JP7136236B2 - 保管システム - Google Patents
保管システム Download PDFInfo
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- JP7136236B2 JP7136236B2 JP2020567419A JP2020567419A JP7136236B2 JP 7136236 B2 JP7136236 B2 JP 7136236B2 JP 2020567419 A JP2020567419 A JP 2020567419A JP 2020567419 A JP2020567419 A JP 2020567419A JP 7136236 B2 JP7136236 B2 JP 7136236B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0428—Transfer means for the stacker crane between the alleys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
- B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/02—Runways, tracks or trackways for trolleys or cranes for underhung trolleys or cranes
- B66C7/04—Trackway suspension
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
Description
図1は、第1実施形態に係る保管システムSYSの一例をX方向から見た図である。図2は、保管システムSYSをY方向から見た図である。図3は、保管システムSYSを平面視で模式的に示した図である。なお、図3では、図を判別しやすくするため、物品2をハッチングで示している。
上記した第1実施形態では、受け渡しポート12である着脱部14bが、複数の物品2をY方向に1列に並べて載置可能な構成を示しているが、この構成に限定されない。図11及び図12は、第2実施形態に係る保管システムSYS2の一例を示す図である。図11は側面図、図12は平面図を示している。なお、以下の説明において、上記した第1実施形態と同一又は同等の構成については同一の符号を付けて説明を省略又は簡略化する。
F・・・床面
LP・・・ロードポート
TL・・・処理装置
PS・・・作業者用通路
SYS、SYS2・・・保管システム
2・・・物品
10・・・棚
11・・・保管部
12・・・受け渡しポート
14、114・・・載置部
14a、114a・・・固定部
14b、114b・・・着脱部
20・・・第1天井軌道
25・・・昇降軌道
27・・・吊り下げ部材
28・・・昇降軌道駆動部
30・・・第2天井軌道
40・・・クレーン
50・・・天井搬送車
60・・・上側天井搬送車
70・・・クレーン搬送台車
71・・・移載用軌道
72・・・クレーン収容部
73・・・車輪
100・・・天井ストッカ
200・・・天井搬送車システム
300・・・搬送装置
Claims (5)
- 第1天井軌道と、上下方向に複数段の保管部を備えた棚と、前記第1天井軌道に沿って走行し、前記複数段の保管部の間で物品を受け渡しするクレーンと、を有する天井ストッカと、
前記天井ストッカの下端よりも下方に設けられた第2天井軌道と、前記第2天井軌道に沿って走行して所定の移載先に対して物品を受け渡しする天井搬送車と、を有する天井搬送車システムと、を備え、
前記第1天井軌道は、平面視において前記第2天井軌道から外れた部分に、走行を停止している前記クレーンを支持して下降可能な昇降軌道を有する、保管システム。 - 前記昇降軌道は、作業者用通路の直上に設けられる、請求項1に記載の保管システム。
- 前記昇降軌道を吊り下げて保持する吊り下げ部材と、前記吊り下げ部材を巻き取り又は繰り出すことにより前記昇降軌道を昇降させる昇降軌道駆動部と、を備える、請求項1又は請求項2に記載の保管システム。
- 前記天井ストッカと前記天井搬送車システムとの間で上下方向に物品を搬送する搬送装置を備え、
前記昇降軌道の直下には、前記天井搬送車及び前記搬送装置が何れも物品を受け渡し可能な載置部が設けられ、
前記載置部は、前記昇降軌道の直下から退避可能である、請求項1から請求項3のいずれか一項に記載の保管システム。 - 前記載置部は、一対の他の載置部の間に掛け渡されて配置され、
前記天井搬送車は、前記他の載置部との間で物品を受け渡し可能である、請求項4に記載の保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019011280 | 2019-01-25 | ||
JP2019011280 | 2019-01-25 | ||
PCT/JP2019/048870 WO2020153039A1 (ja) | 2019-01-25 | 2019-12-13 | 保管システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020153039A1 JPWO2020153039A1 (ja) | 2021-11-25 |
JP7136236B2 true JP7136236B2 (ja) | 2022-09-13 |
Family
ID=71736727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020567419A Active JP7136236B2 (ja) | 2019-01-25 | 2019-12-13 | 保管システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US11615975B2 (ja) |
EP (1) | EP3915903A4 (ja) |
JP (1) | JP7136236B2 (ja) |
KR (1) | KR102531954B1 (ja) |
CN (1) | CN113348140B (ja) |
SG (1) | SG11202108087XA (ja) |
TW (1) | TWI828841B (ja) |
WO (1) | WO2020153039A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114649250B (zh) * | 2022-05-20 | 2022-08-05 | 弥费实业(上海)有限公司 | 供存储库与oht交换晶圆盒的运输装置、天车窗口及存储库 |
WO2024070624A1 (ja) * | 2022-09-27 | 2024-04-04 | 村田機械株式会社 | 保管システム |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000124284A (ja) | 1998-10-13 | 2000-04-28 | Hitachi Kiden Kogyo Ltd | 搬送装置 |
JP2007331906A (ja) | 2006-06-16 | 2007-12-27 | Murata Mach Ltd | 天井走行車システム |
JP2012004479A (ja) | 2010-06-21 | 2012-01-05 | Murata Mach Ltd | 搬送体昇降装置 |
WO2012060291A1 (ja) | 2010-11-04 | 2012-05-10 | ムラテックオートメーション株式会社 | 搬送システム及び搬送方法 |
JP2012193033A (ja) | 2011-03-17 | 2012-10-11 | Daifuku Co Ltd | 物品搬送設備 |
JP2013001533A (ja) | 2011-06-20 | 2013-01-07 | Murata Machinery Ltd | 天井走行車システム |
JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170140966A1 (en) | 2015-11-13 | 2017-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | High capacity overhead transport (oht) rail system with multiple levels |
