JP6531638B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- JP6531638B2 JP6531638B2 JP2015240458A JP2015240458A JP6531638B2 JP 6531638 B2 JP6531638 B2 JP 6531638B2 JP 2015240458 A JP2015240458 A JP 2015240458A JP 2015240458 A JP2015240458 A JP 2015240458A JP 6531638 B2 JP6531638 B2 JP 6531638B2
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- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
- B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
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- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- G—PHYSICS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
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- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
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Description
天井に設置された走行レールと、前記走行レールに沿って地上側に設けられた複数の載置台と、前記走行レールに吊下げ支持されて前記走行レールによって形成された走行経路に沿って走行し、搬送元となる前記載置台から搬送先となる前記載置台へ物品を搬送する物品搬送車と、を備えた物品搬送設備であって、
前記物品搬送車によって前記物品が搬送される第1エリアと、
前記第1エリアとは別の領域に設けられ、前記物品搬送車の調整が行われる第2エリアと、
前記第2エリアに設置された調整用装置と、
前記第1エリアにおける前記物品搬送車の作動を制御する第1制御装置と、
前記第2エリアにおける前記物品搬送車の作動を制御する第2制御装置と、を備え、
前記走行経路は、前記第1エリアに設けられた第1経路と、前記第1経路に対して分岐及び合流すると共に前記第2エリアに設けられた第2経路とを含み、
前記物品搬送車は、少なくとも前記第1制御装置及び前記第2制御装置と排他的にワイヤレス通信が可能な通信制御部と、前記第1制御装置及び前記第2制御装置からの指令に基づいて前記物品搬送車を自律制御により作動させる作動制御部と、各載置台において前記物品を移載するための位置情報を少なくとも含む搬送用プロファイル情報を記憶するプロファイル記憶部と、を備え、
前記第1制御装置は、前記物品搬送車を作動させるための作動指令を前記物品搬送車に与えるものであり、
前記作動指令には、前記物品を搬送させる物品搬送指令と、前記物品搬送車を前記第1エリアから前記第2エリアに離脱させる離脱指令とを少なくとも含み、
調整が必要な前記物品搬送車である調整対象車の前記作動制御部は、前記離脱指令に基づいて当該物品搬送車を前記第2経路へ進入させ、
前記調整対象車の前記通信制御部は、前記離脱指令に基づいて、通信対象先を前記第1制御装置から前記第2制御装置に変更し、
前記調整対象車の前記作動制御部は、前記第2制御装置からの調整指令に応答して前記調整用装置を用いて調整作動を行うと共に前記搬送用プロファイル情報を更新し、
前記調整対象車の前記通信制御部は、前記搬送用プロファイル情報が更新された後、通信対象先を前記第2制御装置から前記第1制御装置に変更する。
以下、その他の実施形態について説明する。尚、以下に説明する各実施形態の構成は、それぞれ単独で適用されるものに限られず、矛盾が生じない限り、他の実施形態の構成と組み合わせて適用することも可能である。
2 :処理装置
3 :支持台(載置台)
4 :検査台(調整用載置台)
4a :第1検査台(調整用載置台)
4b :第2検査台(調整用載置台)
4c :第3検査台(調整用載置台)
4d :第4検査台(調整用載置台)
4n :第n検査台(調整用載置台)
10 :通信制御部
11 :作動制御部
12 :プロファイル記憶部
22 :走行部
24 :支持機構(支持部)
25 :昇降駆動部
C :調整用ユニット(調整用装置)
E1 :第1エリア
E2 :第2エリア
FS :設備監視装置
H1 :第1制御装置
