JP2007217078A - 方向転換装置 - Google Patents

方向転換装置 Download PDF

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Publication number
JP2007217078A
JP2007217078A JP2006036572A JP2006036572A JP2007217078A JP 2007217078 A JP2007217078 A JP 2007217078A JP 2006036572 A JP2006036572 A JP 2006036572A JP 2006036572 A JP2006036572 A JP 2006036572A JP 2007217078 A JP2007217078 A JP 2007217078A
Authority
JP
Japan
Prior art keywords
transport
rail
foup
conveyance
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006036572A
Other languages
English (en)
Japanese (ja)
Inventor
Senzo Kutoku
千三 久徳
Tatsuo Tsubaki
達雄 椿
Masanao Murata
正直 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Shinko Inc
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Priority to JP2006036572A priority Critical patent/JP2007217078A/ja
Priority to US11/705,461 priority patent/US20070186799A1/en
Priority to TW096105453A priority patent/TW200808632A/zh
Priority to KR1020070015483A priority patent/KR20070082052A/ko
Priority to CNA2007100801527A priority patent/CN101020537A/zh
Publication of JP2007217078A publication Critical patent/JP2007217078A/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61J—SHIFTING OR SHUNTING OF RAIL VEHICLES
    • B61J1/00—Turntables; Traversers; Transporting rail vehicles on other rail vehicles or dollies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
JP2006036572A 2006-02-14 2006-02-14 方向転換装置 Pending JP2007217078A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006036572A JP2007217078A (ja) 2006-02-14 2006-02-14 方向転換装置
US11/705,461 US20070186799A1 (en) 2006-02-14 2007-02-13 Direction change device
TW096105453A TW200808632A (en) 2006-02-14 2007-02-14 Direction change device
KR1020070015483A KR20070082052A (ko) 2006-02-14 2007-02-14 방향 전환 장치
CNA2007100801527A CN101020537A (zh) 2006-02-14 2007-02-14 方向转换装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006036572A JP2007217078A (ja) 2006-02-14 2006-02-14 方向転換装置

Publications (1)

Publication Number Publication Date
JP2007217078A true JP2007217078A (ja) 2007-08-30

Family

ID=38367000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006036572A Pending JP2007217078A (ja) 2006-02-14 2006-02-14 方向転換装置

Country Status (5)

Country Link
US (1) US20070186799A1 (ko)
JP (1) JP2007217078A (ko)
KR (1) KR20070082052A (ko)
CN (1) CN101020537A (ko)
TW (1) TW200808632A (ko)

Cited By (8)

* Cited by examiner, † Cited by third party
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KR100955895B1 (ko) * 2009-07-24 2010-05-06 (주)에스엠텍 카세트 이송장치
JP2010231467A (ja) * 2009-03-27 2010-10-14 Laurel Precision Machines Co Ltd 硬貨収納箱回収システム
JP2010231466A (ja) * 2009-03-27 2010-10-14 Laurel Precision Machines Co Ltd 硬貨収納箱回収システム
CN103171886A (zh) * 2013-04-18 2013-06-26 广西北流市智宇陶瓷自动化设备有限公司 90度等分转弯传送装置
CN103466308A (zh) * 2013-08-16 2013-12-25 天津市华帅制药机械有限公司 料车90度换向器
CN104129609A (zh) * 2013-12-20 2014-11-05 中国重汽集团柳州运力专用汽车有限公司 生产线转盘
CN112309930A (zh) * 2019-07-29 2021-02-02 Bns株式会社 具备行驶及引导功能的轨道转向模块及其托盘移送系统
JP7344186B2 (ja) 2020-09-14 2023-09-13 地中空間開発株式会社 トンネル掘削機、掘削ツール交換装置および掘削ツール交換方法

