FR2950478B1 - Électrode en pomme de douche monolithique bloquée. - Google Patents

Électrode en pomme de douche monolithique bloquée.

Info

Publication number
FR2950478B1
FR2950478B1 FR1003725A FR1003725A FR2950478B1 FR 2950478 B1 FR2950478 B1 FR 2950478B1 FR 1003725 A FR1003725 A FR 1003725A FR 1003725 A FR1003725 A FR 1003725A FR 2950478 B1 FR2950478 B1 FR 2950478B1
Authority
FR
France
Prior art keywords
apple
monolithic
shower
blocked
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1003725A
Other languages
English (en)
Other versions
FR2950478A1 (fr
Inventor
Bettencourt Gregory R
Gautam Bhattacharyya
Eng Simon Gosselin
Sandy Chao
La Llera Anthony De
Patrik Mankidy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
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Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of FR2950478A1 publication Critical patent/FR2950478A1/fr
Application granted granted Critical
Publication of FR2950478B1 publication Critical patent/FR2950478B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
FR1003725A 2009-09-18 2010-09-20 Électrode en pomme de douche monolithique bloquée. Active FR2950478B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24364709P 2009-09-18 2009-09-18

Publications (2)

Publication Number Publication Date
FR2950478A1 FR2950478A1 (fr) 2011-03-25
FR2950478B1 true FR2950478B1 (fr) 2017-04-28

Family

ID=43728862

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1003725A Active FR2950478B1 (fr) 2009-09-18 2010-09-20 Électrode en pomme de douche monolithique bloquée.

Country Status (7)

Country Link
US (1) US8419959B2 (fr)
JP (1) JP3167751U (fr)
CN (1) CN201919233U (fr)
DE (1) DE202010012763U1 (fr)
FR (1) FR2950478B1 (fr)
SG (1) SG169960A1 (fr)
TW (1) TWM412457U (fr)

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FR2950478A1 (fr) 2011-03-25
US8419959B2 (en) 2013-04-16
SG169960A1 (en) 2011-04-29
DE202010012763U1 (de) 2011-04-07
CN201919233U (zh) 2011-08-03
US20110070740A1 (en) 2011-03-24
TWM412457U (en) 2011-09-21
JP3167751U (ja) 2011-05-19

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