JP4146864B2 - 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法 - Google Patents

配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法 Download PDF

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Publication number
JP4146864B2
JP4146864B2 JP2006014199A JP2006014199A JP4146864B2 JP 4146864 B2 JP4146864 B2 JP 4146864B2 JP 2006014199 A JP2006014199 A JP 2006014199A JP 2006014199 A JP2006014199 A JP 2006014199A JP 4146864 B2 JP4146864 B2 JP 4146864B2
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JP
Japan
Prior art keywords
manufacturing
electrode
wiring board
wiring
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006014199A
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English (en)
Japanese (ja)
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JP2007013092A5 (enExample
JP2007013092A (ja
Inventor
順一 中村
祐治 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2006014199A priority Critical patent/JP4146864B2/ja
Priority to KR1020060046012A priority patent/KR20060124576A/ko
Priority to US11/419,887 priority patent/US8015700B2/en
Priority to TW095118980A priority patent/TWI437668B/zh
Priority to CN2006100836413A priority patent/CN1873935B/zh
Publication of JP2007013092A publication Critical patent/JP2007013092A/ja
Publication of JP2007013092A5 publication Critical patent/JP2007013092A5/ja
Application granted granted Critical
Publication of JP4146864B2 publication Critical patent/JP4146864B2/ja
Priority to US13/196,129 priority patent/US8455770B2/en
Priority to KR1020120088942A priority patent/KR101344800B1/ko
Priority to US13/873,504 priority patent/US9155195B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/115—Via connections; Lands around holes or via connections
    • H10D64/011—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/421—Blind plated via connections
    • H10P72/74—
    • H10W70/05—
    • H10W90/701—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/115—Via connections; Lands around holes or via connections
    • H05K1/116—Lands, clearance holes or other lay-out details concerning the surrounding of a via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0364—Conductor shape
    • H05K2201/0376—Flush conductors, i.e. flush with the surface of the printed circuit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/09481—Via in pad; Pad over filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/0949—Pad close to a hole, not surrounding the hole
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09509—Blind vias, i.e. vias having one side closed
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0338—Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1536—Temporarily stacked PCBs
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457—Solder materials or compositions; Methods of application thereof
    • H05K3/3473—Plating of solder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H10P72/7424—
    • H10W72/0198—
    • H10W72/072—
    • H10W72/07204—
    • H10W72/07236—
    • H10W72/241—
    • H10W72/884—
    • H10W74/012—
    • H10W74/15—
    • H10W90/724—
    • H10W90/734—
    • H10W90/754—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Ceramic Engineering (AREA)
  • Wire Bonding (AREA)
JP2006014199A 2005-05-31 2006-01-23 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法 Expired - Fee Related JP4146864B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2006014199A JP4146864B2 (ja) 2005-05-31 2006-01-23 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法
KR1020060046012A KR20060124576A (ko) 2005-05-31 2006-05-23 배선 기판의 제조 방법 및 반도체 장치의 제조 방법
US11/419,887 US8015700B2 (en) 2005-05-31 2006-05-23 Method of fabricating wiring board and method of fabricating semiconductor device
TW095118980A TWI437668B (zh) 2005-05-31 2006-05-29 佈線板、半導體裝置、佈線板之製造方法及半導體裝置之製造方法
CN2006100836413A CN1873935B (zh) 2005-05-31 2006-05-31 配线基板的制造方法及半导体器件的制造方法
US13/196,129 US8455770B2 (en) 2005-05-31 2011-08-02 Method of fabricating wiring board and method of fabricating semiconductor device
KR1020120088942A KR101344800B1 (ko) 2005-05-31 2012-08-14 배선 기판 및 반도체 장치
US13/873,504 US9155195B2 (en) 2005-05-31 2013-04-30 Wiring board and semiconductor device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005159993 2005-05-31
JP2006014199A JP4146864B2 (ja) 2005-05-31 2006-01-23 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008133992A Division JP4980295B2 (ja) 2005-05-31 2008-05-22 配線基板の製造方法、及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2007013092A JP2007013092A (ja) 2007-01-18
JP2007013092A5 JP2007013092A5 (enExample) 2008-01-17
JP4146864B2 true JP4146864B2 (ja) 2008-09-10

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JP2006014199A Expired - Fee Related JP4146864B2 (ja) 2005-05-31 2006-01-23 配線基板及びその製造方法、並びに半導体装置及び半導体装置の製造方法

Country Status (4)

Country Link
US (3) US8015700B2 (enExample)
JP (1) JP4146864B2 (enExample)
KR (2) KR20060124576A (enExample)
TW (1) TWI437668B (enExample)

