JP2012093066A - クリーンルーム - Google Patents
クリーンルーム Download PDFInfo
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- JP2012093066A JP2012093066A JP2010242798A JP2010242798A JP2012093066A JP 2012093066 A JP2012093066 A JP 2012093066A JP 2010242798 A JP2010242798 A JP 2010242798A JP 2010242798 A JP2010242798 A JP 2010242798A JP 2012093066 A JP2012093066 A JP 2012093066A
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- clean room
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- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000002347 injection Methods 0.000 claims description 15
- 239000007924 injection Substances 0.000 claims description 15
- 239000003566 sealing material Substances 0.000 claims description 9
- 238000007664 blowing Methods 0.000 claims description 8
- 238000000465 moulding Methods 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000003892 spreading Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000443 aerosol Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 235000013305 food Nutrition 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
- F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Sanitary Device For Flush Toilet (AREA)
Abstract
【解決手段】クリーンルーム10のクリーンゾーン11の温調された清浄空気の吹出口が、複数のプレートノズル20で形成されたものである。
【選択図】図1
Description
11 クリーンゾーン
12 給気チャンバ
16 レターンチャンバ
20 プレートノズル
23 プレート
24 ノズル
Claims (16)
- クリーンゾーンの温調された清浄空気の吹出口が、複数のプレートノズルで形成されたことを特徴とするクリーンルーム。
- プレートノズルは、薄型箱状に形成されたプレートと、そのプレートの縦横に複数のノズルが、そのプレートと一体に樹脂成形して形成される請求項1記載のクリーンルーム。
- ノズルの内径が2〜40mmの範囲内のいずれかに形成される請求項2記載のクリーンルーム。
- プレートには、内径が大きく、かつ一定の吹出角度で清浄空気を吹き出すノズルと、そのノズル間に配置され、内径が小さく清浄空気を広角度で清浄空気を吹き出すノズルが設けられる請求項3記載のクリーンルーム。
- 製造設備が設置されるクリーンゾーンと、該クリーンゾーンの天井に、下部が開口して設けられた給気チャンバと、前記クリーンゾーンの床下に設けられたレターンチャンバと、該レターンチャンバと前記給気チャンバとを結ぶ空気循環路と、空気循環路に接続された空調機と、空調機と前記給気チャンバを結ぶ循環路に設けられた高性能フィルタと、前記給気チャンバとクリーンゾーンの天井の開口を覆うように設けられた複数のプレートノズルとを備えたことを特徴とするクリーンルーム。
- 給気チャンバの開口部に、方形の開口が複数形成された支持枠が設けられ、その支持枠の各開口部に、シール材を介してプレートノズルが取り付けられる請求項5記載のクリーンルーム。
- プレートノズルは、薄型箱状に形成されたプレートと、そのプレートの縦横に多数のノズルが、そのプレートと一体に樹脂成形して形成される請求項5記載のクリーンルーム。
- ノズルの内径が2〜40mmの範囲内のいずれかに形成される請求項7記載のクリーンルーム。
- プレートノズルのノズルから吹き出された清浄空気が、風速0.15m/secとなる有効噴射距離をノズル内径に応じて予め求めておき、前記床上のある高さの面で風速0.15〜0.5m/secとなるように、前記ノズルの有効噴射距離からノズル内径を選定する請求項7記載のクリーンルーム。
- 各ノズルから吹き出された清浄空気は、有効噴射距離に達する間に一定の広がり角で吹き出され、ノズル同士の間隔は、隣接するノズルから吹き出された清浄空気の広がり角で、前記有効噴射距離内で隣接するノズルからの清浄空気が相互に交わるように設定される請求項9記載のクリーンルーム。
- 製造設備が設置されるクリーンゾーンと、該クリーンゾーンの天井に、下部が開口して設けられ、給気チャンバと、前記クリーンゾーンの床下に設けられたレターンチャンバと、該レターンチャンバと前記給気チャンバとを結ぶ空気循環路と、空気循環路に接続された空調機と、給気チャンバ内に設けられた高性能フィルタと、前記給気チャンバとクリーンゾーンの天井の開口を覆うように設けられた複数のノズルプレレートとを備えたことを特徴とするクリーンルーム。
- 給気チャンバの開口部に、方形の開口が複数形成された支持枠が設けられ、その支持枠の各開口部に、シール材を介してプレートノズルが取り付けられる請求項11記載のクリーンルーム。
- プレートノズルは、薄型箱状に形成されたプレートと、そのプレートの縦横に多数のノズルが、そのプレートと一体に樹脂成形して形成される請求項11記載のクリーンルーム。
- ノズルの内径が2〜40mmの範囲内のいずれかに形成される請求項13記載のクリーンルーム。
- プレートノズルのノズルから吹き出された清浄空気が、風速0.15m/secとなる有効噴射距離をノズル内径に応じて予め求めておき、前記床上のある高さの面で風速0.15〜0.5m/secとなるように、前記ノズルの有効噴射距離からノズル内径を選定する請求項14記載のクリーンルーム。
- 各ノズルから吹き出された清浄空気は、有効噴射距離に達する間に一定の広がり角で吹き出され、ノズル同士の間隔は、隣接するノズルから吹き出された清浄空気の広がり角で、前記有効噴射距離内で隣接するノズルからの清浄空気が相互に交わるように設定される請求項15記載のクリーンルーム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010242798A JP4755307B1 (ja) | 2010-10-28 | 2010-10-28 | クリーンルーム |
KR1020117027760A KR101284022B1 (ko) | 2010-10-28 | 2010-11-12 | 크린 룸 |
PCT/JP2010/070202 WO2012056592A1 (ja) | 2010-10-28 | 2010-11-12 | クリーンルーム |
CN201080025662.4A CN102656410B (zh) | 2010-10-28 | 2010-11-12 | 洁净室 |
TW100126993A TWI431229B (zh) | 2010-10-28 | 2011-07-29 | Clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010242798A JP4755307B1 (ja) | 2010-10-28 | 2010-10-28 | クリーンルーム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4755307B1 JP4755307B1 (ja) | 2011-08-24 |
JP2012093066A true JP2012093066A (ja) | 2012-05-17 |
Family
ID=44597130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010242798A Active JP4755307B1 (ja) | 2010-10-28 | 2010-10-28 | クリーンルーム |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4755307B1 (ja) |
KR (1) | KR101284022B1 (ja) |
CN (1) | CN102656410B (ja) |
TW (1) | TWI431229B (ja) |
WO (1) | WO2012056592A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102818323A (zh) * | 2012-08-02 | 2012-12-12 | 青岛海信日立空调系统有限公司 | 基于喷射送风的热泵空调系统 |
JP2022056167A (ja) * | 2020-09-29 | 2022-04-08 | 芝浦メカトロニクス株式会社 | 送風器及び電子部品の実装装置 |
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CN102818323B (zh) * | 2012-08-02 | 2015-03-11 | 青岛海信日立空调系统有限公司 | 基于喷射送风的热泵空调系统 |
JP2022056167A (ja) * | 2020-09-29 | 2022-04-08 | 芝浦メカトロニクス株式会社 | 送風器及び電子部品の実装装置 |
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