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US20080240900A1 (en) * 2007-03-29 2008-10-02 Eric Reisenauer System for storage and retrieval
US20080240894A1 (en) * 2007-03-29 2008-10-02 Eric Reisenauer Storage and retrieval system
CN101161568B (zh) * 2007-09-11 2010-07-07 王树生 悬挂式托盘动力横移机构
CN101397083B (zh) * 2007-09-30 2011-04-13 中国国际海运集装箱(集团)股份有限公司 一种有轨堆垛机转轨装置
CN102300790B (zh) * 2009-01-29 2013-10-16 平田机工株式会社 工件保持移送装置
CN102101584B (zh) * 2009-12-18 2013-05-22 株式会社太星技研 气动螺旋转向式输送机
KR101426581B1 (ko) * 2010-12-03 2014-08-05 현대중공업 주식회사 턴 테이블을 활용한 굴삭기의 조립 공정 설비
CN102673980A (zh) * 2011-03-15 2012-09-19 捷达世软件（深圳）有限公司 物品运送系统及方法
TWI426043B (zh) * 2011-06-07 2014-02-11 Au Optronics Corp 輸送系統
US20130042736A1 (en) * 2011-08-19 2013-02-21 Shenzhen China Star Optoelectronics Technology Co., Ltd. Cutting machine and positioning method thereof for positioning liquid crystal panel
CN102313452B (zh) * 2011-09-21 2012-11-07 苏州汇科机电设备有限公司 电子元器件烧成炉的送料机构
CN103158899A (zh) * 2011-12-15 2013-06-19 苏州澳昆智能机器人技术有限公司 包装箱输送线的包装箱转弯定位机构
CN102633103A (zh) * 2012-03-21 2012-08-15 李莉 一种平板玻璃旋转台
CN103848195A (zh) * 2012-11-28 2014-06-11 江苏天工钛业科技有限公司 自动直角拐弯运输车
CN103043418A (zh) * 2012-12-24 2013-04-17 保定天威保变电气股份有限公司 一种变压器的转向装置及转向方法
CN103143933B (zh) * 2013-03-20 2018-02-06 厦门松芝汽车空调有限公司 大中型汽车空调柔性生产流水线
CN103159023B (zh) * 2013-04-07 2015-06-10 普瑞特机械制造股份有限公司 一种能在垂直相交地轨上直行并转向的转运装置
CN103245681B (zh) * 2013-05-10 2016-05-04 中国原子能科学研究院 中子伽玛联合测量装置
KR101533370B1 (ko) * 2013-10-10 2015-07-02 이노이엔지주식회사 기판이송장치
US9670002B2 (en) 2013-10-28 2017-06-06 Murata Machinery, Ltd. Conveyor device
JP6427783B2 (ja) * 2014-01-29 2018-11-28 伊東電機株式会社 移載装置及びモータを有する装置の位置決め方法
CN104176905A (zh) * 2014-08-12 2014-12-03 湖北大别山窑炉产业研究设计院有限公司 泡沫玻璃生产线自动回模系统
CN104401767B (zh) * 2014-11-14 2017-03-15 广州兴森快捷电路科技有限公司 Pcb转角传输装置及方法
CN104495323B (zh) * 2014-11-28 2017-01-25 苏州晟成光伏设备有限公司 旋转配料装置
CN104787383B (zh) * 2015-04-22 2017-04-19 江苏仅一包装技术有限公司 一种防甩料机构
CN105083959A (zh) * 2015-07-07 2015-11-25 安徽宜留电子科技有限公司 轴承半成品中转输送装置
CN105416987A (zh) * 2015-11-29 2016-03-23 无锡市鑫茂锻造有限公司 铸造生产线的多功能转向输送装置
CN105405586A (zh) * 2015-12-02 2016-03-16 山东电力设备有限公司 一种应用于山洞内旋转变压器的装置
CN106044560B (zh) * 2016-07-12 2017-06-13 陈祯蕾 适用于狭小空间内吊运物体转向的直角转弯装置
JP6046855B1 (ja) * 2016-08-31 2016-12-21 田中　正弘 車両転回装置および車両転回装置を用いた軌道
CN106553892B (zh) * 2016-12-07 2018-04-20 东莞市奥海科技股份有限公司 高低产能对接生产线
US20190393064A1 (en) * 2017-03-17 2019-12-26 Applied Materials, Inc. Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamber
CN107021328A (zh) * 2017-06-19 2017-08-08 中铁十局集团第三工程有限公司 一种过轨装置及运输轨道
CN107195432B (zh) * 2017-06-21 2018-12-28 云南送变电工程有限公司 一种将±500kV换流变压器带油带附件旋转180°就位的方法
US11773541B2 (en) 2017-07-26 2023-10-03 Mitsubishi Electric Corporation Conveying path switching device and elevator apparatus
JP6906754B2 (ja) * 2017-10-31 2021-07-21 村田機械株式会社 搬送システム
CN107804699A (zh) * 2017-12-21 2018-03-16 芜湖戎征达伺服驱动技术有限公司 一种零件检验台
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
CN110436098B (zh) * 2018-05-03 2020-09-22 北新集团建材股份有限公司 一种机器人运输中转方法和中转系统
CN108910487A (zh) * 2018-09-05 2018-11-30 邯郸学院 一种计算机控制物流用直角转弯装置
CN109823856A (zh) * 2018-12-29 2019-05-31 枣庄北航机床创新研究院有限公司 一种地下物料传输系统及地下物料传输方法
CN113135418A (zh) * 2020-01-17 2021-07-20 江南大学 一种轨道分流系统
NO346443B1 (en) * 2020-11-25 2022-08-22 Autostore Tech As Vehicle rotation device and system
CN114056897B (zh) * 2021-10-26 2023-07-07 深圳市登峰自动化设备有限公司 一种转角暂存机的传送装置
CN114750788B (zh) * 2022-05-23 2024-04-09 贵州化工建设有限责任公司 一种低空间大尺寸非标设备运输安装装置及使用方法
CN117125609B (zh) * 2023-10-25 2024-01-30 上海果纳半导体技术有限公司 一种天车轨道和天车搬运系统

