JP2010524208A5 - - Google Patents

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Publication number
JP2010524208A5
JP2010524208A5 JP2010501279A JP2010501279A JP2010524208A5 JP 2010524208 A5 JP2010524208 A5 JP 2010524208A5 JP 2010501279 A JP2010501279 A JP 2010501279A JP 2010501279 A JP2010501279 A JP 2010501279A JP 2010524208 A5 JP2010524208 A5 JP 2010524208A5
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JP
Japan
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acid
ether
optionally
glycol
chloride
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JP2010501279A
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English (en)
Japanese (ja)
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JP2010524208A (ja
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Priority claimed from PCT/US2008/058878 external-priority patent/WO2008121952A1/en
Publication of JP2010524208A publication Critical patent/JP2010524208A/ja
Publication of JP2010524208A5 publication Critical patent/JP2010524208A5/ja
Pending legal-status Critical Current

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JP2010501279A 2007-03-31 2008-03-31 ウエハ再生のために材料を剥離する方法 Pending JP2010524208A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US90942807P 2007-03-31 2007-03-31
US94373607P 2007-06-13 2007-06-13
PCT/US2008/058878 WO2008121952A1 (en) 2007-03-31 2008-03-31 Methods for stripping material for wafer reclamation

Publications (2)

Publication Number Publication Date
JP2010524208A JP2010524208A (ja) 2010-07-15
JP2010524208A5 true JP2010524208A5 (https=) 2011-05-12

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ID=39577853

Family Applications (1)

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JP2010501279A Pending JP2010524208A (ja) 2007-03-31 2008-03-31 ウエハ再生のために材料を剥離する方法

Country Status (7)

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EP (1) EP1975987A3 (https=)
JP (1) JP2010524208A (https=)
KR (1) KR20100015974A (https=)
CN (1) CN101681130A (https=)
SG (1) SG166102A1 (https=)
TW (1) TW200908148A (https=)
WO (1) WO2008121952A1 (https=)

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