JP2009507396A - フッ素処理を用いたロバストトランジスタ - Google Patents
フッ素処理を用いたロバストトランジスタ Download PDFInfo
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- JP2009507396A JP2009507396A JP2008532215A JP2008532215A JP2009507396A JP 2009507396 A JP2009507396 A JP 2009507396A JP 2008532215 A JP2008532215 A JP 2008532215A JP 2008532215 A JP2008532215 A JP 2008532215A JP 2009507396 A JP2009507396 A JP 2009507396A
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- 229910052731 fluorine Inorganic materials 0.000 title claims description 30
- 239000011737 fluorine Substances 0.000 title claims description 30
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims description 13
- 150000002500 ions Chemical group 0.000 claims abstract description 87
- 238000000034 method Methods 0.000 claims abstract description 51
- 239000004065 semiconductor Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 230000004888 barrier function Effects 0.000 claims description 57
- 239000000463 material Substances 0.000 claims description 44
- 230000005684 electric field Effects 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 22
- -1 fluorine ions Chemical class 0.000 claims description 22
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- 150000004767 nitrides Chemical class 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 7
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000009832 plasma treatment Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 229910002601 GaN Inorganic materials 0.000 description 29
- 229910002704 AlGaN Inorganic materials 0.000 description 27
- 125000006850 spacer group Chemical group 0.000 description 23
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 13
- 229910010271 silicon carbide Inorganic materials 0.000 description 13
- 230000006911 nucleation Effects 0.000 description 12
- 238000010899 nucleation Methods 0.000 description 12
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
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- 238000001451 molecular beam epitaxy Methods 0.000 description 2
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
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- 238000012360 testing method Methods 0.000 description 2
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- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000807 Ga alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 229910017947 MgOx Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 239000003989 dielectric material Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021339 platinum silicide Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/207—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
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- Power Engineering (AREA)
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- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
Claims (31)
- バッファ層と、
前記バッファ層の上のバリア層と、
前記バッファ層と前記バリア層との界面における2次元電子ガス(2DEG)と、
前記バリア層の中の負イオン領域と
を備えることを特徴とする高電子移動度トランジスタ(HEMT)。 - 前記バリア層の上に、それぞれ、ゲートコンタクトとソースコンタクトとドレインコンタクトとをさらに備えることを特徴とする請求項1に記載のHEMT。
- 前記バッファ層および前記バリア層は、III族窒化物材料により作られ、
前記負イオン領域は、フッ素イオンを備えることを特徴とする請求項1に記載のHEMT。 - 前記負イオン領域は、HEMTの動作時電(E)界を打ち消して低減する位置に置かれることを特徴とする請求項1に記載のHEMT。
- 前記ゲートは、前記ソースコンタクトと前記ドレインコンタクトとの間にあって、
前記負イオン領域は、少なくとも一部分が前記ゲートの下にあることを特徴とする請求項2に記載のHEMT。 - 前記負イオン領域は、前記バリア層の中に種々の深さを有することを特徴とする請求項1に記載のHEMT。
- 前記負イオン領域は、種々の場所に種々の濃度の負イオンを備えることを特徴とする請求項1に記載のHEMT。
- 前記負イオン領域は、前記バリア層の中にプラズマ処理により導入されることを特徴とする請求項1に記載のHEMT。
- フィールドプレートをさらに備えることを特徴とする請求項1に記載のHEMT。
- 前記負イオン領域は、前記バッファ層の中に広がることを特徴とする請求項1に記載のHEMT。
