JP6329199B2 - 半導体装置の製造方法、基板処理装置およびプログラム - Google Patents
半導体装置の製造方法、基板処理装置およびプログラム Download PDFInfo
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- JP6329199B2 JP6329199B2 JP2016068139A JP2016068139A JP6329199B2 JP 6329199 B2 JP6329199 B2 JP 6329199B2 JP 2016068139 A JP2016068139 A JP 2016068139A JP 2016068139 A JP2016068139 A JP 2016068139A JP 6329199 B2 JP6329199 B2 JP 6329199B2
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- film
- copper
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- diffusion
- gas supply
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
Classifications
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
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- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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Description
以下に本発明の第一の実施形態について説明する。
配線層形成工程S101について説明する。
配線層形成工程S101に関し、図2を用いて説明する。図2は、半導体ウエハ200に形成する配線層2006を説明した図である。配線層2006は、絶縁膜2001上に形成される。絶縁膜2001より下方には、図示しない電極層が存在し、電極層にはゲート電極、アノード等の構成が設けられている。絶縁膜2001は、電極層と絶縁する層間絶縁膜として用いられる。
続いて、第一の拡散防止膜形成工程S102について、図3を用いて説明する。ここでは図2の配線層2006が形成された状態のウエハ200に対して、第一の拡散防止膜2007を形成する。拡散防止膜2007は、例えばSiON膜である。拡散防止膜2007は絶縁性の性質および拡散を抑制する性質を有する。具体的には、第一の拡散防止膜2007を形成することで、銅含有膜2005の成分が上層への拡散を抑制することができる。また、著しく配線間が狭い場合には、配線層2006上に形成される上層を介して配線(銅含有膜2005)が導通する恐れがあるが、それを抑制することができる。
次にパターニング工程S103について説明する。
ここでは、図3に記載の拡散防止膜2007が形成された状態のウエハ200を処理する。まず、拡散防止膜2007上に、パターニング用のレジスト層2008を形成する。その後露光処理を行い、図4(A)に記載のように、レジスト層2008を所望のパターンに形成する。
近年の微細化、高密度化に伴い、配線間の距離が狭くなってきている。そうなると配線間でコンデンサ容量が増加して信号遅延が発生するという問題がある。この場合、従来同様、配線間に低誘電率の絶縁物を充填することが考えられるが、それには物理的な限界がある。それを回避するために、配線間にエアギャップと呼ばれる空隙を設け、誘電率を下げる。
ところで、近年の微細化、高密度化によって、デバイス上の配線間の距離が狭くなってきているが、それに伴い露光精度も限界に近づいており、ミスアライメントの影響を受けやすくなっている。ミスアライメントが起きると、たとえば図4(B)に記載のように、銅含有膜2005間だけでなく、銅含有膜2005上の拡散防止膜2007の一部がエッチングされ、被エッチング部2007a上を露出させてしまう。
続いて、拡散防止膜2010上に層間絶縁膜2011を形成する第二の層間絶縁膜形成工程S105について説明する。拡散防止膜2010を形成したら、図6に記載のように、拡散防止膜2010上に、層間絶縁膜2011を形成する。層間絶縁膜2011は、例えば炭素含有シリコン酸化膜(SiOC膜)である。形成する際は、例えばシリコン含有ガスと酸素含有ガスとをウエハ200上に供給して気相反応させ、その後炭素をドーピングする、等の方法が考えられる。
