EP0598763B1 - Bain acide de depot galvanique de cuivre et son utilisation - Google Patents
Bain acide de depot galvanique de cuivre et son utilisation Download PDFInfo
- Publication number
- EP0598763B1 EP0598763B1 EP92916259A EP92916259A EP0598763B1 EP 0598763 B1 EP0598763 B1 EP 0598763B1 EP 92916259 A EP92916259 A EP 92916259A EP 92916259 A EP92916259 A EP 92916259A EP 0598763 B1 EP0598763 B1 EP 0598763B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- aqueous
- bath according
- phenazonium
- poly
- acidic bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Definitions
- the invention relates to an acid bath for the electrodeposition of shiny, ductile and leveled copper coatings and the use of this combination.
- the bath according to the invention can be used both to reinforce the conductor tracks of printed circuits and in the decorative sector.
- the prior art includes baths which contain a mixture of oxygen-containing high-molecular compounds with organic, in particular aromatic thio compounds (DE-AS 1521062). However, these show unimportant results with regard to metal scattering and / or leveling.
- DE-AS 2039831 describes an acidic copper bath which, in addition to a polymeric oxygen-containing compound and a thio compound with a water-soluble group, also contains at least one dye from the series of polymeric phenazonium compounds in solution. Further work describes the combination of organic thio compounds and polymeric oxygen-containing compounds with other dyes such as crystal violet (EP-PS 071512) or phthalocyanine derivatives with aposafranine (DE-PS 3420999) or a combination with amides (DE-PS 2746938) .
- a disadvantage when using conventional oxygen-containing high molecular weight Connections is the stability in the electrolyte. With normal use, these compounds decompose slowly during the electrolysis to water-insoluble polymers, which accumulate more and more in the electrolyte, frame them as jellies on the walls and finally deposit on the goods themselves, so that the goods become damaged and thus unusable. This decomposition is extremely increased when the bath temperature rises above 28 ° C.
- the object of this invention is to avoid these disadvantages.
- the amount in which the polyalkylene glycol dialkyl ether can be added in order to achieve a significant improvement in the copper deposition is approximately 0.005 to 30 g / liter; preferably 0.02 to 8.0 g / liter.
- the relative molar mass can be between 500 and 35,000 g / mol; preferably 800 to 4000 g / mol.
- polyalkylene glycol dialkyl ethers are known per se or can be prepared by processes known per se by reacting polyalkylene glycols with an alkylating agent, e.g. Dimethyl sulfate or tert. Butene are made.
- an alkylating agent e.g. Dimethyl sulfate or tert. Butene are made.
- Table 1 shows examples of the polyalkylene glycol dialkyl ethers to be used according to the invention and their preferred use concentration listed: Table 1 Polyalkylene glycol dialkyl ether preferred concentration g / liter Dimethyl polyethylene glycol ether 0.1 - 5.0 Dimethyl polypropylene glycol ether 0.05-1.0 Di-tert-butyl polyethylene glycol ether 0.1 - 2.0 Stearly monomethyl polyethylene glycol ether 0.5 - 8.0 Nonylphenyl monomethyl polyethylene glycol ether 0.5 - 6.0 Polyethylene-polypropylene-dimethyl ether (mixed or block polymer) 0.02 - 5.0 Octyl monomethyl polyalkylene ether (copolymer or block polymer) 0.05-0.5 Dimethyl-bis (polyalkylene glycol) octylene ether (mixed or block polymer) 0.02 - 0.5 ⁇ -naphthol monomethyl polyethylene glycol ether 0.03 - 4.0
- At least one thio compound having a water-solubilizing group can be added to the compound according to the invention in order to obtain a shiny precipitate.
- Other additives such as nitrogen-containing thio compounds, polymeric nitrogen compounds and / or polymeric phenazonium compounds can also be added to the bath.
