JP4667140B2 - 露光装置およびデバイス製造方法 - Google Patents
露光装置およびデバイス製造方法 Download PDFInfo
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- JP4667140B2 JP4667140B2 JP2005193084A JP2005193084A JP4667140B2 JP 4667140 B2 JP4667140 B2 JP 4667140B2 JP 2005193084 A JP2005193084 A JP 2005193084A JP 2005193084 A JP2005193084 A JP 2005193084A JP 4667140 B2 JP4667140 B2 JP 4667140B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Description
前記基板を保持する基板ステージとを有し、前記チャック上に保持された前記マスクと前記チャックとの間の第1の位置ズレ量を得るほか、前記マスクステージに保持された前記チャック上の基準マークと前記基板ステージ上の基準マークとの間の第2の位置ズレ量を測定し、前記第1の位置ズレ量と前記第2の位置ズレ量とを前記マスクと前記基板との間の位置補正のためのデータとして用いる。
本発明の好適な実施形態によれば、前記搬送手段による前記搬送の前に前記第1の位置ズレ量を得ることが好ましい。
本発明の好適な実施形態によれば、前記マスクを保持する前記チャックを前記マスクステージが保持した後に、前記チャックから前記カバーを取り外すことが好ましい。
本発明の好適な実施形態によれば、前記容器に備えられたポートを介して前記容器内の排気または前記容器内への不活性ガスの供給を行うことが好ましい。
本発明の好適な実施形態によれば、前記搬送手段は、前記容器に対してキネマティックカップリングをなすハンドを有することが好ましい。
本発明の好適な実施形態によれば、前記マスクステージは、前記チャックを位置決めするための嵌合部を有することが好ましい。
本発明の第2の側面は、デバイス製造方法に係り、該製造方法は、上記の露光装置を用いて基板を露光する工程と、前記工程で露光された該基板を現像する工程とを有する。
図5は、本発明の第1実施形態のマスク容器の概略構成を示す断面図である。図9、図10は、それぞれ図5に示すマスク容器の使用に好適なEUV露光装置の全体構成を側面図、平面図である。
図6は、本発明の第2実施形態のマスク容器の概略構成を示す断面図である。なお、第1実施形態と共通する部分には同一の参照符号が付されている。第2実施形態のマスク容器300では、マスク容器をレチクルステージへ供給した後にカバー320を取り外す際に、Oリング105から発生した異物がカバー320の内側へ落下しないように、防塵壁106が設けられている。ここで、防塵壁106をカバー320側とチャック310側に複数設けてラビリンス形状とすることにより、防塵性を高めるようにしてもよい。
本発明は、真空又は不活性パージ環境だけではなく、通常の大気中搬送においても、防塵効果を有するものである。図12は、本発明の第3実施形態のマスク容器の概略構成を示す断面図である。第3実施形態のマスク容器は、大気中における搬送への適用例である。
次に、上記の露光装置を利用した半導体デバイスの製造プロセスを説明する。図13は、半導体デバイスの全体的な製造プロセスのフローを示す図である。ステップ1(回路設計)では半導体デバイスの回路設計を行なう。ステップ2(マスク作製)では設計した回路パターンに基づいてマスクを作製する。一方、ステップ3(ウエハ製造)ではシリコン等の材料を用いてウエハを製造する。ステップ4(ウエハプロセス)は前工程と呼ばれ、上記のマスクとウエハを用いて、リソグラフィ技術によってウエハ上に実際の回路を形成する。次のステップ5(組み立て)は後工程と呼ばれ、ステップ4によって作製されたウエハを用いて半導体チップ化する工程であり、アッセンブリ工程(ダイシング、ボンディング)、パッケージング工程(チップ封入)等の組立て工程を含む。ステップ6(検査)ではステップ5で作製された半導体デバイスの動作確認テスト、耐久性テスト等の検査を行なう。こうした工程を経て半導体デバイスが完成し、これを出荷(ステップ7)する。
以上のように、上記の各実施形態によれば、例えばマスクやウェハ等のような基板を異物から保護しながら搬送するとともに搬送後における基板の利用を容易にすることができる。
Claims (7)
- マスクを介して基板を露光する露光装置であって、
電極を備えた支持ベース上に前記マスクを前記電極により静電吸着するように且つカバーと共に前記マスクのための容器を形成するように構成されているチャックを保持するマスクステージと、
前記マスクを保持する前記チャックを前記マスクステージが保持できるように、前記マスクを収容した前記容器を前記マスクステージに搬送する搬送手段と、
前記基板を保持する基板ステージと、を有し、
前記チャック上に保持された前記マスクと前記チャックとの間の第1の位置ズレ量を得るほか、前記マスクステージに保持された前記チャック上の基準マークと前記基板ステージ上の基準マークとの間の第2の位置ズレ量を測定し、前記第1の位置ズレ量と前記第2の位置ズレ量とを前記マスクと前記基板との間の位置補正のためのデータとして用いる、
ことを特徴とする露光装置。 - 前記搬送手段による前記搬送の前に前記第1の位置ズレ量を得る、
ことを特徴とする請求項1に記載の露光装置。 - 前記マスクを保持する前記チャックを前記マスクステージが保持した後に、前記チャックから前記カバーを取り外す、
ことを特徴とする請求項1または2に記載の露光装置。 - 前記容器に備えられたポートを介して前記容器内の排気または前記容器内への不活性ガスの供給を行う、
ことを特徴とする請求項1乃至請求項3のいずれか1項に記載の露光装置。 - 前記搬送手段は、前記容器に対してキネマティックカップリングをなすハンドを有する、
ことを特徴とする請求項1乃至請求項4のいずれか1項に記載の露光装置。 - 前記マスクステージは、前記チャックを位置決めするための嵌合部を有する、
