JP2009506490A5 - - Google Patents
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- JP2009506490A5 JP2009506490A5 JP2008527504A JP2008527504A JP2009506490A5 JP 2009506490 A5 JP2009506490 A5 JP 2009506490A5 JP 2008527504 A JP2008527504 A JP 2008527504A JP 2008527504 A JP2008527504 A JP 2008527504A JP 2009506490 A5 JP2009506490 A5 JP 2009506490A5
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- 239000010410 layer Substances 0.000 claims description 306
- 239000000463 material Substances 0.000 claims description 111
- 238000000034 method Methods 0.000 claims description 78
- 238000000151 deposition Methods 0.000 claims description 72
- 239000000758 substrate Substances 0.000 claims description 68
- 230000008021 deposition Effects 0.000 claims description 54
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 125000006850 spacer group Chemical group 0.000 claims description 47
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 46
- 239000002904 solvent Substances 0.000 claims description 42
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- 238000005530 etching Methods 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 238000000059 patterning Methods 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 5
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- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000000412 dendrimer Substances 0.000 description 4
- 229920000736 dendritic polymer Polymers 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
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- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 2
- 230000005258 radioactive decay Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
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- 229920001621 AMOLED Polymers 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001555 benzenes Chemical class 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
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- 230000008878 coupling Effects 0.000 description 1
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- HHNHBFLGXIUXCM-GFCCVEGCSA-N cyclohexylbenzene Chemical compound [CH]1CCCC[C@@H]1C1=CC=CC=C1 HHNHBFLGXIUXCM-GFCCVEGCSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
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- 238000011049 filling Methods 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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- 239000012454 non-polar solvent Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- -1 poly (p-phenylene vinylene) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
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- 239000002344 surface layer Substances 0.000 description 1
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- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0517195.4A GB0517195D0 (en) | 2005-08-23 | 2005-08-23 | Molecular electronic device structures and fabrication methods |
| GB0517195.4 | 2005-08-23 | ||
| GB0605128.8 | 2006-03-15 | ||
| GBGB0605128.8A GB0605128D0 (en) | 2005-08-23 | 2006-03-15 | Molecular electronic device structures and fabrication methods |
| PCT/GB2006/003135 WO2007023272A1 (en) | 2005-08-23 | 2006-08-22 | Organic electronic device structures and fabrication methods |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011258870A Division JP5575094B2 (ja) | 2005-08-23 | 2011-11-28 | 液滴堆積ウェルの形成方法、有機電子デバイス、有機電子デバイスの形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009506490A JP2009506490A (ja) | 2009-02-12 |
| JP2009506490A5 true JP2009506490A5 (https=) | 2010-11-25 |
| JP5183475B2 JP5183475B2 (ja) | 2013-04-17 |
Family
ID=35098100
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008527504A Expired - Fee Related JP5183475B2 (ja) | 2005-08-23 | 2006-08-22 | 有機電子デバイスの構造および製造方法 |
