JP7215457B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- JP7215457B2 JP7215457B2 JP2020078879A JP2020078879A JP7215457B2 JP 7215457 B2 JP7215457 B2 JP 7215457B2 JP 2020078879 A JP2020078879 A JP 2020078879A JP 2020078879 A JP2020078879 A JP 2020078879A JP 7215457 B2 JP7215457 B2 JP 7215457B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
物品搬送設備の第1の実施形態について、図面を参照して説明する。
物品搬送設備の第2の実施形態について、図面を参照して説明する。以下では、本実施形態の物品搬送設備について、第1の実施形態との相違点を中心に説明する。特に明記しない点については、第1の実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
次に、物品搬送設備のその他の実施形態について説明する。
以下、上記において説明した物品搬送設備の概要について説明する。
10:搬送装置
11:保持部
15:昇降機構
16:移動機構
20:操作部
21:操作機構
22:切替機構
30:制御部
40:保管装置
41:被押圧部
42:付勢機構
50:第1保管部
51:第1支持部
52:可動支持部
60:第2保管部
61:第2支持部
100:物品搬送設備
P1:第1位置
P2:第2位置
PA:重複位置
PB:非重複位置
Q1:押圧姿勢
Q2:非押圧姿勢
R:移動経路
S:対象空間
W:物品
Y:経路幅方向
Y1:第1側
Z:上下方向
Claims (9)
- 移動経路に沿って移動して物品を搬送する搬送装置と、前記移動経路に隣接して配置され、前記物品を保管する保管装置と、を備えた物品搬送設備であって、
前記移動経路の幅方向である経路幅方向における、前記移動経路に対して前記保管装置が配置される側を第1側として、
前記搬送装置は、前記物品を保持する保持部と、前記保持部を昇降させる昇降機構と、前記保持部を前記経路幅方向に沿って移動させる移動機構と、を備え、前記保持部と前記保管装置との間で前記物品を移載する場合に、前記移動機構により前記保持部を前記第1側に突出させるように構成され、
前記保管装置は、第1保管部と、前記第1保管部よりも下方に配置された第2保管部と、を備え、
前記第1保管部は、前記物品を支持する第1支持部と、前記第1支持部を前記経路幅方向に移動可能に支持する可動支持部と、を備え、
前記第2保管部は、前記移動経路に対する前記経路幅方向の位置が固定され、前記物品を支持する第2支持部を備え、
前記第2支持部に支持された状態の前記物品が占める空間を対象空間とし、上下方向に沿う上下方向視で前記第1支持部が前記対象空間と重複する位置を重複位置とし、前記重複位置に対して前記第1側に隣接し、前記上下方向視で前記第1支持部が前記対象空間と重複しない位置を非重複位置として、
前記保管装置に接触作用して前記第1支持部の位置を前記重複位置と前記非重複位置とに切り替える操作部が、前記搬送装置に設けられている、物品搬送設備。 - 前記搬送装置を制御する制御部を備え、
前記制御部は、前記保持部と前記第1支持部との間で前記物品が移載される場合に前記第1支持部が前記重複位置に配置され、前記保持部と前記第2支持部との間で前記物品が移載される場合に前記第1支持部が前記非重複位置に配置されるように、前記操作部による前記第1支持部の操作状態を制御する、請求項1に記載の物品搬送設備。 - 前記搬送装置は、前記操作部を前記保持部とは独立に前記経路幅方向に沿って移動させる操作機構を備え、
前記操作部は、前記第1側への移動に伴い前記保管装置に設けられた被押圧部を前記第1側に向けて押圧するように構成され、
前記重複位置及び前記非重複位置の一方を第1位置とし、他方を第2位置として、
前記第1保管部は、前記被押圧部が前記第1側へ押圧されることに伴い前記第1支持部が前記第1位置から前記第2位置に移動し、前記被押圧部に対する前記第1側への押圧が解除されることに伴い前記第1支持部が前記第2位置から前記第1位置に移動するように構成されている、請求項1又は2に記載の物品搬送設備。 - 前記被押圧部は、前記第1支持部と一体的に前記経路幅方向に移動するように設けられ、
前記第1位置は前記重複位置であり、前記第2位置は前記非重複位置である、請求項3に記載の物品搬送設備。 - 前記操作部は、前記保持部の前記経路幅方向の移動に伴い、前記経路幅方向において前記保持部が移動する側と同じ側に移動するように構成され、
前記重複位置及び前記非重複位置の一方を第1位置とし、他方を第2位置として、
前記操作部による前記第1支持部の操作状態を、前記操作部の前記第1側への移動に伴い前記第1支持部が前記第1位置から前記第2位置に移動する有効状態と、前記操作部の前記第1側への移動にかかわらず前記第1支持部が前記重複位置又は前記非重複位置に維持される無効状態と、に切り替える切替機構を備えている、請求項1又は2に記載の物品搬送設備。 - 前記搬送装置を制御する制御部を備え、
前記制御部は、前記操作部の姿勢を切り替えることで、前記操作部による前記第1支持部の操作状態を前記有効状態と前記無効状態とに切り替えるように構成されている、請求項5に記載の物品搬送設備。 - 前記第1保管部は、前記保管装置に設けられた被押圧部が前記第1側へ押圧されることに伴い前記第1支持部が前記第1位置から前記第2位置に移動し、前記被押圧部に対する前記第1側への押圧が解除されることに伴い前記第1支持部が前記第2位置から前記第1位置に移動するように構成され、
前記操作部は、前記第1側への移動に伴い前記被押圧部を前記第1側に押圧する押圧姿勢と、前記押圧姿勢ではない非押圧姿勢と、に姿勢を切替可能に構成され、
前記制御部は、前記操作部の姿勢を前記押圧姿勢に切り替えることで、前記操作部による前記第1支持部の操作状態を前記有効状態に切り替え、前記操作部の姿勢を前記非押圧姿勢に切り替えることで、前記操作部による前記第1支持部の操作状態を前記無効状態に切り替えるように構成されている、請求項6に記載の物品搬送設備。 - 前記重複位置及び前記非重複位置の一方を第1位置とし、他方を第2位置として、
前記第1支持部は、前記操作部に操作されていない状態で前記第1位置に配置され、
前記保管装置は、前記第1支持部の自重及び付勢機構による付勢力の一方又は双方を用いて、前記第1支持部を前記第2位置から前記第1位置に移動させるための力の少なくとも一部を発生させるように構成されている、請求項1から7のいずれか一項に記載の物品搬送設備。 - 前記搬送装置は、天井に沿って形成された移動経路に沿って移動し、
