JP2004336048A - Mosfetデバイス及び該デバイスを備える電子システム - Google Patents
Mosfetデバイス及び該デバイスを備える電子システム Download PDFInfo
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- JP2004336048A JP2004336048A JP2004135589A JP2004135589A JP2004336048A JP 2004336048 A JP2004336048 A JP 2004336048A JP 2004135589 A JP2004135589 A JP 2004135589A JP 2004135589 A JP2004135589 A JP 2004135589A JP 2004336048 A JP2004336048 A JP 2004336048A
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Abstract
【解決手段】本構造は、ゲート絶縁物と、予め選ばれた仕事関数を持つために不純物をドープされた層との間にサンドイッチ状に挟まれたSi:CまたはSiGe:Cの層を備える。さらに、このことおよび他のFETデバイスの改良例えば、隆起状ソース/ドレインおよびマルチファセット・ゲート・オン・インシュレータ、MODFETが開示される。
【選択図】図5
Description
チャンネル領域を具備するSiベース結晶本体と、
前記結晶本体の上面に配置されたゲート絶縁物層と、
前記絶縁物層の上面に配置された第1の層とを備え、前記第1の層がSi:CまたはSiGe:Cである層状構造。
(2)前記第1の層が、0.5%から10%までの炭素を含む、上記(1)に記載の層状構造。
(3)前記第1の層が、1nmから5nmの厚さである、上記(1)に記載の層状構造。
(4)さらに、前記第1の層の上面に配置された第2の層を備え、前記第2の層が多結晶Siを含み、さらに前記第2の層が、前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされている、上記(1)に記載の層状構造。
(5)前記不純物が、p型ドーパントである、上記(4)に記載の層状構造。
(6)前記p型ドーパントが硼素を含む、上記(5)に記載の層状構造。
(7)前記不純物が、n型ドーパントである、上記(4)に記載の層状構造。
(8)前記n型ドーパントがリンを含む、上記(7)に記載の層状構造。
(9)前記結晶本体が、SiGe層である、上記(1)に記載の層状構造。
(10)前記結晶本体が、歪み層である、上記(1)に記載の層状構造。
(11)前記結晶本体が、Si基板である、上記(1)に記載の層状構造。
(12)MOSFETデバイス製造中の、ドーパントのゲート絶縁物貫通を防止する方法であって、
前記ゲート絶縁物に第1の層を堆積するステップを備え、前記第1の層がSi:CまたはSiGe:Cである方法。
(13)前記第1の層が、約0.5%から10%までの炭素濃度で堆積される、上記(12)に記載の方法。
(14)前記第1の層が、約1nmから5nmまでの厚さに堆積される、上記(12)に記載の方法。
(15)前記第1の層を堆積するステップが、境界のない堆積として実施される、上記(12)に記載の方法。
(16)MOSFETデバイスであって、
チャンネル領域を具備している、結晶Siをベースにした本体と、
ゲート絶縁物と、
前記ゲート絶縁物層と第2の層の間にサンドイッチ状に挟まれたSi:CまたはSiGe:Cの第1の層とを備え、前記第2の層が多結晶Siを含み、さらに前記第2の層が、前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされている、MOSFETデバイス。
(17)前記第1の層が、約0.5%から10%までの炭素を含む、上記(16)に記載のデバイス。
(18)前記第1の層が、約1nmから5nmの厚さである、上記(16)に記載のデバイス。
(19)前記不純物が、p型ドーパントである、上記(16)に記載のデバイス。
(20)前記p型ドーパントが硼素を含む、上記(19)に記載のデバイス。
(21)前記不純物が、n型ドーパントである、上記(16)に記載のデバイス。
(22)前記n型ドーパントがリンを含む、上記(21)に記載のデバイス。
