JP2008222346A - 懸垂式軌道搬送台車及び搬送システム - Google Patents
懸垂式軌道搬送台車及び搬送システム Download PDFInfo
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- JP2008222346A JP2008222346A JP2007060512A JP2007060512A JP2008222346A JP 2008222346 A JP2008222346 A JP 2008222346A JP 2007060512 A JP2007060512 A JP 2007060512A JP 2007060512 A JP2007060512 A JP 2007060512A JP 2008222346 A JP2008222346 A JP 2008222346A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
- B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
- B66C1/22—Rigid members, e.g. L-shaped members, with parts engaging the under surface of the loads; Crane hooks
- B66C1/28—Duplicate, e.g. pivoted, members engaging the loads from two sides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
- B66C11/12—Trolleys or crabs, e.g. operating above runways having hoisting gear adapted to special load-engaging elements and not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
【解決手段】天井に敷設された軌道上を懸垂状態で走行し、昇降自在な把持機構22で被搬送物を把持して搬送する懸垂式軌道搬送台車において、その把持機構22に、水平方向に伸縮自在なスライド機構23と、前記スライド機構23の先端に支持され被搬送物を狭持及び開放自在なグリッパ24とを備える。
【選択図】 図2
Description
すなわち、本発明の懸垂式軌道搬送台車は、天井に敷設された軌道上を懸垂状態で走行し、昇降自在な把持機構で被搬送物を把持して搬送する懸垂式軌道搬送台車において、前記懸垂式軌道搬送台車は、前記把持機構に、水平方向に伸縮自在なスライド機構と、前記スライド機構の先端に支持され被搬送物を狭持及び開放自在なグリッパとを備えていることを特徴とするものである。
11 工程内軌道
12 分岐軌道
13 棚装置
14 ストッカ
15 処理装置
16 搬送台車
17 FOUP
18 処理部
20 レール
21 懸垂ベルト
22 把持機構
23 スライド機構
24 グリッパ
25 固定棚板
26 支柱
30 ロッド
31 係止部
40 突き出しロッド
41 回転ロッド
42 挿入ロッド
43 吸着ロッド
44 ロッド受け
45 ロッド受け
46 筒状ロッド受け
47 被吸着部材
48 凹部
49 凹部
50 スライド棚板
51 突き出しロッド
52 挿入部
60 走行機構
61 位置合わせ機構
62 スライド機構
63 懸垂機構
Claims (5)
- 天井に敷設された軌道上を懸垂状態で走行し、昇降自在な把持機構で被搬送物を把持して搬送する懸垂式軌道搬送台車において、
前記把持機構は、水平方向に伸縮自在なスライド機構と、前記スライド機構の先端に支持され被搬送物を狭持及び開放自在なグリッパとを備えていることを特徴とする懸垂式軌道搬送台車。 - 請求項1記載の懸垂式軌道搬送台車と、被搬送物を一時的に保管する複数台の棚装置とを備えている搬送システムにおいて、
前記棚装置は、前記搬送物を載置するための棚が、垂直方向に間隔をおいて複数枚配置されていることを特徴とする搬送システム。 - 前記把持機構と前記棚装置との間に、前記把持機構を前記棚装置に係脱可能に固定する姿勢保持手段を備えたことを特徴とする請求項2記載の搬送システム。
- 前記姿勢保持手段は、前記把持機構に設けられいずれかの棚に係合可能なロッドと、各棚に設けられ前記ロッドを保持可能な係止部と、からなることを特徴とする請求項3記載の搬送システム。
- 請求項4記載の姿勢保持手段は、前記把持機構が前記棚装置のいずれかの棚に被搬送物を移載する際に、前記ロッドが、前記いずれかの棚の直上の棚に設けられた前記係止部と係合することを特徴とする請求項4記載の搬送システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007060512A JP5088468B2 (ja) | 2007-03-09 | 2007-03-09 | 懸垂式搬送台車を用いた搬送システム |
KR1020080021426A KR20080082928A (ko) | 2007-03-09 | 2008-03-07 | 현수식 반송 캐리지 및 반송 시스템 |
TW097108009A TWI419823B (zh) | 2007-03-09 | 2008-03-07 | 搬送系統 |
CN2008100852595A CN101276773B (zh) | 2007-03-09 | 2008-03-10 | 悬挂型运输车和运输系统 |
