JP2009170823A - 成膜方法及び成膜装置 - Google Patents
成膜方法及び成膜装置 Download PDFInfo
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- JP2009170823A JP2009170823A JP2008009926A JP2008009926A JP2009170823A JP 2009170823 A JP2009170823 A JP 2009170823A JP 2008009926 A JP2008009926 A JP 2008009926A JP 2008009926 A JP2008009926 A JP 2008009926A JP 2009170823 A JP2009170823 A JP 2009170823A
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- 238000000034 method Methods 0.000 title claims description 98
- 230000015572 biosynthetic process Effects 0.000 title abstract description 11
- 239000010408 film Substances 0.000 claims abstract description 144
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910000077 silane Inorganic materials 0.000 claims abstract description 50
- 239000010409 thin film Substances 0.000 claims abstract description 40
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 23
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000007789 gas Substances 0.000 claims description 243
- 238000005121 nitriding Methods 0.000 claims description 110
- 230000008569 process Effects 0.000 claims description 64
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 24
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 claims description 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 7
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 claims description 7
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 6
- VOSJXMPCFODQAR-UHFFFAOYSA-N ac1l3fa4 Chemical compound [SiH3]N([SiH3])[SiH3] VOSJXMPCFODQAR-UHFFFAOYSA-N 0.000 claims description 6
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 claims description 6
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims description 6
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 4
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 claims description 3
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 3
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims description 3
- 229960001730 nitrous oxide Drugs 0.000 claims description 3
- 235000013842 nitrous oxide Nutrition 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 abstract description 9
- 238000000151 deposition Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 45
- 239000004065 semiconductor Substances 0.000 description 14
- 239000010410 layer Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000006185 dispersion Substances 0.000 description 10
- 239000010453 quartz Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000010926 purge Methods 0.000 description 9
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 238000005192 partition Methods 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010574 gas phase reaction Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- -1 disilylamine (DSA) Chemical compound 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- VYIRVGYSUZPNLF-UHFFFAOYSA-N n-(tert-butylamino)silyl-2-methylpropan-2-amine Chemical compound CC(C)(C)N[SiH2]NC(C)(C)C VYIRVGYSUZPNLF-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
