JP2010041059A5 - - Google Patents
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- Publication number
- JP2010041059A5 JP2010041059A5 JP2009211791A JP2009211791A JP2010041059A5 JP 2010041059 A5 JP2010041059 A5 JP 2010041059A5 JP 2009211791 A JP2009211791 A JP 2009211791A JP 2009211791 A JP2009211791 A JP 2009211791A JP 2010041059 A5 JP2010041059 A5 JP 2010041059A5
- Authority
- JP
- Japan
- Prior art keywords
- block
- unit
- substrate
- coating
- developing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 15
- 239000011248 coating agent Substances 0.000 claims 13
- 238000000576 coating method Methods 0.000 claims 13
- 230000007723 transport mechanism Effects 0.000 claims 4
- 230000032258 transport Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009211791A JP2010041059A (ja) | 2009-09-14 | 2009-09-14 | 塗布、現像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009211791A JP2010041059A (ja) | 2009-09-14 | 2009-09-14 | 塗布、現像装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005025509A Division JP4459831B2 (ja) | 2005-02-01 | 2005-02-01 | 塗布、現像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010041059A JP2010041059A (ja) | 2010-02-18 |
| JP2010041059A5 true JP2010041059A5 (enExample) | 2010-11-18 |
Family
ID=42013200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009211791A Pending JP2010041059A (ja) | 2009-09-14 | 2009-09-14 | 塗布、現像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010041059A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5223897B2 (ja) * | 2010-09-02 | 2013-06-26 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| JP2013243406A (ja) * | 2013-08-13 | 2013-12-05 | Tokyo Electron Ltd | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| JP5644916B2 (ja) * | 2013-08-13 | 2014-12-24 | 東京エレクトロン株式会社 | 塗布、現像装置 |
| JP5590201B2 (ja) * | 2013-08-13 | 2014-09-17 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| CN110943018B (zh) * | 2018-09-21 | 2024-12-27 | 株式会社斯库林集团 | 衬底处理装置及衬底处理方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2931820B2 (ja) * | 1991-11-05 | 1999-08-09 | 東京エレクトロン株式会社 | 板状体の処理装置及び搬送装置 |
| JP4104828B2 (ja) * | 2001-02-22 | 2008-06-18 | 東京エレクトロン株式会社 | 処理装置 |
| JP2004015023A (ja) * | 2002-06-11 | 2004-01-15 | Dainippon Screen Mfg Co Ltd | 基板処理装置およびその方法 |
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2009
- 2009-09-14 JP JP2009211791A patent/JP2010041059A/ja active Pending