JP2004059990A5 - - Google Patents

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Publication number
JP2004059990A5
JP2004059990A5 JP2002219328A JP2002219328A JP2004059990A5 JP 2004059990 A5 JP2004059990 A5 JP 2004059990A5 JP 2002219328 A JP2002219328 A JP 2002219328A JP 2002219328 A JP2002219328 A JP 2002219328A JP 2004059990 A5 JP2004059990 A5 JP 2004059990A5
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JP
Japan
Prior art keywords
processed
substrate
film forming
tray
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002219328A
Other languages
English (en)
Japanese (ja)
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JP2004059990A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002219328A priority Critical patent/JP2004059990A/ja
Priority claimed from JP2002219328A external-priority patent/JP2004059990A/ja
Publication of JP2004059990A publication Critical patent/JP2004059990A/ja
Publication of JP2004059990A5 publication Critical patent/JP2004059990A5/ja
Pending legal-status Critical Current

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JP2002219328A 2002-07-29 2002-07-29 成膜装置 Pending JP2004059990A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002219328A JP2004059990A (ja) 2002-07-29 2002-07-29 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002219328A JP2004059990A (ja) 2002-07-29 2002-07-29 成膜装置

Publications (2)

Publication Number Publication Date
JP2004059990A JP2004059990A (ja) 2004-02-26
JP2004059990A5 true JP2004059990A5 (enExample) 2005-10-27

Family

ID=31940260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002219328A Pending JP2004059990A (ja) 2002-07-29 2002-07-29 成膜装置

Country Status (1)

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JP (1) JP2004059990A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4654738B2 (ja) * 2005-04-05 2011-03-23 パナソニック株式会社 プラズマ処理装置
DE102005045718B4 (de) 2005-09-24 2009-06-25 Applied Materials Gmbh & Co. Kg Träger für ein Substrat
GB0608528D0 (en) * 2006-04-28 2006-06-07 Applied Materials Inc Front plate for an ion source
JP6026869B2 (ja) * 2012-11-28 2016-11-16 京セラ株式会社 ワーク載置用トレーおよびこれを用いたウエハ熱処理用トレーならびにワーク載置用トレーの製造方法
JP2016035080A (ja) * 2014-08-01 2016-03-17 大陽日酸株式会社 サセプタカバーおよび該サセプタカバーを備えた気相成長装置

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