JP2009117761A5 - - Google Patents
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- Publication number
- JP2009117761A5 JP2009117761A5 JP2007292079A JP2007292079A JP2009117761A5 JP 2009117761 A5 JP2009117761 A5 JP 2009117761A5 JP 2007292079 A JP2007292079 A JP 2007292079A JP 2007292079 A JP2007292079 A JP 2007292079A JP 2009117761 A5 JP2009117761 A5 JP 2009117761A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- pad
- wiring
- dummy pattern
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 10
- 230000001681 protective effect Effects 0.000 claims 10
- 229910052814 silicon oxide Inorganic materials 0.000 claims 10
- 238000000034 method Methods 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 230000007261 regionalization Effects 0.000 claims 1
Priority Applications (16)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007292079A JP5291917B2 (ja) | 2007-11-09 | 2007-11-09 | 半導体装置およびその製造方法 |
| TW097135640A TWI453842B (zh) | 2007-11-09 | 2008-09-17 | Semiconductor device and manufacturing method thereof |
| TW103128729A TWI552239B (zh) | 2007-11-09 | 2008-09-17 | Semiconductor device |
| US12/239,810 US8552552B2 (en) | 2007-11-09 | 2008-09-28 | Semiconductor device and a method of manufacturing the same |
| CN2008101707993A CN101431058B (zh) | 2007-11-09 | 2008-10-29 | 半导体器件及其制造方法 |
| US13/613,602 US8552555B2 (en) | 2007-11-09 | 2012-09-13 | Semiconductor device and a method of manufacturing the same |
| US14/012,937 US8785318B2 (en) | 2007-11-09 | 2013-08-28 | Semiconductor device and a method of manufacturing the same |
| US14/320,686 US9508630B2 (en) | 2007-11-09 | 2014-07-01 | Semiconductor device and a method of manufacturing the same |
| US14/953,382 US9484286B2 (en) | 2007-11-09 | 2015-11-29 | Semiconductor device and a method of manufacturing the same |
| US14/953,390 US9484287B2 (en) | 2007-11-09 | 2015-11-29 | Semiconductor device and a method of manufacturing the same |
| US14/994,016 US20160126264A1 (en) | 2007-11-09 | 2016-01-12 | Semiconductor device and a method of manufacturing the same |
| US14/993,981 US20160126203A1 (en) | 2007-11-09 | 2016-01-12 | Semiconductor device and a method of manufacturing the same |
| US15/264,588 US9748191B2 (en) | 2007-11-09 | 2016-09-13 | Semiconductor device and a method of manufacturing the same |
| US15/674,406 US10204878B2 (en) | 2007-11-09 | 2017-08-10 | Semiconductor device and a method of manufacturing the same |
| US16/267,307 US10741517B2 (en) | 2007-11-09 | 2019-02-04 | Semiconductor device and a method of manufacturing the same |
| US16/920,625 US11239191B2 (en) | 2007-11-09 | 2020-07-03 | Semiconductor device and a method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007292079A JP5291917B2 (ja) | 2007-11-09 | 2007-11-09 | 半導体装置およびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012237427A Division JP5466280B2 (ja) | 2012-10-29 | 2012-10-29 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009117761A JP2009117761A (ja) | 2009-05-28 |
| JP2009117761A5 true JP2009117761A5 (enExample) | 2010-11-25 |