ことを特徴とする請求項1乃至請求項5のいずれか1項に記載の露光装置。 - 請求項1乃至請求項6のいずれか1項に記載の露光装置を用いて基板を露光する工程と、
前記工程で露光された該基板を現像する工程と、
を有することを特徴とするデバイス製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005193084A JP4667140B2 (ja) | 2005-06-30 | 2005-06-30 | 露光装置およびデバイス製造方法 |
EP06004224A EP1739735A1 (en) | 2005-06-30 | 2006-03-02 | Container and method of transporting substrates using the same |
US11/366,580 US7659966B2 (en) | 2005-06-30 | 2006-03-03 | Container and method of transporting substrate using the same |
KR1020060020767A KR100774027B1 (ko) | 2005-06-30 | 2006-03-06 | 용기 및 이것을 사용해서 기판을 반송하는 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005193084A JP4667140B2 (ja) | 2005-06-30 | 2005-06-30 | 露光装置およびデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007012942A JP2007012942A (ja) | 2007-01-18 |
JP4667140B2 true JP4667140B2 (ja) | 2011-04-06 |
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Application Number | Title | Priority Date | Filing Date |
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JP2005193084A Expired - Fee Related JP4667140B2 (ja) | 2005-06-30 | 2005-06-30 | 露光装置およびデバイス製造方法 |
Country Status (4)
Country | Link |
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US (1) | US7659966B2 (ja) |
EP (1) | EP1739735A1 (ja) |
JP (1) | JP4667140B2 (ja) |
KR (1) | KR100774027B1 (ja) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005123292A (ja) * | 2003-10-15 | 2005-05-12 | Canon Inc | 収納装置、当該収納装置を用いた露光方法 |
JP4667140B2 (ja) | 2005-06-30 | 2011-04-06 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
US7808616B2 (en) * | 2005-12-28 | 2010-10-05 | Nikon Corporation | Reticle transport apparatus, exposure apparatus, reticle transport method, and reticle processing method |
TWI417649B (zh) * | 2005-12-28 | 2013-12-01 | 尼康股份有限公司 | 十字標記運送裝置、曝光裝置、十字標記運送方法以及十字標記的處理方法 |
KR101229020B1 (ko) * | 2006-06-22 | 2013-02-01 | 엘지디스플레이 주식회사 | 쉐도우 마스크의 자성제거 방법 및 그 장치 |
US7866224B2 (en) * | 2006-11-30 | 2011-01-11 | Chartered Semiconductor Manufacturing Ltd. | Monitoring structure |
JP2008186949A (ja) * | 2007-01-29 | 2008-08-14 | Nikon Corp | 露光装置および露光方法 |
US20080225261A1 (en) * | 2007-03-13 | 2008-09-18 | Noriyuki Hirayanagi | Exposure apparatus and device manufacturing method |
WO2008151095A2 (en) * | 2007-05-30 | 2008-12-11 | Blueshift Technologies, Inc. | Vacuum substrate storage |
NL1036193A1 (nl) | 2007-12-06 | 2009-06-09 | Asml Netherlands Bv | Imprint lithography. |
US8215510B2 (en) * | 2008-03-24 | 2012-07-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photomask storage apparatus |
NL1036785A1 (nl) | 2008-04-18 | 2009-10-20 | Asml Netherlands Bv | Rapid exchange device for lithography reticles. |
NL1036843A1 (nl) * | 2008-05-23 | 2009-11-24 | Asml Netherlands Bv | Support structure, lithographic apparatus and method. |
