JP2007146270A - ガス供給装置及び基板処理装置 - Google Patents
ガス供給装置及び基板処理装置 Download PDFInfo
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45572—Cooled nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Abstract
【解決手段】多数のガス供給孔が形成されたニッケル部材からなるシャワープレートと、このシャワープレートとの間に処理ガスの通流空間が形成されると共に処理容器の天井部の開口部の周縁部に気密に取り付けられるニッケル部材からなるベース部材と、を互いに周縁部にてネジで接合するにあたり、互いの接合面の間にニッケル部材とは異なる材質例えばハステロイやカーボンなどの中間部材を介在させる。
【選択図】図2
Description
前記ニッケル部材同士の接合面の間に、ニッケル部材とは異なる材質からなる貼り付き防止用の中間部材を設けたことを特徴とする。
このシャワープレートの周縁部の上面とその周縁部の下面とが互いに気密に接合されて、当該シャワープレートとの間に処理ガスの拡散空間が形成されると共に処理容器の前記開口部の周縁部に気密に取り付けられ、少なくともシャワープレートと対向する部分がニッケル部材からなるベース部材と、
前記シャワープレートの周縁部の上面と前記ベース部材の周縁部の下面との間に介在し、ニッケル部材とは異なる材質からなる貼り付き防止用の中間部材と、を備えた構成を挙げることができる。
他の発明に係る基板処理装置は、気密な処理容器と、この処理容器内に設けられ、基板を載置するための載置台と、処理容器内のガスを排気する排気手段と、本発明のガス供給装置と、を備え、
前記ベース部材の上端部は、高周波絶縁のためのアルミナからなる上側絶縁部材を介して処理容器に固定され、
前記上側絶縁部材の下方側には、前記処理容器における前記ベース部材と横方向に対向する部位を囲むように高周波絶縁のための石英からなる下側絶縁部材が設けられ、
前記ガス供給装置から供給される処理ガスにより載置台上の基板を処理することを特徴とする。
前記制御部は、前記ガス供給装置における処理雰囲気に接する面の温度が、ニッケルとアンモニアとが反応して固体生成物が生成される温度よりも低くかつTiClx(xは1、2または3)の分解温度領域となるように、第2の温調手段の設定温度が決められていることを特徴とする。
またOリング35の昇温を抑えるためにフランジ部51には冷却機構をなす冷媒流路である空冷流路51aが形成されており、この空冷流路51aには冷媒である冷却用エアーが通流されるようになっている。
ウエハ温度(℃) シャワー温度(℃) ヒータ71の温度(℃)
450 400 400
450 450 475
550 400 320
550 450 410
600 400 180
600 450 300
なお本発明のガスシャワーヘッドは、プリミックスタイプのものに限らず、従来例として示した図10に示したいわゆるポストミックスタイプ、つまり第1のガスと第2のガスとを別々に処理容器2内に供給するタイプのものにも適用できる。
21 ステージ(基板載置台)
31 開口部
34 絶縁部材
35 Oリング
4 ガスシャワーヘッド(ガス供給装置)
5 ベース部材
51 フランジ部
51a 空冷流路
52 底面部
53 側壁部
55 補強用の支柱
6 シャワープレート
61 ガス供給孔
63 中間部材
57 ガス導入管
58 ガス混合部
Claims (17)
- 基板を処理するための処理容器の天井部に形成された開口部を気密に塞ぐように設けられると共に複数のニッケル部材を組み合わせて構成され、下面に形成された多数のガス供給孔から処理容器内に処理ガスを供給するガス供給装置において、
前記ニッケル部材同士の接合面の間に、ニッケル部材とは異なる材質からなる貼り付き防止用の中間部材を設けたことを特徴とするガス供給装置。 - 基板を処理するための処理容器の天井部に形成された開口部を気密に塞ぐように設けられ、下面に形成された多数のガス供給孔から処理容器内に処理ガスを供給するガス供給装置において、
前記多数のガス供給孔が形成されたニッケル部材からなるシャワープレートと、
このシャワープレートの周縁部の上面とその周縁部の下面とが互いに気密に接合されて、当該シャワープレートとの間に処理ガスの拡散空間が形成されると共に処理容器の前記開口部の周縁部に気密に取り付けられ、少なくともシャワープレートと対向する部分がニッケル部材からなるベース部材と、
前記シャワープレートの周縁部の上面と前記ベース部材の周縁部の下面との間に介在し、ニッケル部材とは異なる材質からなる貼り付き防止用の中間部材と、を備えたことを特徴とするガス供給装置。 - 前記ベース部材は、上端周縁部が処理容器の前記開口部の周縁部に気密に取り付けられ、底面部の周縁部がシャワープレートの周縁部に気密に接合された扁平な有底筒状体として構成されていることを特徴とする請求項2記載のガス供給装置。
- 前記ベース部材の側壁部は、ニッケル部材よりも熱伝導率が小さい材質により構成されていることを特徴とする請求項3記載のガス供給装置。
- 前記ベース部材は、側壁部を補強するためにニッケル部材よりも熱伝導率が小さい材質からなる補強部材を備えていることを特徴とする請求項4記載のガス供給装置。
- ニッケル部材よりも熱伝導率が小さい材質は、ハステロイであることを特徴とする請求項4または5記載のガス供給装置。
- 前記ベース部材の上端周縁部は冷媒流路が形成されていることを特徴とする請求項2ないし6の記載のガス供給装置。
- 前記冷媒流路にはエアーが流通することを特徴とする請求項7記載のガス供給装置。
- 前記ベース部材の上面には絶縁プレートを介して面状のヒーターが配置され、前記絶縁プレートとヒーターは各々平面方向に複数に分割されていることを特徴とする請求項2ないし8のいずれか一つに記載の供給装置。
- 中間部材は、ハステロイまたはカーボンからなることを特徴とする請求項1ないし9のいずれか一つに記載のガス供給装置。
- 処理ガスは、互いに反応して成膜成分を生成する第1のガスと第2のガスとを含み、これらガスが予め混合されてその中に導入され、その混合ガスを処理容器内に供給するように構成されている請求項1ないし10のいずれか一つに記載のガス供給装置。
- 気密な処理容器と、この処理容器内に設けられ、基板を載置するための載置台と、処理容器内のガスを排気する排気手段と、請求項1ないし11のいずれか一つに記載のガス供給装置と、を備え、ガス供給装置から供給される処理ガスにより載置台上の基板を処理することを特徴とする基板処理装置。