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Publication number Priority date Publication date Assignee Title
JPS6256213A (ja) * 1985-08-31 1987-03-11 Hino Motors Ltd 搬送加工装置
JPH03288706A (ja) * 1990-04-04 1991-12-18 Daifuku Co Ltd ローラコンベヤ
JPH0485210A (ja) * 1990-07-27 1992-03-18 Nakai Kogyo Kk 物品搬送用ターンテーブル
JP2003506289A (ja) * 1999-08-02 2003-02-18 アシスト テクノロジーズ インコーポレイテッド 一貫搬送キャリヤ及びディレクターを有する搬送装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010231467A (ja) * 2009-03-27 2010-10-14 Laurel Precision Machines Co Ltd 硬貨収納箱回収システム
JP2010231466A (ja) * 2009-03-27 2010-10-14 Laurel Precision Machines Co Ltd 硬貨収納箱回収システム
KR100955895B1 (ko) * 2009-07-24 2010-05-06 (주)에스엠텍 카세트 이송장치
CN103171886A (zh) * 2013-04-18 2013-06-26 广西北流市智宇陶瓷自动化设备有限公司 90度等分转弯传送装置
CN103466308A (zh) * 2013-08-16 2013-12-25 天津市华帅制药机械有限公司 料车90度换向器
CN104129609A (zh) * 2013-12-20 2014-11-05 中国重汽集团柳州运力专用汽车有限公司 生产线转盘
CN112309930A (zh) * 2019-07-29 2021-02-02 Bns株式会社 具备行驶及引导功能的轨道转向模块及其托盘移送系统
JP7344186B2 (ja) 2020-09-14 2023-09-13 地中空間開発株式会社 トンネル掘削機、掘削ツール交換装置および掘削ツール交換方法

Also Published As

Publication number Publication date
KR20070082052A (ko) 2007-08-20
CN101020537A (zh) 2007-08-22
TW200808632A (en) 2008-02-16
US20070186799A1 (en) 2007-08-16

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