(23)前記デバイスのソース端子および前記チャンネル領域が、ショットキ障壁コンタクトを形成している、上記(16)に記載のデバイス。
(24)SiGeオン・インシュレータMOSFETデバイスであって、
薄いデバイス層から基板を分離する埋込み絶縁層と、
チャンネル領域を具備する歪み結晶SiGe層であって、前記薄いデバイス層が含んでいる歪み結晶SiGe層と、
ゲート絶縁物層と第2の層の間にサンドイッチ状に挟まれたSi:CまたはSiGe:Cの第1の層であって、前記第2の層が多結晶Siを含み、さらに前記第2の層が前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされたものである第1の層と、
シリサイド・コンタクトを有する隆起状ソース領域とを備えるSiGeオン・インシュレータMOSFETデバイス。
(25)前記第1の層が、約0.5%から10%までの炭素を含む、上記(24)に記載のSiGeデバイス。
(26)前記第1の層が、約1nmから5nmの厚さである、上記(24)に記載のSiGeデバイス。
(27)前記不純物が硼素を含む、上記(24)に記載のSiGeデバイス。
(28)前記歪み結晶SiGe層が、約2nmから50nmまでの厚さである、上記(24)に記載のSiGeデバイス。
(29)前記歪み結晶SiGe層が、引っ張りでひずんでいる、上記(24)に記載のSiGeデバイス。
(30)前記歪み結晶SiGe層が、圧縮でひずんでいる、上記(24)に記載のSiGeデバイス。
(31)前記歪み結晶SiGe層が、本質的にSiから成る、上記(24)に記載のSiGeデバイス。
(32)前記歪み結晶SiGe層が、本質的にGeからなる、上記(24)に記載のSiGeデバイス。
(33)さらに、シリサイド・コンタクトを有する隆起状ドレイン領域を含む、上記(24)に記載のSiGeデバイス。
(34)前記薄いデバイス層が、SiGe緩和バッファ層を含み、前記緩和SiGeバッファ層が前記埋込み絶縁層と前記歪み結晶SiGe層の間にサンドイッチ状に挟まれている、上記(24)に記載のSiGeデバイス。
(35)SiGeオン・インシュレータMOSFETデバイスを製造する方法であって、
前記SiGeオン・インシュレータMOSFETデバイスのチャンネル領域を具備させるために、歪み結晶SiGeオン・インシュレータの層を使用するステップと、
前記SiGeオン・インシュレータMOSFETデバイスのゲート絶縁物層に第1の層を堆積するステップであって、前記第1の層がSi:CまたはSiGe:Cであるステップと、
前記SiGeオン・インシュレータMOSFETデバイスのソース領域を隆起状にするために、選択エピタキシを使用するステップとを備える方法。
(36)さらに、前記SiGeオン・インシュレータMOSFETデバイスのドレイン領域を隆起状にするために、選択エピタキシを使用するステップを備える、上記(35)に記載の方法。
(37)さらに、
前記第1の層の上面に第2の層を堆積するステップであって、前記第2の層が、多結晶Siを含み、さらに前記第2の層が前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされたものであるステップと、
前記SiGeオン・インシュレータMOSFETデバイスのゲート・スタックを形成するステップであって、前記ゲート・スタックが前記第1の層および前記第2の層を含むステップと、
自己整合シリサイド化を実施するステップとを備える、上記(35)に記載の方法。
(38)前記選択エピタキシを使用するステップが、UHV−CVD法で行われる、上記(35)に記載の方法。
(39)マルチファセット・ゲートMOSFETデバイスであって、
中心部分と2つの端部を備えた、歪みSiベース単結晶ストリップ(strained Sibased monocrystalline strip)であって、前記中心部分がマルチファセット・チャンネル領域を備え、前記端部がソースとドレインを備えるものである歪みSiベース単結晶ストリップと、
前記チャンネル領域を覆うゲート絶縁物と、
前記チャンネル領域の少なくとも2つのファセットの上に重なりかつ前記ゲート絶縁物に接続するゲートと、
付着手段によって前記歪みSiベース単結晶ストリップと係合する支持台とを備えるマルチファセット・ゲートMOSFETデバイス。
(40)前記歪みSiベース単結晶層は、引っ張りでひずんでいる、上記(39)に記載のマルチファセット・ゲート・デバイス。