前記保管装置は、前記天井に支持されている、請求項1から8のいずれか一項に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020078879A JP7215457B2 (ja) | 2020-04-28 | 2020-04-28 | 物品搬送設備 |
TW110114783A TW202146308A (zh) | 2020-04-28 | 2021-04-23 | 物品搬送設備 |
US17/241,460 US11345542B2 (en) | 2020-04-28 | 2021-04-27 | Article transport facility |
KR1020210054086A KR20210133160A (ko) | 2020-04-28 | 2021-04-27 | 물품 반송설비 |
CN202110464558.5A CN113562369A (zh) | 2020-04-28 | 2021-04-28 | 物品搬运设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020078879A JP7215457B2 (ja) | 2020-04-28 | 2020-04-28 | 物品搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021172501A JP2021172501A (ja) | 2021-11-01 |
JP7215457B2 true JP7215457B2 (ja) | 2023-01-31 |
Family
ID=78161388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020078879A Active JP7215457B2 (ja) | 2020-04-28 | 2020-04-28 | 物品搬送設備 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11345542B2 (ja) |
JP (1) | JP7215457B2 (ja) |
KR (1) | KR20210133160A (ja) |
CN (1) | CN113562369A (ja) |
TW (1) | TW202146308A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7283500B2 (ja) * | 2021-06-07 | 2023-05-30 | 株式会社ダイフク | 物品搬送設備 |
KR20230023301A (ko) * | 2021-08-10 | 2023-02-17 | 삼성전자주식회사 | 선반 이동 모듈을 갖는 스토리지 시스템 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150129A (ja) | 2003-11-11 | 2005-06-09 | Asyst Shinko Inc | 移載装置及び移載システム |
JP2008222346A (ja) | 2007-03-09 | 2008-09-25 | Asyst Technologies Japan Inc | 懸垂式軌道搬送台車及び搬送システム |
JP2018065655A (ja) | 2016-10-19 | 2018-04-26 | 株式会社ダイフク | 物品搬送設備 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4394027B2 (ja) | 2005-04-05 | 2010-01-06 | 村田機械株式会社 | 天井走行車システム |
JP4796024B2 (ja) * | 2007-08-30 | 2011-10-19 | 東京エレクトロン株式会社 | 容器交換システム及び容器交換方法 |
KR101015225B1 (ko) * | 2008-07-07 | 2011-02-18 | 세메스 주식회사 | 기판 처리장치 및 이의 기판 이송 방법 |
KR101077566B1 (ko) * | 2008-08-20 | 2011-10-28 | 세메스 주식회사 | 기판 처리장치 및 이의 기판 이송 방법 |
US8851820B2 (en) * | 2009-05-18 | 2014-10-07 | Brooks Automation, Inc. | Substrate container storage system |
US9991144B2 (en) * | 2013-09-30 | 2018-06-05 | Murata Machinery, Ltd. | Storage warehouse |
CN109950187B (zh) * | 2017-12-20 | 2024-04-12 | 株式会社国际电气 | 基板处理装置、半导体装置的制造方法以及记录介质 |
-
2020
- 2020-04-28 JP JP2020078879A patent/JP7215457B2/ja active Active
-
2021
- 2021-04-23 TW TW110114783A patent/TW202146308A/zh unknown
- 2021-04-27 KR KR1020210054086A patent/KR20210133160A/ko active Search and Examination
- 2021-04-27 US US17/241,460 patent/US11345542B2/en active Active
- 2021-04-28 CN CN202110464558.5A patent/CN113562369A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150129A (ja) | 2003-11-11 | 2005-06-09 | Asyst Shinko Inc | 移載装置及び移載システム |
JP2008222346A (ja) | 2007-03-09 | 2008-09-25 | Asyst Technologies Japan Inc | 懸垂式軌道搬送台車及び搬送システム |
JP2018065655A (ja) | 2016-10-19 | 2018-04-26 | 株式会社ダイフク | 物品搬送設備 |
Also Published As
Publication number | Publication date |
---|---|
US11345542B2 (en) | 2022-05-31 |
US20210331866A1 (en) | 2021-10-28 |
KR20210133160A (ko) | 2021-11-05 |
TW202146308A (zh) | 2021-12-16 |
JP2021172501A (ja) | 2021-11-01 |
CN113562369A (zh) | 2021-10-29 |
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