- Table 2 lists some common thio compounds with water-soluble groups and their preferred use concentration: Table 2 Thio compounds preferred concentration g / liter 3-mercaptopropan-1-sulfonic acid, sodium salt 0.002 - 0.1 Thiophosphoric acid-O-ethyl-bis- ( ⁇ -sulfopropyl) ester, disodium salt 0.01-0.15 Thiophosphoric acid tris ( ⁇ -sulfopropyl) ester, trisodium salt 0.02-0.15 Thioglycolic acid 0.001 - 0.005 Ethylene dithiodipropyl sulfonic acid, sodium salt 0.001 - 0.1 Bis- ( ⁇ -sulfopropyl) disulfide, disodium salt 0.001 - 0.05 Bis ( ⁇ -sulfopropyl) sulfide, disodium salt 0.01-0.15 O-ethyl-dithiocarbonic acid S- ( ⁇ -sulfopropyl) ester,
- Table 3 contains examples of nitrogen-containing thio compounds (so-called thiourea derivatives) and Table 4 for polymeric phenazonium compounds and Table 5 for polymeric nitrogen compounds.
- the basic composition of the bath according to the invention can vary within wide limits.
- An aqueous solution of the following composition is generally used: Copper sulfate (CuSO4 ⁇ 5H2O) preferably 20 - 250 g / liter 60 - 80 g / liter or 180 - 220 g / liter
- chloride ions 0.01 - 0.18 g / liter, 0.03-0.10 g / liter
- copper sulfate instead of copper sulfate, other copper salts can also be used, at least in part.
- Some or all of the sulfuric acid can be replaced by fluoroboric acid, methanesulfonic acid or other acids.
- the chloride ions are added as alkali chloride (eg sodium chloride) or in the form of hydrochloric acid pa. The addition of sodium chloride can be omitted in whole or in part if the additives already contain halogen ions.
- customary brighteners, levelers or wetting agents can also be present in the bathroom.
- the working conditions of the bath are as follows: PH value: ⁇ 1 Temperature: 15 ° C - 50 ° C, preferably 25 ° C - 40 ° C cath. Current density: 0.5 - 12 A / dm2, preferably 2-7 A / dm2
- the electrolyte movement takes place by blowing clean air in, so strongly that the electrolyte surface is in a strong flush.
- Copper with a content of 0.02 to 0.067% phosphorus is used as the anode.
- electrolyte temperature 30 ° C with a current density of 4 A / dm2 and movement by blowing in air, a well-leveled shiny copper coating is obtained.
- the electrolyte at the tub edge shows clear gelatinous polymer framing.
- the compound according to the invention polyethylene glycol dimethyl ether
- the electrolyte shows no polymer framing after aging.
- the electrolyte at the tub edge shows clear gelatinous polymer framing.
- the compound according to the invention polypropylene glycol dimethyl ether
- the electrolyte shows no polymer framing after aging.
- the electrolyte at the tub edge shows clear gelatinous polymer framing.
- the electrolyte shows no polymer framing after aging.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Chemically Coating (AREA)
Claims (18)
- Bain aqueux acide pour le dépôt galvanique de revêtements de cuivre brillants et lisses, contenant de l'éther dialkylique de polyalkylèneglycol, de la formule générale :
- Bain acide aqueux selon la revendication 1, caractérisé en ce qu'il contient de l'éther dialkylique de polyalkylène-glycol ou des mélanges de celui-ci à des concentrations de 0,005 à 30 g/litre.
- Bain acide aqueux selon les revendications 1 et 2, caractérisé en ce qu'il contient
de l'éther diméthylique de polyéthylène-glycol
de l'éther di-tert.-butylique de polyéthylène-glycol
de l'éther stéaryl-monométhylique de polyéthylène-glycol
de l'éther nonylphényl-monométhylique de polyéthylène-glycol
de l'éther diméthylique de polyéthylène-polypropylène-glycol
de l'éther octylique de monométhyl-polyalkylène
de l'éther octylique de diméthyl-bis(polyalkylène-glycol) et/ou
de l'éther β-naphtol-monométhylique de polyéthylène-glycol. - Bain acide aqueux selon les revendications 1 à 3, caractérisé en ce qu'il contient en outre un composé thio ou un mélange de plusieurs composés thio.
