JP3189241U - シャワーヘッド電極およびガスケット - Google Patents
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- H—ELECTRICITY
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
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- Y10T29/00—Metal working
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
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Abstract
Description
Claims (17)
- 平行平板型容量結合プラズマ処理チャンバ内のシャワーヘッド電極アセンブリ用のシャワーヘッド電極であって、前記シャワーヘッド電極アセンブリが、上面と下面の間に延在するガス注入穴を有するバッキングプレートと、複数のスタッド/ソケットアセンブリおよびカムシャフトと、位置合わせリングと、複数の位置合わせピンとを備え、前記シャワーヘッド電極が、
前記シャワーヘッド電極の下面のプラズマ露出面と、
前記シャワーヘッド電極の上面の取付面と、
前記シャワーヘッド電極の前記プラズマ露出面と前記取付面の間に延在し、前記バッキングプレートの前記ガス注入穴に合致するパターンで配列された複数のガス注入穴とを備え、
前記ガス注入穴は、0.04インチ以下の直径を有し、前記電極の中心にある1つの中心ガス注入穴と、同心の第1から第8の各列のガス注入穴と有するパターンで配列され、
前記第1の列は、前記電極の中心から約0.6〜0.7インチの半径方向距離に位置された7個のガス注入穴を有し、
前記第2の列は、前記電極の中心から約1.3〜1.4インチの半径方向距離に位置された17個のガス注入穴を有し、
前記第3の列は、前記電極の中心から約2.1〜2.2インチの半径方向距離に位置された28個のガス注入穴を有し、
前記第4の列は、前記電極の中心から約2.8〜3.0インチの半径方向距離に位置された40個のガス注入穴を有し、
前記第5の列は、前記電極の中心から約3.6〜3.7インチの半径方向距離に位置された48個のガス注入穴を有し、
前記第6の列は、前記電極の中心から約4.4〜4.5インチの半径方向距離に位置された56個のガス注入穴を有し、
前記第7の列は、前記電極の中心から約5.0〜5.1インチの半径方向距離に位置された64個のガス注入穴を有し、
前記第8の列は、前記電極の中心から約5.7〜5.8インチの半径方向距離に位置された72個のガス注入穴を有し、
各列にある前記ガス注入穴が、方位角で等間隔に配置される
シャワーヘッド電極。 - 前記シャワーヘッド電極が、シャワーヘッド電極アセンブリの内側電極であり、前記シャワーヘッド電極アセンブリが、内側方向に延在するフランジと、前記バッキングプレートの下面の開口に係合するスタッド/ソケットアセンブリを受け取るように構成されたねじ付きソケットとを有する外側電極と、前記バッキングプレートの下面の開口に係合するスタッド/ソケットアセンブリを受け取るように構成された複数のねじ付きソケットを有する環状シュラウドとを備え、前記内側電極が、
前記外側電極の前記内側方向に延在するフランジと対合するように構成された、前記内側電極の外周縁にあるただ1つの環状の段差と、
前記位置合わせピンを受け取るように構成された、前記取付面にある複数のねじ切りされていない止まり穴と、
前記位置合わせリングを受け取るように構成された前記取付面にある環状溝と、
前記スタッド/ソケットアセンブリを受け取るように構成された、前記取付面にある複数のねじ付きソケットとを備え、前記スタッド/ソケットアセンブリが、前記カムシャフトに係合し、クランプリングを使用することなく前記内側電極を前記バッキングプレートに取り付ける
請求項1に記載のシャワーヘッド電極。 - 前記複数のねじ付きソケットが、等間隔に配置された8個のねじ付きソケットの第1の円周列と、等間隔に配置された8個のねじ付きソケットの第2の円周列とを備え、前記ねじ付きソケットがそれぞれ、7/16−28のねじサイズでねじを切られており、ねじ切り深さが少なくとも0.163インチであり、前記第1の円周列が、前記内側電極の中心から約2.4〜2.6インチの半径方向距離に位置され、前記第2の円周列が、前記内側電極の中心から約5.3〜5.5インチの半径方向距離に位置される請求項2に記載のシャワーヘッド電極。
- 前記ねじ付きソケットが、前記内側電極の半径の1/4〜1/2の半径位置に位置された第1の円周列にある8個のねじ付きソケットと、前記内側電極の半径の1/2よりも大きい半径位置に位置された第2の円周列にある8個のねじ付きソケットとを備える請求項2に記載のシャワーヘッド電極。
- 前記位置合わせピンを受け取るように構成された前記複数のねじ切りされていない止まり穴が、第1の組の穴および第2の組の穴を備え、
前記第1の組の穴は、2つの穴を備え、前記2つの穴が、(a)前記内側電極の中心から約1.7〜1.8インチの半径方向距離に位置され、(b)半径方向で位置合わせされ、方位角で互いに約175°ずれており、(c)直径が約0.10〜0.12インチであり、(d)深さが少なくとも0.2インチであり、
