JP2006273457A - 自動搬送システム - Google Patents
自動搬送システム Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Business, Economics & Management (AREA)
- Human Resources & Organizations (AREA)
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- Tourism & Hospitality (AREA)
- Development Economics (AREA)
- Theoretical Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Factory Administration (AREA)
- Warehouses Or Storage Devices (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Abstract
【解決手段】全てのキャリア18に無線通信機能を内蔵したIDカード20を設置し、一部の搬送台車10に無線通信機能を内蔵したID読み書き装置25を設置する。そして、ID読み書き装置25に接続されたMCS4の指令によりIDカード20に対してキャリアIDを読み書きし、キャリアID管理部4aでキャリアIDの管理を行う。また、ID読み書き装置25を備えた搬送台車10でキャリア18を入出庫する都度、IDカード20から読み出したキャリアIDとキャリアID管理部4aで蓄積管理したキャリアIDとの一致をキャリアID確認部4bで確認し、不一致の場合はIDカード20から読み出したキャリアIDに基づいてキャリアID管理部4aのキャリアIDを書き換える。
【選択図】図4
Description
2 保管手段
4 MCS(制御装置)
4a キャリアID管理部(識別情報管理手段)
4b キャリアID確認部(識別情報確認手段)
10 OHT搬送台車(搬送台車)
12 簡易バッファ装置(保管手段)
13 半導体製造装置(製造装置)
18 キャリア(被搬送物)
20 IDカード(識別情報記録手段)
25 ID読み書き装置(識別情報読み書き手段)
Claims (4)
- 1つまたは複数の保管手段と複数の製造装置の間を、制御装置の指令により複数の搬送台車で搬送される被搬送物を管理する自動搬送システムであって、
前記被搬送物は、当該被搬送物に収容された被処理物を識別する識別情報を記録する読み書き可能な識別情報記録手段を備え、
前記搬送台車の一部は、前記制御装置の指令に基づいて、前記識別情報記録手段に対して前記識別情報の読み書きを行う識別情報読み書き手段を備え、
前記制御装置は、前記識別情報読み書き手段において読み書きを行った前記識別情報を蓄積管理する識別情報管理手段を備え、
前記識別情報記録手段に記録した前記識別情報と、前記識別情報管理手段において蓄積管理した前記識別情報に基づいて、前記制御装置において前記被処理物の管理を行うことを特徴とする自動搬送システム。 - 前記識別情報読み書き手段は、前記保管手段及び前記製造装置に前記被搬送物の搬入出を行う際に、前記識別情報記録手段から前記識別情報を読み取り、
前記制御装置は、前記識別情報読み書き手段で読み取った前記識別情報と、前記識別情報管理手段に蓄積管理した前記識別情報とが一致しているか確認する識別情報確認手段を更に備えることを特徴とする請求項1に記載の自動搬送システム。 - 前記識別情報読み書き手段は、前記識別情報読み書き手段が設置されていない前記保管手段及び前記製造装置に前記被搬送物の搬入出を行う際に、前記識別情報記録手段から前記識別情報を読み取り、
前記制御装置は、前記識別情報読み書き手段読み取った前記識別情報と、前記識別情報管理手段に蓄積管理した前記識別情報とが一致しているか確認する識別情報確認手段を更に備えることを特徴とする請求項1に記載の自動搬送システム。 - 前記制御装置は、前記識別情報確認手段において、前記識別情報読み書き手段で読み取った前記識別情報と、前記識別情報管理手段に蓄積管理した前記識別情報とが一致していないと判断した場合に、前記識別情報管理手段において蓄積管理する前記識別情報を、前記識別情報読み書き手段により読み取った前記識別情報に書き換える、或いは、前記識別情報管理手段において蓄積管理する前記識別情報に一致させるよう前記被搬送物を再配置させることを特徴とする請求項2または3に記載の自動搬送システム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005091673A JP4915051B2 (ja) | 2005-03-28 | 2005-03-28 | 自動搬送システム |
CN2006800103745A CN101151197B (zh) | 2005-03-28 | 2006-03-27 | 自动材料处理系统 |
US11/887,278 US7917245B2 (en) | 2005-03-28 | 2006-03-27 | Automated material handling system |
PCT/JP2006/306194 WO2006104115A1 (ja) | 2005-03-28 | 2006-03-27 | 自動搬送システム |
KR1020077024603A KR20080009092A (ko) | 2005-03-28 | 2006-03-27 | 자동 재료 취급 시스템 |
TW095110624A TWI355360B (en) | 2005-03-28 | 2006-03-28 | Automated material handling system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005091673A JP4915051B2 (ja) | 2005-03-28 | 2005-03-28 | 自動搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006273457A true JP2006273457A (ja) | 2006-10-12 |
JP4915051B2 JP4915051B2 (ja) | 2012-04-11 |
Family
ID=37053371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005091673A Active JP4915051B2 (ja) | 2005-03-28 | 2005-03-28 | 自動搬送システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US7917245B2 (ja) |
JP (1) | JP4915051B2 (ja) |
KR (1) | KR20080009092A (ja) |
CN (1) | CN101151197B (ja) |
TW (1) | TWI355360B (ja) |
WO (1) | WO2006104115A1 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008222346A (ja) * | 2007-03-09 | 2008-09-25 | Asyst Technologies Japan Inc | 懸垂式軌道搬送台車及び搬送システム |
JP2009051623A (ja) * | 2007-08-27 | 2009-03-12 | Asyst Technologies Japan Inc | 搬送システム |
JP2009094460A (ja) * | 2007-09-20 | 2009-04-30 | Tokyo Electron Ltd | 基板の処理装置 |
JP2011060904A (ja) * | 2009-09-08 | 2011-03-24 | Nikon Corp | 基板処理方法、基板処理装置、露光装置、露光システム及びデバイスの製造方法 |
US8043039B2 (en) | 2007-09-20 | 2011-10-25 | Tokyo Electron Limited | Substrate treatment apparatus |
JP2012023240A (ja) * | 2010-07-15 | 2012-02-02 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
JP2014036143A (ja) * | 2012-08-09 | 2014-02-24 | Lintec Corp | 搬送装置および搬送方法 |
JP2016023010A (ja) * | 2014-07-16 | 2016-02-08 | 株式会社ダイフク | 物品搬送設備 |
JP2020203787A (ja) * | 2019-06-19 | 2020-12-24 | オムロン株式会社 | 搬送制御システム、搬送制御方法、および制御プログラム。 |