H2 :第2制御装置
L :走行経路
L1 :第1経路
L2 :第2経路
P :調整用載置面
P1 :第1調整用載置面(調整用載置面)
P2 :第2調整用載置面(調整用載置面)
P3 :第3調整用載置面(調整用載置面)
P4 :第4調整用載置面(調整用載置面)
R :走行レール
W :容器(物品)
Claims (7)
- 天井に設置された走行レールと、前記走行レールに沿って地上側に設けられた複数の載置台と、前記走行レールに吊下げ支持されて前記走行レールによって形成された走行経路に沿って走行し、搬送元となる前記載置台から搬送先となる前記載置台へ物品を搬送する物品搬送車と、を備えた物品搬送設備であって、
前記物品搬送車によって前記物品が搬送される第1エリアと、
前記第1エリアとは別の領域に設けられ、前記物品搬送車の調整が行われる第2エリアと、
前記第2エリアに設置された調整用装置と、
前記第1エリアにおける前記物品搬送車の作動を制御する第1制御装置と、
前記第2エリアにおける前記物品搬送車の作動を制御する第2制御装置と、を備え、
前記走行経路は、前記第1エリアに設けられた第1経路と、前記第1経路に対して分岐及び合流すると共に前記第2エリアに設けられた第2経路とを含み、
前記物品搬送車は、少なくとも前記第1制御装置及び前記第2制御装置と排他的にワイヤレス通信が可能な通信制御部と、前記第1制御装置及び前記第2制御装置からの指令に基づいて前記物品搬送車を自律制御により作動させる作動制御部と、各載置台において前記物品を移載するための位置情報を少なくとも含む搬送用プロファイル情報を記憶するプロファイル記憶部と、を備え、
前記第1制御装置は、前記物品搬送車を作動させるための作動指令を前記物品搬送車に与えるものであり、
前記作動指令には、前記物品を搬送させる物品搬送指令と、前記物品搬送車を前記第1エリアから前記第2エリアに離脱させる離脱指令とを少なくとも含み、
調整が必要な前記物品搬送車である調整対象車の前記作動制御部は、前記離脱指令に基づいて当該物品搬送車を前記第2経路へ進入させ、
前記調整対象車の前記通信制御部は、前記離脱指令に基づいて、通信対象先を前記第1制御装置から前記第2制御装置に変更し、
前記調整対象車の前記作動制御部は、前記第2制御装置からの調整指令に応答して前記調整用装置を用いて調整作動を行うと共に前記搬送用プロファイル情報を更新し、
前記調整対象車の前記通信制御部は、前記搬送用プロファイル情報が更新された後、通信対象先を前記第2制御装置から前記第1制御装置に変更する、物品搬送設備。 - 各物品搬送車の過去の作動状況を稼働情報として蓄積する設備監視装置をさらに備え、
前記設備監視装置は、各物品搬送車の搬送回数及び走行時間を少なくとも含む作動状況の情報を逐次取得し、前記稼働情報に基づいて調整が必要な前記物品搬送車を前記調整対象車として選定すると共に、この選定結果を前記第1制御装置に与え、
前記第1制御装置は、当該選定結果に基づいて、前記調整対象車に前記離脱指令を与える請求項1に記載の物品搬送設備。 - 前記物品搬送車は、前記走行経路に沿って走行する走行部と、前記走行部に支持され且つ前記物品を吊り下げ支持する支持部と、前記走行部が停止した状態で前記支持部を前記走行部に対して昇降させる昇降駆動部と、を備え、
前記支持部は、前記第2エリアにおいて、前記物品に代えて前記調整用装置を吊り下げ支持し、
前記調整用装置は、前記昇降駆動部によって昇降される際に調整用データを取得し、前記調整対象車に対応する前記搬送用プロファイル情報を演算し、当該搬送用プロファイル情報を前記調整対象車に伝達する請求項1又は2に記載の物品搬送設備。 - 前記第2エリアは、前記載置台に前記物品を載置する形態と同じ形態で前記調整用装置を載置可能な調整用載置面を有する調整用載置台を備え、
前記第2エリアにおいて、前記調整用装置は、少なくとも2つの異なる高さの前記調整用載置面に載置され、前記調整用載置面のそれぞれから昇降される際に前記調整用データを取得する請求項3に記載の物品搬送設備。 - 異なる高さの前記調整用載置面をそれぞれ備えた少なくとも2つの前記調整用載置台が、前記第2経路に沿って配置され、前記調整対象車は、前記第2経路に沿って移動すると共に、異なる前記調整用載置台の間で前記調整用装置を移載し、
前記調整用装置は、複数の前記調整用載置台ごとに前記調整用データを取得する請求項4に記載の物品搬送設備。 - 前記調整用載置台は、地上からの高さが高い順に、或いは低い順に、前記第2経路に沿って配置されている請求項5に記載の物品搬送設備。
- 前記調整用載置面の地上からの高さは、前記載置台の地上からの高さに対応する高さである請求項4から6の何れか一項に記載の物品搬送設備。
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