- Bain acide aqueux selon la revendication 4, caractérisé en ce qu'il contient
de l'acide 3-mercaptopropano-1-sulfonique, sel sodique
de l'ester O-éthyl-bis-(ω-sulfopropylique) d'acide thiophosphorique, sel disodique
de l'ester tris-(ω-sulfopropylique) d'acide thiophosphorique, sel trisodique,
de l'acide éthylènedithiodipropylsulfonique, sel sodique
du disulfure de bis-(ω-sulfopropyle), sel disodique
du sulfure de bis-(ω-sulfopropyle), sel disodique
de l'ester S-(ω-sulfopropylique) d'acide O-éthyl-dithiocarbonique, sel potassique
de l'acide 3(benzothiazolyl-2-thio)-propylsulfonique, sel sodique
du disulfure de bis-(ω-sulfohydroxypropyle), sel disodique
du disulfure de bis-(ω-sulfobutyle), sel disodique
du disulfure de bis-(p-sulfophényle), sel disodique
du disulfure de méthyl-(ω-sulfopropyle), sel disodique et/ou
du trisulfure de méthyl-(ω-sulfopropyle), sel disodique. - Bain acide aqueux selon les revendications 4 et 5, caractérisé en ce qu'il contient des composés thio à des concentrations de 0,0005 à 0,4 g/litre.
- Bain acide aqueux selon les revendications 1 à 6, caractérisé en ce qu'il contient en outre un certain taux d'au moins un composé de phénazonium polymère.
- Bain acide aqueux selon la revendication 7, caractérisé en ce qu'il contient
du polysulfate de 6-méthyl-7-diméthylamino-5-phénylphénazonium
du polychlorure de 2-méthyl-7-diéthylamino-5-phénylphénazonium
du polysulfate de 2-méthyl-7-diméthylamino-5-phénylphénazonium
du polyacétate de 5-méthyl-7-diméthylamino-phénazonium
du polysulfate de 2-méthyl-7-anilino-5-phényl-phénazonium
du polysulfate de 2-méthyl-7-diméthylamino-phénazonium
du polyacétate de 7-méthylamino-5-phényl-phénazonium
du polychlorure de 7-éthylamino-2,5-diphényl-phénazonium
du polychlorure de 2,8-diméthyl-7-diéthylamino-5-p-tolyl-phénazonium
du polysulfate de 2,5,8-triphényl-7-diméthylamino-phénazonium
du polysulfate de 2,8-diméthyl-7-amino-5-phényl-phénazonium
et/ou
du polychlorure de 7-diméthylamino-5-phényl-phénazonium - Bain acide aqueux selon les revendications 7 et 8, caractérisé en ce qu'il contient des composés de phénazonium polymères à des concentrations de 0,0001 à 0,5 g/litre.
- Bain acide aqueux selon les revendications 1 à 6, caractérisé en ce qu'il contient en outre un certain taux d'au moins un dérivé de thio-urée.
- Bain acide aqueux selon la revendication 10, caractérisé en ce qu'il contient
de la N-acétylthio-urée
de la N-trifluoroacétylthio-urée
de la N-éthylthio-urée
de la N-cyanoacétylthio-urée
de la N-allylthio-urée
de l'O-tolylthio-urée
de la N-N'-butylènethio-urée
du thiazolidinthiol (2)
du 4-thiazolidinthiol (2)
de l'imidazolidinthiol (2) (N-N'-éthylènethio-urée)
du 4-méthyl-2-pyrimidine-thiol et/ou
du 2-thio-uracile - Bain acide aqueux selon les revendications 10 et 11, caractérisé en ce qu'il contient un dérivé de thio-urée à des concentrations de 0,0001 à 0,5 g/litre.
- Bain acide aqueux selon les revendications 1 à 6, caractérisé en ce qu'il contient en outre un certain taux d'au moins un composé azoté polymère.
