JP2014049768A - 半導体デバイスおよびその製造方法 - Google Patents
半導体デバイスおよびその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000004065 semiconductor Substances 0.000 title abstract description 4
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 93
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 90
- 229910052751 metal Inorganic materials 0.000 claims abstract description 80
- 239000002184 metal Substances 0.000 claims abstract description 80
- 238000000034 method Methods 0.000 claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 238000000151 deposition Methods 0.000 claims abstract description 19
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 8
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 27
- 239000010703 silicon Substances 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 230000001131 transforming effect Effects 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 4
- 238000004377 microelectronic Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 38
- 230000015572 biosynthetic process Effects 0.000 abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- SCCCLDWUZODEKG-UHFFFAOYSA-N germanide Chemical compound [GeH3-] SCCCLDWUZODEKG-UHFFFAOYSA-N 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 239000011800 void material Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910000510 noble metal Inorganic materials 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000005669 field effect Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910006137 NiGe Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- -1 for example Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
【解決手段】基板の上に設けられたゲルマニウム含有チャネル層20の上であって、ゲルマニウム含有チャネル層に対して互いに反対側に位置するゲルマニウム系ソース領域3とドレイン領域4との間にゲート構造5を設ける工程と、ゲルマニウム系ソース領域およびドレイン領域の上に、SiおよびGeを含むキャップ層7を設ける工程と、キャップ層の上に金属層54を堆積させる工程と、温度工程を実施し、キャップ層の少なくとも一部を、金属を溶解させるように構成された所定のエッチャントに溶解しない金属ゲルマノシリサイドに変質させる工程と、所定のエッチャントによって、消費されていない金属を基板から選択的に除去する工程と、を含む。
【選択図】図3
Description
基板(例えばゲルマニウム基板、Geを含むエピタキシャル層を有するSi基板、または、絶縁体基板の上のSixGe1−x(0≦x≦1))の上に設けられたゲルマニウム系チャネル層の上であって、ゲルマニウム系チャネル層に対して互いに反対側に位置するゲルマニウム系ソース領域とゲルマニウム系ドレイン領域との間にゲート構造を設ける工程と、
ゲルマニウム系ソース領域およびゲルマニウム系ドレイン領域の上に、シリコンおよびゲルマニウムを含む、例えばSiGeを含むキャップ層を設ける工程と、
キャップ層の上に金属層を堆積させる工程と、
例えばアニール工程のような温度工程(temperature step)を実施し、キャップ層の少なくとも一部を、上記金属を溶解させるように構成された所定のエッチャントに溶解しない金属ゲルマノシリサイド(metal germano-silicide)に変質させる工程と、
当該所定のエッチャントによって、消費されていない金属層を基板から選択的に除去する工程と、
プレメタル誘電体層(premetal dielectric layer)を設ける工程と、を含む。