| JP5291917B2 JP5291917B2 (ja) | 2013-09-18 |
Family
ID=40622952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007292079A Active JP5291917B2 (ja) | 2007-11-09 | 2007-11-09 | 半導体装置およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (12) | US8552552B2 (enExample) |
| JP (1) | JP5291917B2 (enExample) |
| CN (1) | CN101431058B (enExample) |
| TW (2) | TWI453842B (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5291917B2 (ja) | 2007-11-09 | 2013-09-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP5415710B2 (ja) * | 2008-04-10 | 2014-02-12 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP5395407B2 (ja) * | 2008-11-12 | 2014-01-22 | ルネサスエレクトロニクス株式会社 | 表示装置駆動用半導体集積回路装置および表示装置駆動用半導体集積回路装置の製造方法 |
| KR20100055193A (ko) * | 2008-11-17 | 2010-05-26 | 삼성전자주식회사 | 반도체 집적 회로 장치 및 그를 포함하는 액정 표시 장치 |
| JP5503208B2 (ja) * | 2009-07-24 | 2014-05-28 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP5315186B2 (ja) | 2009-09-18 | 2013-10-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP2013033775A (ja) * | 2009-12-03 | 2013-02-14 | Panasonic Corp | 半導体集積回路及びそれを備えた半導体装置、並びに電子機器 |
| WO2012002236A1 (en) * | 2010-06-29 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Wiring board, semiconductor device, and manufacturing methods thereof |
| KR101300034B1 (ko) * | 2010-10-18 | 2013-08-29 | 엘지디스플레이 주식회사 | 액정표시장치용 기판 및 이를 이용한 액정표시장치 |
| US8434041B2 (en) * | 2011-01-10 | 2013-04-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Increasing dielectric strength by optimizing dummy metal distribution |
| US8778737B2 (en) * | 2011-10-31 | 2014-07-15 | International Business Machines Corporation | Flattened substrate surface for substrate bonding |
| TWI467719B (zh) * | 2012-05-07 | 2015-01-01 | Novatek Microelectronics Corp | 薄膜覆晶裝置 |
| JP5995518B2 (ja) * | 2012-05-11 | 2016-09-21 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
| CN103632957A (zh) * | 2012-08-23 | 2014-03-12 | 上海华虹宏力半导体制造有限公司 | 半导体芯片第一层金属阻挡层的制造方法 |
| JP6180801B2 (ja) * | 2013-06-07 | 2017-08-16 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP6334851B2 (ja) * | 2013-06-07 | 2018-05-30 | シナプティクス・ジャパン合同会社 | 半導体装置、表示デバイスモジュール、及び、表示デバイスモジュールの製造方法 |
| JP2015032661A (ja) * | 2013-08-01 | 2015-02-16 | ルネサスエレクトロニクス株式会社 | 半導体装置とその製造方法および半導体装置の実装方法 |
| KR20150038842A (ko) * | 2013-10-01 | 2015-04-09 | 삼성디스플레이 주식회사 | 구동 칩, 이를 구비한 표시 장치 및 구동 칩 제조 방법 |
| JP2015079848A (ja) * | 2013-10-17 | 2015-04-23 | シナプティクス・ディスプレイ・デバイス株式会社 | 表示装置駆動用半導体集積回路装置 |
| KR20150080825A (ko) * | 2014-01-02 | 2015-07-10 | 삼성디스플레이 주식회사 | 표시 패널, 이를 포함하는 표시 장치 및 이의 제조 방법 |
| US9275967B2 (en) | 2014-01-06 | 2016-03-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protrusion bump pads for bond-on-trace processing |
| US9508637B2 (en) | 2014-01-06 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protrusion bump pads for bond-on-trace processing |
| US9418928B2 (en) | 2014-01-06 | 2016-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protrusion bump pads for bond-on-trace processing |