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US8389871B2 (en) 2010-02-26 2013-03-05 Ngk Spark Plug Co., Ltd. Multilayered wiring board and method of manufacturing the same
US8658905B2 (en) 2010-03-26 2014-02-25 Ngk Spark Plug Co., Ltd. Multilayer wiring substrate
US8847082B2 (en) 2010-05-18 2014-09-30 Ngk Spark Plug Co., Ltd. Multilayer wiring substrate

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JP5032187B2 (ja) * 2007-04-17 2012-09-26 新光電気工業株式会社 配線基板の製造方法及び半導体装置の製造方法及び配線基板
JP5101169B2 (ja) 2007-05-30 2012-12-19 新光電気工業株式会社 配線基板とその製造方法
US8502398B2 (en) 2007-10-05 2013-08-06 Shinko Electric Industries Co., Ltd. Wiring board, semiconductor apparatus and method of manufacturing them
JP5557439B2 (ja) * 2008-10-24 2014-07-23 ピーエスフォー ルクスコ エスエイアールエル 半導体装置及びその製造方法
JP5561460B2 (ja) 2009-06-03 2014-07-30 新光電気工業株式会社 配線基板および配線基板の製造方法
JP5231340B2 (ja) 2009-06-11 2013-07-10 新光電気工業株式会社 配線基板の製造方法
JP5479073B2 (ja) 2009-12-21 2014-04-23 新光電気工業株式会社 配線基板及びその製造方法
US8569894B2 (en) 2010-01-13 2013-10-29 Advanced Semiconductor Engineering, Inc. Semiconductor package with single sided substrate design and manufacturing methods thereof
TWI411075B (zh) 2010-03-22 2013-10-01 日月光半導體製造股份有限公司 半導體封裝件及其製造方法
JP5502624B2 (ja) * 2010-07-08 2014-05-28 新光電気工業株式会社 配線基板の製造方法及び配線基板
JP5462777B2 (ja) * 2010-12-09 2014-04-02 日本特殊陶業株式会社 多層配線基板の製造方法
US9406658B2 (en) 2010-12-17 2016-08-02 Advanced Semiconductor Engineering, Inc. Embedded component device and manufacturing methods thereof
JP5795225B2 (ja) * 2011-09-27 2015-10-14 新光電気工業株式会社 配線基板の製造方法
JP5225451B2 (ja) * 2011-11-04 2013-07-03 新光電気工業株式会社 配線基板の製造方法及び半導体パッケージの製造方法
US8698008B2 (en) 2011-12-12 2014-04-15 Advance Materials Corporation Packaging substrate and fabrication method thereof
JP5511922B2 (ja) * 2012-09-26 2014-06-04 新光電気工業株式会社 配線基板とその製造方法
TWI527173B (zh) * 2013-10-01 2016-03-21 旭德科技股份有限公司 封裝載板
KR20150064445A (ko) * 2013-12-03 2015-06-11 삼성전기주식회사 반도체 패키지용 코어리스 기판 및 그 제조 방법, 이를 이용한 반도체 패키지 제조 방법
JP2015231003A (ja) * 2014-06-06 2015-12-21 イビデン株式会社 回路基板および回路基板の製造方法
CN105407651B (zh) * 2014-09-12 2018-06-26 深南电路有限公司 一种电路板上设置阻焊层的方法
KR102231100B1 (ko) * 2014-10-02 2021-03-23 삼성전기주식회사 인쇄회로기판 및 그 제조 방법
JP6817599B2 (ja) * 2016-03-10 2021-01-20 パナソニックＩｐマネジメント株式会社 Ｌｅｄモジュール
JP2017163058A (ja) * 2016-03-10 2017-09-14 パナソニックＩｐマネジメント株式会社 Ｌｅｄモジュール
JP7382175B2 (ja) * 2019-08-26 2023-11-16 ローム株式会社 半導体装置
CN111564374A (zh) * 2020-07-15 2020-08-21 珠海越亚半导体股份有限公司 封装基板制作方法
KR20230096382A (ko) * 2021-12-23 2023-06-30 삼성전기주식회사 인쇄회로기판 제조 방법

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JP3437453B2 (ja) 1998-07-06 2003-08-18 イビデン株式会社 Ｉｃチップ実装用プリント配線板およびその製造方法
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TW200703590A (en) 2007-01-16
KR101344800B1 (ko) 2013-12-26
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TWI437668B (zh) 2014-05-11
US20060270211A1 (en) 2006-11-30
US8455770B2 (en) 2013-06-04
JP2007013092A (ja) 2007-01-18
US20130235543A1 (en) 2013-09-12
US20110286189A1 (en) 2011-11-24
KR20120109427A (ko) 2012-10-08
US9155195B2 (en) 2015-10-06
US8015700B2 (en) 2011-09-13

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