(41)前記歪みSiベース単結晶層が、圧縮でひずんでいる、上記(39)に記載のマルチファセット・ゲート・デバイス。
(42)前記ゲート絶縁物が、エピタキシャルSiO2層を含み、前記エピタキシャルSiO2層が前記チャンネル領域に接続する、上記(39)に記載のマルチファセット・ゲート・デバイス。
(43)前記支持台が、Si基板上のSiO2層である、上記(39)に記載のマルチファセット・ゲート・デバイス。
(44)前記Siをベースにしたストリップが、本質的にSiから成る、上記(39)に記載のマルチファセット・ゲート・デバイス。
(45)前記Siをベースにしたストリップが、SiGe、Si:C、又はSiGe:Cのいずれかである、上記(39)に記載のMOSFETデバイス。
(46)前記Siをベースにしたストリップが、Si:Cである、上記(39)に記載のマルチファセット・ゲート・デバイス。
(47)前記Siをベースにしたストリップが、SiGe:Cである、上記(39)に記載のマルチファセット・ゲート・デバイス。
(48)前記ソースと前記チャンネル領域が、ショットキ障壁コンタクトを形成している、上記(39)に記載のMOSFETデバイス。
(49)前記ゲートが、前記ゲート絶縁物の上面に配置された第1の層を含み、前記第1の層がSi:CまたはSiGe:Cである、上記(39)に記載のMOSFETデバイス。
(50)前記ゲートが、2つの別個のゲート電極を含み、前記2つの別個のゲート電極が前記マルチファセット・チャンネル領域の2つの別個のファセットと係合する、上記(39)に記載のMOSFETデバイス。
(51)マルチファセット・チャンネル領域が、少なくとも2つの相対する側面ファセットを有し、さらに前記2つの別個のゲート電極が前記2つの相対する側面ファセットと係合している、上記(50)に記載のMOSFETデバイス。
(52)前記ゲートが、前記マルチファセット・チャンネル領域を完全に囲繞している、上記(39)に記載のMOSFETデバイス。
(53)前記MOSFETデバイスにおいて、前記支持台が表面を有し、電流が、前記支持台の表面に対して本質的に平行に流れる、上記(39)に記載のMOSFETデバイス。
(54)前記ゲートが、2つの別個のゲート電極で構成されており、前記2つの別個のゲート電極が、前記マルチファセット・チャンネル領域の2つの別個のファセットと係合し、さらに前記マルチファセット・チャンネル領域が、前記支持台に付着する底面ファセットと、前記底面ファセットに対して本質的に向かい合う配置にある少なくとも1つの上面ファセットとを有し、さらに前記2つの別個のゲート電極が前記底面ファセットおよび前記少なくとも1つの上面ファセットと係合している、上記(53)に記載のMOSFETデバイス。
(55)前記マルチファセット・チャンネル領域が、前記支持台に付着する1つのファセットを有し、前記ゲートが、前記支持台に付着する前記ファセットを除いて、前記マルチファセット・チャンネル領域の全ての前記ファセットと係合する、上記(53)に記載のMOSFETデバイス。
(56)前記支持台が、Si基板上のSiO2層の上面に薄いゲート電極材料を含む、上記(53)に記載のMOSFETデバイス。
(57)前記MOSFETデバイスにおいて、前記支持台が表面を有し、電流が、前記支持台の表面に対して本質的に垂直に流れる、上記(39)に記載のMOSFETデバイス。
(58)マルチファセット・ゲートMOSFETデバイス・オン・インシュレータを製造する方法であって、
歪みSiベース結晶層のストリップを形成するステップであって、前記ストリップがマルチファセットの中心部分および2つの端部を備え、さらに前記歪みSiベース結晶層が支持台に付着しているものであるステップと、
前記ストリップの前記マルチファセット中心部分の上にゲート絶縁物を形成するステップと、
前記ゲート絶縁物上にゲート材料を堆積するステップであって、前記マルチファセット・ゲートが前記ストリップの少なくとも2つのファセットの上に重なっているステップと、
前記ストリップの前記端部にソースおよびドレインを形成するステップとを含む方法。
(59)前記ゲート絶縁物を形成するステップが、さらに、
前記マルチファセット中心部分の上にエピタキシャル酸化物層を堆積するステップを含む、上記(58)に記載のデバイス製造方法。
(60)さらに、
前記歪みSiベース結晶層オン・インシュレータの製造中に、層移送を使用するステップを含む、上記(58)に記載のデバイス製造方法。
