JP2008030179A - チャック装置 - Google Patents
チャック装置 Download PDFInfo
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- JP2008030179A JP2008030179A JP2006208994A JP2006208994A JP2008030179A JP 2008030179 A JP2008030179 A JP 2008030179A JP 2006208994 A JP2006208994 A JP 2006208994A JP 2006208994 A JP2006208994 A JP 2006208994A JP 2008030179 A JP2008030179 A JP 2008030179A
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- Prior art keywords
- gripping
- pair
- chuck device
- workpiece
- driving
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- 239000012530 fluid Substances 0.000 claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims description 43
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 description 16
- 238000003780 insertion Methods 0.000 description 10
- 230000037431 insertion Effects 0.000 description 10
- 238000013459 approach Methods 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 4
- 238000012856 packing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
- B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
- B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
- B23B31/16004—Jaws movement actuated by one or more spiral grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
- B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
- B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
- B23B31/16195—Jaws movement actuated by levers moved by a coaxial control rod
- B23B31/16216—Jaws movement actuated by levers moved by a coaxial control rod using fluid-pressure means to actuate the gripping means
- B23B31/1622—Jaws movement actuated by levers moved by a coaxial control rod using fluid-pressure means to actuate the gripping means using mechanical transmission through the spindle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B1/00—Vices
- B25B1/06—Arrangements for positively actuating jaws
- B25B1/08—Arrangements for positively actuating jaws using cams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B1/00—Vices
- B25B1/06—Arrangements for positively actuating jaws
- B25B1/18—Arrangements for positively actuating jaws motor driven, e.g. with fluid drive, with or without provision for manual actuation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
- B25J15/026—Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
- B25J15/028—Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by cams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
- B25J15/10—Gripping heads and other end effectors having finger members with three or more finger members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2260/00—Details of constructional elements
- B23B2260/004—Adjustable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2260/00—Details of constructional elements
- B23B2260/062—Electric motors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/12—Chucks or sockets with fluid-pressure actuator
- Y10T279/1274—Radially reciprocating jaws
- Y10T279/1291—Fluid pressure moves jaws via mechanical connection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/17—Socket type
- Y10T279/17411—Spring biased jaws
- Y10T279/17487—Moving-cam actuator
- Y10T279/17495—Threaded sleeve and wedge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/19—Radially reciprocating jaws
- Y10T279/1926—Spiral cam or scroll actuated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/19—Radially reciprocating jaws
- Y10T279/1926—Spiral cam or scroll actuated
- Y10T279/1941—Bevel pinion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/27—Separate chuck-actuating power source
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/29—More than one set of gripping means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
【解決手段】チャックボディ12に供給される圧力流体によってピストン14を変位させることにより、一組の把持部20a、20bをベース体42に沿って開閉動作させると共に、前記把持部20a、20bを構成する一組のフィンガ93a、93bを、駆動部24からの駆動力によって前記把持部20a、20bの開閉方向と略直交方向に開閉自在としている。そして、ワークに対する把持部20a、20bの位置決めを一組のフィンガ93a、93bを開閉動作させることによって行い、その後、圧力流体の供給作用下に前記把持部20a、20bを介して前記ワークにおける所望の把持位置を把持する。
