JP2007502019A5 - - Google Patents

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Publication number
JP2007502019A5
JP2007502019A5 JP2006522918A JP2006522918A JP2007502019A5 JP 2007502019 A5 JP2007502019 A5 JP 2007502019A5 JP 2006522918 A JP2006522918 A JP 2006522918A JP 2006522918 A JP2006522918 A JP 2006522918A JP 2007502019 A5 JP2007502019 A5 JP 2007502019A5
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JP
Japan
Prior art keywords
objective lens
mirrors
curved mirror
lens
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006522918A
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English (en)
Japanese (ja)
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JP2007502019A (ja
JP5036311B2 (ja
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Priority claimed from US10/639,780 external-priority patent/US7085075B2/en
Application filed filed Critical
Publication of JP2007502019A publication Critical patent/JP2007502019A/ja
Publication of JP2007502019A5 publication Critical patent/JP2007502019A5/ja
Application granted granted Critical
Publication of JP5036311B2 publication Critical patent/JP5036311B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006522918A 2003-08-12 2004-07-16 ミラーｍ３の前にレンズを伴う複数のミラーを含む投影対物レンズ Expired - Fee Related JP5036311B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/639,780 2003-08-12
US10/639,780 US7085075B2 (en) 2003-08-12 2003-08-12 Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
PCT/EP2004/007910 WO2005015283A1 (en) 2003-08-12 2004-07-16 Projection objectives including a plurality of curved mirrors with lenses ahead of the last but one mirror

Publications (3)

Publication Number Publication Date
JP2007502019A JP2007502019A (ja) 2007-02-01
JP2007502019A5 true JP2007502019A5 (enExample) 2007-08-16
JP5036311B2 JP5036311B2 (ja) 2012-09-26

Family

ID=34135943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006522918A Expired - Fee Related JP5036311B2 (ja) 2003-08-12 2004-07-16 ミラーｍ３の前にレンズを伴う複数のミラーを含む投影対物レンズ

Country Status (5)

Country Link
US (2) US7085075B2 (enExample)
EP (1) EP1654577A1 (enExample)
JP (1) JP5036311B2 (enExample)
TW (1) TW200508818A (enExample)
WO (1) WO2005015283A1 (enExample)

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