(61)前記層移送ステップが、さらに、前記歪みSiをベースにした層の上にエピタキシャル酸化物層を成長して付着を容易にするステップを含む、上記(60)に記載のデバイス製造方法。
(62)前記支持台が、Si基板上のSiO2層であるように選ばれる、上記(60)に記載のデバイス製造方法。
(63)前記ゲート材料を堆積するステップが、さらに、
前記ゲート絶縁物の上面に第1の層を配置するステップを含み、前記第1の層がSi:CまたはSiGe:Cである、上記(58)に記載のデバイス製造方法。
(64)チャンネル領域を具備する歪みSiベース単結晶層と、
付着手段によって前記歪みSiベース単結晶層と係合する支持台とを備える、MODFETデバイス。
(65)前記MODFETデバイス・オン・インシュレータが、N−MODFETである、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(66)前記MODFETデバイス・オン・インシュレータが、P−MODFETである、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(67)前記歪みSiベース単結晶層が、引っ張りでひずんでいる、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(68)前記歪みSiベース単結晶層が、圧縮でひずんでいる、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(69)前記歪みSiベース単結晶層がSiGe、又はSiGe:Cである、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(70)前記歪みSiベース単結晶層がSiGe:Cである、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(71)前記歪みSiベース単結晶層が本質的にSiから成る、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(72)前記支持台が、Si基板上のSiO2層である、上記(64)に記載のMODFETデバイス・オン・インシュレータ。
(73)少なくとも1つのマルチファセット・ゲートMOSFETデバイスを備えた1つまたは複数のプロセッサ・チップを備える電子システムであって、前記少なくとも1つのマルチファセット・ゲートMOSFETが、
中心部分と2つの端部を備えた歪みSiベース単結晶ストリップであって、前記中心部分がマルチファセット・チャンネル領域を備え前記端部がソースおよびドレインを備える歪みSiベース単結晶ストリップと、
前記チャンネル領域を覆うゲート絶縁物と、
前記マルチファセット・チャンネル領域の少なくとも2つのファセットの上に重なりかつ前記ゲート絶縁物に接続するゲートと、
付着手段によって前記歪みSiベース単結晶ストリップと係合する支持台とを備える電子システム。
(74)前記システムが、ディジタル・プロセッサである、上記(73)に記載の電子システム。
(75)前記システムが、混合ディジタル/アナログ・プロセッサである、上記(73)に記載の電子システム。
(76)前記システムが、通信プロセッサである、上記(75)に記載の電子システム。
(77)前記システムの前記少なくとも1つのマルチファセット・ゲートMOSFETが、約250°Kと70°Kの間での動作に最適化されたデバイス設計になっている、上記(73)に記載の電子システム。
110 ゲート材料(ドープド・ポリシリコン)
150 ゲート絶縁物(SiO2)
160 本体層(Si基板、SOIのデバイス層、SiGe層)
260 ソース/ドレイン領域
300 堆積層
300’ 隆起状領域
350 チャンネル領域(歪みSiGe層)
360 支持層(SiGe緩和バッファ層)
370 絶縁物層(BOX層)
430 シリサイド
500 ゲート
501 電流の方向
510 歪みSiまたはSiGe
520 ゲート絶縁物(エピタキシャルSiO2層)
530 ゲート絶縁物(エピタキシャルでないSiO2)
512 上面ファセット(チャンネル領域)
511 底面ファセット(チャンネル領域)
513 側面ファセット
540 ソース/ドレイン
570 Siをベースにしたひずんだ層
601 MODFETデバイス
610 チャンネル