【解決手段】複数枚の被処理体Wが収容されて真空引き可能になされた処理容器4内に、シラン系ガスと窒化ガスとを供給して被処理体の表面にシリコン窒化膜よりなる薄膜を形成する成膜処理を行うようにした成膜方法において、シラン系ガスを供給するシラン系ガス供給工程と窒化ガスを供給する窒化ガス供給工程とを交互に繰り返し行うと共に、繰り返される複数の窒化ガス供給工程にはプラズマを立てる窒化ガス供給工程とプラズマを立てない窒化ガス供給工程とを含ませることにより薄膜の膜質を制御する。
【選択図】図3
Description
本発明は、以上のような問題点に着目し、これを有効に解決すべく創案されたものである。本発明の目的は、薄膜の膜質特性を精度良く制御することが可能な成膜方法及び成膜装置を提供することにある。
また例えば請求項3に記載したように、前記プラズマを立てる窒化ガス供給工程と前記プラズマを立てない窒化ガス供給工程とが混在されており、その比率が調整可能になされている。
また例えば請求項4に記載したように、前記プラズマを立てる窒化ガス供給工程と前記プラズマを立てない窒化ガス供給工程とが偏在されており、その比率が調整可能になされている。
また例えば請求項6に記載したように、前記プラズマを立てる窒化ガス供給では、前記窒化ガスは前記処理容器内で高周波電力によって発生したプラズマによって活性化される。
また例えば請求項8に記載したように、前記薄膜の成膜時の温度は、25℃〜700℃の範囲内である。
また例えば請求項9に記載したように、前記薄膜の成膜時の圧力は、13Pa(0.1Torr)〜13300Pa(100Torr)の範囲内である。
また例えば請求項12に記載したように、前記シリコン窒化膜には、不純物がドープされている。
複数枚の被処理体が収容されて真空引き可能になされた処理容器内に、シラン系ガスと窒化ガスとを供給して被処理体の表面にシリコン窒化膜よりなる薄膜を形成するに際して、シラン系ガスを供給するシラン系ガス供給工程と窒化ガスを供給する窒化ガス供給工程とを交互に繰り返し行うと共に、繰り返される複数の窒化ガス供給工程にはプラズマを立てる窒化ガス供給工程とプラズマを立てない窒化ガス供給工程とを含ませるようにしたので、薄膜の膜質特性を精度良く制御することができる。
図1は本発明の係る成膜装置の一例を示す縦断面構成図、図2は成膜装置(加熱手段は省略)を示す横断面構成図である。尚、ここではシラン系ガスとしてジクロロシラン(DCS)を用い、窒化ガスとしてアンモニアガス(NH3 )を用い、上記NH3 ガスをプラズマにより活性化して窒化膜としてSiN膜を成膜する場合を例にとって説明する。
そして、この回転軸20の貫通部には、例えば磁性流体シール22が介設され、この回転軸20を気密にシールしつつ回転可能に支持している。また、蓋部18の周辺部とマニホールド8の下端部には、例えばOリング等よりなるシール部材24が介設されており、処理容器4内のシール性を保持している。
そして上記プラズマ区画壁72の開口70の外側近傍、すなわち開口70の外側(処理容器4内)には、上記シラン系ガス用のガス分散ノズル40が起立させて設けられており、このノズル40に設けた各ガス噴射孔40Aより処理容器4の中心方向に向けてシラン系ガスを噴射し得るようになっている。
本発明では、シラン系ガスを供給するシラン系ガス供給工程と窒化ガスを供給する窒化ガス供給工程とを交互に繰り返し行うと共に、繰り返される複数の窒化ガス供給工程にはプラズマを立てる窒化ガス供給工程とプラズマを立てない窒化ガス供給工程とを含ませることにより薄膜の膜質を制御するようにしてシリコン窒化膜(SiN)よりなる薄膜を形成する。
この場合には、窒化ガスの供給工程において、RFをオンする場合とRFをオフする場合が”2:1”の関係になっている。このような第2実施形態では、図4(B)に示すように薄膜が形成される。すなわち、ウエハWの表面には2層のプラズマSiN膜100Aが積層された上に1層の熱SiN膜100Bが積層される、という3層構造が繰り返し形成されて行くことになる。
ここで、実際に上記第1〜第3実施形態を選択的に行って薄膜(SiN膜)を形成した時の膜質特性等について検討したので、その評価結果について説明する。
図5はRF(高周波)のオン、オフの実施態様と1サイクルの成膜レートとの関係を示すグラフ、図6はRFのオン、オフの実施態様と反射率との関係を示すグラフ、図7はRFのオン、オフの実施態様とストレスとの関係を示すグラフである。尚、図中、”TOP”はウエハボートの上段に位置するウエハを示し、”CTR”はウエハボートの中段に位置するウエハを示し、”BTM”はウエハボートの下段に位置するウエハを示す。
ここで屈折率の変化は非常に僅かではあるが、この僅かの差が前述したように膜質特性に大きく影響を与えるので、実際のシリコン窒化膜の成膜処理において、この屈折率を精度良くコントロールすることが求められている。
また被処理体としては、半導体ウエハに限定されず、ガラス基板やLCD基板等にも本発明を適用することができる。
4 処理容器
12 ウエハボート(保持手段)
18 蓋部
28 窒化ガス供給手段
30 シラン系ガス供給手段
36 パージガス供給手段
38,40 ガス分散ノズル
60 制御手段
62 記憶媒体
66 活性化手段
74 プラズマ電極
76 高周波電源
86 加熱手段
100A プラズマSiN膜
100B 熱SiN膜
W 半導体ウエハ(被処理体)
Claims (14)
- 複数枚の被処理体が収容されて真空引き可能になされた処理容器内に、シラン系ガスと窒化ガスとを供給して前記被処理体の表面にシリコン窒化膜よりなる薄膜を形成する成膜処理を行うようにした成膜方法において、
前記シラン系ガスを供給するシラン系ガス供給工程と前記窒化ガスを供給する窒化ガス供給工程とを交互に繰り返し行うと共に、前記繰り返される複数の窒化ガス供給工程にはプラズマを立てる窒化ガス供給工程とプラズマを立てない窒化ガス供給工程とを含ませることにより前記薄膜の膜質を制御するようにしたことを特徴とする成膜方法。 - 前記膜質は、屈折率、組成比及びストレスの内のいずれか1つであることを特徴とする請求項1記載の成膜方法。
- 前記プラズマを立てる窒化ガス供給工程と前記プラズマを立てない窒化ガス供給工程とが混在されており、その比率が調整可能になされていることを特徴とする請求項1又は2記載の成膜方法。
- 前記プラズマを立てる窒化ガス供給工程と前記プラズマを立てない窒化ガス供給工程とが偏在されており、その比率が調整可能になされていることを特徴とする請求項1又は2記載の成膜方法。
- 前記シラン系ガス供給工程と前記窒化ガス供給工程との間には間欠期間が設けられており、該間欠期間には、前記処理容器内は不活性ガスパージされていること及び/又は全てのガスの供給が停止されて真空引きされていることを特徴とする請求項1乃至4のいずれか一項に記載の成膜方法。
