JP2004251789A5 - - Google Patents

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Publication number
JP2004251789A5
JP2004251789A5 JP2003043210A JP2003043210A JP2004251789A5 JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5 JP 2003043210 A JP2003043210 A JP 2003043210A JP 2003043210 A JP2003043210 A JP 2003043210A JP 2004251789 A5 JP2004251789 A5 JP 2004251789A5
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JP
Japan
Prior art keywords
temperature
substrate
adjustment stage
dimensional
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003043210A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004251789A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003043210A priority Critical patent/JP2004251789A/ja
Priority claimed from JP2003043210A external-priority patent/JP2004251789A/ja
Publication of JP2004251789A publication Critical patent/JP2004251789A/ja
Publication of JP2004251789A5 publication Critical patent/JP2004251789A5/ja
Pending legal-status Critical Current

Links

JP2003043210A 2003-02-20 2003-02-20 温度測定装置及び被処理基板 Pending JP2004251789A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003043210A JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003043210A JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Publications (2)

Publication Number Publication Date
JP2004251789A JP2004251789A (ja) 2004-09-09
JP2004251789A5 true JP2004251789A5 (enExample) 2005-06-02

Family

ID=33026278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003043210A Pending JP2004251789A (ja) 2003-02-20 2003-02-20 温度測定装置及び被処理基板

Country Status (1)

Country Link
JP (1) JP2004251789A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007178253A (ja) * 2005-12-28 2007-07-12 Tokyo Electron Ltd 温度測定装置および温度測定方法
JP4904822B2 (ja) * 2006-01-16 2012-03-28 東京エレクトロン株式会社 温度測定機能を有する装置
NL2002964A1 (nl) 2008-06-16 2009-12-17 Asml Netherlands Bv Lithographic Apparatus, a Metrology Apparatus and a Method of Using the Apparatus.
JP2011109040A (ja) * 2009-11-20 2011-06-02 Nikon Corp 半導体基板ホルダ及び温度検出装置
JP5846969B2 (ja) * 2012-03-05 2016-01-20 株式会社日立ハイテクノロジーズ 温度計測方法
FR3030889B1 (fr) * 2014-12-19 2017-01-27 Commissariat Energie Atomique Capteur differentiel de temperature.

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