EP2330619B1 (en) | 2008-09-17 | 2019-06-12 | Creative Technology Corporation | Substrate processing apparatus and substrate processing method |
JP4796120B2 (ja) | 2008-12-11 | 2011-10-19 | 三菱重工業株式会社 | 常温接合装置 |
US8425687B2 (en) * | 2009-02-10 | 2013-04-23 | Tel Nexx, Inc. | Wetting a workpiece surface in a fluid-processing system |
JP2010287692A (ja) * | 2009-06-10 | 2010-12-24 | Nikon Corp | 基板カバー |
US20110027463A1 (en) * | 2009-06-16 | 2011-02-03 | Varian Semiconductor Equipment Associates, Inc. | Workpiece handling system |
JP2011003723A (ja) * | 2009-06-18 | 2011-01-06 | Nikon Corp | マスク搬送装置、露光装置、マスク搬送方法、及びデバイスの製造方法 |
TW201122564A (en) * | 2009-06-25 | 2011-07-01 | Nikon Corp | Optical element, illumination apparatus, exposure apparatus, and method for manufacturing device |
JP5667568B2 (ja) * | 2009-08-07 | 2015-02-12 | 株式会社ニコン | 移動体装置、露光装置、及びデバイス製造方法 |
EP2475229A4 (en) | 2009-09-01 | 2015-03-18 | Ihi Corp | PLASMA LIGHT SOURCE |
JP2011054376A (ja) * | 2009-09-01 | 2011-03-17 | Ihi Corp | Lpp方式のeuv光源とその発生方法 |
JP2012015206A (ja) * | 2010-06-29 | 2012-01-19 | Toshiba Corp | 露光制御システム及び露光制御方法 |
TWI486723B (zh) * | 2011-04-28 | 2015-06-01 | Mapper Lithography Ip Bv | 在微影系統中處理基板的方法 |
US8888086B2 (en) * | 2011-05-11 | 2014-11-18 | Sematech, Inc. | Apparatus with surface protector to inhibit contamination |
EP2727137B1 (en) | 2011-06-28 | 2022-04-20 | Brooks Automation (Germany) GmbH | Semiconductor stocker systems and methods. |
JP5516547B2 (ja) * | 2011-10-28 | 2014-06-11 | 株式会社デンソー | 電子制御装置 |
NL2009666A (en) * | 2011-11-22 | 2013-05-23 | Asml Netherlands Bv | Reticle assembly, a lithographic apparatus, the use in a lithographic process, and a method to project two or more image fields in a single scanning movement of a lithographic process. |
US9164399B2 (en) * | 2012-01-10 | 2015-10-20 | Hermes-Microvision, Inc. | Reticle operation system |
US9851643B2 (en) | 2012-03-27 | 2017-12-26 | Kla-Tencor Corporation | Apparatus and methods for reticle handling in an EUV reticle inspection tool |
JP2014167963A (ja) * | 2013-02-28 | 2014-09-11 | Toshiba Corp | 静電チャック、レチクル、および静電チャック方法 |
DE102013004481A1 (de) * | 2013-03-12 | 2014-08-28 | Carl Zeiss Sms Gmbh | Vorrichtung und Verfahren zum Öffnen von Retikelhüllen |
US9460950B2 (en) | 2013-12-06 | 2016-10-04 | Applied Materials, Inc. | Wafer carrier for smaller wafers and wafer pieces |
JP6456177B2 (ja) * | 2015-02-12 | 2019-01-23 | 株式会社ディスコ | ウェーハ処理システム |
JP2016207755A (ja) * | 2015-04-17 | 2016-12-08 | 株式会社ニコン | 露光システム及び交換方法 |
JP6700922B2 (ja) * | 2016-04-05 | 2020-05-27 | キヤノン株式会社 | カバー部材、搬送装置、リソグラフィ装置、及び物品の製造方法 |
