JP2011082537A5 - - Google Patents

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Publication number
JP2011082537A5
JP2011082537A5 JP2010255262A JP2010255262A JP2011082537A5 JP 2011082537 A5 JP2011082537 A5 JP 2011082537A5 JP 2010255262 A JP2010255262 A JP 2010255262A JP 2010255262 A JP2010255262 A JP 2010255262A JP 2011082537 A5 JP2011082537 A5 JP 2011082537A5
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JP
Japan
Prior art keywords
acid
chemical mechanical
mechanical polishing
water
polishing abrasive
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JP2010255262A
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English (en)
Japanese (ja)
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JP5472049B2 (ja
JP2011082537A (ja
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Priority to JP2010255262A priority Critical patent/JP5472049B2/ja
Priority claimed from JP2010255262A external-priority patent/JP5472049B2/ja
Publication of JP2011082537A publication Critical patent/JP2011082537A/ja
Publication of JP2011082537A5 publication Critical patent/JP2011082537A5/ja
Application granted granted Critical
Publication of JP5472049B2 publication Critical patent/JP5472049B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2010255262A 1999-08-17 2010-11-15 化学機械研磨用研磨剤 Expired - Lifetime JP5472049B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010255262A JP5472049B2 (ja) 1999-08-17 2010-11-15 化学機械研磨用研磨剤

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP1999230930 1999-08-17
JP23093099 1999-08-17
JP1999308665 1999-10-29
JP30866599 1999-10-29
JP2010255262A JP5472049B2 (ja) 1999-08-17 2010-11-15 化学機械研磨用研磨剤

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006034860A Division JP2006191132A (ja) 1999-08-17 2006-02-13 化学機械研磨用研磨剤及び基板の研磨法

Related Child Applications (1)

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JP2012099648A Division JP2012182473A (ja) 1999-08-17 2012-04-25 化学機械研磨用研磨剤

Publications (3)

Publication Number Publication Date
JP2011082537A JP2011082537A (ja) 2011-04-21
JP2011082537A5 true JP2011082537A5 (enExample) 2012-06-14
JP5472049B2 JP5472049B2 (ja) 2014-04-16

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ID=26529617

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2001517419A Expired - Lifetime JP3954383B2 (ja) 1999-08-17 2000-08-17 化学機械研磨用研磨剤及び基板の研磨法
JP2010255262A Expired - Lifetime JP5472049B2 (ja) 1999-08-17 2010-11-15 化学機械研磨用研磨剤
JP2012099648A Withdrawn JP2012182473A (ja) 1999-08-17 2012-04-25 化学機械研磨用研磨剤

Family Applications Before (1)

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JP2001517419A Expired - Lifetime JP3954383B2 (ja) 1999-08-17 2000-08-17 化学機械研磨用研磨剤及び基板の研磨法

Family Applications After (1)

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JP2012099648A Withdrawn JP2012182473A (ja) 1999-08-17 2012-04-25 化学機械研磨用研磨剤

Country Status (8)

Country Link
US (2) US7744666B2 (enExample)
EP (1) EP1211717B1 (enExample)
JP (3) JP3954383B2 (enExample)
KR (1) KR100510977B1 (enExample)
CN (1) CN101792655B (enExample)
AU (1) AU6594200A (enExample)
TW (1) TW501197B (enExample)
WO (1) WO2001013417A1 (enExample)

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