JP2009170872A - 優勢エッチング抵抗性を具備する低k誘電バリアを得る方法 - Google Patents
優勢エッチング抵抗性を具備する低k誘電バリアを得る方法 Download PDFInfo
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Abstract
【解決手段】半導体基板を処理する方法を提供し、この方法は、ケイ素−炭素結合および炭素−炭素結合を備える前駆物質を処理チャンバへ流すステップと、半導体基板上に炭素−炭素結合を有する誘電バリア膜を形成するために、処理チャンバ内において前駆物質の低密度プラズマを生成するステップであって、この前駆物質中の炭素−炭素結合の少なくとも一部は低密度プラズマ中に保存されかつ誘電膜内に組み込まれるステップと、を備える。
【選択図】図2
Description
[0001]本発明の実施形態は、一般的に、集積回路の製造に関する。より具体的には、本発明の実施形態は、半導体デバイスの製造において使用される誘電バリア膜を形成する方法に関する。
[0002]集積回路は、そのようなデバイスが数十年前に導入されて以来、サイズが劇的に縮小した。これ以降、一般的に集積回路は「2年で半サイズ」、即ち、2年毎にチップ上のデバイスの数が2倍になるというルール(しばしばムーアの法則と呼ばれる)に従ってきた。現在、通常、製作設備では形状サイズが0.1μmのデバイスを製造しているが、またすぐに、これよりも形状サイズがさらに小さいデバイスを製造することになるだろう。
[0021]本発明の実施形態は、例えばPRODUCER(登録商標)SE CVDシステムまたは、DXZ(登録商標)CVDシステムのようなPECVDチャンバの中で実施され、双方とも、カリフォルニア州サンタクララにあるApplied Materials,Inc.により市販されている。
[0033]図2は、本発明の一実施形態による処理順序200を図示したフローチャートである。
式中、R1、R2、R3、R4、R5、R6、R7、R8、R9、R10のそれぞれは、H、CH3、C2H5、あるいは任意のアルキル基のうちの独立した1つである。
式中、R1、R2、R3、R4、R5、R6、R7、R8のそれぞれは、H、CH3、または任意のアルキル基のうちの独立した1つである。
ジメチルシラン (CH3)2−SiH2
トリメチルシラン(TMS) (CH3)3−SiH
エチルシラン CH3−CH2−SiH3
ジシラノメタン SiH3−CH2−SiH3
ビス(メチルシラノ)メタン CH3−SiH2−CH2−SiH2−CH3
1、2ジシラノエタン SiH3−CH2−CH2−SiH3
1、2ビス(メチルシラノ)エタン CH3−SiH2−CH2−CH2−SiH2−CH3
2、2ジシラノプロパン SiH3−C(CH3)2−SiH3
1、3、5トリシラノ2、4、6トリメチレン
−(−SiH2−CH2−)3−(環状)
ジエチルシラン (C2H5)2SiH2
プロピルシラン C3H7SiH3
ビニルメチルシラン (CH2=CH)(CH3)SiH2
1、1、2、2テトラメチルジシラン HSi(CH3)2−Si(CH3)2H
ヘキサメチルジシラン (CH3)3Si−Si(CH3)3
1、1、2、2、3、3ヘキサメチルトリシラン
H(CH3)2Si−Si(CH3)2−SiH(CH3)2
1、1、2、3、3ペンタメチルトリシラン
H(CH3)2Si−SiH(CH3)−SiH(CH3)2
ビス(メチルシラノ)エタン CH3−SiH2−(CH2)2−SiH2−CH3
ビス(メチルシラノ)プロパン CH3−SiH2−(CH2)3−SiH2−CH3
ビス(ジメチルシラノ)エタン (CH3)2−SiH−(CH2)2−SiH−(CH3)2
ビス(ジメチルシラノ)プロパン (CH3)2−SiH−(CH2)3−SiH−(CH3)2
[0043]さらなるケイ素源を、本明細書に参照により組み込まれる米国特許第6、790、788号、「Method of Improving Stability in Low−k Barrier Layers」に見ることができる。
[0052]トリメチルシラン(TMS、(CH3)3SiH)およびエチレン(C2H4)の組み合わせを備える前駆物質を使用して、炭化ケイ素を備える多孔性誘電層を堆積させるためのPECVD堆積処理である。キャリアガス、例えばヘリウム、アルゴン、窒素、またはこれらの組み合わせが、前駆物質と共に処理チャンバに導入される。
流量(前駆物質とキャリアガスを含む):約5〜10、000sccm。この場合、キャリアガスの流量は約5〜10、000sccmであってもよい。
温度:約100〜550℃、または約200〜350℃
チャンバ圧:1雰囲気に対して約10ミリトール
RF電力:約15〜3、000W。一実施形態では、RF電力は約500W未満であってもよい。
[0054]トリメチルシラン(TMS、(CH3)3SiH)、エチレン(C2H4)、アンモニア(NH3)の組み合わせを備える前駆物質を使用して、炭化ケイ素を備える多孔性誘電層を堆積させるためのPECVD堆積処理である。一実施形態では、エチレンとTMSの比率は約3:1〜5:1である。アンモニアとTMSの比率は約1:10〜10:1であってもよい。別の実施形態では、アンモニアとTMSの比率は約1:4〜3:1であってもよい。処理パラメータは以下のとおりである:
流量(前駆物質とキャリアガスを含む):約5〜10、000sccm。この場合、キャリアガスの流量は約5〜10、000sccmであってもよい。
温度:約100〜550℃、または約200〜350℃
