JP2005510055A5 - - Google Patents

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Publication number
JP2005510055A5
JP2005510055A5 JP2003544796A JP2003544796A JP2005510055A5 JP 2005510055 A5 JP2005510055 A5 JP 2005510055A5 JP 2003544796 A JP2003544796 A JP 2003544796A JP 2003544796 A JP2003544796 A JP 2003544796A JP 2005510055 A5 JP2005510055 A5 JP 2005510055A5
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JP
Japan
Prior art keywords
zone
substrate
carrier
elevator mechanism
substrates
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Withdrawn
Application number
JP2003544796A
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English (en)
Japanese (ja)
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JP2005510055A (ja
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Priority claimed from PCT/US2002/035998 external-priority patent/WO2003043060A2/en
Publication of JP2005510055A publication Critical patent/JP2005510055A/ja
Publication of JP2005510055A5 publication Critical patent/JP2005510055A5/ja
Withdrawn legal-status Critical Current

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JP2003544796A 2001-11-13 2002-11-08 マイクロエレクトロニクス基板の自動処理用の低減フットプリントツール Withdrawn JP2005510055A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33805701P 2001-11-13 2001-11-13
PCT/US2002/035998 WO2003043060A2 (en) 2001-11-13 2002-11-08 Reduced footprint tool for automated processing of substrates

Publications (2)

Publication Number Publication Date
JP2005510055A JP2005510055A (ja) 2005-04-14
JP2005510055A5 true JP2005510055A5 (https=) 2006-01-05

Family

ID=23323233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003544796A Withdrawn JP2005510055A (ja) 2001-11-13 2002-11-08 マイクロエレクトロニクス基板の自動処理用の低減フットプリントツール

Country Status (7)

Country Link
US (2) US6979165B2 (https=)
EP (1) EP1446828A2 (https=)
JP (1) JP2005510055A (https=)
KR (1) KR20050044434A (https=)
CN (1) CN1608308A (https=)
TW (1) TW200305188A (https=)
WO (1) WO2003043060A2 (https=)

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