| US9305890B2 (en) | 2014-01-15 | 2016-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package having substrate with embedded metal trace overlapped by landing pad |
| KR102398451B1 (ko) * | 2015-01-13 | 2022-05-16 | 데쿠세리아루즈 가부시키가이샤 | 범프 형성용 필름, 반도체 장치 및 그의 제조 방법 및 접속 구조체 |
| WO2016114318A1 (ja) * | 2015-01-13 | 2016-07-21 | デクセリアルズ株式会社 | 多層基板 |
| KR102410525B1 (ko) * | 2015-04-14 | 2022-06-20 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판, 이를 구비한 디스플레이 장치, 박막 트랜지스터 기판 제조방법 및 디스플레이 장치 제조방법 |
| JP6503286B2 (ja) * | 2015-12-24 | 2019-04-17 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体ウェハ |
| JP2017116798A (ja) * | 2015-12-25 | 2017-06-29 | 株式会社ジャパンディスプレイ | 表示装置、表示装置の製造方法、及びドライバic |
| CN105514075B (zh) * | 2015-12-31 | 2019-05-17 | 昆山国显光电有限公司 | 显示装置绑定结构 |
| KR102487061B1 (ko) * | 2016-06-30 | 2023-01-12 | 삼성디스플레이 주식회사 | 표시 장치 |
| JP6106794B1 (ja) * | 2016-08-05 | 2017-04-05 | サーパス工業株式会社 | 流体機器 |
| TWI587043B (zh) * | 2017-01-25 | 2017-06-11 | 友達光電股份有限公司 | 畫素結構及其顯示面板 |
| CN107807479B (zh) * | 2017-11-15 | 2021-01-22 | 京东方(河北)移动显示技术有限公司 | 阵列基板和显示面板 |
| EP4425708A3 (en) | 2017-11-29 | 2024-11-27 | Dai Nippon Printing Co., Ltd. | Wiring board and method for manufacturing wiring board |
| CN109920787B (zh) * | 2017-12-12 | 2021-05-25 | 中芯国际集成电路制造(北京)有限公司 | 互连结构的设计方法、装置及制造方法 |
| KR102481468B1 (ko) * | 2018-01-04 | 2022-12-26 | 삼성디스플레이 주식회사 | 표시 장치 |
| CN110557887B (zh) * | 2018-05-31 | 2021-10-12 | 京东方科技集团股份有限公司 | 电路对位组件及显示装置 |
| CN108919571B (zh) * | 2018-07-11 | 2021-07-27 | 业成科技(成都)有限公司 | 显示面板 |
| JP6705479B2 (ja) * | 2018-09-12 | 2020-06-03 | 日亜化学工業株式会社 | 光源装置の製造方法 |
| US11259406B2 (en) * | 2018-11-21 | 2022-02-22 | Synaptics Incorporated | Flexible connector for a display device |
| KR20210018700A (ko) * | 2019-08-09 | 2021-02-18 | 삼성디스플레이 주식회사 | 접착 부재 및 이를 포함한 표시장치 |
| KR102891620B1 (ko) * | 2019-09-25 | 2025-11-28 | 삼성디스플레이 주식회사 | 표시장치 및 이의 제조 방법 |
| CN110579917B (zh) * | 2019-10-15 | 2022-03-01 | 上海中航光电子有限公司 | 显示模组及显示装置 |
| CN113496891B (zh) * | 2020-04-03 | 2023-03-14 | 重庆超硅半导体有限公司 | 一种集成电路硅片表面氧化膜自适应均匀腐蚀方法 |
| CN114442353A (zh) * | 2020-10-30 | 2022-05-06 | 京东方科技集团股份有限公司 | 驱动背板及其制备方法和显示面板 |
| CN112710928B (zh) * | 2020-12-10 | 2023-02-21 | 国网宁夏电力有限公司电力科学研究院 | 基于自相关性分析的直流局部放电波形去干扰方法及系统 |
| CN114823351B (zh) * | 2021-01-28 | 2025-05-16 | 欣兴电子股份有限公司 | 金属凸块结构及其制作方法与驱动基板 |
| US20230021655A1 (en) * | 2021-07-22 | 2023-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacturing the same |
| JP2023111106A (ja) * | 2022-01-31 | 2023-08-10 | ルネサスエレクトロニクス株式会社 | 半導体装置、および半導体装置の製造方法 |
| CN115714161A (zh) * | 2022-02-25 | 2023-02-24 | 友达光电股份有限公司 | 用于显示装置的电路板结构 |
| US20240071971A1 (en) * | 2022-08-31 | 2024-02-29 | LAPIS Technology Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100212009B1 (ko) * | 1995-12-29 | 1999-08-02 | 김영환 | 반도체 소자의 금속배선 보호막 형성방법 |
| US6049132A (en) | 1996-07-12 | 2000-04-11 | Kawasaki Steel Corporation | Multiple metallization structure for a reflection type liquid crystal display |