【選択図】図1
Description
圧力流体が供給される一組のポートを有し、前記ポートから供給される圧力流体の作用下に軸線方向に沿って変位するピストンが内装されるボディと、
前記ボディに連結され、電気信号によって回転駆動する駆動部と
前記ピストンに連結され、該ピストンの変位作用下に開閉自在に設けられた一組の第1把持部と、前記駆動部の駆動作用下に開閉自在に設けられ、前記第1把持部の開閉方向と略直交方向に開閉する一組の第2把持部とを有する把持機構と、
を備えることを特徴とする。
前記変換機構は、前記駆動部と共に回転駆動する回転軸と、
前記第2把持部の係合部が係合される円弧状の溝部を有し、前記回転軸と共に回転する回転体と、
前記係合部が挿通され、前記回転軸を中心として略水平方向に延在したガイド溝と
を備えるとよい。
ボディと、
前記ボディに連結され、電気信号によって回転駆動する第1駆動部と、
前記第1駆動部による駆動力によって開閉自在に設けられる一組の第1把持部と、前記第1駆動部とは別の第2駆動部の駆動作用下に開閉自在に設けられ、前記第1把持部の開閉方向と略直交方向に開閉する一組の第2把持部とを有する把持機構と、
を備えることを特徴とする。
14…ピストン 18a、18b…レバー
20a、20b…把持部 22…把持機構
24…駆動部 26…ギア機構
28…カム機構 30…貫通孔
32…第1ポート 34…第2ポート
44a、44b…変位ブロック 46…レール溝
64a、64b…ホルダ 84…回転シャフト
88a、88b…ガイド溝 90…ガイドシャフト
93a、93b…フィンガ 96…爪部
100…ピン部 102…回転駆動源
106…取付ブラケット 110…駆動ギア
112…サブギア 114…メインギア
120a、120b…カムプレート 126…ボス部
128a、128b…カム溝
Claims (4)
- 開閉自在に設けられる把持機構を介してワークを把持するチャック装置において、
圧力流体が供給される一組のポートを有し、前記ポートから供給される圧力流体の作用下に軸線方向に沿って変位するピストンが内装されるボディと、
前記ボディに連結され、電気信号によって回転駆動する駆動部と
前記ピストンに連結され、該ピストンの変位作用下に開閉自在に設けられた一組の第1把持部と、前記駆動部の駆動作用下に開閉自在に設けられ、前記第1把持部の開閉方向と略直交方向に開閉する一組の第2把持部とを有する把持機構と、
を備えることを特徴とするチャック装置。 - 請求項1記載のチャック装置において、
前記駆動部と第2把持部との間には、該駆動部の回転方向への駆動力を前記第2把持部の直線運動へと変換する変換機構を有し、
前記変換機構は、前記駆動部と共に回転駆動する回転軸と、
前記第2把持部の係合部が係合される円弧状の溝部を有し、前記回転軸と共に回転する回転体と、
前記係合部が挿通され、前記回転軸を中心として略水平方向に延在したガイド溝と、
を備えることを特徴とするチャック装置。 - 請求項2記載のチャック装置において、
前記回転体は、前記回転軸に対して軸線方向に沿って変位自在に係合され、且つ、前記回転軸に対する回転方向への相対変位が規制されることを特徴とするチャック装置。 - 開閉自在に設けられる把持機構を介してワークを把持するチャック装置において、
ボディと、
前記ボディに連結され、電気信号によって回転駆動する第1駆動部と、
前記第1駆動部による駆動力によって開閉自在に設けられる一組の第1把持部と、前記第1駆動部とは別の第2駆動部の駆動作用下に開閉自在に設けられ、前記第1把持部の開閉方向と略直交方向に開閉する一組の第2把持部とを有する把持機構と、
を備えることを特徴とするチャック装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006208994A JP4304631B2 (ja) | 2006-07-31 | 2006-07-31 | チャック装置 |
TW096124091A TWI322730B (en) | 2006-07-31 | 2007-07-03 | Chuck apparatus |
DE102007031412A DE102007031412B4 (de) | 2006-07-31 | 2007-07-05 | Klemmvorrichtung |
US11/774,981 US8123234B2 (en) | 2006-07-31 | 2007-07-09 | Chuck apparatus |
CN200710138254XA CN101116914B (zh) | 2006-07-31 | 2007-07-31 | 夹具设备 |
KR1020070077006A KR100918497B1 (ko) | 2006-07-31 | 2007-07-31 | 척장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006208994A JP4304631B2 (ja) | 2006-07-31 | 2006-07-31 | チャック装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008030179A true JP2008030179A (ja) | 2008-02-14 |
JP4304631B2 JP4304631B2 (ja) | 2009-07-29 |
Family
ID=38885125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006208994A Active JP4304631B2 (ja) | 2006-07-31 | 2006-07-31 | チャック装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8123234B2 (ja) |
JP (1) | JP4304631B2 (ja) |
KR (1) | KR100918497B1 (ja) |
CN (1) | CN101116914B (ja) |
DE (1) | DE102007031412B4 (ja) |
TW (1) | TWI322730B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012024882A (ja) * | 2010-07-23 | 2012-02-09 | Seiko Epson Corp | ロボットの駆動装置、ロボットの駆動方法、およびロボット |
JP6313898B1 (ja) * | 2017-11-09 | 2018-04-18 | 有限会社シン・エンジニアリング | リンク機構及びホースクリップ取付け治具 |
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JP5993539B2 (ja) * | 2011-01-06 | 2016-09-14 | セイコーエプソン株式会社 | ロボットハンド及びロボット |
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JP5834480B2 (ja) | 2011-05-11 | 2015-12-24 | セイコーエプソン株式会社 | ロボットハンド及びロボット |
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- 2007-07-09 US US11/774,981 patent/US8123234B2/en active Active
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JP2019086123A (ja) * | 2017-11-09 | 2019-06-06 | 有限会社シン・エンジニアリング | リンク機構及びホースクリップ取付け治具 |
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TWI322730B (en) | 2010-04-01 |
TW200817119A (en) | 2008-04-16 |
KR20080011633A (ko) | 2008-02-05 |
JP4304631B2 (ja) | 2009-07-29 |
DE102007031412B4 (de) | 2011-04-14 |
CN101116914B (zh) | 2010-06-02 |
US20080023925A1 (en) | 2008-01-31 |
DE102007031412A1 (de) | 2008-02-07 |
CN101116914A (zh) | 2008-02-06 |
KR100918497B1 (ko) | 2009-09-24 |
US8123234B2 (en) | 2012-02-28 |
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