キャップ層の上に金属層を堆積させる工程と、
温度工程を実施し、キャップ層の少なくとも一部を金属ゲルマノシリサイドに変質させる工程と、
消費されていない金属または金属層を基板から選択的に除去する工程とを、
プレメタル誘電体層を堆積させる工程の前に実施することを含む。
キャップ層の上に金属層を堆積させる工程と、
温度工程を実施し、キャップ層の少なくとも一部を金属ゲルマノシリサイドに変質させる工程と、
消費されていない金属を基板から選択的に除去する工程とを、
プレメタル誘電体層を堆積させる工程とプレメタル誘電体層内に開口部をパターニングする工程との後に実施することを含む。
基板の上のゲルマニウムまたはゲルマニウム系チャネル層と、
ゲルマニウム系チャネル層の上のゲート構造であって、ゲルマニウム系チャネル層に対して互いに反対側に位置するゲルマニウム系ソース領域とゲルマニウム系ドレイン領域との間に配置されたゲート構造と、
ソース領域および/またはドレイン領域のそれぞれの上で部分的に変質したキャップ層であって、その一部のみが金属ゲルマノ−シリサイドを含むようにしたキャップ層とを備えたデバイスについて説明している。
Claims (15)
- ゲルマニウム系チャネル層を備えたトランジスタデバイスを製造する方法であって、
基板の上に設けられた前記ゲルマニウム系チャネル層の上であって、前記ゲルマニウム系チャネル層に対して互いに反対側に位置するゲルマニウム系ソース領域とゲルマニウム系ドレイン領域との間にゲート構造を設ける工程と、
前記ゲルマニウム系ソース領域および前記ゲルマニウム系ドレイン領域の上に、SiおよびGeを含むキャップ層を設ける工程と、
前記キャップ層の上に金属層を堆積させる工程と、
温度工程を実施し、前記キャップ層の少なくとも一部を、前記金属を溶解させるように構成された所定のエッチャントに溶解しない金属ゲルマノシリサイドに変質させる工程と、
前記所定のエッチャントによって、消費されていない金属を前記基板から選択的に除去する工程と、
プレメタル誘電体層を設ける工程と、を含む方法。 - 前記キャップ層の上に金属層を堆積させる工程と、
前記温度工程を実施し、前記キャップ層の少なくとも一部を金属ゲルマノシリサイドに変質させる工程と、
前記消費されていない金属を前記基板から選択的に除去する工程とを、
前記プレメタル誘電体層を堆積させる工程の前に実施することを含む、請求項1に記載の方法。 - 前記キャップ層の上に金属層を堆積させる工程と、
前記温度工程を実施し、前記キャップ層の少なくとも一部を金属ゲルマノシリサイドに変質させる工程と、
前記消費されていない金属を前記基板から選択的に除去する工程とを、
前記堆積させる工程と、プレメタル誘電体層内に開口部をパターニングする工程との後に実施することを含む、請求項1に記載の方法。 - 前記ゲート構造を最終ゲート構造で置換する工程をさらに含む、請求項1から3のいずれか1項に記載の方法。
- 前記ゲート構造を最終ゲート構造で置換する工程を、前記プレメタル誘電体層を堆積させる工程の後に実施する、請求項4に記載の方法。
- 前記金属層は、NiもしくはPtまたはNiとPtとの複合体、またはPdもしくはCuまたはPdとCuとの複合体を含む、請求項1から5のいずれか1項に記載の方法。
- 前記キャップ層を設ける工程は、前記ゲルマニウム系ソース領域およびドレイン領域の上に前記キャップ層をエピタキシャル成長させる工程を含む、請求項1から6のいずれか1項に記載の方法。
- 前記キャップ層の上に金属層を堆積させる工程と、前記温度工程を実施し、前記キャップ層の少なくとも一部を金属ゲルマノシリサイドに変質させる工程との後に、キャップ層の未反応部分または未変質部分が下位のゲルマニウム系チャネル層を覆った状態を維持するように、堆積させる金属層を設ける、請求項1から7のいずれか1項に記載の方法。
- 前記キャップ層は、SiGeを含み、20%から100%のシリコンを含有する、請求項1から8のいずれか1項に記載の方法。
- 前記キャップ層の上に金属層を堆積させる工程の前に、前記キャップ層を成長させた後にスペーサを形成し、SiGeのファセット成長に起因して存在しうる薄いSiGe領域を幾らか覆うようにした工程を含む、請求項9に記載の方法。
- ほぼファセットフリーモードで前記キャップ層を成長させる工程を含む、請求項1から9のいずれか1項に記載の方法。
- 前記キャップ層は、ゲルマニウム系チャネル層とゲルマニウム系ソース領域およびドレイン領域との、前記所定のエッチャントへの曝露を防止するように構成された、請求項1から11のいずれか1項に記載の方法。
- 前記キャップ層は、少なくとも5nmの厚さを有する、請求項1から12のいずれか1項に記載の方法。
- 前記プレメタル誘電体に、ゲルマニウム系チャネル層とゲルマニウム系ソース領域およびドレイン領域との、前記所定のエッチャントへの曝露を防止する機能をもたせた、請求項1から13のいずれか1項に記載の方法。
- 基板の上のゲルマニウム系チャネル層と、
前記ゲルマニウム系チャネル層の上のゲート構造であって、前記ゲルマニウム系チャネル層に対して互いに反対側に位置するゲルマニウム系ソース領域とゲルマニウム系ドレイン領域との間に配置されたゲート構造と、
前記ソース領域および/またはドレイン領域のそれぞれの上で部分的に変質したキャップ層であって、その一部のみが金属ゲルマノ−シリサイドを含むようにしたキャップ層と、を備えたマイクロ電子デバイス。
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