JP2009542008A5 - - Google Patents

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Publication number
JP2009542008A5
JP2009542008A5 JP2009516709A JP2009516709A JP2009542008A5 JP 2009542008 A5 JP2009542008 A5 JP 2009542008A5 JP 2009516709 A JP2009516709 A JP 2009516709A JP 2009516709 A JP2009516709 A JP 2009516709A JP 2009542008 A5 JP2009542008 A5 JP 2009542008A5
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JP
Japan
Prior art keywords
gas
microcrystalline silicon
depositing
silicon film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009516709A
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English (en)
Japanese (ja)
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JP2009542008A (ja
Filing date
Publication date
Priority claimed from US11/426,127 external-priority patent/US7655542B2/en
Application filed filed Critical
Publication of JP2009542008A publication Critical patent/JP2009542008A/ja
Publication of JP2009542008A5 publication Critical patent/JP2009542008A5/ja
Pending legal-status Critical Current

Links

JP2009516709A 2006-06-23 2007-06-20 光起電デバイス用の微結晶シリコン膜を堆積するための方法および装置 Pending JP2009542008A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/426,127 US7655542B2 (en) 2006-06-23 2006-06-23 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device
PCT/US2007/071703 WO2007149945A2 (en) 2006-06-23 2007-06-20 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device

Publications (2)

Publication Number Publication Date
JP2009542008A JP2009542008A (ja) 2009-11-26
JP2009542008A5 true JP2009542008A5 (https=) 2010-05-13

Family

ID=38834369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009516709A Pending JP2009542008A (ja) 2006-06-23 2007-06-20 光起電デバイス用の微結晶シリコン膜を堆積するための方法および装置

Country Status (7)

Country Link
US (3) US7655542B2 (https=)
EP (1) EP2041797A4 (https=)
JP (1) JP2009542008A (https=)
KR (1) KR20090031492A (https=)
CN (1) CN101322251B (https=)
TW (1) TW200810138A (https=)
WO (1) WO2007149945A2 (https=)

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