JP4008860B2 - 半導体装置の製造方法 - Google Patents
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- JP4008860B2 JP4008860B2 JP2003273603A JP2003273603A JP4008860B2 JP 4008860 B2 JP4008860 B2 JP 4008860B2 JP 2003273603 A JP2003273603 A JP 2003273603A JP 2003273603 A JP2003273603 A JP 2003273603A JP 4008860 B2 JP4008860 B2 JP 4008860B2
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- 239000004065 semiconductor Substances 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 100
- 238000009792 diffusion process Methods 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 36
- 229910021332 silicide Inorganic materials 0.000 claims description 35
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000010410 layer Substances 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 22
- 238000002955 isolation Methods 0.000 claims description 22
- 239000011229 interlayer Substances 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 229910005883 NiSi Inorganic materials 0.000 description 37
- 229910052710 silicon Inorganic materials 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 229910052814 silicon oxide Inorganic materials 0.000 description 17
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910018098 Ni-Si Inorganic materials 0.000 description 2
- 229910018529 Ni—Si Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000005903 acid hydrolysis reaction Methods 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910019001 CoSi Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000004767 nitrides Chemical group 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66628—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation recessing the gate by forming single crystalline semiconductor material at the source or drain location
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/161—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys
- H01L29/165—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- H01—ELECTRIC ELEMENTS
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
Description
素子分離絶縁領域が離間して形成された半導体基板の素子領域に、ゲート絶縁膜を介してゲート電極を形成する工程と、
前記ゲート電極の側面に側壁絶縁膜を形成する工程と、
前記側壁絶縁膜および前記ゲート電極をマスクとして前記半導体基板に不純物を導入し、不純物拡散領域を形成する工程と、
前記素子分離絶縁領域の上部を除去して、前記不純物拡散領域の側面を露出する工程と、
前記不純物拡散領域の上面からその側面の一部にわたって、前記不純物拡散領域側のGe濃度が表面側よりも10原子%以上高いSiGe膜を形成する工程と、
前記SiGe膜および前記ゲート電極の全面に金属膜を形成する工程と、
前記金属膜が形成された前記半導体基板を熱処理して、前記SiGe膜の下層領域を5nm以上残しつつ、この上に金属珪化物層を形成する工程と、
前記金属珪化物層が形成された前記半導体基板の全面に層間絶縁膜を形成する工程と、
前記層間絶縁膜にコンタクトホールを形成し、導電材料で埋め込んで電気的に接続する工程とを具備することを特徴とする。
Claims (9)
- 素子分離絶縁領域が離間して形成された半導体基板の素子領域に、ゲート絶縁膜を介してゲート電極を形成する工程と、
前記ゲート電極の側面に側壁絶縁膜を形成する工程と、
前記側壁絶縁膜および前記ゲート電極をマスクとして前記半導体基板に不純物を導入し、不純物拡散領域を形成する工程と、
前記素子分離絶縁領域の上部を除去して、5nm以上の高さhで前記不純物拡散領域の側面を露出する工程と、
前記不純物拡散領域の上面からその側面の一部にわたって、前記上面における膜厚が前記高さhと同等以上hの2倍以下、かつ前記側面における膜厚が前記高さh以下であり、前記不純物拡散領域側のGe濃度が表面側よりも10原子%以上高いSiGe膜を形成する工程と、
前記SiGe膜および前記ゲート電極の全面に金属膜を形成する工程と、
前記金属膜が形成された前記半導体基板を熱処理して、前記SiGe膜の下層領域を5nm以上残しつつ、この上に金属珪化物層を形成する工程と、
前記金属珪化物層が形成された前記半導体基板の全面に層間絶縁膜を形成する工程と、
前記層間絶縁膜にコンタクトホールを形成し、導電材料で埋め込んで電気的に接続する工程と
を具備することを特徴とする半導体装置の製造方法。 - 前記SiGe膜は、前記ゲート電極の上面を越えない高さで形成されることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記金属珪化物層を形成した後に残るSiGe膜の膜厚が5〜20nmとなるように、前記金属珪化物層を形成することを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記SiGe膜は、高濃度でGeを含有する第1のSiGe膜と、低濃度でGeを含有する第2のSiGe膜とを順次堆積することにより形成されることを特徴とする請求項1ないし3のいずれか1項に記載の半導体装置の製造方法。
- 前記第1のSiGe膜におけるGe濃度は、15〜30原子%であることを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記第2のSiGe膜におけるGe濃度は、5〜20原子%であることを特徴とする請求項4または5に記載の半導体装置の製造方法。
- 前記SiGe膜は、Ge濃度が表面に向けて減少した濃度傾斜を有するSiGe膜から形成することを特徴とする請求項1ないし3のいずれか1項に記載の半導体装置の製造方法。
- 前記SiGe膜の下面におけるGe濃度は30原子%以下であり、表面におけるGe濃度は5原子%以上であることを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記ゲート電極は多結晶シリコンからなり、上部に金属珪化物層を有することを特徴とする請求項1ないし8のいずれか1項に記載の半導体装置の製造方法。
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JP2003273603A JP4008860B2 (ja) | 2003-07-11 | 2003-07-11 | 半導体装置の製造方法 |
US10/743,006 US6924518B2 (en) | 2003-07-11 | 2003-12-23 | Semiconductor device and method of manufacturing the same |
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JP2003273603A JP4008860B2 (ja) | 2003-07-11 | 2003-07-11 | 半導体装置の製造方法 |
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JP2005033137A JP2005033137A (ja) | 2005-02-03 |
JP4008860B2 true JP4008860B2 (ja) | 2007-11-14 |
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Families Citing this family (25)