| JP2011258870A Expired - Fee Related JP5575094B2 (ja) | 2005-08-23 | 2011-11-28 | 液滴堆積ウェルの形成方法、有機電子デバイス、有機電子デバイスの形成方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011258870A Expired - Fee Related JP5575094B2 (ja) | 2005-08-23 | 2011-11-28 | 液滴堆積ウェルの形成方法、有機電子デバイス、有機電子デバイスの形成方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8436528B2 (https=) |
| JP (2) | JP5183475B2 (https=) |
| KR (2) | KR101335852B1 (https=) |
| CN (1) | CN101243553B (https=) |
| GB (4) | GB0517195D0 (https=) |
Families Citing this family (71)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0618698D0 (en) * | 2006-09-22 | 2006-11-01 | Cambridge Display Tech Ltd | Molecular electronic device fabrication methods and structures |
| US20090058271A1 (en) * | 2007-08-28 | 2009-03-05 | Lg Electronics Inc. | Organic light emitting device |
| WO2010092796A1 (ja) | 2009-02-10 | 2010-08-19 | パナソニック株式会社 | 発光素子、発光素子を備えた発光装置および発光素子の製造方法 |
| EP2398083B1 (en) | 2009-02-10 | 2018-06-13 | Joled Inc. | Light-emitting element, display device, and method for manufacturing light-emitting element |
| US8525407B2 (en) * | 2009-06-24 | 2013-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Light source and device having the same |
| JP5437736B2 (ja) | 2009-08-19 | 2014-03-12 | パナソニック株式会社 | 有機ｅｌ素子 |
| CN101996951B (zh) * | 2009-08-20 | 2013-09-11 | 中芯国际集成电路制造(上海)有限公司 | 非易失性存储器结构及其形成方法 |
| KR101588899B1 (ko) * | 2009-09-17 | 2016-01-27 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 |
| CN102097490A (zh) * | 2009-12-15 | 2011-06-15 | 中芯国际集成电路制造(上海)有限公司 | 双位快闪存储器的制作方法 |
| CN102097383B (zh) * | 2009-12-15 | 2013-06-19 | 中芯国际集成电路制造(上海)有限公司 | 双位快闪存储器的制作方法 |
| KR101643009B1 (ko) * | 2009-12-22 | 2016-07-27 | 가부시키가이샤 제이올레드 | 표시 장치와 그 제조 방법 |
| CN102110658B (zh) * | 2009-12-29 | 2013-07-17 | 中芯国际集成电路制造(上海)有限公司 | 双位快闪存储器的制作方法 |
| CN102110657A (zh) * | 2009-12-29 | 2011-06-29 | 中芯国际集成电路制造(上海)有限公司 | 双位快闪存储器的制作方法 |
| US8603922B2 (en) * | 2010-01-27 | 2013-12-10 | Creator Technology B.V. | Semiconductor device, display, electronic apparatus and method of manufacturing a semiconductor device |
| CN102440071B (zh) | 2010-07-05 | 2014-09-03 | 松下电器产业株式会社 | 发光元件的制造方法，使用发光元件的有机显示面板、有机发光装置及有机显示装置 |
| WO2012014256A1 (ja) | 2010-07-30 | 2012-02-02 | パナソニック株式会社 | 有機ｅｌ素子 |
| WO2012017496A1 (ja) * | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子、発光素子を備えた発光装置および発光素子の製造方法 |
| CN103038908B (zh) | 2010-08-06 | 2016-01-06 | 株式会社日本有机雷特显示器 | 发光元件、具备发光元件的发光装置以及发光元件的制造方法 |
| WO2012017495A1 (ja) * | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子およびその製造方法 |
| WO2012017492A1 (ja) * | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子とその製造方法、および発光装置 |
| JP5543599B2 (ja) | 2010-08-06 | 2014-07-09 | パナソニック株式会社 | 発光素子の製造方法 |
| JP5677433B2 (ja) | 2010-08-06 | 2015-02-25 | パナソニック株式会社 | 有機ｅｌ素子、表示装置および発光装置 |
| WO2012017488A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子とその製造方法、および発光装置 |
| WO2012017502A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子およびその製造方法 |
| JP5612692B2 (ja) | 2010-08-06 | 2014-10-22 | パナソニック株式会社 | 有機ｅｌ素子およびその製造方法 |
| JP5677436B2 (ja) | 2010-08-06 | 2015-02-25 | パナソニック株式会社 | 有機ｅｌ素子 |
| WO2012017503A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子 |
| WO2012017497A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子 |
| WO2012017485A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子、表示装置および発光装置 |
| WO2012017489A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機ｅｌ素子、表示装置および発光装置 |
| JP5197882B2 (ja) | 2010-10-15 | 2013-05-15 | パナソニック株式会社 | 有機発光パネルとその製造方法、および有機表示装置 |
| CN102960066B (zh) | 2010-10-15 | 2015-09-30 | 株式会社日本有机雷特显示器 | 有机发光面板及其制造方法以及有机显示装置 |
| JP5677448B2 (ja) | 2010-10-15 | 2015-02-25 | パナソニック株式会社 | 有機発光パネルとその製造方法、および有機表示装置 |
| JP5573616B2 (ja) | 2010-11-12 | 2014-08-20 | 住友化学株式会社 | 表示装置 |
| JP5418487B2 (ja) * | 2010-12-16 | 2014-02-19 | 住友化学株式会社 | 表示装置 |
| CN103283054B (zh) | 2011-01-21 | 2015-12-16 | 株式会社日本有机雷特显示器 | 有机el元件 |
| US8981361B2 (en) | 2011-02-25 | 2015-03-17 | Panasonic Corporation | Organic electroluminescence display panel with tungsten oxide containing hole injection layer that electrically connects electrode to auxiliary wiring, and organic electroluminescence display device |