- 前記プラズマを立てる窒化ガス供給では、前記窒化ガスは前記処理容器内で高周波電力によって発生したプラズマによって活性化されることを特徴とする請求項1乃至5のいずれか一項に記載の成膜方法。
- 前記窒化ガスの供給開始から所定の時間が経過した後に、前記高周波電力が印加されることを特徴とする請求項6記載の成膜方法。
- 前記薄膜の成膜時の温度は、25℃〜700℃の範囲内であることを特徴とする請求項1乃至7のいずれか一項に記載の成膜方法。
- 前記薄膜の成膜時の圧力は、13Pa(0.1Torr)〜13300Pa(100Torr)の範囲内であることを特徴とする請求項1乃至8のいずれか一項に記載の成膜方法。
- 前記シラン系ガスは、ジクロロシラン(DCS)、ヘキサクロロジシラン(HCD)、モノシラン[SiH4 ]、ジシラン[Si2 H6 ]、ヘキサメチルジシラザン(HMDS)、テトラクロロシラン(TCS)、ジシリルアミン(DSA)、トリシリルアミン(TSA)、ビスターシャルブチルアミノシラン(BTBAS)、トリメチルシラン(TMS)、ジメチルシラン(DMS)、モノメチルアミン(MMA)、トリジメチルアミノシラン(3DMAS)よりなる群より選択される1以上のガスであることを特徴とする請求項1乃至9のいずれか一項に記載の成膜方法。
- 前記窒化ガスは、アンモニア[NH3 ]、窒素[N2 ]、一酸化二窒素[N2 O]、一酸化窒素[NO]よりなる群より選択される1以上のガスであることを特徴とする請求項1乃至10のいずれか一項に記載の成膜方法。
- 前記シリコン窒化膜には、不純物がドープされていることを特徴とする請求項1乃至11のいずれか一項に記載の成膜方法。
- 被処理体に対して所定の薄膜を形成するための成膜装置において、
真空引き可能になされた縦型の筒体状の処理容器と、
前記被処理体を複数段に保持して前記処理容器内に挿脱される保持手段と、
前記処理容器の外周に設けられる加熱手段と、
前記処理容器内へシラン系ガスを供給するシラン系ガス供給手段と、
前記処理容器内へ窒化ガスを供給する窒化ガス供給手段と、
前記窒化ガスを活性化する活性化手段と、
請求項1乃至12のいずれか一項に記載した成膜方法を実行するように制御する制御手段と、
を備えたことを特徴とする成膜装置。 - 複数枚の被処理体が収容されて真空引き可能になされた処理容器内に、シラン系ガスと窒化ガスとを供給して前記被処理体の表面にSiN薄膜を形成するようにした成膜装置を用いて薄膜を形成するに際して、
請求項1乃至12のいずれか一項に記載の成膜方法を実行するように前記成膜装置を制御するコンピュータ読み取り可能なプログラムを記憶することを特徴とする記憶媒体。
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---|---|---|---|---|
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JP2018174327A (ja) * | 2012-01-20 | 2018-11-08 | ノベラス・システムズ・インコーポレーテッドNovellus Systems Incorporated | 無塩素の共形SiN膜を蒸着させるための方法 |
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Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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US8647993B2 (en) | 2011-04-11 | 2014-02-11 | Novellus Systems, Inc. | Methods for UV-assisted conformal film deposition |
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US10573511B2 (en) | 2013-03-13 | 2020-02-25 | Asm Ip Holding B.V. | Methods for forming silicon nitride thin films |
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US9401273B2 (en) | 2013-12-11 | 2016-07-26 | Asm Ip Holding B.V. | Atomic layer deposition of silicon carbon nitride based materials |
US20150179316A1 (en) * | 2013-12-23 | 2015-06-25 | Intermolecular Inc. | Methods of forming nitrides at low substrate temperatures |
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US10121655B2 (en) | 2015-11-20 | 2018-11-06 | Applied Materials, Inc. | Lateral plasma/radical source |
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JP6988629B2 (ja) * | 2018-03-26 | 2022-01-05 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US10580645B2 (en) | 2018-04-30 | 2020-03-03 | Asm Ip Holding B.V. | Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors |
CN110581050A (zh) * | 2018-06-07 | 2019-12-17 | 东京毅力科创株式会社 | 处理方法和等离子体处理装置 |
CN111958078B (zh) * | 2020-09-27 | 2021-08-27 | 淄博晨启电子有限公司 | 一种高可靠性高浪涌冲击能力半导体防护器件的焊接工艺 |
KR20220081905A (ko) | 2020-12-09 | 2022-06-16 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 증착용 실리콘 전구체 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006049809A (ja) * | 2004-06-28 | 2006-02-16 | Tokyo Electron Ltd | 成膜方法、成膜装置及び記憶媒体 |
