173291B2 JP7173291B2 JP2021508205A JP2021508205A JP7173291B2 JP 7173291 B2 JP7173291 B2 JP 7173291B2 JP 2021508205 A JP2021508205 A JP 2021508205A JP 2021508205 A JP2021508205 A JP 2021508205A JP 7173291 B2 JP7173291 B2 JP 7173291B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図1は、第1実施形態に係る搬送車システムSYS1の一例をY方向に視た図である。図1に示す搬送車システムSYS1は、例えば、半導体デバイスの製造工場等に設けられ、レチクル等を収容したレチクルポッド、あるいは半導体デバイスの製造に用いられる半導体ウエハを収容したFOUP等の物品Wを搬送する。搬送車システムSYS1は、天井搬送車30により、物品Wを載置可能な移載場所(例えば、後述する第1移載場所S1等)との間で物品Wを搬送する。本実施形態では、物品Wがレチクルポッドである例を用いて説明するが、物品Wは、レチクルポッド以外であってもよい。また、搬送車システムSYS1は、半導体製造分野以外の設備に適用可能であり、物品Wは、搬送車システムSYS1で搬送可能な他の物品でもよい。
図6は、第2実施形態に係る搬送車システムSYS2の一例をY方向に視た図である。図6に示す搬送車システムSYS2は、例えば、半導体デバイスの製造に用いられる半導体ウエハを収容したFOUP等の物品Fを搬送する。物品Fは、第1実施形態の物品W(レチクルポッド)よりも大きく、平面視において保持部33よりも大きい。
F、W・・・物品
P・・・ポートピッチ
P1・・・第1位置
P2・・・第2位置
S1、S3・・・第1移載場所
S2・・・第2移載場所
SYS1、SYS2・・・搬送車システム
10・・・第1軌道
20・・・第2軌道
30、30A、30B・・・天井搬送車
31・・・走行部
32・・・本体部
33・・・保持部
34・・・昇降駆動部
35・・・横出し機構
36・・・附属部
38、38A、38B・・・第1部分
39、39A、39B・・・第2部分
Claims (4)
- 第1軌道と、
前記第1軌道の下方に設けられ且つその第1軌道と共通の延在方向に延在する第2軌道と、
前記第1軌道及び前記第2軌道を走行し、前記延在方向において隣り合う第1移載場所及び第2移載場所に物品を移載する天井搬送車と、を備える搬送車システムであって、
前記天井搬送車は、本体部と、物品を保持する保持部と、前記保持部を昇降させる昇降駆動部と、前記本体部から前記昇降駆動部を横方向へ移動させる横出し機構と、を備え、
前記第1移載場所と前記第2移載場所との配置間隔であるポートピッチが、前記天井搬送車の前記延在方向における全長より小さく、
前記第1軌道において前記第1移載場所に物品を移載するための第1位置に停止した前記天井搬送車における前記昇降駆動部により昇降させられる第1部分と、前記第2軌道において前記第2移載場所に物品を移載するための第2位置に停止した前記天井搬送車における前記横出し機構の駆動により横方向へ移動させられる第2部分とが、前記延在方向においてずれている、搬送車システム。 - 前記第1部分は、前記保持部に保持された物品を含む、請求項1に記載の搬送車システム。
- 平面視において、前記第1部分は、前記第2部分の外縁の内側に収まる、請求項1又は請求項2に記載の搬送車システム。
- 前記天井搬送車は、前記横出し機構が前記昇降駆動部を横方向へ移動させる際、共に横方向へ移動させられる附属部を備え、
前記附属部は、前記第2部分に含まれる、請求項1から請求項3のいずれか一項に記載の搬送車システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019055601 | 2019-03-22 | ||
JP2019055601 | 2019-03-22 | ||
PCT/JP2020/005032 WO2020195240A1 (ja) | 2019-03-22 | 2020-02-10 | 搬送車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020195240A1 JPWO2020195240A1 (ja) | 2020-10-01 |
JP7173291B2 true JP7173291B2 (ja) | 2022-11-16 |
Family
ID=72608795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021508205A Active JP7173291B2 (ja) | 2019-03-22 | 2020-02-10 | 搬送車システム |
Country Status (9)
Country | Link |
---|---|
US (1) | US11820593B2 (ja) |
EP (1) | EP3943414A4 (ja) |
JP (1) | JP7173291B2 (ja) |
KR (1) | KR102501706B1 (ja) |
CN (1) | CN113573991B (ja) |
IL (1) | IL286528A (ja) |
SG (1) | SG11202110216XA (ja) |
TW (1) | TWI828880B (ja) |
WO (1) | WO2020195240A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230058777A (ko) * | 2021-10-25 | 2023-05-03 | 삼성전자주식회사 | 기판 이송 시스템 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012025573A (ja) | 2010-07-27 | 2012-02-09 | Muratec Automation Co Ltd | 搬送システム |
WO2018088089A1 (ja) | 2016-11-08 | 2018-05-17 | 村田機械株式会社 | 天井搬送車、及び天井搬送車の制御方法 |
WO2019035286A1 (ja) | 2017-08-16 | 2019-02-21 | 村田機械株式会社 | 天井搬送車、搬送システム、及び天井搬送車の制御方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1535143A4 (en) * | 2002-06-19 | 2010-05-05 | Brooks Automation Inc | AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS |
KR101446511B1 (ko) * | 2002-10-11 | 2014-10-07 | 무라다기카이가부시끼가이샤 | 자동 재료 핸들링 시스템 |
JP4221603B2 (ja) * | 2005-03-31 | 2009-02-12 | 村田機械株式会社 | 天井走行車システム |
JP2007191235A (ja) * | 2006-01-17 | 2007-08-02 | Murata Mach Ltd | 天井走行車システム |
JP4805286B2 (ja) * | 2008-02-06 | 2011-11-02 | シャープ株式会社 | 搬送装置 |
JP5382470B2 (ja) * | 2010-11-04 | 2014-01-08 | 村田機械株式会社 | 搬送システム及び搬送方法 |
EP2860136B1 (en) * | 2012-06-08 | 2020-08-05 | Murata Machinery, Ltd. | Conveyance system and temporary storage method of articles in conveyance system |
WO2015194265A1 (ja) * | 2014-06-19 | 2015-12-23 | 村田機械株式会社 | キャリアの一時保管装置と一時保管方法 |
US10196214B2 (en) * | 2015-08-14 | 2019-02-05 | Murata Machinery, Ltd. | Conveyor car system |
EP3336018B1 (en) * | 2015-08-14 | 2021-12-15 | Murata Machinery, Ltd. | Conveyance system |
EP3460834B1 (en) * | 2016-05-20 | 2020-08-05 | Murata Machinery, Ltd. | Transport vehicle and transport method |
JP6766584B2 (ja) * | 2016-10-19 | 2020-10-14 | 株式会社ダイフク | 物品搬送設備 |
EP3539903B1 (en) * | 2016-11-14 | 2022-04-27 | Murata Machinery, Ltd. | Ceiling conveyance system, and relay conveyance apparatus and conveyance method used therefor |
JP6769336B2 (ja) * | 2017-02-23 | 2020-10-14 | 株式会社ダイフク | 物品搬送車 |
JP6652106B2 (ja) * | 2017-05-10 | 2020-02-19 | 株式会社ダイフク | 物品搬送設備 |
JP6693481B2 (ja) * | 2017-06-26 | 2020-05-13 | 株式会社ダイフク | 物品搬送設備、及び、物品搬送車 |
JP6654260B2 (ja) | 2019-01-16 | 2020-02-26 | 笹徳印刷株式会社 | 書類綴具 |
-
2020
- 2020-02-10 CN CN202080021155.7A patent/CN113573991B/zh active Active
- 2020-02-10 SG SG11202110216XA patent/SG11202110216XA/en unknown
- 2020-02-10 EP EP20777233.6A patent/EP3943414A4/en active Pending
- 2020-02-10 JP JP2021508205A patent/JP7173291B2/ja active Active
- 2020-02-10 KR KR1020217029626A patent/KR102501706B1/ko active IP Right Grant
- 2020-02-10 WO PCT/JP2020/005032 patent/WO2020195240A1/ja active Application Filing
- 2020-02-10 US US17/441,312 patent/US11820593B2/en active Active
- 2020-03-17 TW TW109108666A patent/TWI828880B/zh active
-
2021
- 2021-09-19 IL IL286528A patent/IL286528A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012025573A (ja) | 2010-07-27 | 2012-02-09 | Muratec Automation Co Ltd | 搬送システム |
WO2018088089A1 (ja) | 2016-11-08 | 2018-05-17 | 村田機械株式会社 | 天井搬送車、及び天井搬送車の制御方法 |
WO2019035286A1 (ja) | 2017-08-16 | 2019-02-21 | 村田機械株式会社 | 天井搬送車、搬送システム、及び天井搬送車の制御方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI828880B (zh) | 2024-01-11 |
EP3943414A1 (en) | 2022-01-26 |
CN113573991B (zh) | 2022-10-21 |
CN113573991A (zh) | 2021-10-29 |
US11820593B2 (en) | 2023-11-21 |
US20220161999A1 (en) | 2022-05-26 |
KR102501706B1 (ko) | 2023-02-17 |
JPWO2020195240A1 (ja) | 2020-10-01 |
TW202100430A (zh) | 2021-01-01 |
KR20210126108A (ko) | 2021-10-19 |
IL286528A (en) | 2021-12-01 |
EP3943414A4 (en) | 2022-11-16 |
SG11202110216XA (en) | 2021-10-28 |
WO2020195240A1 (ja) | 2020-10-01 |
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