JP4428533B2 - 薄膜蒸着用のマスクフレーム組立体及び有機電界発光表示装置 - Google Patents

薄膜蒸着用のマスクフレーム組立体及び有機電界発光表示装置 Download PDF

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JP4428533B2
JP4428533B2 JP2005204259A JP2005204259A JP4428533B2 JP 4428533 B2 JP4428533 B2 JP 4428533B2 JP 2005204259 A JP2005204259 A JP 2005204259A JP 2005204259 A JP2005204259 A JP 2005204259A JP 4428533 B2 JP4428533 B2 JP 4428533B2
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mask
thin film
frame assembly
gap
unit
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JP2006032342A (ja
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敞皓 姜
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Samsung Display Co Ltd
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Samsung Mobile Display Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2005204259A 2004-07-15 2005-07-13 薄膜蒸着用のマスクフレーム組立体及び有機電界発光表示装置 Active JP4428533B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040055074A KR100659057B1 (ko) 2004-07-15 2004-07-15 박막 증착용 마스크 프레임 조립체 및 유기 전계 발광표시장치

Publications (2)

Publication Number Publication Date
JP2006032342A JP2006032342A (ja) 2006-02-02
JP4428533B2 true JP4428533B2 (ja) 2010-03-10

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JP2005204259A Active JP4428533B2 (ja) 2004-07-15 2005-07-13 薄膜蒸着用のマスクフレーム組立体及び有機電界発光表示装置

Country Status (7)

Country Link
US (1) US7802537B2 (fr)
EP (1) EP1626103B1 (fr)
JP (1) JP4428533B2 (fr)
KR (1) KR100659057B1 (fr)
CN (1) CN100484348C (fr)
AT (1) ATE447051T1 (fr)
DE (1) DE602005017335D1 (fr)

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JP4309099B2 (ja) 2002-06-21 2009-08-05 三星モバイルディスプレイ株式會社 有機電子発光素子用メタルマスク及びこれを利用した有機電子発光素子の製造方法
JP4173722B2 (ja) 2002-11-29 2008-10-29 三星エスディアイ株式会社 蒸着マスク、これを利用した有機ｅｌ素子の製造方法及び有機ｅｌ素子
JP2005276480A (ja) 2004-03-23 2005-10-06 Seiko Epson Corp マスク、マスクの製造方法、薄膜パターンの形成方法、電気光学装置の製造方法および電子機器

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KR100659057B1 (ko) 2006-12-21
DE602005017335D1 (de) 2009-12-10
US20060012290A1 (en) 2006-01-19
EP1626103A3 (fr) 2006-08-30
KR20060006177A (ko) 2006-01-19
CN100484348C (zh) 2009-04-29
JP2006032342A (ja) 2006-02-02
EP1626103A2 (fr) 2006-02-15
CN1722918A (zh) 2006-01-18
US7802537B2 (en) 2010-09-28
EP1626103B1 (fr) 2009-10-28
ATE447051T1 (de) 2009-11-15

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