JP6478878B2 - 基板処理装置及び基板搬送方法並びに基板搬送プログラムを記憶したコンピュータ読み取り可能な記憶媒体 - Google Patents
基板処理装置及び基板搬送方法並びに基板搬送プログラムを記憶したコンピュータ読み取り可能な記憶媒体 Download PDFInfo
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- 238000003860 storage Methods 0.000 title claims description 19
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- 230000004308 accommodation Effects 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 29
- 230000032258 transport Effects 0.000 claims 55
- 235000012431 wafers Nutrition 0.000 description 102
- 230000003028 elevating effect Effects 0.000 description 4
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- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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Description
前記キャリアから前記基板を搬出する時に、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出した場合には、前記キャリアに前記基板を搬入する時も、前記第2基板搬送部だけを駆動して前記キャリアに前記基板を搬入することにした。
C キャリア
1 基板処理システム(基板処理装置)
22 基板収容状態検出部
29 第1基板搬送部
30 第2基板搬送部
Claims (9)
- キャリアに収容されている基板の収容状態を検出する基板収容状態検出部と、
前記キャリアに対して前記基板を搬送する第1基板搬送部及び第2基板搬送部と、
前記基板収容状態検出部の検出結果に基づいて前記第1基板搬送部及び第2基板搬送部を制御する制御部と、
を有し、
前記第1基板搬送部は、複数枚の前記基板を同時に搬送するように構成し、
前記第2基板搬送部は、1枚の前記基板を搬送するように構成し、
前記第1基板搬送部と前記第2基板搬送部とを上下に並べて配置し、
前記制御部は、前記基板収容状態検出部の検出結果から、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出するか、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出するかを判断し、
前記キャリアから前記基板を搬出する時に前記第1基板搬送部と前記第2基板搬送部とを同時に使用したか前記第2基板搬送部だけを使用したかを記憶しておき、
前記キャリアから前記基板を搬出する時に、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出した場合には、前記キャリアに前記基板を搬入する時も、前記第2基板搬送部だけを駆動して前記キャリアに前記基板を搬入するように制御することを特徴とする基板処理装置。 - 前記制御部は、前記基板の収容状態から、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出することができると判断した場合には、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出し、一方、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出することができないと判断した場合、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出することができるか判断し、搬出ができると判断した場合には、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出し、搬出ができないと判断した場合には、前記第1基板搬送部と前記第2基板搬送部の搬送動作を停止することを特徴とする請求項1に記載の基板処理装置。
- 前記制御部は、前記第1基板搬送部及び第2基板搬送部で同時に搬送可能な前記基板の最大枚数ごとに区切って前記判断を行うことを特徴とする請求項1又は請求項2に記載の基板処理装置。
- 前記制御部は、前記第1基板搬送部や前記第2基板搬送部に設けられた前記基板を保持するためのフォークを前記キャリアに収容された前記基板の間に挿入することができるだけの間隔が保持されているか否かで搬出することができるか否かを判断することを特徴とする請求項1〜請求項3のいずれかに記載の基板処理装置。
- 基板収容状態検出部で検出したキャリアに収容されている基板の収容状態に基づいて、複数枚の前記基板を同時に搬送する第1基板搬送部及び1枚の前記基板を搬送する第2基板搬送部を用いて前記キャリアに対して前記基板を搬送する基板搬送方法において、
前記基板収容状態検出部の検出結果から、上下に並べて配置された前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出するか、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出するかを判断し、
前記キャリアから前記基板を搬出する時に前記第1基板搬送部と前記第2基板搬送部とを同時に使用したか前記第2基板搬送部だけを使用したかを記憶しておき、
