JP2017025412A5 - - Google Patents

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JP2017025412A5
JP2017025412A5 JP2016144114A JP2016144114A JP2017025412A5 JP 2017025412 A5 JP2017025412 A5 JP 2017025412A5 JP 2016144114 A JP2016144114 A JP 2016144114A JP 2016144114 A JP2016144114 A JP 2016144114A JP 2017025412 A5 JP2017025412 A5 JP 2017025412A5
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plasma
group
reactor
borane
aluminum
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JP2016144114A
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JP2017025412A (ja
JP6437962B2 (ja
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JP2016144114A 2015-07-24 2016-07-22 13族金属又は半金属の窒化物膜の堆積方法 Expired - Fee Related JP6437962B2 (ja)

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Application Number Priority Date Filing Date Title
US201562196494P 2015-07-24 2015-07-24
US62/196,494 2015-07-24
US15/210,172 2016-07-14
US15/210,172 US10745808B2 (en) 2015-07-24 2016-07-14 Methods for depositing Group 13 metal or metalloid nitride films

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JP2017025412A JP2017025412A (ja) 2017-02-02
JP2017025412A5 true JP2017025412A5 (enExample) 2017-04-27
JP6437962B2 JP6437962B2 (ja) 2018-12-12

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JP2016144114A Expired - Fee Related JP6437962B2 (ja) 2015-07-24 2016-07-22 13族金属又は半金属の窒化物膜の堆積方法

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US (1) US10745808B2 (enExample)
EP (1) EP3121309A1 (enExample)
JP (1) JP6437962B2 (enExample)
KR (1) KR101949391B1 (enExample)
CN (1) CN106367730B (enExample)
TW (1) TWI591198B (enExample)

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