JP2007138295A (ja) * | 2005-11-18 | 2007-06-07 | Tokyo Electron Ltd | シングルチャンバ内で異なる堆積プロセスを実行する方法およびシステム |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0293071A (ja) | 1988-09-29 | 1990-04-03 | Toshiba Corp | 薄膜の形成方法 |
JPH0645256A (ja) | 1992-07-21 | 1994-02-18 | Rikagaku Kenkyusho | ガスパルスの供給方法およびこれを用いた成膜方法 |
US6342277B1 (en) * | 1996-08-16 | 2002-01-29 | Licensee For Microelectronics: Asm America, Inc. | Sequential chemical vapor deposition |
JP3529989B2 (ja) * | 1997-09-12 | 2004-05-24 | 株式会社東芝 | 成膜方法及び半導体装置の製造方法 |
US5874368A (en) * | 1997-10-02 | 1999-02-23 | Air Products And Chemicals, Inc. | Silicon nitride from bis(tertiarybutylamino)silane |
JP3501284B2 (ja) * | 2001-03-30 | 2004-03-02 | 富士通カンタムデバイス株式会社 | 半導体装置の製造方法 |
US6638879B2 (en) * | 2001-12-06 | 2003-10-28 | Macronix International Co., Ltd. | Method for forming nitride spacer by using atomic layer deposition |
JP2003347674A (ja) * | 2002-05-30 | 2003-12-05 | Mitsubishi Electric Corp | 半導体レーザ装置及びその製造方法 |
KR100496265B1 (ko) * | 2002-11-29 | 2005-06-17 | 한국전자통신연구원 | 반도체 소자의 박막 형성방법 |
JP4293591B2 (ja) * | 2003-01-23 | 2009-07-08 | 川崎マイクロエレクトロニクス株式会社 | 表示装置の製造方法 |
US7094708B2 (en) * | 2003-01-24 | 2006-08-22 | Tokyo Electron Limited | Method of CVD for forming silicon nitride film on substrate |
JP4403824B2 (ja) * | 2003-05-26 | 2010-01-27 | 東京エレクトロン株式会社 | シリコン窒化膜の成膜方法 |
US20050170104A1 (en) * | 2004-01-29 | 2005-08-04 | Applied Materials, Inc. | Stress-tuned, single-layer silicon nitride film |
JP4506677B2 (ja) * | 2005-03-11 | 2010-07-21 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
US7732342B2 (en) * | 2005-05-26 | 2010-06-08 | Applied Materials, Inc. | Method to increase the compressive stress of PECVD silicon nitride films |
JP4434149B2 (ja) * | 2006-01-16 | 2010-03-17 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
US7519885B2 (en) * | 2006-03-31 | 2009-04-14 | Tokyo Electron Limited | Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table |
-
2008
- 2008-01-19 JP JP2008009926A patent/JP4935687B2/ja not_active Expired - Fee Related
-
2009
- 2009-01-10 TW TW098100871A patent/TWI421941B/zh not_active IP Right Cessation
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006049809A (ja) * | 2004-06-28 | 2006-02-16 | Tokyo Electron Ltd | 成膜方法、成膜装置及び記憶媒体 |
JP2007138295A (ja) * | 2005-11-18 | 2007-06-07 | Tokyo Electron Ltd | シングルチャンバ内で異なる堆積プロセスを実行する方法およびシステム |
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Also Published As
Publication number | Publication date |
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KR20090080019A (ko) | 2009-07-23 |
CN101488452A (zh) | 2009-07-22 |
CN101488452B (zh) | 2012-02-08 |
US8080290B2 (en) | 2011-12-20 |
JP4935687B2 (ja) | 2012-05-23 |
TW201001548A (en) | 2010-01-01 |
KR101105130B1 (ko) | 2012-01-16 |
US20090191722A1 (en) | 2009-07-30 |
TWI421941B (zh) | 2014-01-01 |
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