前記第2の組の穴は、第1の穴と、第2の穴と、第3の穴とを備え、前記穴が、(a)前記内側電極の中心から約6.0〜6.1インチの半径方向距離に位置され、(b)前記第1の穴が、前記第1の組の1つの穴から時計方向に方位角で約10°ずれており、(c)前記第2の穴および前記第3の穴が、前記第1の穴と半径方向で位置合わせされ、前記第1の穴から反時計方向に方位角で約92.5°および約190°ずれており、(d)直径が約0.11〜0.12インチであり、(e)深さが少なくとも0.1インチである
請求項2に記載のシャワーヘッド電極。 - 前記内側電極が、約0.4インチの均一な厚さであり、直径が約12.5インチの平坦な円板であり、前記環状の段差は、内径が約12.0インチであり、長さ約0.2インチの垂直面を有し、前記環状溝は、外径が約0.44インチであり、内径が約0.24インチであり、深さが少なくとも0.1インチであり、前記内側電極が、0.005〜0.02Ω・cmの抵抗率と、合計で10ppm未満の重金属汚染物質とを有する単結晶シリコンまたは多結晶シリコンのプレートから製造される
請求項2に記載のシャワーヘッド電極。 - 請求項2に記載の内側電極を備えるシャワーヘッド電極アセンブリであって、さらに、
前記内側電極の各ねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリと、
カムシャフトを中に取り付けられたボアを有するバッキングプレートとを備え、
前記シャワーヘッド電極が、前記カムシャフトと係合された前記スタッド/ソケットアセンブリのみによって前記バッキングプレートに固定される
シャワーヘッド電極アセンブリ。 - 前記シャワーヘッド電極の前記ねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリの2つが単一のカムシャフトと係合する請求項7に記載のシャワーヘッド電極アセンブリ。
- 請求項2に記載の内側電極を備えるシャワーヘッド電極アセンブリであって、さらに、
前記外側電極の各ねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリを備え、前記外側電極が、外側フランジと内側フランジを含み、前記内側フランジが、前記内側電極の前記環状の段差に被さり、
シャワーヘッド電極アセンブリがさらに、前記環状シュラウドの各ねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリを備え、前記環状シュラウドが、前記外側電極の前記外側フランジに被さる内側フランジを有し、
前記外側電極および前記環状シュラウドが、前記カムシャフトと係合された前記スタッド/ソケットアセンブリによって前記バッキングプレートに固定される
シャワーヘッド電極アセンブリ。 - 前記外側電極のねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリと、前記環状シュラウドのねじ付きソケット内にねじ留めされたスタッド/ソケットアセンブリとが、単一のカムシャフトと係合する請求項9に記載のシャワーヘッド電極アセンブリ。
- 請求項9に記載のシャワーヘッド電極アセンブリを組み立てる方法であって、
前記内側電極の前記取付面にある前記環状溝内に位置合わせリングを挿入するステップと、
前記内側電極の前記取付面にある前記複数のねじ切りされていない止まり穴内に位置合わせピンを挿入するステップと、
前記内側電極の前記取付面上に内側ガスケットを取り付けるステップと、
前記内側ガスケットを取り付けられた前記内側電極を、カムロックによって前記バッキングプレートに固定するステップと、
前記外側電極の前記上面に第1の環状ガスケットを配置するステップと、
前記環状シュラウド上に第2の環状ガスケットを配置するステップと、
前記第1の環状ガスケットを取り付けられた前記外側電極と、前記第2の環状ガスケットを取り付けられた前記環状シュラウドとを、カムロックによって前記バッキングプレートに固定するステップと
を含む方法。 - シャワーヘッド電極アセンブリに取り付けられるように構成されたガスケットセットの熱伝導性および導電性ガスケットであって、前記シャワーヘッド電極アセンブリが、スタッド/ソケットアセンブリを受け取るための複数のねじ付きソケットを有する内側電極と、スタッド/ソケットアセンブリを受け取るための複数のねじ付きソケットを有する外側電極と、スタッド/ソケットアセンブリを受け取るための複数のねじ付きソケットを有する環状シュラウドとを備え、
前記ガスケットセットが、
前記内側電極に取り付けられるように構成された内側ガスケットであって、複数のスポークによって接続された複数の同心偏平リングを備える内側ガスケットと、
前記内側ガスケットを取り囲み、前記内側ガスケットと同心状であり、前記外側電極に取り付けられるように構成された第1の環状ガスケットであって、複数の切欠を有する偏平な環状リングを備える第1の環状ガスケットと、
前記第1の環状ガスケットを取り囲み、前記第1の環状ガスケットと同心状であり、前記環状シュラウドに取り付けられるように構成された第2の環状ガスケットであって、複数の切欠を有する偏平な環状リングを備える第2の環状ガスケットとからなり、
前記ガスケットが、ガス注入穴、位置合わせピン穴、前記位置合わせリング溝、および/または前記ねじ付きソケットに適応する
