JP2020129577A - コンデンサ及びコンデンサモジュール - Google Patents
コンデンサ及びコンデンサモジュール Download PDFInfo
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- JP2020129577A JP2020129577A JP2019020614A JP2019020614A JP2020129577A JP 2020129577 A JP2020129577 A JP 2020129577A JP 2019020614 A JP2019020614 A JP 2019020614A JP 2019020614 A JP2019020614 A JP 2019020614A JP 2020129577 A JP2020129577 A JP 2020129577A
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- 239000003990 capacitor Substances 0.000 title claims abstract description 137
- 239000000758 substrate Substances 0.000 claims abstract description 108
- 239000000463 material Substances 0.000 claims description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229910000679 solder Inorganic materials 0.000 claims description 4
- 244000126211 Hericium coralloides Species 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 28
- 239000010410 layer Substances 0.000 description 289
- 239000003054 catalyst Substances 0.000 description 52
- 238000005530 etching Methods 0.000 description 22
- 238000007747 plating Methods 0.000 description 22
- 239000002245 particle Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 229910000510 noble metal Inorganic materials 0.000 description 14
- 239000004020 conductor Substances 0.000 description 13
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 239000001569 carbon dioxide Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- 229910010272 inorganic material Inorganic materials 0.000 description 5
- 239000011147 inorganic material Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 239000000693 micelle Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000007800 oxidant agent Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000006172 buffering agent Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 101710134784 Agnoprotein Proteins 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 fluororesin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
- H01G2/02—Mountings
- H01G2/06—Mountings specially adapted for mounting on a printed-circuit support
- H01G2/065—Mountings specially adapted for mounting on a printed-circuit support for surface mounting, e.g. chip capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
- H01G2/02—Mountings
- H01G2/06—Mountings specially adapted for mounting on a printed-circuit support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/224—Housing; Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/252—Terminals the terminals being coated on the capacitive element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/181—Printed circuits structurally associated with non-printed electric components associated with surface mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10015—Non-printed capacitor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10431—Details of mounted components
- H05K2201/10507—Involving several components
- H05K2201/10515—Stacked components
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- Engineering & Computer Science (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
- Ceramic Capacitors (AREA)
Abstract
Description
図1乃至図10に、第1実施形態に係るコンデンサを示す。
図1乃至図10に示すコンデンサ1は、図4乃至図10に示すように、導電基板CSと、導電層20bと、誘電体層50とを含んでいる。