900 電子システム
Claims (30)
- MOSFETデバイスの層状構造であって、
チャンネル領域を具備するSiベース結晶本体と、
前記結晶本体の上面に配置されたゲート絶縁物層と、
前記絶縁物層の上面に配置された第1の層とを備え、前記第1の層がSi:CまたはSiGe:Cである層状構造。 - 前記第1の層が、0.5%から10%までの炭素を含む、請求項1に記載の層状構造。
- 前記第1の層が、1nmから5nmの厚さである、請求項1に記載の層状構造。
- さらに、前記第1の層の上面に配置された第2の層を備え、前記第2の層が多結晶Siを含み、さらに前記第2の層が、前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされている、請求項1に記載の層状構造。
- 前記不純物が、p型ドーパントである、請求項4に記載の層状構造。
- 前記p型ドーパントが硼素を含む、請求項5に記載の層状構造。
- 前記不純物が、n型ドーパントである、請求項4に記載の層状構造。
- 前記n型ドーパントがリンを含む、請求項7に記載の層状構造。
- 前記結晶本体が、SiGe層である、請求項1に記載の層状構造。
- 前記結晶本体が、歪み層である、請求項1に記載の層状構造。
- 前記結晶本体が、Si基板である、請求項1に記載の層状構造。
- MOSFETデバイスであって、
チャンネル領域を具備している、結晶Siをベースにした本体と、
ゲート絶縁物と、
前記ゲート絶縁物層と第2の層の間にサンドイッチ状に挟まれたSi:CまたはSiGe:Cの第1の層とを備え、前記第2の層が多結晶Siを含み、さらに前記第2の層が、前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされている、MOSFETデバイス。 - SiGeオン・インシュレータMOSFETデバイスであって、
薄いデバイス層から基板を分離する埋込み絶縁層と、
チャンネル領域を具備する歪み結晶SiGe層であって、前記薄いデバイス層が含んでいる歪み結晶SiGe層と、
ゲート絶縁物層と第2の層の間にサンドイッチ状に挟まれたSi:CまたはSiGe:Cの第1の層であって、前記第2の層が多結晶Siを含み、さらに前記第2の層が前記チャンネル領域に対して選ばれた仕事関数を持つように不純物をドープされたものである第1の層と、
シリサイド・コンタクトを有する隆起状ソース領域とを備えるSiGeオン・インシュレータMOSFETデバイス。 - 前記薄いデバイス層が、SiGe緩和バッファ層を含み、前記緩和SiGeバッファ層が前記埋込み絶縁層と前記歪み結晶SiGe層の間にサンドイッチ状に挟まれている、請求項13に記載のSiGeデバイス。
- マルチファセット・ゲートMOSFETデバイスであって、
中心部分と2つの端部を備えた、歪みSiベース単結晶ストリップ(strained Sibased monocrystalline strip)であって、前記中心部分がマルチファセット・チャンネル領域を備え、前記端部がソースとドレインを備えるものである歪みSiベース単結晶ストリップと、
前記チャンネル領域を覆うゲート絶縁物と、
前記チャンネル領域の少なくとも2つのファセットの上に重なりかつ前記ゲート絶縁物に接続するゲートと、
付着手段によって前記歪みSiベース単結晶ストリップと係合する支持台とを備えるマルチファセット・ゲートMOSFETデバイス。 - 前記Siをベースにしたストリップが、SiGe、Si:C、又はSiGe:Cのいずれかである、請求項15に記載のMOSFETデバイス。
- 前記ソースと前記チャンネル領域が、ショットキ障壁コンタクトを形成している、請求項15に記載のMOSFETデバイス。
- 前記ゲートが、前記ゲート絶縁物の上面に配置された第1の層を含み、前記第1の層がSi:CまたはSiGe:Cである、請求項15に記載のMOSFETデバイス。
- 前記ゲートが、2つの別個のゲート電極を含み、前記2つの別個のゲート電極が前記マルチファセット・チャンネル領域の2つの別個のファセットと係合する、請求項15に記載のMOSFETデバイス。
- マルチファセット・チャンネル領域が、少なくとも2つの相対する側面ファセットを有し、さらに前記2つの別個のゲート電極が前記2つの相対する側面ファセットと係合している、請求項19に記載のMOSFETデバイス。
- 前記ゲートが、前記マルチファセット・チャンネル領域を完全に囲繞している、請求項15に記載のMOSFETデバイス。
