JP2006511932A - ミラー容量及びスイッチング損失を低減するために改良されたmosゲートを有する装置およびその製造方法 - Google Patents
ミラー容量及びスイッチング損失を低減するために改良されたmosゲートを有する装置およびその製造方法 Download PDFInfo
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- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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Abstract
Description
本出願は、2002年8月23日に出願された出願米国仮特許出願第60/405,369号の利益を主張するものである。
技術分野
本発明は半導体に関し、より詳細には、酸化金属半導体電界効果トランジスター(MOSFET)に関する。
Claims (23)
- ドレイン領域とウエル領域とソース領域とを有する半導体装置のゲート構造であって、
前記ドレイン領域および前記ウエル領域と共通の面を有しているシールド電極と、
前記シールド電極と前記ドレインおよびウエル領域との間に配置されている第1の誘電体層と、
前記ウエル領域および前記ソース領域と共通の面を有しているスイッチ電極と、
前記スイッチ電極と前記ウエルおよびソース領域との間に配置されている第2の誘電体層と、
前記シールド電極と前記スイッチ電極との間に配置されている第3の誘電体層と、を含むことを特徴とするゲート構造。 - 前記第2および第3の誘電体層は同一の誘電材料の層であることを特徴とする請求項1記載のゲート構造。
- 前記第1および第2の誘電体層は同一の誘電材料の層であることを特徴とする請求項1記載のゲート構造。
- 前記スイッチ電極の一部と前記シールド電極の一部とが共通の面に配置されていることを特徴とする請求項1記載のゲート構造。
- 前記スイッチ電極の一部と前記シールド電極の一部と前記ウエル領域の一部とが共通の面に配置されていることを特徴とする請求項1記載のゲート構造。
- 前記共通の面は概して水平面であることを特徴とする請求項5のゲート構造。
- 前記共通の面は概して垂直面であることを特徴とする請求項5記載のゲート構造。
- 前記スイッチ電極および前記シールド電極はそれぞれ伝導性材料の層からなることを特徴とする請求項1記載のゲート構造。
- 前記第1、第2および第3の誘電体層は酸化物からなることを特徴とする請求項1記載のゲート構造。
- 基板を有する半導体装置であって、
前記基板上に配置された第1の伝導タイプを有するウエル領域と、
前記ウエル領域内に設けられて第2の伝導タイプを有するソース領域と、
前記ウエル領域に隣り合って配置されており前記第2の伝導タイプを有するドレイン領域と、
前記ドレイン領域および前記ウエル領域と共通の面を有しているシールド電極と、前記シールド電極と前記ドレインおよびウエル領域との間に配置されている第1の誘電体層と、前記ウエル領域および前記ソース領域と共通の面を有しているスイッチ電極と、前記スイッチ電極と前記ウエルおよびソース領域との間に配置されている第2の誘電体層と、前記シールド電極と前記スイッチ電極との間に配置されている第3の誘電体層と、を含むゲート構造と、を含むことを特徴とする半導体装置。 - 前記ウエル領域によって少なくとも部分的に規定されて前記ソース領域に隣り合っているトレンチを更に含み、前記トレンチ内に前記ゲート構造が少なくとも部分的に配置されて、縦型MOSFETを構成していることを特徴とする請求項10記載の半導体装置。
- 前記シールド電極および前記スイッチ電極は前記トレンチの深さ範囲の一部に沿って互いに重なり合っていることを特徴とする請求項10記載の半導体装置。
- 前記シールド電極はシルクハット状部を有し、前記スイッチ電極は側壁と前記側壁によって規定された凹部とを有し、前記側壁が前記トレンチの深さ範囲の一部に沿って前記シルクハット状部と重なるように前記凹部内に前記シルクハット状部が少なくとも部分的に配置されている、ことを特徴とする請求項12記載の半導体装置。
- 前記側壁は前記トレンチ内の深さの所定範囲において前記シルクハット状部と重なり、前記所定範囲の深さは前記ウエル領域に対応して隣り合っている、ことを特徴とする請求項13記載の半導体装置。
- 前記シールド電極は凸状上部表面を有し、前記スイッチ電極は凹状下部表面を有し、前記トレンチの深さ範囲の一部に沿って前記スイッチ電極および前記シールド電極が互いに重なり合うように前記凹状下部表面は前記凸状上部表面と概して補完しあうことを特徴とする請求項12記載の半導体装置。
- 前記スイッチ電極および前記シールド電極は前記トレンチ内の深さの所定範囲において互いに重なり合い、前記深さの所定範囲は前記ウエル領域に対応しかつこれに隣り合うことを特徴とする請求項15記載の半導体装置。
- 前記シールド電極は凹状上部表面を有し、前記スイッチ電極は凸状下部表面を有し、前記トレンチの深さ範囲の一部に沿って前記スイッチ電極および前記シールド電極が互いに重なり合うように前記凸状下部表面は前記凹状上部表面と概して補完しあうことを特徴とする請求項12記載の半導体装置。