- 半導体ベースのデバイスであって、
動作時電(E)界がかかる複数の活性半導体層と、
前記複数の半導体層のうちの少なくとも1つの中に、前記動作時電(E)界を打ち消すための負イオン領域と
を備えることを特徴とする半導体デバイス。 - 高電子移動度トランジスタ(HEMT)を備えることを特徴とする請求項11に記載の半導体デバイス。
- 前記活性半導体層は、III族窒化物材料を備え、
前記負イオン領域は、フッ素イオンを備えることを特徴とする請求項11に記載の半導体デバイス。 - 前記負イオン領域は、前記活性半導体層の中に種々の深さの部分を有することを特徴とする請求項11に記載の半導体デバイス。
- 前記負イオン領域は、種々の場所に種々の濃度の負イオンを備えることを特徴とする請求項11に記載の半導体デバイス。
- III族窒化物ベースのバッファ層と、
前記バッファ層の上の、III族窒化物ベースのバリア層と、
前記バッファ層と前記バリア層とのヘテロ界面における2次元電子ガス(2DEG)と、
前記バリア層の上のソースコンタクトおよびドレインコンタクトと、
前記ソースコンタクトと前記ドレイコンタクトとの間の前記バリア層の上のゲートと、
前記HEMTの中の動作時電(E)界を打ち消すためのフッ素負イオン領域と
を備えることを特徴とする高電子移動度トランジスタ(HEMT)。 - 前記負イオン領域は、少なくとも一部が前記バリア層の中にあることを特徴とする請求項16に記載のHEMT。
- 前記負イオン領域は、少なくとも一部が前記バッファ層の中にあることを特徴とする請求項16に記載のHEMT。
- 前記負イオン領域は、少なくとも一部が前記ゲートの下にあることを特徴とする請求項16に記載のHEMT。
- フィールドプレートをさらに備えることを特徴とする請求項16に記載のHEMT。
- 半導体デバイスを製造する方法であって、
基板を設けるステップと、
前記基板の上にエピタキシャル層を成長させるステップと、
前記半導体デバイスの中の動作時電(E)界を打ち消すために、前記エピタキシャル層の中に負イオンを導入し、負イオン領域を形成するステップと
を備えることを特徴とする方法。 - 前記エピタキシャル層の上にコンタクトを堆積させるステップをさらに備えることを特徴とする請求項21に記載の方法。
- 前記負イオンは、エッチングシステムにおけるプラズマ処理を用いて前記エピタキシャル層の中に導入されることを特徴とする請求項21に記載の方法。
- 前記エピタキシャル層は、III族窒化物材料により作られ、
前記負イオンは、フッ素イオンを備えることを特徴とする請求項21に記載の方法。 - 高電子移動度トランジスタ(HEMT)を製造する方法であって、
基板を設けるステップと、
前記基板の上にIII族窒化物のバッファ層およびバリア層を成長させるステップと、
前記バリア層の中に負イオン領域を形成するステップと
を備え、
前記負イオン領域は、前記HEMTの中の動作時電(E)界を打ち消すように働くことを特徴とする方法。 - 前記バリア層の上に、ソースコンタクトおよびドレインコンタクトを堆積させるステップと、
前記バリア層の上にゲートを堆積させるステップと
をさらに備えることを特徴とする請求項25に記載の方法。 - 前記負イオン領域を形成する前記ステップの前に、前記バリア層の上にソースコンタクトおよびドレインコンタクトを堆積させるステップと、
前記負イオン領域を形成する前記ステップの後に、前記ゲートを堆積させるステップと
をさらに備えることを特徴とする請求項25に記載の方法。 - 前記負イオン領域は、フッ素イオンを備えることを特徴とする請求項25に記載の方法。
- 前記負イオン領域は、プラズマ処理によって形成されることを特徴とする請求項25に記載の方法。
- 前記エッチングは、CF4、SF6、およびCHF3のグループからのプラズマガス化学処理を用いることを特徴とする請求項25に記載の方法。
- 前記負イオン領域は、少なくとも一部分が前記ゲートの下にあることを特徴とする請求項26に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71505705P | 2005-09-07 | 2005-09-07 | |
US60/715,057 | 2005-09-07 | ||
PCT/US2006/026405 WO2008027027A2 (en) | 2005-09-07 | 2006-07-07 | Transistor with fluorine treatment |
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Publication Number | Publication Date |
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JP2009507396A true JP2009507396A (ja) | 2009-02-19 |
JP5501618B2 JP5501618B2 (ja) | 2014-05-28 |
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Country Status (5)
Country | Link |
---|---|
US (3) | US7638818B2 (ja) |
EP (3) | EP2312634B1 (ja) |
JP (1) | JP5501618B2 (ja) |
TW (1) | TW200715570A (ja) |
WO (1) | WO2008027027A2 (ja) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010532080A (ja) * | 2007-07-04 | 2010-09-30 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | パターン化された層を基板上に形成する方法 |
JP2011071512A (ja) * | 2009-09-24 | 2011-04-07 | Samsung Electronics Co Ltd | 電力電子素子及びその製造方法並びに電力電子素子を含む集積回路モジュール |
JP2012038966A (ja) * | 2010-08-09 | 2012-02-23 | Sanken Electric Co Ltd | 化合物半導体装置 |
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EP1938385A2 (en) | 2008-07-02 |
US7955918B2 (en) | 2011-06-07 |
TW200715570A (en) | 2007-04-16 |
US8669589B2 (en) | 2014-03-11 |
EP2312634A3 (en) | 2011-05-25 |
US20070114569A1 (en) | 2007-05-24 |
EP2312635A3 (en) | 2011-05-25 |
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WO2008027027A2 (en) | 2008-03-06 |
US20110220966A1 (en) | 2011-09-15 |
JP5501618B2 (ja) | 2014-05-28 |
EP2312635B1 (en) | 2020-04-01 |
EP2312634B1 (en) | 2019-12-25 |
EP1938385B1 (en) | 2014-12-03 |
EP2312634A2 (en) | 2011-04-20 |
EP2312635A2 (en) | 2011-04-20 |
US20100041188A1 (en) | 2010-02-18 |
US7638818B2 (en) | 2009-12-29 |
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