| GB201105582D0 (en) * | 2011-04-01 | 2011-05-18 | Cambridge Display Tech Ltd | Organic light-emitting device and method |
| WO2012153445A1 (ja) | 2011-05-11 | 2012-11-15 | パナソニック株式会社 | 有機ｅｌ表示パネルおよび有機ｅｌ表示装置 |
| KR20120128966A (ko) * | 2011-05-18 | 2012-11-28 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법 |
| US10158089B2 (en) | 2011-05-27 | 2018-12-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
| KR101888941B1 (ko) * | 2012-05-16 | 2018-08-16 | 엘지디스플레이 주식회사 | 표시장치 및 이의 제조 방법 |
| KR102022123B1 (ko) * | 2012-09-05 | 2019-09-17 | 리쿠아비스타 비.브이. | 표시기판, 이의 제조방법 및 이를 포함하는 전기습윤 표시패널 |
| JP6204012B2 (ja) * | 2012-10-17 | 2017-09-27 | 株式会社半導体エネルギー研究所 | 発光装置 |
| KR101427776B1 (ko) * | 2013-01-23 | 2014-08-12 | 서울대학교산학협력단 | 준 면발광 수직형 유기발광 트랜지스터 및 그 제조 방법 |
| CN103187434A (zh) * | 2013-04-01 | 2013-07-03 | 京东方科技集团股份有限公司 | 有机电致发光器件及制备有机电致发光器件的方法 |
| GB2514401B (en) * | 2013-05-23 | 2017-08-23 | Cambridge Display Tech Ltd | Inkjet Devices |
| CN103337594B (zh) | 2013-05-30 | 2016-02-10 | 京东方科技集团股份有限公司 | 一种oled基板和显示装置 |
| KR102114314B1 (ko) | 2013-06-26 | 2020-05-25 | 삼성디스플레이 주식회사 | 유기발광 디스플레이 장치 및 그 제조방법 |
| KR102038817B1 (ko) * | 2013-06-28 | 2019-11-01 | 엘지디스플레이 주식회사 | 유기전계 발광소자 및 이의 제조 방법 |
| US8907438B1 (en) * | 2013-08-08 | 2014-12-09 | The United States Of America As Represented By The Secretary Of The Army | Semiconducting organic photovoltaic sensor |
| KR102076620B1 (ko) * | 2013-09-24 | 2020-02-12 | 엘지디스플레이 주식회사 | 유기발광 다이오드 표시장치 및 그 제조 방법 |
| JP6059647B2 (ja) | 2013-12-06 | 2017-01-11 | 双葉電子工業株式会社 | 有機エレクトロルミネッセンスデバイス及びその製造方法 |
| KR102361967B1 (ko) * | 2014-07-11 | 2022-02-11 | 엘지디스플레이 주식회사 | 유기전계발광 표시장치 |
| KR102242078B1 (ko) * | 2014-08-05 | 2021-04-21 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
| CN104167430B (zh) * | 2014-08-08 | 2017-04-05 | 京东方科技集团股份有限公司 | 一种有机电致发光显示面板、其制作方法及显示装置 |
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| CN105140236B (zh) * | 2015-07-31 | 2019-08-06 | 京东方科技集团股份有限公司 | 基板组件及其制备方法以及显示装置 |
| CN105118929B (zh) * | 2015-08-03 | 2018-01-02 | 京东方科技集团股份有限公司 | 电极结构和有机发光单元及其制造方法 |
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| KR102550322B1 (ko) | 2016-03-22 | 2023-07-03 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
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| WO2018036542A1 (zh) * | 2016-08-26 | 2018-03-01 | 纳晶科技股份有限公司 | 发光器件的制作方法、发光器件及混合发光器件 |
| CN108074950B (zh) * | 2016-11-11 | 2021-11-23 | 乐金显示有限公司 | 电致发光显示设备及其制造方法 |
| CN106654052B (zh) * | 2017-03-10 | 2018-11-30 | 江苏集萃有机光电技术研究所有限公司 | 有机发光二极管器件及其封装方法 |
| CN108630728B (zh) * | 2017-03-24 | 2020-07-28 | 京东方科技集团股份有限公司 | 像素界定层、有机电致发光器件及其制备方法和显示装置 |
| JP6470477B1 (ja) * | 2017-11-28 | 2019-02-13 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌ発光素子及びその製造方法 |
| CN109192886B (zh) * | 2018-09-05 | 2021-01-22 | 京东方科技集团股份有限公司 | 一种显示基板及其制作方法、显示面板及显示装置 |
| KR102837792B1 (ko) * | 2019-05-13 | 2025-07-23 | 삼성디스플레이 주식회사 | 디스플레이 패널 및 이를 포함하는 디스플레이 장치 |
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- 2006-08-22 KR KR1020087006960A patent/KR101335852B1/ko not_active Expired - Fee Related
- 2006-08-22 US US12/063,984 patent/US8436528B2/en not_active Expired - Fee Related
- 2006-08-22 GB GB1322071.0A patent/GB2507203A/en not_active Withdrawn
- 2006-08-22 CN CN2006800305982A patent/CN101243553B/zh not_active Expired - Fee Related
- 2006-08-22 KR KR1020137014519A patent/KR101431408B1/ko not_active Expired - Fee Related
- 2006-08-22 GB GB0803371.4A patent/GB2500361B/en not_active Expired - Fee Related
- 2006-08-22 JP JP2008527504A patent/JP5183475B2/ja not_active Expired - Fee Related
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2011
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2013
- 2013-03-18 US US13/846,607 patent/US8836214B2/en active Active
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