熱伝導性および導電性ガスケット。 - 前記内側ガスケットの前記同心偏平リングが連続的である、またはセグメント化されている請求項12に記載のガスケット。
- 前記内側ガスケットが、厚さが約0.006インチであり、幅が少なくとも0.1インチである少なくとも6個の同心偏平な第1〜第6のリングを備え、前記第1のリングは、内径が少なくとも0.44インチであり、外径が最大で1.35インチであり、前記第2のリングは、内径が少なくとも1.35インチであり、外径が最大で2.68インチであり、前記第3のリングは、内径が少なくとも2.68インチであり、外径が最大で4.23インチであり、前記第4のリングは、内径が少なくとも4.23インチであり、外径が最大で5.79インチであり、前記第5のリングは、内径が少なくとも5.79インチであり、外径が最大で7.34インチであり、前記第6のリングは、内径が少なくとも7.34インチであり、外径が最大で8.89インチである請求項12に記載のガスケット。
- 前記内側ガスケットが、9個の同心偏平な第1〜第9のリングを備え、前記第7のリングは、内径が少なくとも8.89インチであり、外径が最大で10.18インチであり、前記第8のリングは、内径が少なくとも10.18インチであり、外径が最大で11.46インチであり、前記第9のリングは、内径が11.92〜11.97インチの間であり、外径が12.45〜12.50インチの間である請求項14に記載のガスケット。
- (a)前記第1の環状ガスケットは、内周縁にある1つの切欠と、スタッド/ソケットアセンブリを収容するように構成された第1の組の8個の穴と、ツールアクセスを可能にするように構成された第2の組の3個の穴とを有し、前記第1の組の穴の直径が、前記第2の組の穴の直径よりも大きく、
(b)前記第2の環状ガスケットは、スタッド/ソケットアセンブリを収容するように構成された外周縁にある8個の切欠を有し、内周縁には切欠を有さない
請求項12に記載のガスケット。 - (a)前記第1の環状ガスケットは、厚さが約0.006インチであり、幅が約1.3インチであり、内径が約14.06インチであり、外径が約16.75インチであり、
(b)前記第2の環状ガスケットは、厚さが約0.006インチであり、幅が約0.7インチであり、内径が約17.29インチであり、外径が約18.69インチである
請求項12に記載のガスケット。
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US12/875,869 US8573152B2 (en) | 2010-09-03 | 2010-09-03 | Showerhead electrode |
US12/875,869 | 2010-09-03 | ||
PCT/US2011/001500 WO2012030382A2 (en) | 2010-09-03 | 2011-08-25 | Showerhead electrode |
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JP (1) | JP3189241U (ja) |
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-
2010
- 2010-09-03 US US12/875,869 patent/US8573152B2/en active Active
-
2011
- 2011-08-25 KR KR2020137000011U patent/KR200478781Y1/ko active IP Right Grant
- 2011-08-25 JP JP2013600061U patent/JP3189241U/ja not_active Expired - Lifetime
- 2011-08-25 WO PCT/US2011/001500 patent/WO2012030382A2/en active Application Filing
- 2011-08-25 SG SG2013015516A patent/SG188356A1/en unknown
- 2011-08-25 CN CN201190000716.1U patent/CN203481190U/zh not_active Expired - Lifetime
- 2011-08-31 TW TW100131305A patent/TWI533372B/zh active
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KR20130002985U (ko) | 2013-05-21 |
SG188356A1 (en) | 2013-04-30 |
US8573152B2 (en) | 2013-11-05 |
CN203481190U (zh) | 2014-03-12 |
WO2012030382A2 (en) | 2012-03-08 |
TWI533372B (zh) | 2016-05-11 |
TW201218270A (en) | 2012-05-01 |
WO2012030382A3 (en) | 2012-08-23 |
KR200478781Y1 (ko) | 2015-11-13 |
US20120055632A1 (en) | 2012-03-08 |
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