チャンバ圧:1雰囲気に対して約10ミリトール
RF電力:約15〜3、000W。一実施形態では、RF電力は約500W未満であってもよい。
[0055]トリメチルシラン(TMS、(CH3)3SiH)およびエチレン(C2H4)の組み合わせを備える前駆物質を使用して多孔性の誘電バリアを堆積させるためのPECVD堆積処理である。TMSとエチレンの比率を含む処理条件は、炭素の原子濃度が15%よりも大きくなるように設定される。一実施形態では、エチレンとTMSの比率は約1:1〜8:1であり、TMS/エチレン前駆物質とキャリアガスの流量は約5〜10、000sccmであり、温度は約350℃である。これらの条件の場合、チャンバ圧は約10ミリトール〜1気圧、プラズマ生成の無線周波数(RF)出力は約15〜3、000W、基板と、処理中の基板に前駆物質を提供するように構成されたシャワーヘッドとの間の間隔は約200〜2000ミリである。
[0056]本発明の誘電バリア膜には従来のバリア膜にはない幾つかの利点、例えば、高エッチング抵抗、低誘電率、低い紫外線吸収、高拡散バリア、疎水性がある。この膜の利点は、伝統的なバリア膜として使用する際に優れたバリアとなるだけでなく、新規の適用をも可能にする。
[0061]上述したように、本発明のバリア膜は、伝統的なバリア膜として使用する場合に向上したバリアが得られるだけでなく、新規の適用をも可能にする。図5は、本発明の一実施形態による、誘電バリアにわたって空隙が形成された基板スタック300を概略的に図示している。
Claims (15)
- 半導体基板を処理する方法であって、
ケイ素−炭素結合および炭素−炭素結合を備える前駆物質を処理チャンバへ流すステップと、
前記半導体基板上に炭素−炭素結合を有する誘電バリア膜を形成するために、前記処理チャンバ内において前記前駆物質の低密度プラズマを生成するステップであって、前記前駆物質中の前記炭素−炭素結合の少なくとも一部が前記低密度プラズマ中に保存されかつ前記誘電膜内に組み込まれるステップと、
を備える方法。 - 前記前駆物質が、炭素−炭素単結合(C−C)源、炭素−炭素二重結合(C=C)源、炭素−炭素三重結合(C≡C)源、またはこれらの組み合わせを備えている、請求項1に記載の方法。
- 前記低密度プラズマがRF電力を500W未満に設定することにより生成される、請求項2に記載の方法。
- 前記前駆物質が、有機ケイ素化合物と炭化水素化合物の混合物を備えている、請求項2に記載の方法。
- 前記前駆物質が、トリメチルシランおよび炭化水素を含有する炭素−炭素結合を備えている、請求項4に記載の方法。
- 前記前駆物質がさらに、窒素ガス(N2)、アンモニア(NH3)、またはこれらの組み合わせを備えている、請求項2に記載の方法。
- 半導体基板を処理する方法であって、
第1誘電層内に、内部に誘電材料を保持するように構成されているトレンチを形成するステップと、
前記トレンチを正角誘電バリア膜でライニングするステップと、
前記トレンチを前記正角誘電バリア膜上の金属バリア膜でライニングするステップと、
前記トレンチを充填するために、前記金属バリア膜上に伝導材料を堆積させるステップと、
前記第1誘電層を露出させるために、前記伝導材料を平坦化するステップと、
前記伝導材料および前記第1誘電層の上に多孔性誘電バリア層を堆積させるステップであって、前記多孔性誘電バリア膜が炭素−炭素結合とケイ素−炭素結合を備えており、前記多孔性誘電バリア層が第1誘電層よりも実質的に高い湿式エッチング抵抗性を有するステップと、
前記第1誘電層を多孔性誘電バリア層を介して湿式エッチング溶液と接触させることにより、前記トレンチ間に空隙を形成するステップであって、前記正角誘電バリア膜が、前記湿式エッチング溶液に対するバリアおよびエッチング停止部として機能するステップと、
を備える方法。 - 前記多孔性誘電バリア層が炭化ケイ素、炭化窒化ケイ素、またはこれらの組み合わせを備えている、請求項9に記載の方法。
- 前記多孔性誘電層が、
ケイ素−炭素結合と炭素−炭素結合を備える前駆物質を処理チャンバに流すステップと、
前記処理チャンバ内で前記前駆物質の低密度プラズマを生成して、炭素−炭素結合を有する前記多孔性誘電バリア膜を前記半導体基板上に形成するステップであって、前記前駆物質中の前記炭素−炭素結合の少なくとも一部が前記低密度プラズマ内に保存されかつ前記多孔性誘電バリア膜内に組み込まれるステップと、
を備える請求項10に記載の方法。 - 前記前駆物質が炭素−炭素単結合(C−C)源、炭素−炭素二重結合(C=C)源、炭素−炭素三重結合(C≡C)源、またはこれらの組み合わせを備える、請求項11に記載の方法。
- 前記前駆物質がエチレンおよびトリメチルシランを約8:1の比率で備えている、請求項12に記載の方法。
- 前記前駆物質がエチレン、トリメチルシラン、アンモニアを備えている、請求項13に記載の方法。
- 前記多孔性誘電バリア層がSi−O結合を含有していない、請求項10に記載の方法。
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US7964442B2 (en) | 2011-06-21 |
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KR20090036533A (ko) | 2009-04-14 |
US20090093132A1 (en) | 2009-04-09 |
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