JP2007532937A5 - - Google Patents

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Publication number
JP2007532937A5
JP2007532937A5 JP2007506723A JP2007506723A JP2007532937A5 JP 2007532937 A5 JP2007532937 A5 JP 2007532937A5 JP 2007506723 A JP2007506723 A JP 2007506723A JP 2007506723 A JP2007506723 A JP 2007506723A JP 2007532937 A5 JP2007532937 A5 JP 2007532937A5
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projection objective
image
mirror
group
plane
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JP2007506723A
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JP4801047B2 (ja
JP2007532937A (ja
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Priority claimed from PCT/EP2005/003645 external-priority patent/WO2005098505A1/en
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Publication of JP2007532937A5 publication Critical patent/JP2007532937A5/ja
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JP2007506723A 2004-04-08 2005-04-07 鏡群を有するカタジオプトリック投影対物レンズ Expired - Fee Related JP4801047B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56026704P 2004-04-08 2004-04-08
US60/560,267 2004-04-08
PCT/EP2005/003645 WO2005098505A1 (en) 2004-04-08 2005-04-07 Catadioptric projection objective with mirror group

Publications (3)

Publication Number Publication Date
JP2007532937A JP2007532937A (ja) 2007-11-15
JP2007532937A5 true JP2007532937A5 (enExample) 2008-05-08
JP4801047B2 JP4801047B2 (ja) 2011-10-26

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JP2007506723A Expired - Fee Related JP4801047B2 (ja) 2004-04-08 2005-04-07 鏡群を有するカタジオプトリック投影対物レンズ
JP2007506724A Pending JP2007532938A (ja) 2004-04-08 2005-04-07 カタジオプトリック投影対物レンズ

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JP2007506724A Pending JP2007532938A (ja) 2004-04-08 2005-04-07 カタジオプトリック投影対物レンズ

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US (4) US7712905B2 (enExample)
EP (2) EP1733272A1 (enExample)
JP (2) JP4801047B2 (enExample)
KR (1) KR100991584B1 (enExample)
CN (1) CN1965259B (enExample)
WO (3) WO2005098504A1 (enExample)

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