JP2006519497A5 - - Google Patents

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Publication number
JP2006519497A5
JP2006519497A5 JP2006503525A JP2006503525A JP2006519497A5 JP 2006519497 A5 JP2006519497 A5 JP 2006519497A5 JP 2006503525 A JP2006503525 A JP 2006503525A JP 2006503525 A JP2006503525 A JP 2006503525A JP 2006519497 A5 JP2006519497 A5 JP 2006519497A5
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JP
Japan
Prior art keywords
wafer
etching
positions
preset
heating elements
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006503525A
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English (en)
Japanese (ja)
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JP2006519497A (ja
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Publication date
Priority claimed from US10/376,498 external-priority patent/US6770852B1/en
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Publication of JP2006519497A publication Critical patent/JP2006519497A/ja
Publication of JP2006519497A5 publication Critical patent/JP2006519497A5/ja
Pending legal-status Critical Current

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JP2006503525A 2003-02-27 2004-02-12 局所的なウェーハの温度調節によるウェーハ全体における微細寸法のばらつき補正 Pending JP2006519497A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/376,498 US6770852B1 (en) 2003-02-27 2003-02-27 Critical dimension variation compensation across a wafer by means of local wafer temperature control
PCT/US2004/004134 WO2004077505A2 (en) 2003-02-27 2004-02-12 Critical dimension variation compensation across a wafer by means of local wafer temperature control

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013018861A Division JP5844757B2 (ja) 2003-02-27 2013-02-01 エッチング・システム及びエッチング方法

Publications (2)

Publication Number Publication Date
JP2006519497A JP2006519497A (ja) 2006-08-24
JP2006519497A5 true JP2006519497A5 (enExample) 2011-07-07

Family

ID=32771493

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2006503525A Pending JP2006519497A (ja) 2003-02-27 2004-02-12 局所的なウェーハの温度調節によるウェーハ全体における微細寸法のばらつき補正
JP2013018861A Expired - Fee Related JP5844757B2 (ja) 2003-02-27 2013-02-01 エッチング・システム及びエッチング方法
JP2015081870A Pending JP2015130539A (ja) 2003-02-27 2015-04-13 エッチング・システム及びエッチング方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2013018861A Expired - Fee Related JP5844757B2 (ja) 2003-02-27 2013-02-01 エッチング・システム及びエッチング方法
JP2015081870A Pending JP2015130539A (ja) 2003-02-27 2015-04-13 エッチング・システム及びエッチング方法

Country Status (10)

Country Link
US (1) US6770852B1 (enExample)
EP (1) EP1599891B1 (enExample)
JP (3) JP2006519497A (enExample)
KR (1) KR101047823B1 (enExample)
CN (1) CN1777974B (enExample)
AT (1) ATE480003T1 (enExample)
DE (1) DE602004028910D1 (enExample)
IL (1) IL170511A (enExample)
TW (1) TWI338917B (enExample)
WO (1) WO2004077505A2 (enExample)

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