US12/045,060 US7686176B2 (en) | 2007-03-09 | 2008-03-10 | Suspended type transporting carriage and transporting system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007060512A JP5088468B2 (ja) | 2007-03-09 | 2007-03-09 | 懸垂式搬送台車を用いた搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008222346A true JP2008222346A (ja) | 2008-09-25 |
JP5088468B2 JP5088468B2 (ja) | 2012-12-05 |
Family
ID=39740585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007060512A Expired - Fee Related JP5088468B2 (ja) | 2007-03-09 | 2007-03-09 | 懸垂式搬送台車を用いた搬送システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US7686176B2 (ja) |
JP (1) | JP5088468B2 (ja) |
KR (1) | KR20080082928A (ja) |
CN (1) | CN101276773B (ja) |
TW (1) | TWI419823B (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010215359A (ja) * | 2009-03-17 | 2010-09-30 | Murata Machinery Ltd | 天井搬送システムと物品の一時保管方法 |
WO2011014864A3 (en) * | 2009-07-31 | 2011-06-09 | Muratec Automation Co., Ltd. | Buffered storage and transport device for tool utilization |
JP2012527774A (ja) * | 2009-05-18 | 2012-11-08 | クロッシング オートメーション インコーポレイテッド | 基板用容器貯蔵システム |
JP2012527775A (ja) * | 2009-05-18 | 2012-11-08 | クロッシング オートメーション インコーポレイテッド | 基板用容器貯蔵システムと相互作用する一体システム |
CN105314345A (zh) * | 2014-06-05 | 2016-02-10 | 株式会社大福 | 搬运装置 |
JP2017124933A (ja) * | 2015-10-30 | 2017-07-20 | トーヨーカネツソリューションズ株式会社 | 立体自動倉庫 |
JP2018509357A (ja) * | 2015-03-24 | 2018-04-05 | ポート、ジョセフ | オーバーヘッド倉庫保管のためのシステムおよび方法 |
JP2021172501A (ja) * | 2020-04-28 | 2021-11-01 | 株式会社ダイフク | 物品搬送設備 |
Families Citing this family (31)
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TWI286989B (en) * | 2002-06-19 | 2007-09-21 | Brooks Automation Inc | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US10957569B2 (en) | 2002-10-11 | 2021-03-23 | Murata Machinery Ltd. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
US20070092359A1 (en) * | 2002-10-11 | 2007-04-26 | Brooks Automation, Inc. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
JP5062485B2 (ja) * | 2008-04-09 | 2012-10-31 | 株式会社ダイフク | 物品搬送設備 |
JP5284808B2 (ja) | 2009-01-26 | 2013-09-11 | 株式会社Sokudo | ストッカー装置及び基板処理装置 |
JP2010184760A (ja) * | 2009-02-10 | 2010-08-26 | Muratec Automation Co Ltd | 移載システム |
JP2011029550A (ja) * | 2009-07-29 | 2011-02-10 | Muratec Automation Co Ltd | 搬送システム及びその設定方法 |
CN102234017B (zh) * | 2010-04-29 | 2015-03-04 | 达丰(上海)电脑有限公司 | 集成若干条组装产出线的天车系统及其架设方法 |
CN102234064B (zh) * | 2010-04-29 | 2013-05-08 | 达丰(上海)电脑有限公司 | 可实现集成下载操作的天车系统及其下载操作方法 |
JP2013043707A (ja) * | 2011-08-22 | 2013-03-04 | Honda Motor Co Ltd | 車体昇降装置 |
KR101940564B1 (ko) * | 2012-02-22 | 2019-01-21 | 삼성전자주식회사 | 기판 캐리어 자동 이송 장치와 이를 이용한 기판 캐리어 이송방법 |
CN102785821B (zh) * | 2012-08-24 | 2014-09-17 | 深圳市怡美工业设计有限公司 | 用于自动存取系统中的悬挂式物品容器 |