US10670959B2 (en) | 2017-05-10 | 2020-06-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle and method of using the same |
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Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140537A (ja) * | 1985-12-16 | 1987-06-24 | Nec Corp | 網内遅延時間測定方法 |
JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |
JPH08148538A (ja) * | 1994-11-21 | 1996-06-07 | Hitachi Ltd | 半導体装置の製造方法および製造システムならびにキャリアケース |
JPH08162520A (ja) * | 1994-12-02 | 1996-06-21 | Casio Comput Co Ltd | 被処理体移送用真空容器及びそれを用いた処理方法 |
JPH08191095A (ja) * | 1995-01-12 | 1996-07-23 | Hitachi Ltd | 真空処理装置に於ける試料搬送方法 |
JPH1187457A (ja) * | 1997-09-16 | 1999-03-30 | Hitachi Ltd | 異物除去機能付き静電吸着装置を備えた半導体製造装置 |
JP2000195931A (ja) * | 1998-12-24 | 2000-07-14 | Ntt Advanced Technology Corp | ウエハチャック及びチルト角測定方法 |
JP2000216228A (ja) * | 1999-01-27 | 2000-08-04 | Hitachi Ltd | 基板固定台 |
JP2001053136A (ja) * | 1999-08-06 | 2001-02-23 | Dainippon Printing Co Ltd | ケース |
JP2001298078A (ja) * | 2000-04-17 | 2001-10-26 | Dainippon Printing Co Ltd | 収納ケース |
JP2001354281A (ja) * | 2000-06-13 | 2001-12-25 | Asahi Glass Co Ltd | 液晶表示用ガラス板梱包箱 |
JP2004022816A (ja) * | 2002-06-17 | 2004-01-22 | Tokyo Electron Ltd | 基板収納装置 |
JP2004140395A (ja) * | 2003-12-12 | 2004-05-13 | Shin Etsu Polymer Co Ltd | 精密基板収納容器 |
JP2005123292A (ja) * | 2003-10-15 | 2005-05-12 | Canon Inc | 収納装置、当該収納装置を用いた露光方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189950A (ja) * | 1984-03-09 | 1985-09-27 | Tokuda Seisakusho Ltd | 静電チヤツクの帯電除去方法 |
US4689516A (en) * | 1985-05-02 | 1987-08-25 | Kabushiki Kaisha Toshiba | Position adjustment device with a piezoelectric element as a lock mechanism |
JPS62288911A (ja) * | 1985-05-02 | 1987-12-15 | Toshiba Corp | 位置決め装置 |
US4775877A (en) * | 1985-10-29 | 1988-10-04 | Canon Kabushiki Kaisha | Method and apparatus for processing a plate-like workpiece |
JPH01152727A (ja) | 1987-12-10 | 1989-06-15 | Toshiba Corp | 電子線描画方法 |
JPH0727198A (ja) | 1993-07-15 | 1995-01-27 | Tsudomi Keiko | 回転力伝動装置 |
US5529819A (en) * | 1995-04-17 | 1996-06-25 | Inko Industrial Corporation | Pellicle assembly with vent structure |
JPH10261700A (ja) * | 1997-03-18 | 1998-09-29 | Fujitsu Ltd | 半導体ウエハ用キャリア |
JPH10270535A (ja) * | 1997-03-25 | 1998-10-09 | Nikon Corp | 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法 |
US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
JP2000286319A (ja) * | 1999-03-31 | 2000-10-13 | Canon Inc | 基板搬送方法および半導体製造装置 |
US6279249B1 (en) * | 1999-12-30 | 2001-08-28 | Intel Corporation | Reduced particle contamination manufacturing and packaging for reticles |
TW508653B (en) * | 2000-03-24 | 2002-11-01 | Asml Netherlands Bv | Lithographic projection apparatus and integrated circuit manufacturing method |