| JP4222525B2 (ja) * | 1996-07-12 | 2009-02-12 | 川崎マイクロエレクトロニクス株式会社 | 半導体装置、その製造方法及び反射型液晶表示装置 |
| JP3638778B2 (ja) * | 1997-03-31 | 2005-04-13 | 株式会社ルネサステクノロジ | 半導体集積回路装置およびその製造方法 |
| JP2002198374A (ja) | 2000-10-16 | 2002-07-12 | Sharp Corp | 半導体装置およびその製造方法 |
| JP4445189B2 (ja) * | 2002-08-29 | 2010-04-07 | 株式会社ルネサステクノロジ | 半導体装置およびその製造方法 |
| US6864578B2 (en) * | 2003-04-03 | 2005-03-08 | International Business Machines Corporation | Internally reinforced bond pads |
| JP4228948B2 (ja) * | 2004-03-16 | 2009-02-25 | 日本電気株式会社 | 表示装置 |
| US7452803B2 (en) * | 2004-08-12 | 2008-11-18 | Megica Corporation | Method for fabricating chip structure |
| US7241636B2 (en) * | 2005-01-11 | 2007-07-10 | Freescale Semiconductor, Inc. | Method and apparatus for providing structural support for interconnect pad while allowing signal conductance |
| WO2006097982A1 (ja) * | 2005-03-11 | 2006-09-21 | Renesas Technology Corp. | 半導体集積回路装置の製造方法 |
| JP4708148B2 (ja) | 2005-10-07 | 2011-06-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP2007115980A (ja) * | 2005-10-21 | 2007-05-10 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2007123407A (ja) * | 2005-10-26 | 2007-05-17 | Renesas Technology Corp | 半導体装置の製造方法 |
| US7659178B2 (en) * | 2006-04-21 | 2010-02-09 | International Business Machines Corporation | Semiconductor device structures with reduced junction capacitance and drain induced barrier lowering and methods for fabricating such device structures and for fabricating a semiconductor-on-insulator substrate |
| JP2007294783A (ja) * | 2006-04-27 | 2007-11-08 | Renesas Technology Corp | 半導体装置の製造方法および半導体装置の設計支援システム |
| JP5123510B2 (ja) * | 2006-09-28 | 2013-01-23 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP5291917B2 (ja) * | 2007-11-09 | 2013-09-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
-
2007
- 2007-11-09 JP JP2007292079A patent/JP5291917B2/ja active Active
-
2008
- 2008-09-17 TW TW097135640A patent/TWI453842B/zh active
- 2008-09-17 TW TW103128729A patent/TWI552239B/zh active
- 2008-09-28 US US12/239,810 patent/US8552552B2/en active Active
- 2008-10-29 CN CN2008101707993A patent/CN101431058B/zh active Active
-
2012
- 2012-09-13 US US13/613,602 patent/US8552555B2/en active Active
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2013
- 2013-08-28 US US14/012,937 patent/US8785318B2/en active Active
-
2014
- 2014-07-01 US US14/320,686 patent/US9508630B2/en active Active
-
2015
- 2015-11-29 US US14/953,382 patent/US9484286B2/en active Active
- 2015-11-29 US US14/953,390 patent/US9484287B2/en active Active
-
2016
- 2016-01-12 US US14/993,981 patent/US20160126203A1/en not_active Abandoned
- 2016-01-12 US US14/994,016 patent/US20160126264A1/en not_active Abandoned
- 2016-09-13 US US15/264,588 patent/US9748191B2/en active Active
-
2017
- 2017-08-10 US US15/674,406 patent/US10204878B2/en active Active
-
2019
- 2019-02-04 US US16/267,307 patent/US10741517B2/en active Active
-
2020
- 2020-07-03 US US16/920,625 patent/US11239191B2/en active Active
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