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US7402207B1 (en) | 2004-05-05 | 2008-07-22 | Advanced Micro Devices, Inc. | Method and apparatus for controlling the thickness of a selective epitaxial growth layer |
JP2006100599A (ja) * | 2004-09-29 | 2006-04-13 | Toshiba Corp | 半導体装置及びその製造方法 |
US7402485B1 (en) | 2004-10-20 | 2008-07-22 | Advanced Micro Devices, Inc. | Method of forming a semiconductor device |
US7456062B1 (en) | 2004-10-20 | 2008-11-25 | Advanced Micro Devices, Inc. | Method of forming a semiconductor device |
US7241700B1 (en) | 2004-10-20 | 2007-07-10 | Advanced Micro Devices, Inc. | Methods for post offset spacer clean for improved selective epitaxy silicon growth |
US20060252191A1 (en) * | 2005-05-03 | 2006-11-09 | Advanced Micro Devices, Inc. | Methodology for deposition of doped SEG for raised source/drain regions |
US20060281271A1 (en) * | 2005-06-13 | 2006-12-14 | Advanced Micro Devices, Inc. | Method of forming a semiconductor device having an epitaxial layer and device thereof |
US7553732B1 (en) | 2005-06-13 | 2009-06-30 | Advanced Micro Devices, Inc. | Integration scheme for constrained SEG growth on poly during raised S/D processing |
JP4984665B2 (ja) * | 2005-06-22 | 2012-07-25 | 富士通セミコンダクター株式会社 | 半導体装置およびその製造方法 |
US7579617B2 (en) * | 2005-06-22 | 2009-08-25 | Fujitsu Microelectronics Limited | Semiconductor device and production method thereof |
KR100639464B1 (ko) * | 2005-09-15 | 2006-10-27 | 동부일렉트로닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
US7572705B1 (en) | 2005-09-21 | 2009-08-11 | Advanced Micro Devices, Inc. | Semiconductor device and method of manufacturing a semiconductor device |
US7918975B2 (en) | 2005-11-17 | 2011-04-05 | Abbott Diabetes Care Inc. | Analytical sensors for biological fluid |
CN100411146C (zh) * | 2005-12-06 | 2008-08-13 | 联华电子股份有限公司 | 制作应变硅互补式金属氧化物半导体晶体管的方法 |
US20080070360A1 (en) * | 2006-09-19 | 2008-03-20 | International Business Machines Corporation | Method and structure for forming silicide contacts on embedded silicon germanium regions of cmos devices |
JP2009099702A (ja) * | 2007-10-16 | 2009-05-07 | Toshiba Corp | 半導体装置及びその製造方法 |
DE102007052167B4 (de) * | 2007-10-31 | 2010-04-08 | Advanced Micro Devices, Inc., Sunnyvale | Halbleiterbauelement und Verfahren zum Einstellen der Höhe einer Gateelektrode in dem Halbleiterbauelement |
JP2009111200A (ja) * | 2007-10-31 | 2009-05-21 | Panasonic Corp | 半導体装置及びその製造方法 |
WO2009093328A1 (ja) * | 2008-01-25 | 2009-07-30 | Fujitsu Microelectronics Limited | 半導体装置及びその製造方法 |
JP2010103142A (ja) * | 2008-10-21 | 2010-05-06 | Toshiba Corp | 半導体装置の製造方法 |
JP2011253857A (ja) * | 2010-05-31 | 2011-12-15 | Elpida Memory Inc | 半導体装置およびその製造方法 |
KR101109231B1 (ko) * | 2010-07-08 | 2012-01-30 | 삼성전기주식회사 | 인쇄회로기판 및 이를 포함하는 진동모터 |
EP2704199B1 (en) * | 2012-09-03 | 2020-01-01 | IMEC vzw | Method of manufacturing a semiconductor device |
US20160190319A1 (en) * | 2013-09-27 | 2016-06-30 | Intel Corporation | Non-Planar Semiconductor Devices having Multi-Layered Compliant Substrates |
US11322588B2 (en) | 2019-10-14 | 2022-05-03 | International Business Machines Corporation | Contact source/drain resistance |
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US5496750A (en) * | 1994-09-19 | 1996-03-05 | Texas Instruments Incorporated | Elevated source/drain junction metal oxide semiconductor field-effect transistor using blanket silicon deposition |
JP3616514B2 (ja) | 1998-11-17 | 2005-02-02 | 株式会社東芝 | 半導体集積回路及びその製造方法 |
JP2002124665A (ja) | 2000-10-12 | 2002-04-26 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
US6303450B1 (en) * | 2000-11-21 | 2001-10-16 | International Business Machines Corporation | CMOS device structures and method of making same |
US6787864B2 (en) * | 2002-09-30 | 2004-09-07 | Advanced Micro Devices, Inc. | Mosfets incorporating nickel germanosilicided gate and methods for their formation |
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2003
- 2003-07-11 JP JP2003273603A patent/JP4008860B2/ja not_active Expired - Fee Related
- 2003-12-23 US US10/743,006 patent/US6924518B2/en not_active Expired - Lifetime
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JP2005033137A (ja) | 2005-02-03 |
US20050006637A1 (en) | 2005-01-13 |
US6924518B2 (en) | 2005-08-02 |
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