第1絶縁層60a1は、導電層20bの第5部分P5及び第7部分P7を覆っている。第1絶縁層60a1は、導電層20bに設けられた貫通孔の側壁と、誘電体層50に設けられた貫通孔の側壁とを更に覆っている。第1絶縁層60a1は、例えば、シリコン窒化物及びシリコン酸化物などの無機絶縁体からなる。
絶縁層60aは、多層構造を有していてもよく、単層構造を有していてもよい。
即ち、先ず、図11及び図12に示すように、基板10上に、第1貴金属を各々が含んだ第1触媒層80a及び第2触媒層80bを形成する。第1触媒層80a及び第2触媒層80bは、それぞれ、基板10の一方の主面(以下、第1面という)及び他方の主面(以下、第2面という)を部分的に覆うように形成する。
第1マスク層90aは、第1凹部R1に対応した位置で開口している。第1マスク層90aは、第1面のうち第1マスク層90aによって覆われた部分が、後述する貴金属と接触するのを防止する。
第2マスク層90bは、第2凹部R2に対応した位置で開口している。第2マスク層90bは、第2面のうち第2マスク層90bによって覆われた部分が、貴金属と接触するのを防止する。
エッチング剤100における弗化水素の濃度は、1mol/L乃至20mol/Lの範囲内にあることが好ましく、5mol/L乃至10mol/Lの範囲内にあることがより好ましく、3mol/L乃至7mol/Lの範囲内にあることが更に好ましい。弗化水素濃度が低い場合、高いエッチングレートを達成することが難しい。弗化水素濃度が高い場合、過剰なサイドエッチングを生じる可能性がある。
エッチング剤100は、水などの他の成分を更に含んでいてもよい。
以上のようにして、図1乃至図10に示すコンデンサ1を得る。
図18に示すコンデンサモジュール150は、回路基板110と、複数のコンデンサ1とを含んでいる。
図19に、第2実施形態に係るコンデンサの一部を示す。
第2実施形態に係るコンデンサは、以下の構成を採用したこと以外は、第1実施形態に係るコンデンサ1と同様である。また、第2実施形態に係るコンデンサモジュールは、コンデンサに以下の構成を採用したこと以外は、第1実施形態に係るコンデンサモジュール150と同様である。
Claims (20)
- 第1主面と、第2主面と、前記第1主面の縁から前記第2主面の縁まで延びた端面とを有し、前記第1主面に1以上の凹部が設けられた導電基板と、
前記第1主面と前記1以上の凹部の側壁及び底面とを覆った導電層と、
前記導電基板と前記導電層との間に介在した誘電体層と、
前記端面と向き合った第1電極部を含み、前記導電層に電気的に接続された第1外部電極と、
前記端面と向き合った第2電極部を含み、前記導電基板に電気的に接続された第2外部電極と
を備えたコンデンサ。 - 前記端面には、前記第1主面の縁から前記第2主面の縁まで各々が延びた第1及び第2溝が設けられ、前記第1及び第2電極部はそれぞれ前記第1及び第2溝内に配置された請求項1に記載のコンデンサ。
- 前記第1及び第2電極部はそれぞれ前記第1及び第2溝の壁面に沿った形状を有している請求項2に記載のコンデンサ。
- 前記第1外部電極は、前記第1及び第2主面とそれぞれ向き合った第1及び第2ボンディングパッドを更に含み、前記第2外部電極は、前記第1及び第2主面とそれぞれ向き合った第3及び第4ボンディングパッドを更に含んだ請求項1乃至3の何れか1項に記載のコンデンサ。
- 前記第1ボンディングパッドは前記第1電極部の一端に接続され、前記第2ボンディングパッドは前記第1電極部の他端に接続され、前記第3ボンディングパッドは前記第2電極部の一端に接続され、前記第4ボンディングパッドは前記第2電極部の他端に接続された請求項3又は4に記載のコンデンサ。
- 第1主面と第2主面とを有し、前記第1主面に1以上の凹部が設けられた導電基板と、
前記第1主面と前記1以上の凹部の側壁及び底面とを覆った導電層と、
前記導電基板と前記導電層との間に介在した誘電体層と、
前記第1及び第2主面とそれぞれ向き合った第1及び第2ボンディングパッドを含み、前記導電層に電気的に接続された第1外部電極と、
前記第1及び第2主面とそれぞれ向き合った第3及び第4ボンディングパッドを含み、前記導電基板に電気的に接続された第2外部電極と
を備えたコンデンサ。 - 前記第1ボンディングパッドに対する前記第3ボンディングパッドの相対的な位置は、前記第2ボンディングパッドに対する前記第4ボンディングパッドの相対的な位置と等しい請求項3乃至6の何れか1項に記載のコンデンサ。
- 前記1以上の凹部は1以上の第1トレンチである請求項1乃至7の何れか1項に記載のコンデンサ。
- 前記1以上の第1トレンチの側壁に1以上の第1孔が設けられ、前記導電層は、前記第1トレンチの前記側壁及び底面と前記1以上の第1孔の側壁とを更に覆った請求項8に記載のコンデンサ。
- 前記1以上の第1孔の少なくとも1つは貫通孔である請求項9に記載のコンデンサ。
- 前記第2主面に1以上の第2トレンチが設けられ、前記導電層は、前記第2主面と前記1以上の第2トレンチの側壁及び底面とを更に覆った請求項8乃至10の何れか1項に記載のコンデンサ。
- 前記1以上の第2トレンチの前記側壁に1以上の第2孔が設けられ、前記導電層は、前記1以上の第2トレンチの前記側壁及び底面と前記1以上の第2孔の側壁とを更に覆った請求項11に記載のコンデンサ。
- 前記1以上の第2孔の少なくとも1つは貫通孔である請求項12に記載のコンデンサ。
- 前記1以上の第1トレンチの長さ方向と前記1以上の第2トレンチの長さ方向とは互いに交差し、前記1以上の第1トレンチと前記1以上の第2トレンチとはそれらの交差部で互いに繋がっている請求項11乃至13の何れか1項に記載のコンデンサ。
- 前記第1主面と向き合い、前記導電層を前記第1外部電極へ電気的に接続した第1櫛形電極と、
前記第1主面と向き合い、前記導電基板を前記第2外部電極へ電気的に接続した第2櫛形電極と
を更に備え、
前記第1及び第2櫛形電極の各櫛歯部は、前記1以上の第1トレンチの前記長さ方向と交差する方向に延びた請求項14に記載のコンデンサ。 - 前記導電基板は、基板と、前記基板上に設けられた導電層とを含んだ請求項1乃至15の何れか1項に記載のコンデンサ。
- 前記基板はシリコンを含んだ請求項16に記載のコンデンサ。
- 互いに積層された複数のコンデンサを含み、前記複数のコンデンサの各々は請求項1乃至17の何れか1項に係るコンデンサであり、前記複数のコンデンサの隣り合った2つは、前記第1外部電極が互いに電気的に接続されるとともに、前記第2外部電極が互いに電気的に接続された積層体と、
前記積層体を支持した回路基板と
を備えたコンデンサモジュール。 - 互いに積層された複数のコンデンサを含み、前記複数のコンデンサの各々は請求項1乃至5の何れか1項に係るコンデンサである積層体と、
前記積層体を支持した回路基板と、
前記複数のコンデンサの前記第1電極部と接するように設けられ、それらを電気的に接続した接合材と、
前記複数のコンデンサの前記第2電極部と接するように設けられ、それらを電気的に接続した接合材と
を備えたコンデンサモジュール。 - 前記接合材の各々は半田からなる請求項19に記載のコンデンサモジュール。
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