- 前記MOSFETデバイスにおいて、前記支持台が表面を有し、電流が、前記支持台の表面に対して本質的に平行に流れる、請求項15に記載のMOSFETデバイス。
- 前記ゲートが、2つの別個のゲート電極で構成されており、前記2つの別個のゲート電極が、前記マルチファセット・チャンネル領域の2つの別個のファセットと係合し、さらに前記マルチファセット・チャンネル領域が、前記支持台に付着する底面ファセットと、前記底面ファセットに対して本質的に向かい合う配置にある少なくとも1つの上面ファセットとを有し、さらに前記2つの別個のゲート電極が前記底面ファセットおよび前記少なくとも1つの上面ファセットと係合している、請求項22に記載のMOSFETデバイス。
- 前記マルチファセット・チャンネル領域が、前記支持台に付着する1つのファセットを有し、前記ゲートが、前記支持台に付着する前記ファセットを除いて、前記マルチファセット・チャンネル領域の全ての前記ファセットと係合する、請求項22に記載のMOSFETデバイス。
- 前記支持台が、Si基板上のSiO2層の上面に薄いゲート電極材料を含む、請求項22に記載のMOSFETデバイス。
- 前記MOSFETデバイスにおいて、前記支持台が表面を有し、電流が、前記支持台の表面に対して本質的に垂直に流れる、請求項15に記載のMOSFETデバイス。
- チャンネル領域を具備する歪みSiベース単結晶層と、
付着手段によって前記歪みSiベース単結晶層と係合する支持台とを備える、MODFETデバイス。 - 前記歪みSiベース単結晶層がSiGe、又はSiGe:Cである、請求項27に記載のMODFETデバイス・オン・インシュレータ。
- 前記支持台が、Si基板上のSiO2層である、請求項27に記載のMODFETデバイス・オン・インシュレータ。
- 少なくとも1つのマルチファセット・ゲートMOSFETデバイスを備えた1つまたは複数のプロセッサ・チップを備える電子システムであって、前記少なくとも1つのマルチファセット・ゲートMOSFETが、
中心部分と2つの端部を備えた歪みSiベース単結晶ストリップであって、前記中心部分がマルチファセット・チャンネル領域を備え前記端部がソースおよびドレインを備える歪みSiベース単結晶ストリップと、
前記チャンネル領域を覆うゲート絶縁物と、
前記マルチファセット・チャンネル領域の少なくとも2つのファセットの上に重なりかつ前記ゲート絶縁物に接続するゲートと、
付着手段によって前記歪みSiベース単結晶ストリップと係合する支持台とを備える電子システム。
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JP2011187491A (ja) * | 2010-03-04 | 2011-09-22 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
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US20050161711A1 (en) | 2005-07-28 |
US7411214B2 (en) | 2008-08-12 |
TW200509395A (en) | 2005-03-01 |
US20080108196A1 (en) | 2008-05-08 |
TWI279914B (en) | 2007-04-21 |
JP2009065177A (ja) | 2009-03-26 |
US20080111156A1 (en) | 2008-05-15 |
US7547930B2 (en) | 2009-06-16 |
US20040217430A1 (en) | 2004-11-04 |
US6909186B2 (en) | 2005-06-21 |
US20050156169A1 (en) | 2005-07-21 |
US7563657B2 (en) | 2009-07-21 |
US20080132021A1 (en) | 2008-06-05 |
US7358122B2 (en) | 2008-04-15 |
JP5255396B2 (ja) | 2013-08-07 |
US7510916B2 (en) | 2009-03-31 |
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