JP2014514769A5 - - Google Patents

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Publication number
JP2014514769A5
JP2014514769A5 JP2014506912A JP2014506912A JP2014514769A5 JP 2014514769 A5 JP2014514769 A5 JP 2014514769A5 JP 2014506912 A JP2014506912 A JP 2014506912A JP 2014506912 A JP2014506912 A JP 2014506912A JP 2014514769 A5 JP2014514769 A5 JP 2014514769A5
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JP
Japan
Prior art keywords
substrate
support structure
substrate support
fingers
transport device
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JP2014506912A
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English (en)
Japanese (ja)
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JP2014514769A (ja
JP5787331B2 (ja
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Priority claimed from PCT/EP2012/057959 external-priority patent/WO2012146789A1/en
Publication of JP2014514769A publication Critical patent/JP2014514769A/ja
Publication of JP2014514769A5 publication Critical patent/JP2014514769A5/ja
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JP2014506912A 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を搬送するための装置 Active JP5787331B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161480163P 2011-04-28 2011-04-28
US61/480,163 2011-04-28
PCT/EP2012/057959 WO2012146789A1 (en) 2011-04-28 2012-05-01 Apparatus for transferring a substrate in a lithography system

Publications (3)

Publication Number Publication Date
JP2014514769A JP2014514769A (ja) 2014-06-19
JP2014514769A5 true JP2014514769A5 (enExample) 2015-06-25
JP5787331B2 JP5787331B2 (ja) 2015-09-30

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ID=46017897

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014506911A Expired - Fee Related JP5805851B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を処理する方法
JP2014506912A Active JP5787331B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を搬送するための装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2014506911A Expired - Fee Related JP5805851B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を処理する方法

Country Status (7)

Country Link
US (4) US8936994B2 (enExample)
EP (1) EP2702452B1 (enExample)
JP (2) JP5805851B2 (enExample)
KR (4) KR20180031082A (enExample)
CN (3) CN103649837B (enExample)
TW (2) TWI486723B (enExample)
WO (2) WO2012146788A1 (enExample)

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