前述のように配線間が非常に狭い場合、層間絶縁膜2011の堆積が進行するに従って、拡散防止膜2007の上部付近では、堆積物に遮られてガスが下方に回りこみにくくなる。このため、空隙2009の下方の堆積速度は、拡散防止膜2007の上方における堆積速度よりも小さくなる。そのような状態で成膜処理を継続することで、空隙2009を確保する。確保された空隙2009はエアギャップとして用いられる。
まず図7を用いて基板処理装置100を説明する。本実施形態においては、基板処理装置100は拡散防止膜2010を形成する。
シャワーヘッド230の蓋231に設けられたガス導入孔231aには、第一分散機構241が接続されている。第一分散機構241には、共通ガス供給管242が接続されている。第一分散機構241にはフランジが設けられ、ねじ等によって、蓋231や共通ガス供給管242のフランジに固定される。
第一ガス供給管243aには、上流方向から順に、第一ガス供給源243b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)243c、及び開閉弁であるバルブ243dが設けられている。
第二ガス供給管244aには、上流方向から順に、第二ガス供給源244b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)244c、及び開閉弁であるバルブ244dが設けられている。
タングステンは、活性点の多い領域で選択的に成長する性質を有する。本実施形態における活性点の多い領域とは、銅含有膜2005の露出部分である。露出部分では最外殻反応によって電子の移動が為されやすく、それが活性点となる。一方、配線間絶縁膜2002や第一の層間絶縁膜2001の表面は電子の移動が行われにくいため、活性点とはなりにくい。すなわち、溝2009の側面を構成する配線絶縁膜2002の側面2002aと、溝2009の底面を構成する層間絶縁膜2001の表面2001aは活性点とはなりにくい。このような関係であるので、銅含有膜2005の露出面の表面にタングステン膜が成長するが、配線間絶縁膜2002の表面にはタングステン膜が成長しない。この様な特徴を有する金属含有ガスであれば、WF6ガスに限らず用いることが可能である。
第三ガス供給管245aには、上流方向から順に、第三ガス供給源245b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)245c、及び開閉弁であるバルブ245dが設けられている。
チャンバ202の雰囲気を排気する排気系は、チャンバ202に接続された複数の排気管を有する。具体的には、処理空間201に接続される排気管262と、搬送空間203に接続される排気管261とを有する。また、各排気管261,262の下流側には、排気管264が接続される。
基板処理装置100は、基板処理装置100の各部の動作を制御するコントローラ280を有している。コントローラ280は、図8に記載のように、演算部(CPU)280a、一時記憶部280b、記憶部280c、送受信部280dを少なくとも有する。コントローラ280は、送受信部280を介して基板処理装置100の各構成に接続され、上位コントローラや使用者の指示に応じて記憶部280cからプログラムやレシピを呼び出し、その内容に応じて各構成の動作を制御する。なお、コントローラ280は、専用のコンピュータとして構成してもよいし、汎用のコンピュータとして構成してもよい。例えば、上述のプログラムを格納した外部記憶装置(例えば、磁気テープ、フレキシブルディスクやハードディスク等の磁気ディスク、CDやDVD等の光ディスク、MO等の光磁気ディスク、USBメモリ(USB Flash Drive)やメモリカード等の半導体メモリ)282を用意し、外部記憶装置282を用いて汎用のコンピュータにプログラムをインストールすることにより、本実施形態に係るコントローラ280を構成することができる。また、コンピュータにプログラムを供給するための手段は、外部記憶装置282を介して供給する場合に限らない。例えば、インターネットや専用回線等の通信手段を用いても良いし、上位装置280から受信部283を介して情報を受信し、外部記憶装置282を介さずにプログラムを供給するようにしてもよい。また、キーボードやタッチパネル等の入出力装置281を用いて、コントローラ280に指示をしても良い。
続いて、基板処理装置に搬入されたウエハ200の第二拡散防止膜形成工程S104の詳細について、図9を用いて説明する。なお、ウエハ200は図4(B)の状態からレジスト層2008を除去した状態であり、銅含有膜2005が露出した状態である。
基板処理装置100では基板載置台212をウエハ200の搬送位置(搬送ポジション)まで下降させることにより、基板載置台212の貫通孔214にリフトピン207を貫通させる。その結果、リフトピン207が、基板載置台212表面よりも所定の高さ分だけ突出した状態となる。続いて、ゲートバルブ205を開いて搬送空間203を移載室(図示せず)と連通させる。そして、この移載室からウエハ移載機(図示せず)を用いてウエハ200を搬送空間203に搬入し、リフトピン207上にウエハ200を移載する。これにより、ウエハ200は、基板載置台212の表面から突出したリフトピン207上に水平姿勢で支持される。