JP2002252162A (ja) | 2001-02-26 | 2002-09-06 | Nikon Corp | X線反射マスク、その保護方法、x線露光装置及び半導体デバイスの製造方法 |
US6778258B2 (en) * | 2001-10-19 | 2004-08-17 | Asml Holding N.V. | Wafer handling system for use in lithography patterning |
US6906783B2 (en) * | 2002-02-22 | 2005-06-14 | Asml Holding N.V. | System for using a two part cover for protecting a reticle |
CN1474233A (zh) * | 2002-03-01 | 2004-02-11 | Asml荷兰有限公司 | 传送贮藏箱中掩模或基片的方法和所用设备及其制造方法 |
JP4027214B2 (ja) * | 2002-11-28 | 2007-12-26 | キヤノン株式会社 | 搬送装置、デバイス製造装置、搬送方法およびデバイス製造方法 |
CN100437358C (zh) * | 2003-05-15 | 2008-11-26 | 株式会社尼康 | 曝光装置及器件制造方法 |
WO2005047981A2 (en) * | 2003-11-10 | 2005-05-26 | Nikon Corporation | Thermophoretic techniques for protecting reticles from contaminants |
JP4667140B2 (ja) | 2005-06-30 | 2011-04-06 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
-
2005
- 2005-06-30 JP JP2005193084A patent/JP4667140B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-02 EP EP06004224A patent/EP1739735A1/en not_active Withdrawn
- 2006-03-03 US US11/366,580 patent/US7659966B2/en not_active Expired - Fee Related
- 2006-03-06 KR KR1020060020767A patent/KR100774027B1/ko active IP Right Grant
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140537A (ja) * | 1985-12-16 | 1987-06-24 | Nec Corp | 網内遅延時間測定方法 |
JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |
JPH08148538A (ja) * | 1994-11-21 | 1996-06-07 | Hitachi Ltd | 半導体装置の製造方法および製造システムならびにキャリアケース |
JPH08162520A (ja) * | 1994-12-02 | 1996-06-21 | Casio Comput Co Ltd | 被処理体移送用真空容器及びそれを用いた処理方法 |
JPH08191095A (ja) * | 1995-01-12 | 1996-07-23 | Hitachi Ltd | 真空処理装置に於ける試料搬送方法 |
JPH1187457A (ja) * | 1997-09-16 | 1999-03-30 | Hitachi Ltd | 異物除去機能付き静電吸着装置を備えた半導体製造装置 |
JP2000195931A (ja) * | 1998-12-24 | 2000-07-14 | Ntt Advanced Technology Corp | ウエハチャック及びチルト角測定方法 |
JP2000216228A (ja) * | 1999-01-27 | 2000-08-04 | Hitachi Ltd | 基板固定台 |
JP2001053136A (ja) * | 1999-08-06 | 2001-02-23 | Dainippon Printing Co Ltd | ケース |
JP2001298078A (ja) * | 2000-04-17 | 2001-10-26 | Dainippon Printing Co Ltd | 収納ケース |
JP2001354281A (ja) * | 2000-06-13 | 2001-12-25 | Asahi Glass Co Ltd | 液晶表示用ガラス板梱包箱 |
JP2004022816A (ja) * | 2002-06-17 | 2004-01-22 | Tokyo Electron Ltd | 基板収納装置 |
JP2005123292A (ja) * | 2003-10-15 | 2005-05-12 | Canon Inc | 収納装置、当該収納装置を用いた露光方法 |
JP2004140395A (ja) * | 2003-12-12 | 2004-05-13 | Shin Etsu Polymer Co Ltd | 精密基板収納容器 |
Also Published As
Publication number | Publication date |
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US7659966B2 (en) | 2010-02-09 |
US20070002516A1 (en) | 2007-01-04 |
KR20070003536A (ko) | 2007-01-05 |
EP1739735A1 (en) | 2007-01-03 |
KR100774027B1 (ko) | 2007-11-06 |
JP2007012942A (ja) | 2007-01-18 |
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