- 気密な処理容器と、この処理容器内に設けられ、基板を載置するための載置台と、処理容器内のガスを排気する排気手段と、請求項2記載のガス供給装置と、を備え、
前記ベース部材の上端部は、高周波絶縁のためのアルミナからなる上側絶縁部材を介して処理容器に固定され、
前記上側絶縁部材の下方側には、前記処理容器における前記ベース部材と横方向に対向する部位を囲むように高周波絶縁のための石英からなる下側絶縁部材が設けられ、
前記ガス供給装置から供給される処理ガスにより載置台上の基板を処理することを特徴とする基板処理装置。 - ベース部材の上端周縁部は、処理容器の前記開口部周縁部に対して樹脂シール部材を介して気密に接合されるものであることを特徴とする請求項12または13に記載の基板処理装置。
- 気密な処理容器と、この処理容器内に設けられ、基板を載置するための載置台と、処理容器内のガスを排気する排気手段と、請求項1ないし11のいずれか一つに記載のガス供給装置と、基板を加熱するために載置台に設けられた第1の温調手段と、前記ガス供給装置における処理雰囲気に接する面の温度を制御するためにガス供給装置に設けられた第2の温調手段と、前記第1の温調手段及び第2の温調手段を制御する制御部と、を備え、基板上にチタン膜を成膜するためにガス供給装置から四塩化チタンガスと水素ガスとを処理容器内に供給し、続いて基板上のチタン膜を窒化するためにアンモニアガスを処理容器内に供給するようにガス供給制御を行う基板処理装置であって、
前記制御部は、前記ガス供給装置における処理雰囲気に接する面の温度が、ニッケルとアンモニアとが反応して固体生成物が生成される温度よりも低くかつTiClx(xは1、2または3)の分解温度領域となるように、第2の温調手段の設定温度が決められていることを特徴とする基板処理装置。 - 前記第2の温調手段は前記ガス供給装置における処理雰囲気に接する面の温度が400〜450℃になるよう制御されることを特徴とする請求項15記載の基板処理装置。
- 前記第1の温調手段は基板温度を450〜600℃の範囲で加熱するように制御されるとともに、前記第2の温調手段は前記基板温度に応じて180〜475℃の温度範囲で制御されることを特徴とする請求項16記載の基板処理装置。
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JP2006006697A JP5044931B2 (ja) | 2005-10-31 | 2006-01-13 | ガス供給装置及び基板処理装置 |
US11/588,423 US20070131168A1 (en) | 2005-10-31 | 2006-10-27 | Gas Supplying unit and substrate processing apparatus |
KR1020060105843A KR100776057B1 (ko) | 2005-10-31 | 2006-10-30 | 가스 공급 장치 및 기판 처리 장치 |
CN2006101427762A CN1958170B (zh) | 2005-10-31 | 2006-10-31 | 气体供给装置及基板处理装置 |
TW095140282A TW200725702A (en) | 2005-10-31 | 2006-10-31 | Gas supplying apparatus and substrate processing apparatus |
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JP2006006697A JP5044931B2 (ja) | 2005-10-31 | 2006-01-13 | ガス供給装置及び基板処理装置 |
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Cited By (1)
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JP2015214716A (ja) * | 2014-05-07 | 2015-12-03 | 東京エレクトロン株式会社 | 基板処理装置 |
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JP5045000B2 (ja) * | 2006-06-20 | 2012-10-10 | 東京エレクトロン株式会社 | 成膜装置、ガス供給装置、成膜方法及び記憶媒体 |
JP5008478B2 (ja) * | 2007-06-27 | 2012-08-22 | 東京エレクトロン株式会社 | 基板処理装置およびシャワーヘッド |
KR100920417B1 (ko) * | 2007-08-01 | 2009-10-14 | 주식회사 에이디피엔지니어링 | 센싱유닛 및 이를 가지는 기판처리장치 |
DE102008026001B4 (de) * | 2007-09-04 | 2012-02-16 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre und Heizelement |
CN102084471B (zh) | 2008-07-07 | 2012-11-28 | 朗姆研究公司 | 用于检测等离子体处理室中的等离子体不稳定的无源电容耦合静电(cce)探针装置 |
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JP5430192B2 (ja) * | 2009-03-19 | 2014-02-26 | 東京エレクトロン株式会社 | 温度調節装置、温度調節方法、基板処理装置及び対向電極 |
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Also Published As
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TW200725702A (en) | 2007-07-01 |
KR20070046749A (ko) | 2007-05-03 |
CN1958170A (zh) | 2007-05-09 |
KR100776057B1 (ko) | 2007-11-15 |
US20070131168A1 (en) | 2007-06-14 |
JP5044931B2 (ja) | 2012-10-10 |
CN1958170B (zh) | 2011-07-20 |
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