WO2018055883A1 (ja) | 2016-09-26 | 2018-03-29 | 村田機械株式会社 | 天井搬送システム、及び天井搬送車 |
WO2018074130A1 (ja) | 2016-10-18 | 2018-04-26 | 村田機械株式会社 | 天井搬送車及び搬送システム |
WO2019003753A1 (ja) | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Family Cites Families (14)
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JP5028871B2 (ja) | 2006-06-09 | 2012-09-19 | 村田機械株式会社 | メンテナンスステーション |
JP5339167B2 (ja) * | 2009-11-27 | 2013-11-13 | 株式会社ダイフク | 天井搬送車 |
JP5229363B2 (ja) * | 2010-11-04 | 2013-07-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP5674041B2 (ja) * | 2011-08-11 | 2015-02-18 | 株式会社ダイフク | 物品搬送設備 |
KR101664238B1 (ko) * | 2012-06-08 | 2016-10-10 | 무라다기카이가부시끼가이샤 | 반송 시스템 및 반송 시스템에서의 물품의 일시 보관 방법 |
US9415934B2 (en) * | 2014-05-14 | 2016-08-16 | Murata Machinery, Ltd. | Transport system and transport method |
US10153189B2 (en) * | 2014-06-19 | 2018-12-11 | Murata Machinery, Ltd. | Carrier buffering device and buffering method |
JP6048686B2 (ja) * | 2014-09-25 | 2016-12-21 | 村田機械株式会社 | 一時保管装置と搬送システム及び一時保管方法 |
JP6256420B2 (ja) * | 2015-06-30 | 2018-01-10 | 村田機械株式会社 | スタッカクレーン |
JP2018177376A (ja) * | 2015-09-09 | 2018-11-15 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP6531626B2 (ja) * | 2015-11-10 | 2019-06-19 | 村田機械株式会社 | 自動倉庫システム |
KR102283382B1 (ko) * | 2017-06-26 | 2021-07-29 | 세메스 주식회사 | 비히클 유지 보수용 승강 장치 |
WO2019003799A1 (ja) * | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP7029235B2 (ja) | 2017-06-30 | 2022-03-03 | ポーラ化成工業株式会社 | 油性化粧料 |
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2019
- 2019-12-13 US US17/425,716 patent/US11615975B2/en active Active
- 2019-12-13 JP JP2020567419A patent/JP7136236B2/ja active Active
- 2019-12-13 CN CN201980089990.1A patent/CN113348140B/zh active Active
- 2019-12-13 KR KR1020217023443A patent/KR102531954B1/ko active IP Right Grant
- 2019-12-13 EP EP19911633.6A patent/EP3915903A4/en active Pending
- 2019-12-13 SG SG11202108087XA patent/SG11202108087XA/en unknown
- 2019-12-13 WO PCT/JP2019/048870 patent/WO2020153039A1/ja unknown
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2020
- 2020-01-14 TW TW109101129A patent/TWI828841B/zh active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000124284A (ja) | 1998-10-13 | 2000-04-28 | Hitachi Kiden Kogyo Ltd | 搬送装置 |
JP2007331906A (ja) | 2006-06-16 | 2007-12-27 | Murata Mach Ltd | 天井走行車システム |
JP2012004479A (ja) | 2010-06-21 | 2012-01-05 | Murata Mach Ltd | 搬送体昇降装置 |
WO2012060291A1 (ja) | 2010-11-04 | 2012-05-10 | ムラテックオートメーション株式会社 | 搬送システム及び搬送方法 |
JP2012193033A (ja) | 2011-03-17 | 2012-10-11 | Daifuku Co Ltd | 物品搬送設備 |
JP2013001533A (ja) | 2011-06-20 | 2013-01-07 | Murata Machinery Ltd | 天井走行車システム |
JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170140966A1 (en) | 2015-11-13 | 2017-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | High capacity overhead transport (oht) rail system with multiple levels |
WO2018055883A1 (ja) | 2016-09-26 | 2018-03-29 | 村田機械株式会社 | 天井搬送システム、及び天井搬送車 |
WO2018074130A1 (ja) | 2016-10-18 | 2018-04-26 | 村田機械株式会社 | 天井搬送車及び搬送システム |
WO2019003753A1 (ja) | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
EP3915903A4 (en) | 2022-10-05 |
US20220189807A1 (en) | 2022-06-16 |
KR20210106549A (ko) | 2021-08-30 |
TWI828841B (zh) | 2024-01-11 |
US11615975B2 (en) | 2023-03-28 |
CN113348140B (zh) | 2023-08-29 |
CN113348140A (zh) | 2021-09-03 |
EP3915903A1 (en) | 2021-12-01 |
TW202031572A (zh) | 2020-09-01 |
SG11202108087XA (en) | 2021-08-30 |
WO2020153039A1 (ja) | 2020-07-30 |
JPWO2020153039A1 (ja) | 2021-11-25 |
KR102531954B1 (ko) | 2023-05-12 |
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