- Bain acide aqueux selon la revendication 13, caractérisé en ce qu'il contient
de la polyéthylène-imine
du polyéthylène-imide
de l'amide d'acide polyacrylique
de la polypropylène-imine
de la polybutylène-imine
de la N-méthylpolyèthylène-imine
de la N-acétylpolyéthylène-imine et/ou
de la N-burylpolyéthylène-imine - Bain acide aqueux selon les revendications 13 et 14, caractérisé en ce qu'il contient des composés azotés polymères à des concentrations de 0,0001 à 0,5 g/litre.
- Bain acide aqueux, caractérisé, en ce qu'il contient un certain taux d'éther dialkylique de polyalkylène-glycol selon les revendications 1 à 3 et de composés thio selon les revendications 4 à 6.
- Utilisation du bain selon l'une au moins des revendications 1 à 16 pour renforcer des pistes conductrices de circuits imprimés.
- Utilisation du bain selon l'une au moins des revendications 1 à 16 pour la fabrication de revêtements en cuivre brillants et lisses.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4126502 | 1991-08-07 | ||
DE4126502A DE4126502C1 (fr) | 1991-08-07 | 1991-08-07 | |
PCT/DE1992/000605 WO1993003204A1 (fr) | 1991-08-07 | 1992-07-22 | Bain acide de depot galvanique de cuivre et son utilisation |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0598763A1 EP0598763A1 (fr) | 1994-06-01 |
EP0598763B1 true EP0598763B1 (fr) | 1995-12-13 |
Family
ID=6438067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92916259A Expired - Lifetime EP0598763B1 (fr) | 1991-08-07 | 1992-07-22 | Bain acide de depot galvanique de cuivre et son utilisation |
Country Status (8)
Country | Link |
---|---|
US (1) | US5433840A (fr) |
EP (1) | EP0598763B1 (fr) |
JP (1) | JP3121346B2 (fr) |
AT (1) | ATE131546T1 (fr) |
CA (1) | CA2115062C (fr) |
DE (2) | DE4126502C1 (fr) |
ES (1) | ES2082486T3 (fr) |
WO (1) | WO1993003204A1 (fr) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5849171A (en) * | 1990-10-13 | 1998-12-15 | Atotech Deutschland Gmbh | Acid bath for copper plating and process with the use of this combination |
JP3313277B2 (ja) * | 1995-09-22 | 2002-08-12 | 古河サーキットフォイル株式会社 | ファインパターン用電解銅箔とその製造方法 |
WO1998036042A1 (fr) * | 1997-02-14 | 1998-08-20 | The Procter & Gamble Company | Compositions liquides de nettoyage de surfaces dures a base de glycols de polyalkylene specifiques presentant un double coiffage |
US6460548B1 (en) * | 1997-02-14 | 2002-10-08 | The Procter & Gamble Company | Liquid hard-surface cleaning compositions based on specific dicapped polyalkylene glycols |
US5863410A (en) * | 1997-06-23 | 1999-01-26 | Circuit Foil Usa, Inc. | Process for the manufacture of high quality very low profile copper foil and copper foil produced thereby |
KR100694562B1 (ko) * | 1998-08-11 | 2007-03-13 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 도금방법 및 장치 |
EP1118696A4 (fr) * | 1998-09-03 | 2007-10-17 | Ebara Corp | Procede et dispositif de revetement de substrat |
US6444110B2 (en) * | 1999-05-17 | 2002-09-03 | Shipley Company, L.L.C. | Electrolytic copper plating method |
JP2001073182A (ja) * | 1999-07-15 | 2001-03-21 | Boc Group Inc:The | 改良された酸性銅電気メッキ用溶液 |
WO2001011932A1 (fr) * | 1999-08-06 | 2001-02-15 | Ibiden Co., Ltd. | Solution de galvanoplastie, procede de fabrication d'une carte imprimee multicouche au moyen de ladite solution, et carte imprimee multicouche |
