JP2008511164A5 - - Google Patents

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Publication number
JP2008511164A5
JP2008511164A5 JP2007529785A JP2007529785A JP2008511164A5 JP 2008511164 A5 JP2008511164 A5 JP 2008511164A5 JP 2007529785 A JP2007529785 A JP 2007529785A JP 2007529785 A JP2007529785 A JP 2007529785A JP 2008511164 A5 JP2008511164 A5 JP 2008511164A5
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JP
Japan
Prior art keywords
substrate
chuck
chuck table
unit
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007529785A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008511164A (ja
JP5140428B2 (ja
Filing date
Publication date
Priority claimed from SG200405166A external-priority patent/SG120197A1/en
Priority claimed from SG200501802A external-priority patent/SG125997A1/en
Priority claimed from SG200505056A external-priority patent/SG129327A1/en
Application filed filed Critical
Priority claimed from PCT/SG2005/000288 external-priority patent/WO2006022597A2/en
Publication of JP2008511164A publication Critical patent/JP2008511164A/ja
Publication of JP2008511164A5 publication Critical patent/JP2008511164A5/ja
Application granted granted Critical
Publication of JP5140428B2 publication Critical patent/JP5140428B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2007529785A 2004-08-23 2005-08-23 集積回路ダイシング装置のチャック用供給機構 Expired - Lifetime JP5140428B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
SG200405166-0 2004-08-23
SG200405166A SG120197A1 (en) 2004-08-23 2004-08-23 Supply mechanism for the chuck of an integrated circuit dicing device
SG200501802-3 2005-03-22
SG200501802A SG125997A1 (en) 2005-03-22 2005-03-22 Improved chuck table for an integrated circuit dicing device
SG200505056A SG129327A1 (en) 2005-07-15 2005-07-15 Improved method and apparatus for an integrated circuit dicing device
SG200505056-2 2005-07-15
PCT/SG2005/000288 WO2006022597A2 (en) 2004-08-23 2005-08-23 Supply mechanism for the chuck of an integrated circuit dicing device

Publications (3)

Publication Number Publication Date
JP2008511164A JP2008511164A (ja) 2008-04-10
JP2008511164A5 true JP2008511164A5 (https=) 2008-09-25
JP5140428B2 JP5140428B2 (ja) 2013-02-06

Family

ID=35967934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007529785A Expired - Lifetime JP5140428B2 (ja) 2004-08-23 2005-08-23 集積回路ダイシング装置のチャック用供給機構

Country Status (8)

Country Link
US (2) US7829383B2 (https=)
EP (1) EP1789998B1 (https=)
JP (1) JP5140428B2 (https=)
KR (1) KR101299322B1 (https=)
CN (1) CN101969038B (https=)
MY (1) MY146842A (https=)
TW (1) TWI387053B (https=)
WO (1) WO2006022597A2 (https=)

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KR20120108229A (ko) * 2011-03-23 2012-10-05 삼성디스플레이 주식회사 레이저 가공용 워크 테이블
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KR101411157B1 (ko) * 2012-07-31 2014-06-23 세메스 주식회사 기판 처리 장치
ITTV20130048A1 (it) 2013-04-10 2014-10-11 Dario Toncelli Macchina per il taglio di materiale in lastra
US10907247B2 (en) 2014-08-13 2021-02-02 Rokko Systems Pte Ltd Apparatus and method for processing sputtered IC units
CN106206392B (zh) * 2015-05-07 2021-04-30 梭特科技股份有限公司 晶粒定位布置设备以及晶粒定位布置方法
TWI577624B (zh) 2016-09-30 2017-04-11 均豪精密工業股份有限公司 翹曲板材搬送物流系統
CN107195580B (zh) * 2017-05-23 2023-05-05 商洛学院 一种可在不同衬底块同步生长的两用mocvd衬底架托盘结构
JP7339858B2 (ja) * 2019-11-08 2023-09-06 株式会社ディスコ 加工装置及び板状ワークの搬入出方法
US11107716B1 (en) * 2020-02-06 2021-08-31 Pyxis Cf Pte. Ltd. Automation line for processing a molded panel
KR102274543B1 (ko) * 2020-03-20 2021-07-07 ㈜토니텍 쏘 앤 플레이스먼트 시스템
CN112739003B (zh) * 2020-11-09 2022-04-26 昆山丘钛光电科技有限公司 一种将fpc连板进行分板的方法及装置
JP7723475B2 (ja) * 2020-12-02 2025-08-14 株式会社ディスコ 切削装置
TWI820522B (zh) * 2020-12-15 2023-11-01 新加坡商洛克系统私人有限公司 Ｉｃ單元切割與分類之方法及系統
JP7678083B2 (ja) * 2021-03-18 2025-05-15 Ｔｏｗａ株式会社 加工装置、及び加工品の製造方法

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