続いて還元工程S304を行う。
還元工程S304では第一ガス供給系から処理空間201にH2ガスを供給する。ここでは、搬送途中においてウエハ200の表面に形成された自然酸化膜等を除去する。特に、被エッチング部2007aにおける銅含有膜2005の露出面を清浄化(クリーニング)する。清浄化することで、銅含有膜2005の露出面と拡散防止膜2010との間の反応阻害物を除去できるので、銅含有膜2005の露出面全面に渡って拡散防止膜2010との間の反応性を高めることができる。したがって、露出面における拡散防止膜2010を均一に形成することができる。
基板処理装置に搬入されたウエハ200の選択成長工程S306について説明する。選択成長工程S306では、図4(B)の状態でのウエハを処理する。
WF6ガスの割合は、例えば水素含有ガスとWF6ガスの混合ガスのうち、0.1%〜3%の間とする。
ところで、選択成長工程S306においては、処理条件等が一時的に変動し、選択性が破れることがある。この場合、図5に記載のように、露出面上だけでなく、層間絶縁膜2001の表面2001aや配線間絶縁膜2002の側面2002aに、まだらな状態の膜2012が形成されることがある。この状態で次の工程である第二の層間絶縁膜形成工程S105以降の工程を行った場合、局所的にエアギャップの誘電率が高くなる等、エアギャップ構造の特性低下が起きる。
改質工程S308が終了したら、基板搬出工程S310を実施する。基板搬出工程S310では、基板載置台212を下降させ、基板載置台212の表面から突出させたリフトピン207上にウエハ200を支持させる。これにより、ウエハ200は処理位置から搬送位置となる。
続いて第二の実施形態について説明する。
第二の実施形態は、主に次の点で第一の実施形態と相違する。一つ目の相違点は第二のガスが異なる点である。二つ目の相違点は、第二の拡散防止膜を形成する工程が異なる点である。
ここでは図12を用いて基板処理装置100’を説明する。基板処理装置100’は、第一の実施形態の基板処理装置100と比べ第二のガス供給系、第三のガス供給系の構成が異なると共に、第四のガス供給系が新たに加わった。以下では基板処理装置100との相違点を中心に詳細を説明する。なお、基板処理装置100と同様の番号の構成については説明を省略する。
第二の実施形態における第二ガス供給系249を説明する。
第二ガス供給管249aには、上流方向から順に、第二ガス供給源249b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)249c、及び開閉弁であるバルブ249dが設けられている。
第三ガス供給管251aには、上流方向から順に、第三ガス供給源251b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)251c、及び開閉弁であるバルブ251dが設けられている。
続いて第四ガス供給系252を説明する。
第四ガス供給管252aには、上流方向から順に、第四ガス供給源252b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)252c、及び開閉弁であるバルブ252d、リモートプラズマユニット252eが設けられている。
基板処理装置に搬入されたウエハ200の選択成長工程S406について説明する。選択成長工程S406では、図4(B)の状態のうち、レジスト層2008が除去された状態のウエハを処理する。
ところで、選択成長工程S406においては、選択性の問題から銅含有膜2005の露出面だけでなく、層間絶縁膜2001の表面2001aや配線間絶縁膜2002の側面2002aにまだら状態の膜2014が形成される。この状態で次の工程である第二の層間絶縁膜形成工程S105以降の工程を行った場合、エアギャップの誘電率が高くなる等、エアギャップ構造の特性低下が起きる。
続いて改質工程S410を説明する。
ところで、一般的に、例えば400℃程度の高温状態の場合、シリコン成分は銅に拡散しやすいということが知られている。本実施形態に照らし合わせてみると、銅で構成される銅含有膜2005の露出部分に形成されたシリコン含有膜2013に含まれるシリコン成分が、銅含有膜2005に拡散される恐れがある。
以上の実施形態に伴う主な効果を以下に記す。
(a)第二の拡散防止膜を形成することで、エッチング工程にて銅含有膜が露出したとしても、上層への金属成分の拡散を抑制することができる。