前記キャリアから前記基板を搬出する時に、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出した場合には、前記キャリアに前記基板を搬入する時も、前記第2基板搬送部だけを駆動して前記キャリアに前記基板を搬入することを特徴とする基板搬送方法。 - 前記基板の収容状態から、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出することができると判断した場合には、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出し、一方、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出することができないと判断した場合、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出することができるか判断し、搬出ができると判断した場合には、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出し、搬出ができないと判断した場合には、前記第1基板搬送部と前記第2基板搬送部の搬送動作を停止することを特徴とする請求項5に記載の基板搬送方法。
- 前記第1基板搬送部及び第2基板搬送部で搬送可能な前記基板の最大枚数ごとに区切って前記判断を行うことを特徴とする請求項5又は請求項6に記載の基板搬送方法。
- 前記第1基板搬送部や前記第2基板搬送部に設けられた前記基板を保持するためのフォークを前記キャリアに収容された前記基板の間に挿入することができるだけの間隔が保持されているか否かで搬出することができるか否かを判断することを特徴とする請求項5〜請求項7のいずれかに記載の基板搬送方法。
- キャリアに収容されている基板の収容状態を検出する基板収容状態検出部と、
前記キャリアに対して前記基板を搬送する第1基板搬送部及び第2基板搬送部と、
を有し、
前記第1基板搬送部は、複数枚の前記基板を同時に搬送するように構成し、
前記第2基板搬送部は、1枚の前記基板を搬送するように構成し、
前記第1基板搬送部と前記第2基板搬送部とを上下に並べて配置
する基板処理装置に基板を処理させるための基板搬送プログラムを記憶したコンピュータ読み取り可能な記憶媒体において、
前記基板収容状態検出部の検出結果から、前記第1基板搬送部と前記第2基板搬送部とを同時に駆動して前記キャリアから前記基板を搬出するか、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出するかを判断し、
前記キャリアから前記基板を搬出する時に前記第1基板搬送部と前記第2基板搬送部とを同時に使用したか前記第2基板搬送部だけを使用したかを記憶しておき、
前記キャリアから前記基板を搬出する時に、前記第2基板搬送部だけを駆動して前記キャリアから前記基板を搬出した場合には、前記キャリアに前記基板を搬入する時も、前記第2基板搬送部だけを駆動して前記キャリアに前記基板を搬入することを特徴とする基板搬送プログラムを記憶したコンピュータ読み取り可能な記憶媒体。
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JP2015171747A JP6478878B2 (ja) | 2015-09-01 | 2015-09-01 | 基板処理装置及び基板搬送方法並びに基板搬送プログラムを記憶したコンピュータ読み取り可能な記憶媒体 |
CN201610685054.5A CN106486403B (zh) | 2015-09-01 | 2016-08-18 | 基板处理装置和基板输送方法 |
KR1020160111680A KR102521418B1 (ko) | 2015-09-01 | 2016-08-31 | 기판 처리 장치 및 기판 반송 방법 그리고 기판 반송 프로그램을 기억한 컴퓨터 판독 가능한 기억 매체 |
US15/252,364 US10043692B2 (en) | 2015-09-01 | 2016-08-31 | Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program |
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US10867824B2 (en) * | 2018-05-29 | 2020-12-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate detecting system in a substrate storage container |
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JP5100265B2 (ja) * | 2007-09-03 | 2012-12-19 | 株式会社東芝 | ウエハ移送システム中の清浄度評価方法 |
JP5131094B2 (ja) * | 2008-08-29 | 2013-01-30 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法並びに記憶媒体 |
JP5000627B2 (ja) * | 2008-11-27 | 2012-08-15 | 東京エレクトロン株式会社 | 基板処理システム |
US9254566B2 (en) * | 2009-03-13 | 2016-02-09 | Kawasaki Jukogyo Kabushiki Kaisha | Robot having end effector and method of operating the same |
JP5871845B2 (ja) * | 2013-03-12 | 2016-03-01 | 東京エレクトロン株式会社 | 基板搬送装置、基板処理装置、基板取出方法および記憶媒体 |
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KR20170027304A (ko) | 2017-03-09 |
US20170062251A1 (en) | 2017-03-02 |
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