- 前記スイッチ電極および前記シールド電極は前記トレンチ内の深さの所定範囲において互いに重なり合い、前記深さの所定範囲は前記ウエル領域に対応しかつこれに隣り合うことを特徴とする請求項15記載の半導体装置。
- 前記スイッチ電極は前記ソースおよびウエル領域を少なくとも部分的に覆って配置され、前記シールド電極は前記ウエルおよびドレイン領域を少なくとも部分的に覆って配置され、縦型MOSFETを構成していることを特徴とする請求項10記載の半導体装置。
- 前記シールド電極および前記スイッチ電極は前記ウエル領域を覆って互いにオーバーラップしていることを特徴とする請求項19記載の半導体装置。
- 前記スイッチ電極は前記ソースおよびウエル領域を少なくとも部分的に覆って配置され、前記シールド電極は前記ウエルおよびドレイン領域を少なくとも部分的に覆って配置され、横型MOSFETを構成していることを特徴とする請求項10記載の半導体装置。
- 前記シールド電極および前記スイッチ電極が前記ウエル領域を覆って互いにオーバーラップしていることを特徴とする請求項21記載の半導体装置。
- 半導体のウエル領域において前記半導体のソース領域に隣り合うトレンチをエッチングする工程と、
前記トレンチの壁部および底部に第1の誘電体層を設ける工程と、
第1の伝導性材料層を配置する工程と、
前記第1の伝導性材料層がシールド電極を形成ようにエッチングする工程と、
前記第1の誘電体層をエッチングする工程と、
前記シールド電極を覆いかつ前記トレンチの壁部を覆う第2の誘電体層を形成する工程と、
前記トレンチの中で前記第2の誘電体層の上へスイッチ電極を形成する工程と、を含むことを特徴とする半導体装置の製造方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US40536902P | 2002-08-23 | 2002-08-23 | |
US60/405,369 | 2002-08-23 | ||
US10/640,742 | 2003-08-14 | ||
US10/640,742 US6870220B2 (en) | 2002-08-23 | 2003-08-14 | Method and apparatus for improved MOS gating to reduce miller capacitance and switching losses |
PCT/US2003/026094 WO2004019380A2 (en) | 2002-08-23 | 2003-08-20 | Method and apparatus for improved mos gating to reduce miller capacitance and switching losses |
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JP2006511932A true JP2006511932A (ja) | 2006-04-06 |
JP4731165B2 JP4731165B2 (ja) | 2011-07-20 |
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JP2004531142A Expired - Fee Related JP4731165B2 (ja) | 2002-08-23 | 2003-08-20 | ミラー容量及びスイッチング損失を低減するために改良されたmosゲートを有する装置 |
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US (2) | US6870220B2 (ja) |
JP (1) | JP4731165B2 (ja) |
KR (1) | KR101015306B1 (ja) |
AU (1) | AU2003262748A1 (ja) |
DE (1) | DE10393138T5 (ja) |
WO (1) | WO2004019380A2 (ja) |
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JP4731165B2 (ja) | 2011-07-20 |
KR101015306B1 (ko) | 2011-02-15 |
AU2003262748A1 (en) | 2004-03-11 |
US6870220B2 (en) | 2005-03-22 |
WO2004019380A2 (en) | 2004-03-04 |
US20040113202A1 (en) | 2004-06-17 |
US20050145934A1 (en) | 2005-07-07 |
AU2003262748A8 (en) | 2004-03-11 |
WO2004019380A3 (en) | 2005-12-22 |
KR20050038025A (ko) | 2005-04-25 |
DE10393138T5 (de) | 2005-07-28 |
US7005353B2 (en) | 2006-02-28 |
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