(b)第二の拡散防止膜を形成することで、エッチング工程にて銅含有膜が露出したとしても、隣接する銅含有膜との導通を抑制することができる。
201 処理空間
202 チャンバ
212 基板載置台
Claims (14)
- 第一の層間絶縁膜と、前記第一の層間絶縁膜上に形成され、配線として用いられる複数の銅含有膜と、前記銅含有膜間を絶縁する配線間絶縁膜と、前記複数の銅含有膜の間に設けられた空隙とを有する第一の配線層と、
前記銅含有膜上面の一部の面上に形成され、前記第一の配線層の上方に設けられる第二の配線層としての第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第一の拡散防止膜と、
を有する基板を処理室に搬入する工程と、
前記銅含有膜上のうち前記第一の拡散防止膜が形成されていない他部の面上に、前記第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第二の拡散防止膜を選択的に形成する工程と、
を有する半導体装置の製造方法。 - 前記第二の拡散防止膜を形成する工程では、前記配線間絶縁膜を選択せずに前記銅含有膜を選択する性質を有する金属含有ガスを前記基板に供給し、前記他部の面上に前記第二の拡散防止膜を形成する請求項1に記載の半導体装置の製造方法。
- 前記金属含有ガスは遷移金属含有ガスである請求項2に記載の半導体装置の製造方法。
- 前記金属含有ガスにおける金属成分は、タングステン、タンタル、モリブデンのいずれかである請求項2または請求項3に記載の半導体装置の製造方法。
- 前記第二の拡散防止膜を形成する工程では、さらに水素含有ガスを前記基板に供給する請求項2から請求項4のうち、いずれか一項に記載の半導体装置の製造方法。
- 前記第二の拡散防止膜を形成する工程では、前記基板に前記水素含有ガスを供給し、その後前記金属含有ガスを供給する請求項5に記載の半導体装置の製造方法。
- 前記第二の拡散防止膜を形成する工程では、前記金属含有ガスの供給を停止した後、前記水素含有ガスの供給を停止する請求項5または請求項6に記載の半導体装置の製造方法。
- 前記第一の拡散防止膜はシリコン含有膜であり、前記第二の拡散防止膜は金属含有膜である請求項1から請求項7のうち、いずれか一項に記載の半導体装置の製造方法。
- 前記第二の拡散防止膜を形成する工程では、前記配線間絶縁膜を選択せずに前記銅含有膜を選択する性質を有するシリコン含有ガスを前記基板に供給し、前記他部の面上にシリコン含有膜を形成する請求項1に記載の半導体装置の製造方法。
- 前記第二拡散防止膜形成工程では、前記シリコン含有膜形成後、前記シリコン含有膜の改質を行い、前記第二拡散防止膜を形成する請求項9に記載の半導体装置の製造方法。
- 前記シリコン含有膜の改質では、前記基板に窒化ガスを供給する請求項10に記載の半導体装置の製造方法。
- 前記改質工程では、前記シリコン含有膜の成分が前記銅含有膜に拡散することを抑制する温度で前記基板を処理する請求項9から請求項11のうち、いずれか一項に記載の半導体装置の製造方法。
- 第一の層間絶縁膜と、前記第一の層間絶縁膜上に形成され、配線として用いられる複数の銅含有膜と、前記銅含有膜間を絶縁する配線間絶縁膜と、前記複数の銅含有膜の間に設けられた空隙とを有する第一の配線層と、
前記銅含有膜上面の一部の面上に形成され、前記第一の配線層の上方に設けられる第二の配線層としての第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第一の拡散防止膜と、
を有する基板を載置する載置部と、
前記載置部を内包する処理室と、
前記処理室に、前記銅含有膜上のうち前記第一の拡散防止膜が形成されていない他部の面上に、前記第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第二の拡散防止膜を選択的に形成するガスを供給する供給部と、
を有する基板処理装置。 - 第一の層間絶縁膜と、前記第一の層間絶縁膜上に形成され、配線として用いられる複数の銅含有膜と、前記銅含有膜間を絶縁する配線間絶縁膜と、前記複数の銅含有膜の間に設けられた空隙とを有する第一の配線層と、
前記銅含有膜上面の一部の面上に形成され、前記第一の配線層の上方に設けられる第二の配線層としての第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第一の拡散防止膜と、
を有する基板を処理室に搬入する手順と、
前記銅含有膜上のうち前記第一の拡散防止膜が形成されていない他部の面上に、前記第二の層間絶縁膜への前記銅含有膜の成分の拡散を抑制するよう構成される第二の拡散防止膜を選択的に形成する手順と、
をコンピュータによって基板処理装置に実行させるプログラム。
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