CN102785882B (zh) * | 2012-08-24 | 2015-04-15 | 深圳市怡美工业设计有限公司 | 悬挂式自动存取系统 |
CN102826316B (zh) * | 2012-08-31 | 2015-06-17 | 深圳市华星光电技术有限公司 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
US9287150B2 (en) * | 2012-10-09 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reticle transfer system and method |
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US11858738B2 (en) | 2013-08-09 | 2024-01-02 | Ocado Innovation Limited | Apparatus for retrieving units from a storage system |
JP6278751B2 (ja) * | 2014-03-04 | 2018-02-14 | 東京エレクトロン株式会社 | 搬送方法及び基板処理装置 |
US10773353B2 (en) * | 2014-09-05 | 2020-09-15 | Fuji Machine Mfg. Co., Ltd. | Manufacturing system |
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- 2008-03-07 KR KR1020080021426A patent/KR20080082928A/ko not_active Application Discontinuation
- 2008-03-10 US US12/045,060 patent/US7686176B2/en not_active Expired - Fee Related
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010215359A (ja) * | 2009-03-17 | 2010-09-30 | Murata Machinery Ltd | 天井搬送システムと物品の一時保管方法 |
JP2012527774A (ja) * | 2009-05-18 | 2012-11-08 | クロッシング オートメーション インコーポレイテッド | 基板用容器貯蔵システム |
JP2012527775A (ja) * | 2009-05-18 | 2012-11-08 | クロッシング オートメーション インコーポレイテッド | 基板用容器貯蔵システムと相互作用する一体システム |
KR101343894B1 (ko) | 2009-07-31 | 2013-12-20 | 무라다기카이가부시끼가이샤 | 툴 이용을 위한 버퍼 스토리지 및 이송 장치 |
US8196732B2 (en) | 2009-07-31 | 2012-06-12 | Muratec Automation Co., Ltd. | Buffered storage and transport device for tool utilization |
CN102484091A (zh) * | 2009-07-31 | 2012-05-30 | 村田自动化机械有限公司 | 用于工具的缓冲存储和运输装置 |
WO2011014864A3 (en) * | 2009-07-31 | 2011-06-09 | Muratec Automation Co., Ltd. | Buffered storage and transport device for tool utilization |
TWI496732B (zh) * | 2009-07-31 | 2015-08-21 | Murata Machinery Ltd | 供工具利用之緩衝儲存和運輸裝置 |
CN105314345A (zh) * | 2014-06-05 | 2016-02-10 | 株式会社大福 | 搬运装置 |
CN105314345B (zh) * | 2014-06-05 | 2019-10-15 | 株式会社大福 | 搬运装置 |
JP2018509357A (ja) * | 2015-03-24 | 2018-04-05 | ポート、ジョセフ | オーバーヘッド倉庫保管のためのシステムおよび方法 |
JP2017124933A (ja) * | 2015-10-30 | 2017-07-20 | トーヨーカネツソリューションズ株式会社 | 立体自動倉庫 |
JP2021172501A (ja) * | 2020-04-28 | 2021-11-01 | 株式会社ダイフク | 物品搬送設備 |
JP7215457B2 (ja) | 2020-04-28 | 2023-01-31 | 株式会社ダイフク | 物品搬送設備 |
Also Published As
Publication number | Publication date |
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TW200920670A (en) | 2009-05-16 |
US7686176B2 (en) | 2010-03-30 |
TWI419823B (zh) | 2013-12-21 |
JP5088468B2 (ja) | 2012-12-05 |
KR20080082928A (ko) | 2008-09-12 |
US20080217278A1 (en) | 2008-09-11 |
CN101276773A (zh) | 2008-10-01 |
CN101276773B (zh) | 2010-08-25 |
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