LU90532B1 (en) * | 2000-02-24 | 2001-08-27 | Circuit Foil Luxembourg Trading Sarl | Comosite copper foil and manufacturing method thereof |
US6491806B1 (en) | 2000-04-27 | 2002-12-10 | Intel Corporation | Electroplating bath composition |
US6361673B1 (en) | 2000-06-27 | 2002-03-26 | Ga-Tek Inc. | Electroforming cell |
US6679983B2 (en) * | 2000-10-13 | 2004-01-20 | Shipley Company, L.L.C. | Method of electrodepositing copper |
DE10058896C1 (de) * | 2000-10-19 | 2002-06-13 | Atotech Deutschland Gmbh | Elektrolytisches Kupferbad, dessen Verwendung und Verfahren zur Abscheidung einer matten Kupferschicht |
JP3899313B2 (ja) * | 2000-10-19 | 2007-03-28 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 銅浴および無光沢銅被膜の電着方法 |
US6797146B2 (en) * | 2000-11-02 | 2004-09-28 | Shipley Company, L.L.C. | Seed layer repair |
US20020195351A1 (en) * | 2001-04-12 | 2002-12-26 | Chang Chun Plastics Co., Ltd. | Copper electroplating composition for integrated circuit interconnection |
JP2003105584A (ja) * | 2001-07-26 | 2003-04-09 | Electroplating Eng Of Japan Co | 微細配線埋め込み用銅メッキ液及びそれを用いた銅メッキ方法 |
US6736954B2 (en) * | 2001-10-02 | 2004-05-18 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
US6652731B2 (en) * | 2001-10-02 | 2003-11-25 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
US6911068B2 (en) * | 2001-10-02 | 2005-06-28 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
EP1310582A1 (fr) * | 2001-11-07 | 2003-05-14 | Shipley Company LLC | Procédé de placage électrolytique de cuivre |
US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
DE10261852B3 (de) | 2002-12-20 | 2004-06-03 | Atotech Deutschland Gmbh | Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad |
DE60336539D1 (de) † | 2002-12-20 | 2011-05-12 | Shipley Co Llc | Methode zum Elektroplattieren mit Umkehrpulsstrom |
US6851200B2 (en) * | 2003-03-14 | 2005-02-08 | Hopkins Manufacturing Corporation | Reflecting lighted level |
DE102004045451B4 (de) * | 2004-09-20 | 2007-05-03 | Atotech Deutschland Gmbh | Galvanisches Verfahren zum Füllen von Durchgangslöchern mit Metallen, insbesondere von Leiterplatten mit Kupfer |
TW200632147A (fr) | 2004-11-12 | 2006-09-16 | ||
US20070158199A1 (en) * | 2005-12-30 | 2007-07-12 | Haight Scott M | Method to modulate the surface roughness of a plated deposit and create fine-grained flat bumps |
US20070178697A1 (en) * | 2006-02-02 | 2007-08-02 | Enthone Inc. | Copper electrodeposition in microelectronics |
KR101335480B1 (ko) | 2006-03-30 | 2013-12-02 | 아토테크 도이칠란드 게엠베하 | 홀 및 캐비티를 금속으로 충전하기 위한 전기분해 방법 |
JP2007327127A (ja) * | 2006-06-09 | 2007-12-20 | Daiwa Fine Chemicals Co Ltd (Laboratory) | 銀めっき方法 |
US7905994B2 (en) | 2007-10-03 | 2011-03-15 | Moses Lake Industries, Inc. | Substrate holder and electroplating system |
US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
JP5955785B2 (ja) * | 2010-03-18 | 2016-07-20 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | レベリング剤を含有する金属電解めっき用組成物 |
US8735580B2 (en) | 2010-09-24 | 2014-05-27 | Andrew M. Krol | Method of producing polymeric phenazonium compounds |
US8691987B2 (en) | 2010-09-24 | 2014-04-08 | Andrew M. Krol | Method of producing polymeric phenazonium compounds |