Families Citing this family (25)
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KR101841753B1 (ko) * | 2006-08-18 | 2018-03-23 | 브룩스 오토메이션 인코퍼레이티드 | 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템 |
JP4193186B2 (ja) * | 2006-11-02 | 2008-12-10 | 村田機械株式会社 | 天井走行車 |
JP4378655B2 (ja) * | 2007-03-07 | 2009-12-09 | 株式会社ダイフク | 物品処理設備 |
JP2009093281A (ja) * | 2007-10-04 | 2009-04-30 | Hitachi Global Storage Technologies Netherlands Bv | 搬送制御方法及び搬送制御システム |
EP2051189A1 (en) * | 2007-10-18 | 2009-04-22 | Siemens Aktiengesellschaft | Device for electronic identification of items |
US7992734B2 (en) * | 2008-01-11 | 2011-08-09 | International Business Machines Corporation | Semiconductor automation buffer storage identification system and method |
JP5062485B2 (ja) * | 2008-04-09 | 2012-10-31 | 株式会社ダイフク | 物品搬送設備 |
US8185242B2 (en) * | 2008-05-07 | 2012-05-22 | Lam Research Corporation | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements |
US9048274B2 (en) * | 2008-12-08 | 2015-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Portable stocker and method of using same |
CN102018277B (zh) * | 2010-11-04 | 2013-03-20 | 昆明昆船物流信息产业有限公司 | 一种纸箱烟包自动化高架醇化库 |
JP6044059B2 (ja) | 2011-09-16 | 2016-12-14 | 富士ゼロックス株式会社 | 物体情報管理システム及びプログラム。 |
US20130123966A1 (en) * | 2011-11-14 | 2013-05-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Spatial three-dimensional inline handling system |
US8881297B2 (en) * | 2012-09-06 | 2014-11-04 | Brooks Automation, Inc. | Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same |
TWI560125B (en) * | 2013-10-15 | 2016-12-01 | Inotera Memories Inc | Overhead hoist transport system |
IL230866A0 (en) * | 2014-02-06 | 2014-09-30 | Dan Yehuda Schlesinger | Device for surface transportation |
US9852934B2 (en) * | 2014-02-14 | 2017-12-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor wafer transportation |
KR102174332B1 (ko) | 2014-07-30 | 2020-11-04 | 삼성전자주식회사 | 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법 |
KR101616706B1 (ko) * | 2014-11-14 | 2016-05-13 | 오학서 | 자동 반송 시스템용 rf 통신 시스템 및 방법 |
JP6477439B2 (ja) * | 2015-11-17 | 2019-03-06 | 株式会社ダイフク | 物品搬送設備 |
CN108257900A (zh) * | 2016-12-28 | 2018-07-06 | 惠特科技股份有限公司 | 半导体制程输送系统及方法 |
CN111032535B (zh) | 2017-08-16 | 2022-02-25 | 村田机械株式会社 | 高架搬运车、输送系统、以及高架搬运车的控制方法 |
KR101936296B1 (ko) * | 2017-12-14 | 2019-04-03 | 오학서 | 자동 반송 시스템에서 무인 이송 장치와 설비간의 rf 통신 방법 |
MX2019003979A (es) | 2018-04-06 | 2019-10-07 | Sst Systems Inc | Sistema de transporte con portadores automatizados. |
US11295973B2 (en) * | 2020-02-11 | 2022-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for automated wafer carrier handling |
CN113539879B (zh) * | 2020-04-21 | 2023-12-12 | 长鑫存储技术有限公司 | 半导体制造过程中的故障监测系统及方法 |
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2005
- 2005-03-28 JP JP2005091673A patent/JP4915051B2/ja active Active
-
2006
- 2006-03-27 WO PCT/JP2006/306194 patent/WO2006104115A1/ja active Application Filing
- 2006-03-27 US US11/887,278 patent/US7917245B2/en active Active
- 2006-03-27 KR KR1020077024603A patent/KR20080009092A/ko not_active Application Discontinuation
- 2006-03-27 CN CN2006800103745A patent/CN101151197B/zh active Active
- 2006-03-28 TW TW095110624A patent/TWI355360B/zh active
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Cited By (10)
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JP2016023010A (ja) * | 2014-07-16 | 2016-02-08 | 株式会社ダイフク | 物品搬送設備 |
JP2020203787A (ja) * | 2019-06-19 | 2020-12-24 | オムロン株式会社 | 搬送制御システム、搬送制御方法、および制御プログラム。 |
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JP4915051B2 (ja) | 2012-04-11 |
WO2006104115A1 (ja) | 2006-10-05 |
CN101151197B (zh) | 2011-05-11 |
CN101151197A (zh) | 2008-03-26 |
US20090276082A1 (en) | 2009-11-05 |
TW200704573A (en) | 2007-02-01 |
KR20080009092A (ko) | 2008-01-24 |
US7917245B2 (en) | 2011-03-29 |
TWI355360B (en) | 2012-01-01 |
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