CN103422079B (zh) * | 2012-05-22 | 2016-04-13 | 比亚迪股份有限公司 | 一种化学镀铜液及其制备方法 |
EP2735627A1 (fr) * | 2012-11-26 | 2014-05-28 | ATOTECH Deutschland GmbH | Composition de bain de placage de cuivre |
EP3074552A1 (fr) * | 2013-11-25 | 2016-10-05 | Enthone, Inc. | Dépôt électrolytique de cuivre |
DE102014208733A1 (de) * | 2014-05-09 | 2015-11-12 | Dr. Hesse Gmbh & Cie Kg | Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten |
JP6733314B2 (ja) * | 2015-09-29 | 2020-07-29 | 三菱マテリアル株式会社 | 高純度銅電解精錬用添加剤と高純度銅製造方法 |
CN113166962A (zh) * | 2018-11-07 | 2021-07-23 | 科文特亚股份有限公司 | 缎面铜浴和沉积缎面铜层的方法 |
JP7374556B2 (ja) | 2019-11-29 | 2023-11-07 | ダイハツ工業株式会社 | 変速機 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA633957A (en) * | 1962-01-02 | Unipak Cartons Ltd. | Container carton and cellular structure therefor | |
NL291575A (fr) * | 1962-04-16 | |||
DE1293749B (de) * | 1965-04-24 | 1969-04-30 | Hoechst Ag | Verfahren zur Aufarbeitung der bei der Herstellung von Sorbinsaeure durch thermische Polyesterspaltung entstandenen waessrigen Polyglykoldialkylaetherloesung |
DE2028803C3 (de) * | 1970-06-06 | 1980-08-14 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Polymere Phenazoniumverbindungen |
US3804729A (en) * | 1972-06-19 | 1974-04-16 | M & T Chemicals Inc | Electrolyte and process for electro-depositing copper |
DE2746938A1 (de) * | 1977-10-17 | 1979-04-19 | Schering Ag | Saures galvanisches kupferbad |
FR2510145B1 (fr) * | 1981-07-24 | 1986-02-07 | Rhone Poulenc Spec Chim | Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes |
AU554236B2 (en) * | 1983-06-10 | 1986-08-14 | Omi International Corp. | Electrolyte composition and process for electrodepositing copper |
DE3722778A1 (de) * | 1987-07-09 | 1989-03-09 | Raschig Ag | Polyalkylenglykol-naphthyl-3-sulfopropyl- diether und deren salze, verfahren zur herstellung dieser verbindungen und ihre verwendung als netzmittel in der galvanotechnik |
US5328589A (en) * | 1992-12-23 | 1994-07-12 | Enthone-Omi, Inc. | Functional fluid additives for acid copper electroplating baths |
-
1991
- 1991-08-07 DE DE4126502A patent/DE4126502C1/de not_active Expired - Fee Related
-
1992
- 1992-07-22 AT AT92916259T patent/ATE131546T1/de active
- 1992-07-22 ES ES92916259T patent/ES2082486T3/es not_active Expired - Lifetime
- 1992-07-22 DE DE59204703T patent/DE59204703D1/de not_active Expired - Lifetime
- 1992-07-22 WO PCT/DE1992/000605 patent/WO1993003204A1/fr active IP Right Grant
- 1992-07-22 EP EP92916259A patent/EP0598763B1/fr not_active Expired - Lifetime
- 1992-07-22 JP JP05503171A patent/JP3121346B2/ja not_active Expired - Lifetime
- 1992-07-22 CA CA002115062A patent/CA2115062C/fr not_active Expired - Fee Related
- 1992-07-22 US US08/193,016 patent/US5433840A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2115062C (fr) | 2005-11-22 |
EP0598763A1 (fr) | 1994-06-01 |
DE4126502C1 (fr) | 1993-02-11 |
DE59204703D1 (de) | 1996-01-25 |
ES2082486T3 (es) | 1996-03-16 |
JP3121346B2 (ja) | 2000-12-25 |
ATE131546T1 (de) | 1995-12-15 |
CA2115062A1 (fr) | 1993-02-18 |
WO1993003204A1 (fr) | 1993-02-18 |
JPH07505187A (ja) | 1995-06-08 |
US5433840A (en) | 1995-07-18 |
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